| Semifield International | SVG Parts | ||
| Item | OEM | OEM# | Description |
| 1 | SVG | 00-50083 R B | Chuck, Delrin, One-Piece |
| 2 | SVG | 01-00-515-04 | Bearing |
| 3 | SVG | 06734-08 | Chuck, Developer, Teflon, 4 1/2" for 6" |
| 4 | SVG | 100-001 | Sensor, Optical |
| 5 | SVG | 100-032 | Sensor, Capacitive Proximity |
| 6 | SVG | 103-11011 | Transistor |
| 7 | SVG | 112-001 | Motor, 24 VDC, Gear 5.9:1 |
| 8 | SVG | 112-010 | Motor, 6 VDC, Gear 5.9:1 |
| 9 | SVG | 112-011 | Motor, 12 VDC, Gear 19.7:1 |
| 10 | SVG | 112-012 | Motor, 15 VDC, 5.4:1 |
| 11 | SVG | 112-018 | Motor, 12 VDC, 19.7:1 |
| 12 | SVG | 112-019 | Motor, 24 VDC, 19.7:1 |
| 13 | SVG | 112-038 | Motor, 24 VDC, 10:1 |
| 14 | SVG | 112-040 | Motor, 30 VDC, 38.3:1 |
| 15 | SVG | 112-071 | Motor, 121 VDC, 65.5:1 |
| 16 | SVG | 114-001 | Valve, 24 VDC, 3 Way |
| 17 | SVG | 114-006 | Valve, 24 VDC |
| 18 | SVG | 114-007 | Valve, 24 VDC, 7 W |
| 19 | SVG | 18416-01 | Chuck, Coater, 150 mm Wafers |
| 20 | SVG | 201-002 | Bearing |
| 21 | SVG | 201-005 | Bearing |
| 22 | SVG | 201-010 | Bearing |
| 23 | SVG | 201-017 | Bearing, Seal |
| 24 | SVG | 201-031 | Bearing, Linear Bushing |
| 25 | SVG | 201-036 | Bearing |
| 26 | SVG | 201-040 | Bearing, Flanged |
| 27 | SVG | 201-081 | Bearing |
| 28 | SVG | 201-082 | Bearing |
| 29 | SVG | 201-083 | Bearing |
| 30 | SVG | 202-011 | Belt |
| 31 | SVG | 202-017 | Belt |
| 32 | SVG | 202-018 | Belt |
| 33 | SVG | 203-016 | Cylinder, Air |
| 34 | SVG | 203-018 | Cylinder, Flat |
| 35 | SVG | 203-025 | Cylinder, Air |
| 36 | SVG | 203-035 | Cylinder, Air |
| 37 | SVG | 203-044 | Cylinder, Air |
| 38 | SVG | 219-006 | Kit, Seal, Valve |
| 39 | SVG | 219-007 | Kit, Seal, Fluid |
| 40 | SVG | 219-008 | Kit, Seal, Air |
| 41 | SVG | 219-009 | Kit, Separator |
| 42 | SVG | 30048-01 | Chuck, Delrin, 8600 |
| 43 | SVG | 99-00269 | Valve, 24 VDC |
| 44 | SVG | 99-04013-02 | Motor, Stpng, Linear Actuator-Hot Plate |
| 45 | SVG | 99-06635-03 | Ring, Air, 3" |
| 46 | SVG | 99-80001-01 | Sensor, Double, PCB |