| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 2-1H-40012 | CENTERING WAFER | 7 | SCREEN | A2E301810 |
| 2-1H-40016 | CENTERING WAFER | 8 | SCREEN | A2E301811 |
| 2-39-20857 | PRESSURE GAUGE, U/P | 3 | SCREEN | A2E301812 |
| 2-39-32039 | VALVE PNUEMATIC AMD11-X5D-0 | 2 | SCREEN | A2E301813 |
| 2-39-33791 | MICROMETER HEAD | 2 | SCREEN | A2E301814 |
| 2-39-41969 | COUPLING | 1 | SCREEN | A2E301815 |
| 2-39-46932 | AMPLIFIER,SERVO(BACKSIDE)(YASKAWA CACR-03-DS3BUI) | 1 | SCREEN | A2E301816 |
| 2-39-49253 | PNEUMATIC CYLINDER | 3 | SCREEN | A2E301817 |
| 2-F2-90141 | BLOCK | 2 | SCREEN | A2E301818 |
| 2-F2-D0113 | SHOWERHEAD | 1 | SCREEN | A2E301819 |
| 2-F3-30606 | SHAFT | 2 | SCREEN | A2E301820 |
| 2-F3-37640 | GUIDE LINEAR FOR DNS COATER/DEVELOPER INDEXER | 1 | SCREEN | A2E301821 |
| 2-F3-38335 | IH ARM | 2 | SCREEN | A2E301822 |
| 2-F3-82700 | SPIN CHUCK RETAINER | 1 | SCREEN | A2E301823 |
| 2-F3-D0311 | ARM UPPER 200MM | 1 | SCREEN | A2E301824 |
| 2-F3-D0312 | ARM LOWER 200MM | 1 | SCREEN | A2E301825 |
| 2-F4-39852 | LIFTER PIN | 2 | SCREEN | A2E301826 |
| 2-F4-89194 | BAFFLE DISK | 1 | SCREEN | A2E301827 |
| 2-J4-87384 | COVER DRAIN POT | 4 | SCREEN | A2E301828 |
| 3510N39E10 | AC SERVO MOTOR | 1 | SCREEN | A2E301829 |
| 539-50151 | PCB, PLS-MOTOR | 1 | SCREEN | A2E301830 |
| 5-F1-91089 | WAFER GUIDE NOTCH (2) | 1 | SCREEN | A2E301831 |
| 5-F3-06551 | COVER | 2 | SCREEN | A2E301832 |
| 5-F4-13280 | THERMOCOUPLE | 2 | SCREEN | A2E301833 |
| 7-39-03343 | SOLENOID VALVE | 1 | SCREEN | A2E301834 |
| 7-F2-04546 | MIXING BOX | 1 | SCREEN | A2E301835 |
| 7-F3-94869 | SHAFT | 1 | SCREEN | A2E301836 |
| 7-F3-95265 | SPRAY PIPE | 1 | SCREEN | A2E301837 |
| 7-F4-22106 | TIMING PULLEY | 1 | SCREEN | A2E301838 |
| 7-F4-93124 | IH ARM | 1 | SCREEN | A2E301839 |
| 7-R4-04870 | PUMP DRIVE BOARD | 1 | SCREEN | A2E301840 |
| CEHC-0011 | CONTROLLER | 1 | SCREEN | A2E301841 |
| CEYC-0013 | LINK UNIT CONTROLLER | 1 | SCREEN | A2E301842 |
| CEYD-0018 | POWER SUPPLY | 1 | SCREEN | A2E301843 |