| Semifield International | AMAT Parts | |||
| OEM P/N | DESCRIPTION | QUANTITY AVAILABLE | LOCATION | |
| 2057 | DB-25 MALE TO MALE 100FT (CUSTOM) | 1 | A1B100001 | |
| 6588 | SCREW CRYO TURBO | 1 | A1B100002 | |
| 7940 | KIT TURBO ACCESSORY | 1 | A1B100003 | |
| 9106 | BLOCK ( AL ) | 1 | A1B100004 | |
| 18011 | ENCODER MIKE CONTROLLER | 3 | A1B100005 | |
| 63033 | BOARD NESLAB CONTROL | 1 | A1B100006 | |
| 85721 | TURBOPUMP CONTROLLER (NT20) | 1 | A1B100007 | |
| 219178 | SEAT MONOVAT W/ LIGNMENT | 1 | A1B100008 | |
| 351004 | 1'' UHV AV-100M-P-SP GASKET KIT | 15 | A1B100009 | |
| 600875 | TUBE, FLOWMETER TYPE 25 | 1 | A1C100001 | |
| 602574 | BELLOWS WELD ASSY | 1 | A1C100002 | |
| 602592 | AFC, 3SLM H2, NON-AMMONIA | 2 | A1C100003 | |
| 602595 | AFC, 50SLM H2 NON-AMMONIA SERVICE | 1 | A1C100004 | |
| 642902 | DETECTOR MOD CONDUIT H2 | 1 | A1C100005 | |
| 645136 | VALVE, PNEUMATIC 3-WAY | 1 | A1C100006 | |
| 647065 | TRACK, CHAIN | 2 | A1C100007 | |
| 648125 | FITTING ASSY, PLENUM | 2 | A1C100008 | |
| 648125 | FITTING ASSY, PLENUM | 3 | A1C100009 | |
| 650112 | SPACER, RF FEEDTHRU | 2 | A1C100010 | |
| 650143 | SPROCKET, MAGNET DRIVE | 1 | A1C100011 | |
| 650155 | SHAFT, MAGNET DRIVE | 2 | A1C100012 | |
| 650620 | SUSCEPTOR, 3" ANODIZED | 1 | A1C100013 | |
| 650653 | CABLE, RF OUTPUT | 1 | A1C100014 | |
| 650793 | LENS PROTECTOR | 9 | A1C100015 | |
| 650884 | SUSCEPTOR, 6" ANODIZED | 1 | A1C100016 | |
| 650996 | SUSCEPTOR, 3" ANODIZED | 1 | A1C100017 | |
| 651019 | PERFORATED PLATE | 1 | A1C100018 | |
| 670000 | ASSY ELECTRO VALVE PANEL | 1 | A1C100019 | |
| 670044 | SHAFT EXTENSION | 2 | A1C100020 | |
| 670054 | PCB SLAVE CPU | 1 | A1B100010 | |
| 670197 | W PCB, LEAK DETECT INTFC | 1 | A1C100021 | |
| 670222 | LINE, RIGHT INJECT | 1 | A1C100022 | |
| 670265 | BRACKET, REGULATOR MOUNT | 4 | A1C100023 | |
| 670268 | PLUMBING H2 PRESS.SW | 2 | A1C100024 | |
| 670288 | BRACKET,AFC MOUNT | 5 | A1C100025 | |
| 670307 | LAMP MODULE PANEL | 3 | A1C100026 | |
| 670308 | LAMP MODULE PANEL, 3 | 2 | A1C100027 | |
| 670309 | LAMP MODULE PANEL #4 | 1 | A1C100028 | |
| 670333 | LINE, LEFT INJECT, TABLE TOP RUN | 1 | A1C100029 | |
| 670362 | PCB VERSACONTROLLER POWER FAIL | 1 | A1B100011 | |
| 670368 | RADIATION SHIELD ASSY | 1 | A1C100030 | |
| 670423 | HUB GEAR | 1 | A1C100031 | |
| 670480 | COLLAR QUARTZ HANGER | 3 | A1C100032 | |
| 670480 | COLLAR QUARTZ HANGER | 1 | A1C100033 | |
| 670703 | RING, GEAR MOUNTING | 1 | A1C100034 | |
| 670711 | SEAL NUTROTATION DRIVE | 1 | A1B100012 | |
| 670728 | LINE, PRESSURE SENSING | 4 | A1C100035 | |
| 670728 | LINE, PRESSURE SENSING | 2 | A1C100036 | |
| 670858 | LINE,CENTER PURGE | 6 | A1C100037 | |
| 670938 | KIT,REFURB,GATE VALVE | 8 | A1C100038 | |
| 671040 | MANIFOLD, MAIN | 1 | A1C100039 | |
| 672528 | PCB D/A CONVERTER | 2 | A1B100013 | |
| 672530 | PCB ALPHANUMERIC DISPLAY | 3 | A1B100014 | |
| 673009 | AFC INLET FTG, 1/4" VCR | 2 | A1C100040 | |
| 673201 | CABLE, DISPLAYINTERCONNECT | 1 | A1C100041 | |
| 673212 | DISPERSION HEAD ASSY CHECK W | 1 | A1B100015 | |
| 676090 | SPOOL,GAS RING | 1 | A1C100042 | |
| 676155 | JET NOZZLE | 9 | A1C100043 | |
| 676167 | FLEX LINE EXHAUST | 1 | A1C100044 | |
| 676241 | EXTRUSION MACHINING&PLATE | 5 | A1B100016 | |
| 676294 | BEARING,SPROCKET | 1 | A1C100045 | |
| 676301 | ROTATION BELLOWS ASSY | 1 | A1C100046 | |
| 676471 | W TRANSITION DUCT | 5 | A1C100047 | |
| 676652 | RIGHT LAMP MODULE | 1 | A1B100017 | |
| 676850 | SHAFT EXTENSION | 4 | A1B100018 | |
| 678191 | INJECT NOZZLE ASSY | 4 | A1C100048 | |
| 678209 | VALVE 3/8 NUPRO (SS-8BK-1C-352) | 2 | A1C100050 | |
| 678222 | BUSHING,CHAIN TENSION | 1 | A1C100051 | |
| 678423 | ALIGNMENT JIG ASSY | 1 | A1C100052 | |
| 678611 | W PCB, DO SOURCE | 1 | A1C100053 | |
| 678611 | W PCB, DO SOURCE | 2 | A1C100054 | |
| 678617 | PCB AUTO INTERIOR/EXTERIOR | 1 | A1B100019 | |
| 678619 | PCB 790 SETPOINT CONTROL | 1 | A1B100020 | |
| 678631 | PCB 790 TEMPERATURE CONTROL 1 | 1 | A1B100021 | |
| 678633 | PCB 790 TEMPERATURE CONTROL 2 | 2 | A1B100022 | |
| 678635 | PCB 790 POWER SUPPLY | 1 | A1B100023 | |
| 678643 | PCB 790 LIFT ASSEMBLY ROTATION | 2 | A1B100024 | |
| 678667 | PCB ASSY (DI BOARD) | 1 | A1B100025 | |
| 678669 | PCB DIGITAL OUTPUT SINK | 2 | A1B100026 | |
| 678815 | TRAP ASSY | 1 | A1C100056 | |
| 678827 | 4" T/C MOUNT ADAPTOR | 2 | A1C100057 | |
| 678941 | WATER M'FOLD DRAIN ASSY | 1 | A1C100058 | |
| 678946 | COOLING PLATE | 1 | A1C100059 | |
| 679009 | GAS TUB FITTING | 3 | A1C100060 | |
| 679121 | ROD END,MOD | 1 | A1C100061 | |
| 679277 | LINE, LEFT INJECT | 1 | A1C100062 | |
| 679578 | ASSY TRAP LEYBOLD PUMP | 1 | A1C100063 | |
| 749001 | BRUSH, SWIVEL HANDLE | 8 | A1C100064 | |
| 813871 | FLOW METER, BROOKS | 6 | A1C100065 | |
| 823222 | VALVE | 1 | A1C100066 | |
| 825121 | TIP, VALVE, KEL F | 3 | A1C100067 | |
| 825128 | BELLOWS, VALVE-SC11 | 1 | A1C100068 | |
| 825138 | VALVE SOLENOID 1/4 4-WAY | 3 | A1B100027 | |
| 828253 | FLOW RESTRICTOR | 2 | A1C100069 | |
| 831227 | GAUGE, 30-0-30 PSI 1/8 ANPT CBM | 11 | A1C100070 | |
| 832434 | GAUGE | 2 | A1C100072 | |
| 844990 | AIR REGULATOR | 2 | A1B100028 | |
| 844995 | REGULATOR | 1 | A1C100073 | |
| 852200 | FILTER 8X8X1'' | 1 | A1B100029 | |
| 862010 | BEARING (PACK OF 10) | 1 | A1C100074 | |
| 863208 | FILTER ELEMENT KIT (SWAGELOK) | 1 | A1C100075 | |
| 865044 | CHAIN, ROTATION | 1 | A1C100076 | |
| 865106 | BRAKEFAIL SAFE | 4 | A1B100030 | |
| 871343 | SENSOR | 1 | A1C100077 | |
| 874479 | MOMENTARY SWITCH DPDT | 2 | A1C100078 | |
| 883318 | CONNECT, QUICK | 5 | A1C100079 | |
| 891001 | BATTERY, 12V RECHARGABLE | 1 | A1C100080 | |
| 891001 | BATTERY, 12V RECHARGABLE | 1 | A1C100081 | |
| 894014 | THERMOMETER, SPOT SURFACE | 3 | A1C100082 | |
| 895002 | BLOWER WHEEL | 1 | A1C100083 | |
| 900014 | PLUG, 14-PIN | 6 | A1C100084 | |
| 900400 | BUTTON, BLACK (PACK OF 10) | 4 | A1C100085 | |
| 924012 | THERMOCOUPLE TYPE K | 9 | A1C100086 | |
| 951054 | W DIGITAL PANEL METER | 1 | A1C100089 | |
| 951058 | METER DIGITAL VOLT | 2 | A1B100031 | |
| 955507 | RELAY 4PDT | 156 | A1C100090 | |
| 961023 | CONTROLLER TEMP | 2 | A1B100032 | |
| 965192 | CONN M 25PIN RT ANGLE | 102 | A1C100092 | |
| 970162 | TRANSISTOR ENI-1 | 33 | A1C100094 | |
| 970392 | ID DAC80 | 2 | A1C100097 | |
| 1011440 | POWER-SPLY +15/-15VDC 1.5A PWR-PAK | 1 | A1B100033 | |
| 1950504 | ROBOT PWR CABLE ASSY | 1 | A1B100034 | |
| 1951719 | T_MOT LEFT LIMIT-CABLE ASSY | 1 | A1B100035 | |
| 2560174 | VLV RELIEF 5 PSI | 3 | A1B100036 | |
| 3070007 | CLEAN TAPE | 4 | A1B100037 | |
| 3161841 | PCB 8000 SERIES | 3 | A1B100038 | |
| 4053220 | GAUGE ION TUBE PLENUM ONLY | 2 | A1B100039 | |
| 5021360 | CYLINDER AIR 4-IN S X 4-IN B LL POPET | 1 | A1B100040 | |
| 6776654 | LAMP MODULE #2 / #5 LH | 1 | A1B100041 | |
| 9959503 | TIMER | 2 | A1C100099 | |
| 11315001 | SENSOR ASSY REFLECT | 1 | A1B100042 | |
| 45300297 | PRESSURE VALVE | 1 | A1C100101 | |
| 45300297 | PRESSURE VALVE | 1 | A1C100102 | |
| 100311706 | FLANGE BLANK OFF SS NW50 | 12 | A1B100043 | |
| 220490256 | GASKET 5/8X13/16X.08 COPPER | 1 | A1B100044 | |
| 220550109 | LENS MODULE | 4 | A1B100045 | |
| 220550515 | MODULE E-S-MINI | 1 | A1B100046 | |
| 220550566 | RING LIMITING FOR DR CF | 1 | A1B100047 | |
| 230070004 | WASHER FLAT M8 (PACK OF 10) | 1 | A1B100048 | |
| 230670012 | LIFT-O-MAT 100 N | 4 | A1B100049 | |
| 2660203100 | KIT VALVE REBUILD | 5 | A1B100050 | |
| 21016300007 | PCB DMA 16 BIT DRV11-WA | 1 | A1B100051 | |
| 21016400023 | POWER SUPPLY | 1 | A1B100052 | |
| 21016400051 | BOARD SCAN MODE SWITCH | 1 | A1B100053 | |
| 21016400052 | SCAN ROTATION | 1 | A1B100054 | |
| 21016402060 | MONITOR SW 8 PORTS | 1 | A1B100055 | |
| 21016404033 | VIDEO SPLITTER 2XVGA | 1 | A1B100056 | |
| 21016404110 | FAST ETHERNET LAN | 1 | A1B100057 | |
| 50412578300 | BOARD DR CLC | 4 | A1B100058 | |
| 50416900500 | IPU ASSY | 2 | A1B100059 | |
| 50417501100 | INDEXER | 1 | A1B100060 | |
| 50419527000 | CABLE ASSY OM: Z-DRIVE | 1 | A1B100061 | |
| 50490540000 | CK T/N #540 OM P.S. | 1 | A1B100062 | |
| 70210170000 | BOARD VCR 8 RELAY | 1 | A1B100063 | |
| 70301030000 | PUMP MOD. ION CONT. | 1 | A1B100064 | |
| 70301550000 | O-RING HOLDER | 2 | A1B100065 | |
| 70301564000 | SHIM CHUCK | 2 | A1B100066 | |
| 70309270200 | APERTURE 4 STRIP | 1 | A1B100067 | |
| 70309280000 | COLUMN LINER ASSY | 1 | A1B100068 | |
| 70311123000 | CAB RS422 LLK | 3 | A1C100103 | |
| 70311590100 | BOARD DRIVER VACUUM | 1 | A1B100069 | |
| 70312300000 | PUMP CONT. ION MULTI VAC | 1 | A1B100070 | |
| 70312532000 | PCB ASSY | 1 | A1B100071 | |
| 70312533000 | E/O CPU | 1 | A1B100072 | |
| 70312533010 | BOARD VIDEO CPU | 1 | A1B100073 | |
| 70312535200 | PCB MOD SCAN SWITCH | 1 | A1B100074 | |
| 70312535300 | CPU MOD E/O | 1 | A1B100075 | |
| 70312536400 | AMPLIFIER MOD SCAN CURRENT WATER COOLED | 2 | A1B100076 | |
| 70312537300 | PCB SLOW SCAN INT | 1 | A1B100077 | |
| 70312590200 | BOARD CLC | 3 | A1B100078 | |
| 70315294100 | CONTROLLER ROBOT MODEL | 2 | A1B100079 | |
| 70316590200 | TU SUPERVISOR BD | 1 | A1B100080 | |
| 70316590300 | BOARD SUPERVISOR TN 514 ITU | 1 | A1B100081 | |
| 70333211000 | PCB EXTENDER EUROCARD | 1 | A1B100082 | |
| 70409150000 | DETECTOR MCP WSE ASSY | 1 | A1B100083 | |
| 70410229300 | CPU Bd | 1 | A1B100084 | |
| 70412564000 | PCB ASSY | 1 | A1B100085 | |
| 70412566000 | SCAN AMP | 1 | A1B100086 | |
| 70413220000 | PCB ASSY | 1 | A1B100087 | |
| 70500170060 | O-RING | 1 | A1B100088 | |
| 70504050000 | TURBO PUMP HEAT SINK | 1 | A1B100089 | |
| 70509160000 | ASSYBEAM BLANK CF | 3 | A1B100090 | |
| 70512512000 | BOARD SWA1 | 1 | A1B100091 | |
| 0000-57120 | VALVE SOLENOID | 2 | A1B100092 | |
| 00050-20073 | GAS LINE CHAMBER 3 HEATER MFC 1 VCR | 1 | A1B100093 | |
| 0010-00012 | VME POWER SUPPLY | 2 | A1B100094 | |
| 0010-00017 | ION TC AC MODULE | 6 | A1B100095 | |
| 0010-00019 | ANALOG POWER SUPPLY | 4 | A1B100096 | |
| 0010-00026 | ATMOSPHERE SWITCH | 2 | A1B100097 | |
| 0010-00028 | POWER SUPPLY SYSTEM +/-15V | 2 | A1B100098 | |
| 00100-00415 | G2/G3 PROCTECTION DELATCH | 1 | A1B100099 | |
| 0010-00065 | GENEVA MOTOR DRIV | 4 | A1B100100 | |
| 0010-00086 | PCB ASSY | 1 | A1B100101 | |
| 0010-00112 | SHUTTLE | 1 | A1B100102 | |
| 0010-00114 | BEZEL OPERATOR ASSY | 2 | A1B100103 | |
| 0010-00138 | FRAME UPPER AC DIST. ASSY | 2 | A1B100104 | |
| 0010-00139 | POWER SUPPLY MOD # LPS-56-24 | 1 | A1B100105 | |
| 0010-00146 | MANOMETER ELECTRICAL | 1 | A1B100106 | |
| 0010-00148 | SENSOR PCB CRYO PUMP TEMPERATURE | 3 | A1B100107 | |
| 0010-00174 | THROTTLE VALVE REDUCER BOX ASSEMBLY | 2 | A1B100108 | |
| 0010-00195 | PCB | 1 | A1B100109 | |
| 0010-00198 | REFLECTOR SOCKET ASSY. | 5 | A1B100110 | |
| 0010-00209 | PNEUMATIC MANIFOLD | 1 | A1B100111 | |
| 0010-00215 | PCB MAGNITUDE DETECTOR | 16 | A1B100112 | |
| 0010-00218 | MOTOR WIPER ASSY | 7 | A1B100113 | |
| 0010-00219 | MOTOR | 8 | A1B100114 | |
| 0010-00227 | FOOTSWITCH ASSY | 1 | A1B100115 | |
| 0010-00251 | STRAP ASSY LOWER GROUND | 2 | A1B100116 | |
| 0010-00266 | BLADE ASSY 150MM | 1 | A1B100117 | |
| 0010-00283 | W GENEVA DRIVE ASSY | 2 | A1B100118 | |
| 0010-00284 | 5''GENEVA WHEEL ASSY | 2 | A1B100119 | |
| 0010-00298 | RF MATCH NETWORK | 1 | A1B100120 | |
| 0010-00305 | W GRIPPER ASSY 150MM | 1 | A1B100121 | |
| 0010-00333 | FLAT FINDER DRIVE | 1 | A1B100122 | |
| 0010-00336 | CLIP LOWER ASSY | 134 | A1B100123 | |
| 0010-00339 | PEDESTAL ASSY | 19 | A1B100124 | |
| 0010-00344 | PEDESTAL 5'' | 69 | A1B100125 | |
| 0010-00350 | CLIP DEPRESSOR ASSEMBLY | 17 | A1B100126 | |
| 0010-00369 | FEED | 1 | A1B100127 | |
| 0010-00388 | PEDESTAL | 25 | A1B100128 | |
| 0010-00389 | PNEUMATIC MANIFOLD | 1 | A1B100129 | |
| 0010-00396 | HOSE ASSY 20 FT. | 1 | A1B100130 | |
| 0010-00399 | WIPER | 2 | A1B100131 | |
| 0010-00481 | PEDESTAL | 1 | A1B100132 | |
| 0010-00523 | ROBOT SHIPPING ASSY | 1 | A1B100133 | |
| 0010-00538 | LASER | 1 | A1B100134 | |
| 0010-00564 | WAFER COUNTER SENSOR | 3 | A1B100135 | |
| 0010-00565 | BRACKET | 5 | A1B100136 | |
| 0010-00570 | NESLAB HEAT EXCHANGER | 2 | A1B100137 | |
| 0010-00651 | BRACKET EPD FIBER | 8 | A1B100138 | |
| 0010-00653 | ASSY CABLE BRACKET RECIPE SELECT | 1 | A1B100139 | |
| 0010-00663 | PEDESTAL | 7 | A1B100140 | |
| 0010-00669 | PEDESTAL | 18 | A1B100141 | |
| 0010-00673 | PEDESTAL GAS COOLED TOP | 13 | A1B100142 | |
| 0010-00674 | PEDESTAL | 6 | A1B100143 | |
| 0010-00682 | SCREEN TURBO PORT | 2 | A1B100144 | |
| 0010-00687 | CLAMP | 1 | A1B100145 | |
| 0010-00703 | CONNECTOR QUICK DISCONNECT TURBO PUMPS | 2 | A1B100146 | |
| 0010-00705 | CLAMP RING XTAL S ASSY | 4 | A1B100147 | |
| 0010-00706 | RING CLAMP XTALTRENCH ETCH | 2 | A1B100148 | |
| 0010-00713 | PEDESTAL | 2 | A1B100149 | |
| 0010-00715 | PEDESTAL | 11 | A1B100150 | |
| 0010-00716 | RING LEXAN ASSY | 15 | A1B100151 | |
| 0010-00742 | KEYBOARD ASSEMBLY TTW | 5 | A1B100152 | |
| 0010-00750 | TOP COVER ASSY CHAMBER | 2 | A1B100153 | |
| 0010-00764 | BLADE ASSY 150MM | 3 | A1B100154 | |
| 0010-00800 | RF MATCH NETWORK | 1 | A1B100155 | |
| 0010-00800W | RF MATCH | 3 | A1B100156 | |
| 0010-00817 | ASSY ENDPT SMOOTHER II | 1 | A1B100157 | |
| 0010-00827 | CLIP ASSY LOWER 6'' | 229 | A1B100158 | |
| 0010-00829 | CLIP | 254 | A1B100159 | |
| 0010-00832 | PEDESTAL125mmAPPLY ELASTCLE | 1 | A1B100160 | |
| 0010-00834 | PEDESTAL | 15 | A1B100161 | |
| 0010-00865 | CLAMP STAINLESS | 63 | A1B100162 | |
| 0010-01004 | LINE GAS FEED | 6 | A1B100163 | |
| 0010-01321Rev.2 | DI/O BOARD Rev 2 | 2 | A1B100164 | |
| 0010-01321Rev.3 | DI/O BOARD Rev 3 | 2 | A1B100165 | |
| 0010-01321Rev.4 | DI/O BOARD Rev 4 | 1 | A1B100166 | |
| 0010-01334 | ASSY TOOL LID UWAVE | 2 | A1B100167 | |
| 0010-01388 | LTESC CONTROL BOX ASSY | 1 | A1B100168 | |
| 0010-01442 | ASSY UWAVE ENDPOINT DETECTOR | 3 | A1B100169 | |
| 0010-02475 | ASSYVALVE MECHANICAL | 1 | A1B100170 | |
| 0010-02518 | HOSE | 1 | A1B100171 | |
| 0010-03349 | ASSY HEATER 8'' JHT .029 OSCR WXZ | 1 | A1B100172 | |
| 0010-03717 | ASSYCLIP SIC SPIDER WEDGE | 1 | A1B100173 | |
| 0010-04918 | ARMPADCONDP4 | 2 | A1B100174 | |
| 0010-05106 | ASSYPADCONDP4 | 4 | A1B100175 | |
| 0010-05955 | ASSY POST CHAMBER | 5 | A1B100176 | |
| 0010-06040 | SUCTIONCUPENDEFFECTOR | 8 | A1B100177 | |
| 0010-08114 | ASSY MESA CLEANER GRIPPER W/ ADJUST BRACKET | 3 | A1B100178 | |
| 0010-09021 | SLIT VALVE ASSY | 1 | A1B100179 | |
| 0010-09028 | LIFTER | 1 | A1B100180 | |
| 0010-09049 | STORAGE ELEVATOR ASSY 5000 PVD | 1 | A1B100181 | |
| 0010-09054 | HELIUM PRESSURE CONTROL | 1 | A1B100182 | |
| 0010-09063 | ASSY SUSCEPTOR CALIBRATION DISPLAY | 5 | A1B100183 | |
| 0010-09068 | LOADLOCK LID | 3 | A1B100184 | |
| 0010-09072 | DIFFUSER ASSY | 5 | A1B100185 | |
| 0010-09103 | ASSY MONITOR BASE REPLACES 0220-09074 | 2 | A1B100186 | |
| 0010-09125 | HEAD ASSY 8'' NITRIDE/ OXIDE | 17 | A1B100187 | |
| 0010-09138 | BOARD ROBOT INTERCONNECT | 1 | A1B100188 | |
| 0010-09174 | THROTTLE VALVE | 5 | A1B100189 | |
| 0010-09180 | WAFER LIFT ASSEMBLY | 1 | A1B100190 | |
| 0010-09182 | STEPPER MOTOR POWER DRIVE BOARD | 1 | A1B100191 | |
| 0010-09189 | NESLAB HOSE KIT | 3 | A1B100192 | |
| 0010-09288 | WAFER LIFT ARM | 1 | A1B100193 | |
| 0010-09297 | SUPPLY POWER 15 VOLT | 6 | A1B100194 | |
| 0010-09298 | LOADLOCK REBUILD KIT | 1 | A1B100195 | |
| 0010-09305 | THROTTLE VALVE | 3 | A1B100196 | |
| 0010-09306 | DRIVE UNIT | 3 | A1B100197 | |
| 0010-09319 | PURGE HOSE CHAMBER | 2 | A1B100198 | |
| 0010-09408 | ASSY CLAMP CHAMBER SACVD | 1 | A1B100199 | |
| 0010-09418 | NESLAB HOSE ASSY | 1 | A1B100200 | |
| 0010-09463 | 200MM SUSC ASSY TEOS OST | 1 | A1B100201 | |
| 0010-09489 | VALVE H/E COOLING WATER LINE | 3 | A1B100202 | |
| 0010-09495 | ASSY COVER TOP ETCH | 4 | A1B100203 | |
| 0010-09500 | HINGE POS A OR D EGEC | 4 | A1B100204 | |
| 0010-09501 | HINGE POS B OR C EGEC | 5 | A1B100205 | |
| 0010-09559 | PEDESTALPOLY | 1 | A1B100206 | |
| 0010-09574A | PEDESTAL ASSEMBLY OX/MLR/NIT 125MM (5") FLAT | 5 | B1C100117 | |
| 0010-09690 | FIXTURE BLADE LEVELING | 1 | A1B100207 | |
| 0010-09819 | SUSCEPTOR ASSY | 1 | A1B100208 | |
| 0010-09837 | WAFER LIFT TUNGSTEN | 3 | A1B100209 | |
| 0010-09919 | PEDESTAL | 12 | A1B100210 | |
| 0010-09934 | PLATE VIEW PORT | 1 | A1B100211 | |
| 0010-09940 | ASSY LID WSIX 200M | 1 | A1B100212 | |
| 0010-09956 | Pedestal Plywsinotch, 218mm, Ni, Assy | 5 | B1C100176 | |
| 0010-09967 | ASSY WPS 8-SLOT | 2 | A1B100213 | |
| 0010-09974 | LID | 1 | A1B100214 | |
| 0010-10010 | HEATED GATE ASSEMBLY FOR ALUMINUMS | 1 | A1B100215 | |
| 0010-10021 | COVER ASSYTOPETCH CHMBR | 4 | A1B100216 | |
| 0010-10037 | SUSCEPTOR ASSY 200MM WSIX-DCS TOP MOUNT | 5 | A1B100217 | |
| 0010-10141 | SENSOR WPS | 1 | A1B100218 | |
| 0010-10177 | PEDESTAL ASSY 200MM NOTCH | 57 | A1B100219 | |
| 0010-10214 | SUSCEPTOR ASSY 150-MM TG | 1 | A1B100220 | |
| 0010-10257 | PEDESTAL ASSY 200MM NTCH | 10 | A1B100221 | |
| 0010-10275 | SUSCEPTOR ASSY | 7 | A1B100222 | |
| 0010-10277 | SUSCEPTOR ASSY | 16 | A1B100223 | |
| 0010-10312 | WXZ HEATER | 3 | A1B100224 | |
| 0010-10322 | PEDESTAL | 1 | A1B100225 | |
| 0010-10331 | SUSCEPTOR MCVD 8'' | 2 | A1B100226 | |
| 0010-10455 | LAMP MODULE | 1 | A1B100227 | |
| 0010-10474 | THROTTLE VALVE | 1 | A1B100228 | |
| 0010-10517 | ASSY SUSCEPTOR WSIX 150MM | 5 | A1B100229 | |
| 0010-10551 | MODULE ASSY FOR P-5000 | 1 | A1B100230 | |
| 0010-10632 | ASSEMBLY USG 8''-6'' TISABB SUSCEPTOR''G''E | 2 | A1B100231 | |
| 0010-10761 | LID SGD CHB | 2 | A1B100232 | |
| 0010-10892 | SUSCEPTOR SHADOW RING 150MM 6'' | 6 | A1B100233 | |
| 0010-10957 | DRIVE ASSY. FC WXZ W/VITON | 2 | A1B100234 | |
| 0010-10973 | ASSEMBLYH.O.T.DETECTOR MOD | 7 | A1B100235 | |
| 0010-11000 | PCB 8330 ETCHER | 1 | A1B100236 | |
| 0010-12282 | HEATER ASSY NGK HA-12 RF BASE 200MM PRDUCER | 1 | A1B100237 | |
| 0010-13334 | HEATER HOSE ASSY 47 SST | 2 | A1B100238 | |
| 0010-13445 | MONITOR VGA BASE ASSY | 2 | A1B100239 | |
| 0010-13622 | RF MATCH VECTRA IMP | 1 | A1B100240 | |
| 0010-13806 | ASSY AC POWER BOX ORIENTER OCR | 1 | A1B100241 | |
| 0010-13912 | ASSY VGA MONITOR STAND ALONE | 1 | A1B100242 | |
| 0010-13943 | SO/STLHEAD HEX HOSE 75 FT | 4 | A1B100243 | |
| 0010-14752 | PYROMETER CONTROLLER ASSEMBLYRADIANCE 40GB | 1 | A1B100244 | |
| 0010-20098 | KAISER POWER SUPPLY CHASSIS ASSY W/SHIELD | 2 | A1B100245 | |
| 0010-20127 | ENDURA SHIELD TREATMENT 8'' | 1 | A1B100246 | |
| 0010-20129 | BLADE 6'' ASSY | 1 | A1B100247 | |
| 0010-20130 | BLADE ASSY. BUFFER | 1 | A1B100248 | |
| 0010-20142 | THRU WALL SKINS OPTION: 1.5-2.5'' THICK | 6 | A1B100249 | |
| 0010-20143 | KIT THRU WALL SKINS OPT | 1 | A1B100250 | |
| 0010-20163 | CHAMBER SHIELD | 1 | A1B100251 | |
| 0010-20238 | KIT LIFT ASSY | 1 | A1B100252 | |
| 0010-20292 | DETECTOR ASSY | 2 | A1B100253 | |
| 0010-20300 | WAFER LIFT ASSYPVD | 1 | A1B100254 | |
| 0010-20331 | DUAL DEGAS ASSEMBLY | 1 | A1B100255 | |
| 0010-20348 | ASSYWATER LEAK DETECTOR | 1 | A1B100256 | |
| 0010-20406 | ASSYDETECTORLEFT | 2 | A1B100257 | |
| 0010-20418 | BELLOWS ASSY | 1 | A1B100258 | |
| 0010-20422 | ENDURA J SHIELD TREATMENT 8'' | 2 | A1B100259 | |
| 0010-20441 | RF MATCH NETWORK 6'' PVD 60 MHZ | 1 | A1B100260 | |
| 0010-20472 | SENSOR | 1 | A1B100261 | |
| 0010-20862 | ASSY PNEU EXT ROBOT | 1 | A1B100262 | |
| 0010-21497 | DRIVE ASSY 3.5 FLOPPY DISK DRIVE | 5 | A1B100263 | |
| 0010-21669 | CHAMBER LID W/HINGE | 1 | A1B100264 | |
| 0010-21768 | ASSY MCA + WAFER DETECTION | 1 | A1B100265 | |
| 0010-21810 | G12 MAGNET | 1 | A1B100266 | |
| 0010-21827 | 8'' ASSY SHIELD | 3 | A1B100267 | |
| 0010-22209 | DOOR ASSY W/PARKER DOOR | 3 | A1B100268 | |
| 0010-22225 | ASSYHIGHEFFIENCYRF MATCHBIAS | 1 | A1B100269 | |
| 0010-30111 | WAFER HEATER 8'' | 3 | A1B100270 | |
| 0010-30136 | ELECTRICAL ASSY CAP/BLOCK | 2 | A1B100271 | |
| 0010-30334 | THROTTLE VALVE | 1 | A1B100272 | |
| 0010-30354 | ASSY PLASMA CHUCK THICK CABLE | 2 | A1B100273 | |
| 0010-30402 | THROTTLE VALVE ASSY | 1 | A1B100274 | |
| 0010-30579 | ASSY ADPTR HOSE DISCONNECT SUPPLY | 1 | A1B100275 | |
| 0010-30580 | ASSY ADPTR HOSE QUICK DISCONNECT RETURN | 1 | A1B100276 | |
| 0010-30591 | IPS UPPER MAGNET RING ASSY | 1 | A1B100277 | |
| 0010-30610 | ASSY BLADE | 2 | A1B100278 | |
| 0010-35713 | ASSY FAN MODULE DOME | 1 | A1B100279 | |
| 0010-36153 | ASSY THROTTLE VALVE | 1 | A1B100280 | |
| 0010-36236 | ASSY RGA PORT DXZ AND UNIV PE-TEOS CENTURA | 4 | A1B100281 | |
| 0010-36408R | ASSYRF MATCHDPS CHAMB | 3 | A1B100282 | |
| 0010-36522 | ASSY EDGE RING | 9 | A1B100283 | |
| 0010-36524 | ASSY RF ADAPTER TXZ CHAMBER MCVD | 1 | A1B100284 | |
| 0010-36618 | ASSYCERAMIC DOME DPS POLY CHAMBER | 3 | A1B100285 | |
| 0010-37140 | THROTTLE VALVE ASSEMBLY 5200 CVD | 1 | A1B100286 | |
| 0010-37267 | PLASMA CHUCK ASSY 150MM | 3 | A1B100287 | |
| 0010-37269 | PLASMA CHUCK ASSY | 6 | A1B100288 | |
| 0010-37340 | VALVE | 7 | A1B100289 | |
| 0010-37390 | ASSY MINIFOLD FLOW SWITCH | 6 | A1B100290 | |
| 0010-37828 | ASSYDISPLAY BOARD HFRF GEN | 9 | A1B100291 | |
| 0010-37911 | LINER2 PIECETURBO PORT | 2 | A1B100292 | |
| 0010-38023 | LID VIEW TI/HT TIN | 3 | A1B100293 | |
| 0010-38194 | ASSEMBLY VALVE LOCKOUT/TAGOUT | 2 | A1B100294 | |
| 0010-38909 | CENTURA ASSY GAS BOX WXZ UWAVE | 3 | A1B100295 | |
| 0010-39474 | ASSY WAFER LIFT ASP + CENTURA | 1 | A1B100296 | |
| 0010-39749 | DPS R1UNIVERSALCERAMIC DOMEASSY | 5 | A1B100297 | |
| 0010-39869 | ASSYACTUATOR COVERSLIT LINER | 1 | A1B100298 | |
| 0010-39884 | INNER HOUSING ASSY | 2 | A1B100299 | |
| 0010-39885 | IHC ASSYDUAL ZONE 100 TORR 50 | 1 | A1B100300 | |
| 0010-40010 | PCB | 2 | A1B100301 | |
| 0010-40016 | PCB | 5 | A1B100302 | |
| 0010-40065 | SEAL ASSY | 5 | A1B100303 | |
| 0010-40155 | WAFER DETECTOR SENSOR FOR BUFFER STATION | 6 | A1B100304 | |
| 0010-40239 | ASSEMBLY, ESC POWER SUPPLY, CEN-CEN | 3 | B1C100203 | |
| 0010-40276 | CLAMP ASSY | 1 | A1B100305 | |
| 0010-40298 | ANTENNA-DOME SUB-ASSY DOS MARK IV | 1 | A1B100306 | |
| 001-05059-001-P | PEEK RING | 2 | A1B100307 | |
| 0010-50695 | SI B/B SUSC ASSY YAMANI 6'' | 2 | A1B100308 | |
| 0010-60004 | SILANE SUSCEPTOR 150MM (PLATE) | 1 | A1B100309 | |
| 0010-60010 | SPARE 5'' SUSCEPTOR | 11 | A1B100310 | |
| 0010-60010 | SPARE 5" SUSCEPTOR PLATE | 4 | B1C100118 | |
| 0010-60010 | SUSCEPTOR,PLATE 5" | 3 | B1C100130 | |
| 0010-60013 | SUSCEPTOR ASSEMBLY | 6 | A1B100311 | |
| 0010-60020 | SUSCEPTOR | 14 | A1B100312 | |
| 0010-60025 | SUSCEPTOR TOP MOUNT 150MM | 1 | A1B100313 | |
| 0010-70008 | HEAT EXCHANGER | 1 | A1B100314 | |
| 0010-70078 | STORAGE ELEVATOR 8'' | 1 | A1B100315 | |
| 0010-70242 | CABLE | 3 | A1B100316 | |
| 0010-70271 | ASSY LIFT WAFER 101 | 1 | A1B100317 | |
| 0010-70282 | BRACKET ASSY BLADE SHIPPING | 2 | A1B100318 | |
| 0010-70305 | ASSY FITTINGS FOR ENI GENERATOR | 2 | A1B100319 | |
| 0010-70321 | ASSY SLIT VALVE | 3 | A1B100320 | |
| 0010-70322 | PVD SLIT VALVE ACTUATOR ASSEMBLY | 15 | A1B100321 | |
| 0010-70338 | ASSY HOSE HEAT EXCHANGER | 1 | A1B100322 | |
| 0010-70403 | ASSY G-12 AFS LID | 4 | A1B100323 | |
| 0010-70408 | LOADLOCKLID15-SLOT | 2 | A1B100324 | |
| 0010-70412 | ASSY CH AN2 EXHAUST LINE | 1 | A1B100325 | |
| 0010-70441 | MOTORIZED LIFT ASSYPVD | 3 | A1B100326 | |
| 0010-70615 | 5000 CLEANROOM SLIT VALVE VITON | 2 | A1B100327 | |
| 0010-75090 | MODULE MFG STD ALONE VGA MON BASE PRECISION 5000 | 4 | A1B100328 | |
| 0010-75091 | ASSY VGA MONITOR BASE | 1 | A1B100329 | |
| 0010-75124 | ASSY PER CHMBR POWER DISTRIBUTION | 3 | A1B100330 | |
| 0010-75155 | WATER RETURN HOSE CH 1 & 4 | 1 | A1B100331 | |
| 0010-75593 | ASSY VMA CARDCAGE CENTURA AND BACKPLANE | 1 | A1B100332 | |
| 0010-76001 | 5000 CLEANROOM 8 SLOT STORAGE ELEVATOR | 2 | A1B100333 | |
| 0010-76087 | WAFER VALVE ASSY. CH 24& D | 1 | A1B100334 | |
| 0010-76116 | ASSEMBLY OUTLET BOX 208V | 2 | A1B100335 | |
| 0010-76124 | DI/O BOARD | 1 | A1B100336 | |
| 0010-76165 | TOP DOOR SPRING | 5 | A1B100337 | |
| 0010-76166 | BOTTOM DOOR SPRING | 9 | A1B100338 | |
| 0010-76429 | ASSY VALVE SLIT DOOR | 7 | A1B100339 | |
| 0010-76467 | HEAT EXCHANGER AMAT 0 | 1 | A1B100340 | |
| 0010-76500 | HEATER HOSE ASSY 47'' BRASS | 4 | A1B100341 | |
| 0010-76543 | ASSY HEAT EXCHANGER AMAT-1 208V | 1 | A1B100342 | |
| 0010-76755 | DISC HEAD ASSY | 1 | A1B100343 | |
| 0010-76992 | ASSY 8'' REFLECTOR CASSETTE HANDLER LE | 1 | A1B100344 | |
| 0010-76994 | ASSY SHO SLIT VALVE DOOR | 1 | A1B100345 | |
| 0010-77057 | ASSYENDPOINT LASER | 3 | A1B100346 | |
| 0010-77096 | TRAP-VACUUM | 1 | A1B100347 | |
| 0010-77217 | HEAD | 2 | A1B100348 | |
| 0010-77258 | MEMBRANE VACUUM | 38 | A1B100349 | |
| 0010-77421 | AMPLIFIER ASSY | 2 | A1B100350 | |
| 0010-90605 | MVG CLIP | 6 | A1B100351 | |
| 0010-91106 | SOURCE TURBO BACKING VALVE | 1 | A1B100352 | |
| 0010-91107 | MAG TURBO BACKING VALVE | 4 | A1B100353 | |
| 0010-91168 | SOURCE ISOLATION VALVE | 2 | A1B100354 | |
| 0010-91382ITL | VALVEPURGETURBOSOURCE | 2 | A1B100355 | |
| 0010-91386ITL | VALVEVENTTURBOMRS | 2 | A1B100356 | |
| 0010-91475 | INDEXER 150'' | 1 | A1B100357 | |
| 0010-93152 | ASSY PURGE HEATER 200MM | 7 | A1B100358 | |
| 0010-99166 | MOVING CLIP ASSEMBLY | 6 | B1C100162 | |
| 0012-00344 | PEDESTAL | 2 | A1B100359 | |
| 0015-00013 | COUPLING FLEX MODIFIED MTR | 8 | A1B100360 | |
| 0015-00026 | PIN DOWEL MOD PEDESTAL (PACK OF 10) | 42 | A1B100361 | |
| 0015-00030 | PLUG MODIFIED PIPE | 2 | A1B100362 | |
| 0015-00052 | SCREW SHOULDER CAP HEAD | 7 | A1B100363 | |
| 0015-00087 | DAMPER ASSY. | 4 | A1B100364 | |
| 0015-00093 | COUPLING SHAFT MODIFIED | 1 | A1B100365 | |
| 0015-00125 | SCREW 8-32 X 1/2L (PACK OF 10) | 5 | A1B100366 | |
| 0015-00129 | SCREWS (PACK OF 10) | 4 | A1B100367 | |
| 0015-00131 | SCR ENP MACH FLT HD (PACK OF 10) | 2 | A1B100368 | |
| 0015-00133 | SCR ENP MACH SKT HD 2-56 (PACK OF 10) | 2 | A1B100369 | |
| 0015-00139 | SCREW | 4 | A1B100370 | |
| 0015-00154 | SCREW 8-32X1/2L VENTED (PACK OF 10) | 15 | A1B100371 | |
| 0015-00154* | SCREW 8-32X1/2L VENTED (PACK OF 10) | 1 | A1B100372 | |
| 0015-00183 | SCREW SET 6-32 LEADSCREW (PACK OF 10) | 1 | A1B100373 | |
| 0015-00197 | WASHER SHOWERHEAD (PACK OF 10) | 72 | A1B100374 | |
| 0015-00197* | WASHER SHOWERHEAD (PACK OF 10) | 6 | A1B100375 | |
| 0015-00282 | SCREW TEFLON 8-32 X .22 (PACK OF 10) | 44 | A1B100376 | |
| 0015-00293 | CABLE ASSY EXP DI/DO #5 | 2 | A1B100377 | |
| 0015-00375 | PIN RAIL MODIFIED CONTACTOR LTESC | 2 | A1B100378 | |
| 0015-00423 | BULB150WAUXILLARY | 20 | A1B100379 | |
| 0015-00733 | FLTR VACUUM TRAP | 2 | A1B100380 | |
| 0015-01001 | LEYBOLD TURBOTRONIK NT-450 | 2 | A1B100381 | |
| 0015-09025 | SHIELD | 1 | A1B100382 | |
| 0015-09055 | BELLOWS, ASSEMBLY,SUSCEPTOR,HOLLOW, REV.F | 3 | B1C100142 | |
| 0015-09056 | BELLOWS, ASSEMBLY WAFER SOLID | 11 | B1C100143 | |
| 0015-09058 | COUPLING MODIFI | 3 | A1B100383 | |
| 0015-09065 | BEVELED #6 SUSCEPTOR WASHER | 138 | A1B100384 | |
| 0015-09076 | ROD 1032 THREADED (SKINS-KIT) (PACK OF 6) | 10 | A1B100385 | |
| 0015-09077 | HEATSINK THROTTLE DRIVE MODIFIED | 1 | A1B100386 | |
| 0015-09078 | PULLEY MOTOR THROTTLE DRIVE | 1 | A1B100387 | |
| 0015-09079 | PULLEY IDLER THROTTLE DRIVE | 1 | A1B100388 | |
| 0015-09080 | PULLEY MOD | 2 | A1B100389 | |
| 0015-09094 | DRIVE GEAR | 4 | A1B100390 | |
| 0015-09116 | SHAFT GEAR PULLEY THROTTLE VALVE | 3 | A1B100391 | |
| 0015-09123 | MODIFIED DIN RAIL SYSTEM AC | 1 | A1B100392 | |
| 0015-09129 | SCREW SOCKET SCREW | 8 | A1B100393 | |
| 0015-09130 | SCREW SOCKET SCREW | 8 | A1B100394 | |
| 0015-09131 | SCREW SOCKET SCREW (PACK OF 10) | 5 | A1B100395 | |
| 0015-09132 | HALF DOG POINT ANODIZED | 8 | A1B100396 | |
| 0015-09133 | SPRING WASHER ANODIZED (PACK OF 10) | 9 | A1B100397 | |
| 0015-09135 | SCREW BTN HEAD | 6 | A1B100398 | |
| 0015-09141 | WASHER (PACK OF 10) | 3 | A1B100399 | |
| 0015-09148 | WASHER (PACK OF 10) | 4 | A1B100400 | |
| 0015-09155 | SET SCREW NICKEL 4-401/4 (PACK OF 10) | 4 | A1B100401 | |
| 0015-09156 | SCREW (PACK OF 10) | 9 | A1B100402 | |
| 0015-09178 | WASHER BELLEVILLE SS | 10 | A1B100403 | |
| 0015-09179 | WASHER #6 BELLVILLE NICKEL PLATED (PACK OF 10) | 4 | A1B100404 | |
| 0015-09193 | SCREW SOCKET MOD | 7 | A1B100406 | |
| 0015-09203 | WASHER BELLVILLE | 41 | A1B100407 | |
| 0015-09204 | VALVE MODIFICATION | 9 | A1B100408 | |
| 0015-09213 | GROMMET GAS INLET HOLE | 61 | A1B100409 | |
| 0015-09311 | SCREW SHOULDER THROTTLE VALVE | 3 | A1B100410 | |
| 0015-09322 | SCREW | 4 | A1B100411 | |
| 0015-09328 | SCREW FINGER LIFT NICK 440 X 1/2 BHC UNDSZ SSULTPND (PACK OF 12) | 11 | A1B100412 | |
| 0015-09329 | SC SCREW MACH BTN HD6-32 X 3/8 H (PACK OF 10) | 16 | A1B100413 | |
| 0015-09330 | SCREW BTN HD 4-40 X 1/2'' | 6 | A1B100414 | |
| 0015-09331 | SCREW (PACK OF 10) | 3 | A1B100415 | |
| 0015-09343 | TIMINGPULLEYLEAD | 1 | A1B100416 | |
| 0015-09405 | PULLEY MOD .313 BORE WXZ | 1 | A1B100417 | |
| 0015-19150 | SCREWS (PACK OF 10) | 4 | A1B100418 | |
| 0015-20022 | MOTOR MODIFICATION FROG LEG ROBOT | 22 | A1B100419 | |
| 0015-20041 | SPACER SHIELD | 391 | A1B100420 | |
| 0015-20062-B | SPACER SHIELD TIN | 32 | A1B100421 | |
| 0015-20124 | SCREW TITANIUM PEDESTAL | 36 | A1B100422 | |
| 0015-20221 | CIRCUIT BREAKER PADLOCK 1-3 POLE LOCK OFF ONLY | 7 | A1B100423 | |
| 0015-35036 | GEARMODIFIEDMAG COUPLED ROT | 1 | A1B100424 | |
| 0015-35201 | CAPTIVE SCREW CLAMP RING (PACK OF 10) | 3 | A1B100425 | |
| 0015-35341 | SCR CAP PNL HD 1/4X 1.5DL SKT (PACK OF 10) | 2 | A1B100426 | |
| 0015-35395 | SCR CAP PNL HD 1/4 X 1.25L SKT (PACK OF 10) | 5 | A1B100427 | |
| 0015-40041 | SCREW | 6 | A1B100428 | |
| 0015-70026 | CABLE ASSY GUARD | 1 | A1B100429 | |
| 0015-70028 | CABLE ASSY GUARD | 1 | A1B100430 | |
| 0015-70031 | HARD DISK DRIVE FORM | 1 | A1B100431 | |
| 0015-76034 | MDFD CPLG SHAFT JSPDR 1/4 BOR | 4 | A1B100432 | |
| 0015-76155 | DIN RAIL EMO RELAYS CENTURA | 2 | A1B100433 | |
| 0015-77013 | LENSPOSITIVE | 2 | A1B100434 | |
| 0015-77078 | SCREWW/O-RING SEAL | 4 | A1B100435 | |
| 0015-77088 | DRIVE PULLEY | 4 | A1B100436 | |
| 0015-77094 | VALVE3-WAYNVX-14 | 1 | A1B100437 | |
| 0015-77101 | HOUSING TRAP | 1 | A1B100438 | |
| 0015-90013 | PIN SHUTTER | 3 | A1B100439 | |
| 0020-00043 | QUARTZ COVER | 3 | A1B100440 | |
| 0020-00083 | GATE V/V HOUSING | 1 | A1B100441 | |
| 0020-00085 | BUSHING GUIDE | 7 | A1B100442 | |
| 0020-00195 | SHELD | 67 | A1B100443 | |
| 0020-00210 | RETAINER BEARING ROBOT DR | 1 | A1B100444 | |
| 0020-00212 | POST PULLEY ROBOT DRIVE | 1 | A1B100445 | |
| 0020-00217 | PULLEY.ROBOT DRIVE | 2 | A1B100446 | |
| 0020-00222 | PLATE MOTOR MOUNT ROBOT DRIVE | 3 | A1B100447 | |
| 0020-00223 | SPACER BEARING ROBOT DRIVE | 1 | A1B100448 | |
| 0020-00224 | SHAFT BELT DRIVE EXTENSION (USE 0020-03510 | 1 | A1B100449 | |
| 0020-00242 | BRACKET | 8 | A1B100450 | |
| 0020-00286 | AXLE | 4 | A1B100451 | |
| 0020-00299 | BUMPER TRAILER GATE VALVE | 13 | A1B100452 | |
| 0020-00342 | BAR WAFER SUPPORT | 4 | A1B100453 | |
| 0020-00343 | CLAMPING PLATE SPRING | 4 | A1B100454 | |
| 0020-00344 | PLATE CLAMPING | 3 | A1B100455 | |
| 0020-00345 | SPRING BASE | 1 | A1B100456 | |
| 0020-00399 | COUPLING SHAFT WAVE GENERATOR | 3 | A1B100457 | |
| 0020-00424 | RING RETAINING VIEW PORT | 2 | A1B100458 | |
| 0020-00526 | Filter Air | 3 | A1B100459 | |
| 0020-00683 | FLANGE TURBO | 1 | A1B100460 | |
| 0020-00695 | HOUSING SEAL | 3 | A1B100461 | |
| 0020-00710 | PLUG HOUSING | 4 | A1B100462 | |
| 0020-00713 | RING | 2 | A1B100463 | |
| 0020-00717 | CAP PRESSURE | 1 | A1B100464 | |
| 0020-00728 | 5''HEXODE CLAMP RING | 1 | A1B100465 | |
| 0020-00781 | BLADEWATER BOXGROUND | 1 | A1B100466 | |
| 0020-00846 | VIEWPORT GLASS | 29 | A1B100467 | |
| 0020-00864 | VIEWPORT 4'' GLASS | 4 | A1B100468 | |
| 0020-00916 | ARM | 1 | A1B100469 | |
| 0020-00927 | GLASS WINDOW | 11 | A1B100470 | |
| 0020-01002 | METAL CYLINDER | 1 | A1B100471 | |
| 0020-01003 | ADAPTER GAS DIST LINE | 9 | A1B100472 | |
| 0020-01004 | CLAMP GAS TUBE | 3 | A1B100473 | |
| 0020-01006 | PLUNGER GAS TUBE | 1 | A1B100474 | |
| 0020-01013 | SUPPORT 4'' OXIDE TRAY | 4 | A1B100475 | |
| 0020-01015 | COVER VIEWPORT LEXAN | 3 | A1B100476 | |
| 0020-01016 | ALIGNMENT RING ALUMINUM | 1 | A1B100477 | |
| 0020-01020 | SPACER FLOATING DISC | 50 | A1B100478 | |
| 0020-01021-C | PLATE QUARTZ | 1 | A1B100479 | |
| 0020-01037 | BLOCKER | 1 | A1B100480 | |
| 0020-01058 | OVERLAY LOWER 6'' | 18 | A1B100481 | |
| 0020-01059 | OVERLAY INNER 6'' | 12 | A1B100482 | |
| 0020-01060 | OVERLAY UPPER 6'' | 22 | A1B100483 | |
| 0020-01176 | ASM HEXOIDE LOWER SUPPORT | 11 | A1B100484 | |
| 0020-01177 | OVERLAY SUPPORT TRAY 6'' | 8 | A1B100485 | |
| 0020-01271 | PLATE PUMPING 200MM WXZ+ | 1 | A1B100486 | |
| 0020-01290 | PLUG BUSHING | 8 | A1B100487 | |
| 0020-01616 | SHIELD 8'' BESC TAPERED | 9 | A1B100488 | |
| 0020-02008 | PLATE MOUNTING LEADSCREW | 2 | A1B100489 | |
| 0020-02016 | ALUMINUM BRACKETS | 2 | A1B100490 | |
| 0020-02021 | PILLOW BLOCK INDEXER | 4 | A1B100491 | |
| 0020-02027 | BLOCK V | 36 | A1B100492 | |
| 0020-02032 | FLAG START CASSETTE | 1 | A1B100493 | |
| 0020-02042 | ROLLER LATCH | 3 | A1B100494 | |
| 0020-02050 | STOP LOWER | 3 | A1B100495 | |
| 0020-02054 | BUTTON STOP | 1 | A1B100496 | |
| 0020-02079 | V-BLOCK 125MM | 4 | A1B100497 | |
| 0020-02086 | ROLLER FRAME | 2 | A1B100498 | |
| 0020-02087 | ROLLER FRAME | 2 | A1B100499 | |
| 0020-03304 | BRUSH | 12 | A1B100500 | |
| 0020-03305 | WIPER ROD | 20 | A1B100501 | |
| 0020-03321 | BEARING SHAFT | 2 | A1B100502 | |
| 0020-03366 | QUARTZ PLATE | 1 | A1B100503 | |
| 0020-03379 | GAS DISTRIBUTION PLATE ETCH REPLACES 0020-09062 | 16 | A1B100504 | |
| 0020-03421 | PLATE | 4 | A1B100505 | |
| 0020-03426 | PLUG VESPEL | 140 | A1B100506 | |
| 0020-03427 | RING | 1 | A1B100507 | |
| 0020-03430 | INSERT 150MM XTAL REPLACES 0020-10019 | 17 | A1B100508 | |
| 0020-03431B | INSERT,PED,EXT 5 | 9 | B1C100144 | |
| 0020-03434 | W PEDESTAL 125mm | 2 | B1C100119 | |
| 0020-03434D | W PEDESTAL 125mm, XTAL | 4 | B1C100120 | |
| 0020-03435 | PEDESTAL 150MM EXT | 5 | A1B100509 | |
| 0020-03458 | VIEW PORT | 1 | A1B100510 | |
| 0020-03459 | VIEWPORT GLASS 1 1/2'' | 13 | A1B100511 | |
| 0020-03460 | RING RETAINING 1 1/2'' | 1 | A1B100512 | |
| 0020-03464 | GRIPPER HUB | 1 | A1B100513 | |
| 0020-03508 | POST ADJ | 4 | A1B100514 | |
| 0020-03510 | SHAFT MOTOR | 8 | A1B100515 | |
| 0020-03511 | POST PULLEY | 3 | A1B100516 | |
| 0020-03513 | CLAMP BELT | 9 | A1B100517 | |
| 0020-03514 | ROLLER END | 6 | A1B100518 | |
| 0020-03515 | ROLLER MOTOR IDLER | 2 | A1B100519 | |
| 0020-03543 | GRIPPER FLAG | 1 | A1B100520 | |
| 0020-03545 | FLAG GRIPPER 6'' | 1 | A1B100521 | |
| 0020-03546 | BRACKET | 1 | A1B100522 | |
| 0020-03552 | THROTTLE VALVE BODY | 1 | A1B100523 | |
| 0020-03553 | SCREW COVER #4 SKT HD (PACK OF 10) | 7 | A1B100524 | |
| 0020-03554 | SCREEN PLATE ALUMN | 2 | A1B100525 | |
| 0020-03580 | EXTENSION FEEDTHRU L=250 DELRON | 2 | A1B100526 | |
| 0020-03581 | ROD | 1 | A1B100527 | |
| 0020-03591 | PLUG KNURLED | 73 | A1B100528 | |
| 0020-03595 | SCREEN ALUM | 36 | A1B100529 | |
| 0020-03651 | COVER PROTECTIVE GLASS 5 | 5 | A1B100530 | |
| 0020-03656 | VESPEL SCREWS REPLACES 0020-03660 | 2 | A1B100531 | |
| 0020-03661 | PLUG THREADED ALLUMINIUM | 19 | A1B100532 | |
| 0020-03664 | PEDESTAL 8 X TAL VER 1 | 1 | A1B100533 | |
| 0020-03672 | CLAMP RING POLY | 7 | A1B100534 | |
| 0020-03674 | SLEEVE CENTERING CLAMPING | 9 | A1B100535 | |
| 0020-03675 | COVER VESPEL 5'' | 1 | A1B100536 | |
| 0020-03811 | DISKSHUTTER | 10 | A1B100537 | |
| 0020-04011 | CLAMP | 1 | A1B100538 | |
| 0020-04012 | BRKT 1 | 1 | A1B100539 | |
| 0020-04014 | UPPER CAP INSULATOR | 21 | A1B100540 | |
| 0020-04015 | CATHODE HEX COVER GAS COOLED | 4 | A1B100541 | |
| 0020-04018 | PEDESTAL 6'' RAW MBC | 40 | A1B100542 | |
| 0020-04019 | RING PED TOP | 174 | A1B100543 | |
| 0020-04021 | 5''CATHODE COVER 5'' (OX) | 9 | A1B100544 | |
| 0020-04022 | ADAPTER LID (NDM-345-031) | 1 | A1B100545 | |
| 0020-04023 | U/V FILTER 5000 SIDE | 98 | A1B100546 | |
| 0020-04025 | SCREW (PACK OF 10) | 1 | A1B100547 | |
| 0020-04031 | PEDESTAL 200MM OXIDE | 5 | A1B100548 | |
| 0020-04037 | EXTENSION MOUNT BARATRON | 10 | A1B100549 | |
| 0020-04039 | COVER PLATE | 1 | A1B100550 | |
| 0020-04045 | MOUNTING BRACKET | 1 | A1B100551 | |
| 0020-04048 | BRKT MOUNTING | 1 | A1B100552 | |
| 0020-04058 | RING PED.200MM OX | 12 | A1B100553 | |
| 0020-04074 | WINDOW | 15 | A1B100554 | |
| 0020-04076 | PLATE | 8 | A1B100555 | |
| 0020-04082 | GAS METAL PLATE | 1 | A1B100556 | |
| 0020-04129 | TOP HINGE BRACKET | 4 | A1B100557 | |
| 0020-04131 | HANDLE INSULATOR | 4 | A1B100558 | |
| 0020-04143 | SLEEVE CENTERING CLAMP | 39 | A1B100559 | |
| 0020-04145 | ADAPTOR PLATE FOR ROTOMETER | 11 | A1B100560 | |
| 0020-04150 | BUSHING WATER BOX | 26 | A1B100561 | |
| 0020-04160 | SPACER CIRCULAR EXT CATH | 14 | A1B100562 | |
| 0020-04164 | COUPLER ASSY | 7 | A1B100563 | |
| 0020-04172 | INSERT BASE EXT CATHODE | 10 | A1B100564 | |
| 0020-04177 | PICK-UP DC 9/32 | 115 | A1B100565 | |
| 0020-04189 | ADAPTER TOP | 2 | A1B100566 | |
| 0020-04190 | SWITCH CLAMP | 1 | A1B100567 | |
| 0020-04192 | HINGE INSULATOR | 5 | A1B100568 | |
| 0020-04193 | SCREW CAPTIVE 1/4-20 X 1-1/4 SS (PACK OF 10) | 6 | A1B100569 | |
| 0020-04196 | PLATE MODULE ADAPTOR | 1 | A1B100570 | |
| 0020-04197 | MONOCHROMATOR WINDOW | 1 | A1B100571 | |
| 0020-04229 | MONOCHROMATOR | 1 | A1B100572 | |
| 0020-04231 | PLATE CONNECTOR ACCESS | 1 | A1B100573 | |
| 0020-04232 | PLATE 25PIN D CONNECTOR | 1 | A1B100574 | |
| 0020-04261 | SHIELD WAFER GRIP | 1 | A1B100575 | |
| 0020-04276 | UPPER CAP INSULATOR REPLACES 0020-06452 | 3 | A1B100576 | |
| 0020-04277 | FLANGE INSULATING TAPER EXT CATHODE | 56 | A1B100577 | |
| 0020-04277 | FLANGE | 7 | B1C100174 | |
| 0020-04332 | BLADE | 1 | A1B100578 | |
| 0020-04336 | DISK METAL SQUARE | 2 | A1B100579 | |
| 0020-04343 | INSULATOR GROUND PLATE | 8 | A1B100580 | |
| 0020-04344 | COVER HEXODE 150MM | 10 | A1B100581 | |
| 0020-04345 | INSULATOR HEXODE ANTIARC | 37 | A1B100582 | |
| 0020-04346 | RING GROUND PLATE | 54 | A1B100583 | |
| 0020-04361 | HEXODE COVERS | 68 | A1B100584 | |
| 0020-04363 | SCREW COVER ANTI-ARC (PACK OF 10) | 201 | A1B100585 | |
| 0020-04381 | BAFFLE TURBO | 1 | A1B100586 | |
| 0020-04382 | ENCLOSURE END | 1 | A1B100587 | |
| 0020-04383 | CAP HEXODE | 13 | A1B100588 | |
| 0020-04400 | DISK SHUTTER TA/BESC;AL | 2 | A1B100589 | |
| 0020-04416 | RETAINER COUPLING | 25 | A1B100590 | |
| 0020-04417 | COUPLING RF MATCH | 4 | A1B100591 | |
| 0020-04432 | PIPE SUPPORT BOTTOM | 2 | A1B100592 | |
| 0020-04443 | COVER | 2 | A1B100593 | |
| 0020-04468 | COUPLER | 8 | A1B100594 | |
| 0020-04523 | BUSHING FLANGED GENEVA DR. | 2 | A1B100595 | |
| 0020-04541 | SOCKET - LAMP HOLDER AMC 7000 | 4 | A1B100596 | |
| 0020-04606 | STRAP GROUNDING BUTTON SUPPORT | 2 | A1B100597 | |
| 0020-04775 | SHIELD COOLED TUBE | 8 | A1B100598 | |
| 0020-04927 | FRONTPLATEL/HR650TUNGSTEN | 1 | A1B100599 | |
| 0020-04953 | GRATING FIX PLATE | 4 | A1B100600 | |
| 0020-05243 | CONNECTORADAPTERPIK 2 | 4 | A1B100601 | |
| 0020-05389 | PIN REACTIVE | 17 | A1B100602 | |
| 0020-05604 | BLOCKGUIDE | 1 | A1B100603 | |
| 0020-05808 | CLAMP INSERT INSULATOR | 2 | A1B100604 | |
| 0020-05809 | NUT RF FEEDTHRU .250'' WIDE VECTRA IMP | 6 | A1B100605 | |
| 0020-06008 | RING | 3 | A1B100606 | |
| 0020-06022 | KEYWAYSHAFT IDLER MOTOR | 1 | A1B100607 | |
| 0020-06043 | PLUG THROTTLE VALVE | 2 | A1B100608 | |
| 0020-06047 | BEARING THROTTLE VALVE | 134 | A1B100609 | |
| 0020-06048 | BEARING THROTTLE VALVE | 59 | A1B100610 | |
| 0020-06049 | SHAFT THROTTLE | 2 | A1B100611 | |
| 0020-06057 | BOLT AND WASHER | 4 | A1B100612 | |
| 0020-06081 | COVER HEATER | 4 | A1B100613 | |
| 0020-06084 | RING | 3 | A1B100614 | |
| 0020-06094 | BRACKET SPRING GRIPPER | 1 | A1B100615 | |
| 0020-06132 | BOLT | 8 | A1B100616 | |
| 0020-06144 | SPRING CASSETTE RETAINING | 44 | A1B100617 | |
| 0020-06145 | SHOE CASSETTE RETAINING | 46 | A1B100618 | |
| 0020-06163 | FINGEROXIDE | 17 | A1B100619 | |
| 0020-06165 | FINGER 125 MM DELRIN | 11 | A1B100620 | |
| 0020-06180 | BUSHING SEAL BEARING | 2 | A1B100621 | |
| 0020-06212 | PANEL FLOW METERP5000 | 2 | A1B100622 | |
| 0020-06235 | BULKHEAD FITTING | 1 | A1B100623 | |
| 0020-06246 | SUPPORT TEFLON | 1 | A1B100624 | |
| 0020-06301 | BRACKET | 8 | A1B100625 | |
| 0020-06315 | VIEWPORT GLASS 3.6'' | 34 | A1B100626 | |
| 0020-06315B | GLASS VIEWPORT 3.6'' | 1 | A1B100627 | |
| 0020-06320 | HEXODE LOCK WASHER | 1 | A1B100628 | |
| 0020-06331 | BOLT AND WASHER | 12 | A1B100629 | |
| 0020-06412 | WINDOW LIGHT | 5 | A1B100630 | |
| 0020-06426 | CHAMBER MIRROR LEFT | 2 | A1B100631 | |
| 0020-06430 | STAND OFF | 3 | A1B100632 | |
| 0020-06432 | BRACKET | 14 | A1B100633 | |
| 0020-06438 | HINGE | 5 | A1B100634 | |
| 0020-06442 | 5''SHAFT INDEX DOOR | 3 | A1B100635 | |
| 0020-06443 | INDEXER DOOR BUSHING | 2 | A1B100636 | |
| 0020-06447 | HEXODE BOTTOM PLATE FOR 8330 (UPPER CAP INSULATOR) | 27 | A1B100637 | |
| 0020-06449 | SPRING DOOR LEFT 60 DEGREE | 5 | A1B100638 | |
| 0020-06463 | COVER GASKET ROBOT DRIVE | 2 | A1B100639 | |
| 0020-06465 | PAD SPRINGS | 2 | A1B100640 | |
| 0020-06468 | COVER CATHODE | 20 | A1B100641 | |
| 0020-06517 | PLUNGER RF | 1 | A1B100642 | |
| 0020-06518 | WIPER FR MICRO MATCH | 8 | A1B100643 | |
| 0020-06523 | BRUSH ELECTRICAL CONTACT RF | 1 | A1B100644 | |
| 0020-06535 | BRACKET WIPER LIM SW | 3 | A1B100645 | |
| 0020-06550 | BRACKET CRYO HOLD | 2 | A1B100646 | |
| 0020-06591 | INDEXER CLAMP | 2 | A1B100647 | |
| 0020-06601 | MAGNET BRACKET | 1 | A1B100648 | |
| 0020-06687 | GLASS VIEWPORT WINDOW | 20 | A1B100649 | |
| 0020-06690 | RUB WAVE GENERATOR | 1 | A1B100650 | |
| 0020-06712 | SUSPENSION LOWER | 4 | A1B100651 | |
| 0020-06713 | SPRING FLEXTURE | 4 | A1B100652 | |
| 0020-06748 | INSULATOR BOTTOM | 7 | A1B100653 | |
| 0020-06749 | INSULATOR TOP | 5 | A1B100654 | |
| 0020-06786 | SHIELD | 1 | A1B100655 | |
| 0020-06787 | SHIELD UPPER CYL. HALF | 4 | A1B100656 | |
| 0020-06788 | SHIELD LOWER CYLINDER | 5 | A1B100657 | |
| 0020-06789 | SHIELD LOWER CYL HALF | 5 | A1B100658 | |
| 0020-06790 | SHIELD CHAMBER | 1 | A1B100659 | |
| 0020-06791 | SHIELD | 1 | A1B100660 | |
| 0020-06793 | WASHER BELL JAR SHIELD | 222 | A1B100661 | |
| 0020-06796 | FLAG 150MM GRIPPER | 2 | A1B100662 | |
| 0020-06808 | GATE NON-ANODIZED | 7 | A1B100663 | |
| 0020-06815 | INSULATOR GROUND PLATE | 4 | A1B100664 | |
| 0020-06816 | RUBBER EXTRUSION BELL JAR STRA | 1 | A1B100665 | |
| 0020-06829 | ARMSECONDARY GENEVA DR | 1 | A1B100666 | |
| 0020-06830 | SCREW | 3 | A1B100667 | |
| 0020-06835 | HOUSINGDRIVER BEARING GENEVA | 2 | A1B100668 | |
| 0020-06836 | INDEX POSITION | 1 | A1B100669 | |
| 0020-06837 | ARM GENEVA LOCKING GENEVA DRIVE | 1 | A1B100670 | |
| 0020-06840 | KEY GENEVA WHEEL DRIVER | 4 | A1B100671 | |
| 0020-06841 | GENEVA DRIVE ASSY | 1 | A1B100672 | |
| 0020-06842 | DRIVE PLATE | 1 | A1B100673 | |
| 0020-06844 | PLUG TUBE GAS | 8 | A1B100674 | |
| 0020-06845 | SCREW | 4 | A1B100675 | |
| 0020-06847 | SHIM SHORT SUPPORT | 1 | A1B100676 | |
| 0020-06848 | SHIM LONG | 1 | A1B100677 | |
| 0020-06849 | PLUG GAS TUBE | 9 | A1B100678 | |
| 0020-06893 | CONTACT BRUSH ELECTRICAL | 4 | A1B100679 | |
| 0020-06894 | SPACER RF CONN RF MICRO MATCH | 3 | A1B100680 | |
| 0020-06897 | BRACKET RF MATCH | 12 | A1B100681 | |
| 0020-06902 | SUPPORT SPRING | 1 | A1B100682 | |
| 0020-06916 | BLADE RF MATCH | 7 | A1B100683 | |
| 0020-06956 | INSUL. BLADE RF MATCH | 13 | A1B100684 | |
| 0020-06957 | SHAFT BLADE | 3 | A1B100685 | |
| 0020-06959 | BRACKET BLADE LIMIT SW | 3 | A1B100686 | |
| 0020-06965 | BLOCK SENSOR MTG WC | 1 | A1B100687 | |
| 0020-06967 | DOME GRAPHITE | 1 | A1B100688 | |
| 0020-06968 | LOAD CHAMBER | 12 | A1B100689 | |
| 0020-06978 | SPRING CLIP ROD BRACKET (PACK OF 10) | 79 | A1B100690 | |
| 0020-06986 | SHIELD WAFER | 1 | A1B100691 | |
| 0020-06988 | METAL ATTACHMENT | 13 | A1B100692 | |
| 0020-06997 | PEDESTAL | 12 | A1B100693 | |
| 0020-07028 | GUIDE CASS FLAT FINDER | 2 | A1B100694 | |
| 0020-08465 | DEPOSITION RING | 4 | A1B100695 | |
| 0020-08545 | BRACKET CLAMP | 2 | A1B100696 | |
| 0020-08674 | SHIELD LOWER AL ARC-SPRAY SS | 4 | A1B100697 | |
| 0020-08676 | BUSHING GROUNDED UPPER SHIELD | 4 | A1B100698 | |
| 0020-08772 | BRACKET | 1 | A1B100699 | |
| 0020-09005 | WINDOW QTZ MCD#10273 BOM# 200-001 | 32 | A1B100700 | |
| 0020-09015 | CLAMP RING QTZ WINDOW | 4 | A1B100701 | |
| 0020-09029 | COVERING PIPE | 11 | A1B100702 | |
| 0020-09031 | INSULATING WASHER/ RING | 65 | A1B100703 | |
| 0020-09035 | HOUSING SEAL | 3 | A1B100704 | |
| 0020-09036 | SEAL COVER | 8 | A1B100705 | |
| 0020-09039 | STRAP | 1 | A1B100706 | |
| 0020-09041 | GUIDE | 1 | A1B100707 | |
| 0020-09053 | ETCH CHAMBER LIFT FLAG | 2 | A1B100708 | |
| 0020-09058 | MOUNT | 2 | A1B100709 | |
| 0020-09062 | PLATE GAS DISTRIBUTION | 1 | A1B100710 | |
| 0020-09064 | WINDOW FLANGE | 13 | A1B100711 | |
| 0020-09072 | BLOCK | 3 | A1B100712 | |
| 0020-09074 | COVER BOX | 8 | A1B100713 | |
| 0020-09102 | VALVE SHAFT THROTTLE | 3 | A1B100714 | |
| 0020-09103 | THROTTLE BUTTER FLY | 6 | A1B100715 | |
| 0020-09112 | SHAFT SLIT VALVE CHAMBER | 1 | A1B100716 | |
| 0020-09114 | LEVER B LEFT ACTUATOR | 2 | A1B100717 | |
| 0020-09116 | BLOCK SLIT VALVE | 4 | A1B100718 | |
| 0020-09118 | BUSHING | 4 | A1B100719 | |
| 0020-09123 | LOAD LOCK PLEXI WINDOW A | 7 | A1B100720 | |
| 0020-09124 | LOAD LOCK PLEXI WINDOW B | 3 | A1B100721 | |
| 0020-09128 | BELL CRANK | 3 | A1B100722 | |
| 0020-09131 | DOOR (I/O SLIT VALVE) | 2 | A1B100723 | |
| 0020-09135 | SUPPORT HINGE LAMP MODULE | 2 | A1B100724 | |
| 0020-09139 | RETAINERSOCKET | 2 | A1B100725 | |
| 0020-09147 | WAFER LIFT PIN | 11 | A1B100726 | |
| 0020-09152 | BRACKET ROTATION | 1 | A1B100727 | |
| 0020-09157 | BRACKET | 12 | A1B100728 | |
| 0020-09167 | CYLINDER SINGLE CRYSTAL | 1 | A1B100729 | |
| 0020-09251 | CLEVIS CYLINDER CASS LOCK 125MM | 22 | A1B100730 | |
| 0020-09253 | TURN BUCKLE X-AXIS | 1 | A1B100731 | |
| 0020-09264 | COVER SEAL CVD | 2 | A1B100732 | |
| 0020-09269 | PIN | 1 | A1B100733 | |
| 0020-09284 | FLAGCOMB.SENSOR 3/16'' PITCH | 1 | A1B100734 | |
| 0020-09295 | BRACKET | 1 | A1B100735 | |
| 0020-09302 | AMP | 1 | A1B100736 | |
| 0020-09321 | PLATE ADAPTOR ROTOMETER | 2 | A1B100737 | |
| 0020-09331 | CLEVIS CYLINDER CASS LOCK | 6 | A1B100738 | |
| 0020-09338 | DETECTOR ROTATION | 3 | A1B100739 | |
| 0020-09346 | CAP PALM | 33 | A1B100740 | |
| 0020-09352 | COVER COUPLER | 1 | A1B100741 | |
| 0020-09359 | ENCLOSE CHAMBER INTER PCB | 1 | A1B100742 | |
| 0020-09364 | BRACKET | 5 | A1B100743 | |
| 0020-09367 | SHAFT | 1 | A1B100744 | |
| 0020-09373 | SEAL SMALL FACE | 12 | A1B100745 | |
| 0020-09374 | GASKETS (1 PER BAG) | 15 | B1C100121 | |
| 0020-09376 | O-RING 2-279 BOTTOM COVER | 1 | A1B100746 | |
| 0020-09379 | PLATE STRIKE | 7 | A1B100747 | |
| 0020-09412 | SLEEVE BELLOWS SEAL | 3 | A1B100748 | |
| 0020-09413 | GUIDE NUT LIMIT SWITCH | 2 | A1B100749 | |
| 0020-09416 | SHIM .003 | 22 | A1B100750 | |
| 0020-09427 | BRACKET | 9 | A1B100751 | |
| 0020-09432 | COVER HOUSING PLUG | 4 | A1B100752 | |
| 0020-09437 | CLAMP TUBE 2'' FRAME MEMBER | 13 | A1B100753 | |
| 0020-09438 | CLAMP TUBE 1'' FRAME MEMBER | 9 | A1B100754 | |
| 0020-09442 | PLATE BLOCKING | 19 | A1B100755 | |
| 0020-09450 | DISTRIBUTOR LOWER | 23 | A1B100756 | |
| 0020-09462 | SPACER LEG CHAMBER | 1 | A1B100757 | |
| 0020-09464 | FLANGE STORAGE ELEVATOR | 1 | A1B100758 | |
| 0020-09484 | CLAMP SWITCH | 6 | A1B100759 | |
| 0020-09497 | STORAGE FRAME | 2 | A1B100760 | |
| 0020-09500 | LEVER ENTR ACTUATOR | 1 | A1B100761 | |
| 0020-09504 | LEAF SPRING | 19 | A1B100762 | |
| 0020-09530 | END CAP HINGE | 5 | A1B100763 | |
| 0020-09533 | HANDLE LID CVD BlACK | 26 | A1B100764 | |
| 0020-09539 | BUSHING (I/O SLIT VALVE) | 9 | A1B100765 | |
| 0020-09541 | LEYBOLD FLANGE ADAPTER REMOTE PUMP | 3 | A1B100766 | |
| 0020-09542 | PLATE ISO REMOTE PUMP | 2 | A1B100767 | |
| 0020-09545 | FILTER SLIT WINDOW (PACK OF 2) | 70 | A1B100768 | |
| 0020-09547 | FINGER 5'' | 16 | A1B100769 | |
| 0020-09553 | RING AL EXTERNAR | 5 | A1B100770 | |
| 0020-09560 | PLATE | 1 | A1B100771 | |
| 0020-09566 | REMOTE DISTRIBUTION BD COVER MTG BOX HEAT EXCHANGER INTERFACE BD | 5 | A1B100772 | |
| 0020-09577 | COVER ENCLOSURE I/O VALVE | 2 | A1B100773 | |
| 0020-09598 | MAGNET ASSY CHAMBER SIDE | 4 | A1B100774 | |
| 0020-09599 | CHAMBER MAGNET FRONT/BACK | 5 | A1B100775 | |
| 0020-09613 | SPACER CERAMIC | 9 | A1B100776 | |
| 0020-09615 | WAFER LIFT | 1 | A1B100777 | |
| 0020-09622 | PLUG THROTTLE VALVE | 15 | A1B100778 | |
| 0020-09627 | BAFFLE SCREEN | 2 | A1B100779 | |
| 0020-09636 | O RING BOTTOM COVER | 3 | A1B100780 | |
| 0020-09654 | BRACKET | 1 | A1B100781 | |
| 0020-09655 | DDF3 HUB FR2 PAD CONDITIONER | 1 | A1B100782 | |
| 0020-09657 | REAR PANEL CABLE | 2 | A1B100783 | |
| 0020-09664 | HINGE COVER PLASTIC ETCH | 3 | A1B100784 | |
| 0020-09665 | RING | 1 | A1B100785 | |
| 0020-09666 | KEEPER | 1 | A1B100786 | |
| 0020-09697 | BRACKET | 1 | A1B100787 | |
| 0020-09737 | HANDWHEEL ADJUST | 3 | A1B100788 | |
| 0020-09758 | COVERS FOR ELUMINIUMS (UB65B1B) | 3 | A1B100789 | |
| 0020-09778 | SHELF CASSETTE | 2 | A1B100790 | |
| 0020-09785 | COMB CENTERFINDER 56'' | 4 | A1B100791 | |
| 0020-09787 | CVD;COUPLING | 1 | A1B100792 | |
| 0020-09808 | BRACKETTE | 4 | A1B100793 | |
| 0020-09815 | BRACKET HINGE TOP LEFT | 3 | A1B100794 | |
| 0020-09816 | BRACKET REAR MOUNTING | 1 | A1B100795 | |
| 0020-09818 | BRACKET FRONT MOUNTING | 2 | B1C100104 | |
| 0020-09829 | BRACKET DOOR PNEU-SPRING | 1 | A1B100796 | |
| 0020-09869 | VGA MONITOR BASE STAND ALONE | 1 | A1B100797 | |
| 0020-09898 | BRACKET HINGE SLIDE UPPER | 5 | A1B100798 | |
| 0020-09910 | SPUTTER PIPE | 3 | A1B100799 | |
| 0020-09911 | CARRIER SPUTTER | 14 | A1B100800 | |
| 0020-09912 | LIFTING PIN SPUTTER | 47 | A1B100801 | |
| 0020-09924 | CVD;SUPPPORT SUSC | 1 | A1B100802 | |
| 0020-09925 | SUSCEPTOR NUT | 2 | A1B100803 | |
| 0020-09927 | SUSCEPTOR STUD | 2 | A1B100804 | |
| 0020-09932 | SEAL SUSCEPTOR BELLOWS | 21 | A1B100805 | |
| 0020-09933 | GAS DISTRIBUTION SPUTTER | 8 | A1B100806 | |
| 0020-09933REV F | SHOWER HEAD, 5B PUTTER ETCH | 6 | B1C100145 | |
| 0020-09954 | CLAMP SHIELD N | 26 | A1B100807 | |
| 0020-09955 | PLATE | 2 | A1B100808 | |
| 0020-09965 | R.F. OUTPUT BLOCK | 1 | A1B100809 | |
| 0020-10001 | COUPLER MOUNT | 4 | A1B100810 | |
| 0020-10002 | FLAG THROTTLE DRIVE | 7 | A1B100811 | |
| 0020-10003 | STOPPER THROTTLE | 2 | A1B100812 | |
| 0020-10016 | SHIELD 1/8 INCH CLEAR ACRYLIC TRAY | 3 | A1B100813 | |
| 0020-10041 | PLATE CALIBRATION 200MM | 10 | A1B100814 | |
| 0020-10046 | RING OUTSIDE 6'' SPUTTER | 8 | A1B100815 | |
| 0020-10047 | STAND OFF SPUTTER | 48 | A1B100816 | |
| 0020-10050 | PEDESTAL FLAT SPUTTER | 7 | A1B100817 | |
| 0020-10051 | RING TOP SPUTTER | 8 | A1B100818 | |
| 0020-10068 | RETAINER LIGHT TUBE | 1 | A1B100819 | |
| 0020-10074 | PINLIFT | 4 | A1B100820 | |
| 0020-10075 | BRACKET SUSCEPTOR SHIPPING 6'' TEOS | 2 | A1B100821 | |
| 0020-10076 | WEDGE SUSCEPTOR | 2 | A1B100822 | |
| 0020-10077 | CLAMP TOP SUSCEPTOR | 1 | A1B100823 | |
| 0020-10078 | CLAMP TOP SUSCEPTOR | 1 | A1B100824 | |
| 0020-10079 | CLAMP LEAD SCREW | 9 | A1B100825 | |
| 0020-10083 | LOAD LOCK LID LOCKDOWN | 22 | A1B100826 | |
| 0020-10084 | BRKT THRU THE WALL DOOR CLAMP | 1 | A1B100827 | |
| 0020-10098 | PLATE COVER1CB USE 0020-10099 | 4 | A1B100828 | |
| 0020-10100 | FLANGE ADPT FOR CVD PUMP STACK | 2 | A1B100829 | |
| 0020-10115 | BRACKET | 1 | A1B100830 | |
| 0020-10117 | PLATE PERFORATED OX 200MM TEOS | 2 | A1B100831 | |
| 0020-10122/C | ANODIZED,PERF PLATE | 17 | B1C100146 | |
| 0020-10132 | SUSCEPTOR MANDREL GROUND | 1 | A1B100832 | |
| 0020-10133 | CVD;BLOCK RF GROU | 5 | A1B100833 | |
| 0020-10135 | MANIFOLD WAFER PLATED | 1 | A1B100834 | |
| 0020-10141 | PUMPING PLATE | 1 | A1B100835 | |
| 0020-10157 | MANIFOLD WATER | 1 | A1B100836 | |
| 0020-10166 | CVD;SUSCEPTOR 150MM | 2 | A1B100837 | |
| 0020-10185 | SUPPORT HOOP | 2 | A1B100838 | |
| 0020-10187 | CLAMP RING | 1 | A1B100839 | |
| 0020-10188 | LEVELING PIN | 9 | A1B100840 | |
| 0020-10190 | PLATE CONNECTOR SACVD /WB | 1 | A1B100841 | |
| 0020-10195 | BRACKET | 1 | A1B100842 | |
| 0020-10202 | DOOR CHAMBER SLIT | 3 | A1B100843 | |
| 0020-10246 | LIFT ASSY MOUNTING PLATE | 1 | A1B100844 | |
| 0020-10299 | RECESSED U.V. ENDPOINT FILTER | 3 | A1B100845 | |
| 0020-10308 | BUSHING PLUG 200MM | 15 | A1B100846 | |
| 0020-10314 | BUSS BARAGROUND | 3 | A1B100847 | |
| 0020-10316 | BLOCKPOWER DISTRIBUTION | 3 | A1B100848 | |
| 0020-10317 | BUSS BAR SYSTEM NUETRAL | 1 | A1B100849 | |
| 0020-10363 | BRACKDOR DOOR S | 5 | A1B100850 | |
| 0020-10368 | COVER PANEL | 2 | A1B100851 | |
| 0020-10371 | COVER PANEL | 2 | A1B100852 | |
| 0020-10404 | BUSHING PUMP PLATE ID 187 | 4 | A1B100853 | |
| 0020-10405 | BUSHING PUMP PLATE ID 094 | 6 | A1B100854 | |
| 0020-10414 | AMPULE BODY | 1 | A1B100855 | |
| 0020-10422 | BRACKET WINDOW STOP | 2 | A1B100856 | |
| 0020-10441 | BRACETOP PANEL | 1 | A1B100857 | |
| 0020-10518 | PEDESTAL THICK 200MM | 5 | A1B100858 | |
| 0020-10519 | PEDESTAL OXIDE | 1 | A1B100859 | |
| 0020-10520 | PEDESTAL 5'' ETCH | 1 | A1B100860 | |
| 0020-10527 | PIPE SPUTTER | 3 | A1B100861 | |
| 0020-10573 | COLLIMATOR CENTER | 3 | A1B100862 | |
| 0020-10602 | PLATE BLOCKER | 1 | A1B100863 | |
| 0020-10657 | BRACKET ROBOT FEEDTHRU INTERFACE PCB | 2 | A1B100864 | |
| 0020-10667 | BRACKET MOUNTING HDD SxS CONTROLLER | 2 | A1B100865 | |
| 0020-10672 | HINGE GAS PANEL RIGHT | 1 | A1B100866 | |
| 0020-10700 | PLUG THROTTLE VALVE TEOS | 2 | A1B100867 | |
| 0020-10702 | SEAL | 18 | A1B100868 | |
| 0020-10703 | DRIVE STOPPER | 10 | A1B100869 | |
| 0020-10704 | SEAL THROTTLE VALVE TEOS | 5 | A1B100870 | |
| 0020-10707 | CLAMPTHROTTLE VALVE | 11 | A1B100871 | |
| 0020-10717 | CLAMP ADAPTER TUBING | 1 | A1B100872 | |
| 0020-10721 | SCREW COVER TEFLON SCREW/PREPLATE (PACK OF 10) | 14 | A1B100873 | |
| 0020-10721* | SCREW COVER TEFLON SCREW/PREPLATE (PACK OF 10) | 1 | A1B100874 | |
| 0020-10730 | CLAMP SHIELD WB | 17 | A1B100875 | |
| 0020-10732 | PLATE PUMPING BW 200MM | 2 | A1B100876 | |
| 0020-10734 | LIFT SUSCEPTOR NEW COUPLER | 2 | A1B100877 | |
| 0020-10736 | SCREW | 1 | A1B100878 | |
| 0020-10758 | HOUSING TC AMP REPLACES 0020-09478 | 3 | A1B100879 | |
| 0020-10759 | COVER FRONT | 3 | A1B100880 | |
| 0020-10760 | HOUSING CVD THROTTLE | 2 | A1B100881 | |
| 0020-10762 | CERAMIC BUSHING (PACK OF 10) | 4 | A1B100882 | |
| 0020-10764 | PUMPING PLATE 456'' TEOS | 3 | A1B100883 | |
| 0020-10769 | PLUG SIDE COOLING WATER INLET LAMP MO | 29 | A1B100884 | |
| 0020-10770 | LAMP REFLECTOR BASE | 2 | A1B100885 | |
| 0020-10777 | SPACER SWAGELOK | 4 | A1B100886 | |
| 0020-10802 | WINDOW FRONT DOOR | 2 | A1B100887 | |
| 0020-10803 | SKIN RIGHT | 2 | A1B100888 | |
| 0020-10814 | PEDESTAL ETCHBACK | 7 | A1B100889 | |
| 0020-10817 | RING | 1 | A1B100890 | |
| 0020-10836 | CLAMP | 1 | A1B100891 | |
| 0020-10876 | MANIFOLD GRADIENT OUTPU | 2 | A1B100892 | |
| 0020-10884 | SCREW SLTD PAN HD (PACK OF 10) | 11 | A1B100893 | |
| 0020-10885 | SCREWSLTD PAN HD #4-40 X 1 (PACK OF 10) | 7 | A1B100894 | |
| 0020-10889 | SCREW 632x3/8 S/O HED PAN HP (PACK OF 10) | 14 | A1B100895 | |
| 0020-10890 | SCREW NICKEL PLATED 6-32 X 1/2 (PACK OF 10) | 1 | A1B100896 | |
| 0020-10891 | SCREW PAN HEAD SLOTTED 8-32 X 1/2 | 14 | A1B100897 | |
| 0020-10941 | ISOLATOR TEFLON RING | 4 | A1B100898 | |
| 0020-10942 | SEAL STOPPER TH | 1 | A1B100899 | |
| 0020-10972 | SCREW MATCH HD 4-40 X 3/16 (PACK OF 10)allall | 1 | A1B100900 | |
| 0020-10973 | BRKLT L CHAMBER CLAMP | 7 | A1B100901 | |
| 0020-10985 | HYBRID SEAL INSTALL CLIP | 235 | A1B100902 | |
| 0020-13048 | SPINDLE CALIBRATION WAFER | 1 | A1B100903 | |
| 0020-13217 | PLATE REINFORCING EARTHQUAKE BRKT MTG | 6 | A1B100904 | |
| 0020-13342 | FILTER UV | 1 | A1B100905 | |
| 0020-13380 | WINDOW FILTER FLANGE | 4 | A1B100906 | |
| 0020-13529 | INDEXER HOUSING LEFT | 5 | A1B100907 | |
| 0020-13530 | HOUSING INDEXER RIGHT | 1 | A1B100908 | |
| 0020-13655 | BRACKET DOOR | 2 | A1B100909 | |
| 0020-13656 | BRACKET HOUSING LL | 2 | A1B100910 | |
| 0020-13767 | PLATE BACKING 6.4MM MIRROR | 1 | A1B100911 | |
| 0020-14816 | FINGER | 3 | A1B100912 | |
| 0020-16091 | BUTTON PEDESTAL | 3 | A1B100913 | |
| 0020-16162 | BRACKET PHOTOHELIC GAUGE | 1 | A1B100914 | |
| 0020-17045 | FILTER | 3 | A1B100915 | |
| 0020-17052 | TRNSITIONDUCT7810 | 1 | A1B100916 | |
| 0020-17411 | COVER PVD POST | 2 | A1B100917 | |
| 0020-17729 | WINDOW DEGAS WINDOW FILTER | 4 | A1B100918 | |
| 0020-18043 | RING TEFLON | 1 | A1B100919 | |
| 0020-18261 | BLOCK DUAL | 10 | A1B100920 | |
| 0020-18262 | THREAD-DUAL HELIUM | 6 | A1B100921 | |
| 0020-18269 | RINGTEFLONGUARD IUV HDP-CVD | 16 | A1B100922 | |
| 0020-18280 | SHAFTASSYHDP | 1 | A1B100923 | |
| 0020-18290 | PANEL TURBO CONTROLLER | 1 | A1B100924 | |
| 0020-18304 | COVERRFCONNECTOR | 2 | A1B100925 | |
| 0020-18315 | PANELCH B&D FACILITY TRAYI/O CONNECT | 1 | A1B100926 | |
| 0020-18328 | PIVOT RGT BLDE ASSY ROBOT | 1 | A1B100927 | |
| 0020-18359 | FLAGSENSORLIFT | 5 | A1B100928 | |
| 0020-18361 | SCRSHLDR5/16-24X5/8 | 1 | A1B100929 | |
| 0020-18401 | SCREWDUFFUSERCLEAN PORT | 2 | A1B100930 | |
| 0020-18440 | INSULATORLEFTSIDECOILTENSIONER | 3 | A1B100931 | |
| 0020-18471 | STUD LEVELING 3/8-24 X 2.75 LONG | 3 | A1B100932 | |
| 0020-18483 | CLAMPIR SENSOR STANDOFFY-BAR HDP | 1 | A1B100933 | |
| 0020-18485 | HOLDER DOME | 20 | A1B100934 | |
| 0020-18499 | CLAMPSENSOR | 1 | A1B100935 | |
| 0020-18503 | BRACKET | 7 | A1B100936 | |
| 0020-18505 | ADAPTERPLATEBIAS | 1 | A1B100937 | |
| 0020-18513 | DIFFUSERCLEANPORTHDPCVD | 2 | A1B100938 | |
| 0020-18514 | WEDGECLEANPORTHDPCVDULTIMA | 1 | A1B100939 | |
| 0020-18621 | PLATE TTF CENTER REAR ULTIMA HDP-CVD | 16 | A1B100940 | |
| 0020-18782 | COVER P/S GEN RACK HDP-CVD ULTIMA | 12 | A1B100941 | |
| 0020-18789 | BLANK-OFF GATE-VALVE BONNET PLATE ULTIMA | 4 | A1B100942 | |
| 0020-18794 | COVER INTLK SWITCH | 2 | A1B100943 | |
| 0020-18855 | SPACERNOMEX HOSE WATER | 5 | A1B100944 | |
| 0020-18879 | SCREW PIVOT BARRIER SLTVLV | 7 | A1B100945 | |
| 0020-18881 | BRACKET CAP SLIT VALVE | 1 | A1B100946 | |
| 0020-18927 | CATHODEBOTTOMPLATE | 1 | A1B100947 | |
| 0020-18932 | PLATE TTF REAR PH2 COMMON MAINFRAME | 28 | A1B100948 | |
| 0020-19001 | SLIT VALVE SHO SPACER | 11 | A1B100949 | |
| 0020-19002 | FLAPPER-SLIT VALVE ANODIZED DOOR SLIT VALVE | 13 | A1B100950 | |
| 0020-19708 | COVER RING | 13 | A1B100951 | |
| 0020-20000 | CHAMBER HEAT LAMP | 2 | A1B100952 | |
| 0020-20001 | DOOR PRECLEAN CHAMBER | 2 | A1B100953 | |
| 0020-20003 | SHIELD | 1 | A1B100954 | |
| 0020-20005 | SHIELD | 1 | A1B100955 | |
| 0020-20018 | TOP COVER REAR | 1 | A1B100956 | |
| 0020-20021 | SLIT VALVE | 2 | A1B100957 | |
| 0020-20059 | QUARTZ INSULATOR | 1 | A1B100958 | |
| 0020-20060 | PANEL TURBO CONTROLLER | 1 | A1B100959 | |
| 0020-20084 | PANEL | 2 | A1B100960 | |
| 0020-20111 | CLAMPING RING 5 INCH | 22 | A1B100961 | |
| 0020-20112 | W/CLAMPING RING AL/TI 8'' | 7 | A1B100962 | |
| 0020-20113 | SHIELD HUB DC BIAS | 819 | A1B100963 | |
| 0020-20114 | ISOLATOR DC BIAS (PACK OF 2) | 1340 | A1B100964 | |
| 0020-20117 | CONDUCTOR FLEX DC BIAS | 18 | A1B100965 | |
| 0020-20119 | PAD DC BIAS 5&6 IN | 190 | A1B100966 | |
| 0020-20123 | HEATER CER | 12 | A1B100967 | |
| 0020-20126 | STANDOFF CERAMIC DC BIAS | 83 | A1B100968 | |
| 0020-20168 | SHIELDAL/TI8IN | 2 | A1B100969 | |
| 0020-20170 | TARGET (COPPER) | 1 | A1B100970 | |
| 0020-20293 | PAD FIXTURE GAS SPRING | 1 | A1B100971 | |
| 0020-20342 | PIVOT TRANSFER | 8 | A1B100972 | |
| 0020-20349 | CLAMPFROG LEG DUPLEX | 3 | A1B100973 | |
| 0020-20390 | ARMFROGLEGWINGWELD | 3 | A1B100974 | |
| 0020-20399 | AMP | 5 | A1B100975 | |
| 0020-20404 | LOWER FROG LEG MOTOR MOUNT | 1 | A1B100976 | |
| 0020-20460 | BASE ADAPTER | 4 | A1B100977 | |
| 0020-20462 | VIEWPOINT COVER TRANSFER CH | 1 | A1B100978 | |
| 0020-20479 | STUD CRYO/GATE PROCESS CHAMBER SP (PACK OF 10) | 4 | A1B100979 | |
| 0020-20483 | HUB LAMP CORNER COVER | 1 | A1B100980 | |
| 0020-20485 | BRACKET | 6 | A1B100981 | |
| 0020-20488 | CLAMP BAKE OUT | 21 | A1B100982 | |
| 0020-20499 | WINDOWPROTECTIVE | 74 | A1B100983 | |
| 0020-20499-C | WINDOWPROTECTIVE | 1 | A1B100984 | |
| 0020-20500 | CRYO SHIELD | 8 | A1B100985 | |
| 0020-20509 | PLATE | 6 | A1B100986 | |
| 0020-20512 | PIPE | 4 | A1B100987 | |
| 0020-20514 | COLLAR-CLAMP | 2 | A1B100988 | |
| 0020-20522 | WASHER HOOP INSULATOR | 3 | A1B100989 | |
| 0020-20523 | CLAMP RING 8'' JMF 2X HTR-REFLOW (PACK OF 4) | 2 | A1B100990 | |
| 0020-20561 | BELL JAR PCII QUARTZ | 1 | A1B100991 | |
| 0020-20626 | BLOCK MOUNTING SHUT-OFF VALVE | 22 | A1B100992 | |
| 0020-20627 | BLOCK MOUNTING MFC | 17 | A1B100993 | |
| 0020-20628 | RING | 2 | A1B100994 | |
| 0020-20665 | CHAMBER PIN GUIDE | 4 | A1B100995 | |
| 0020-20672 | PULLEY CHAMBER MONOLITH INTERFACE | 2 | A1B100996 | |
| 0020-20700 | CLAMPEND AR FLEX 8'' GATE VALVE | 1 | A1B100997 | |
| 0020-20719 | RAIL SUPPORT RF GEN CAB | 6 | A1B100998 | |
| 0020-20752 | COOL CHAMBER LIFT FINGER | 3 | A1B100999 | |
| 0020-20753 | PLATE POWER SUPPLY CORD STRAIN RELIEF | 4 | A1B101000 | |
| 0020-20839 | PLATE INSULATOR COVER | 1 | A1B101001 | |
| 0020-20841 | BOLT GAS POST | 1 | A1B101002 | |
| 0020-20843 | PVC CHAMBER POST | 4 | A1B101003 | |
| 0020-20919 | COVER PVD POST | 5 | A1B101004 | |
| 0020-20928 | HOOP CERAMIC 8'' | 4 | A1B101005 | |
| 0020-20929 | INSULATOR MAG SWITCH | 1 | A1B101006 | |
| 0020-20938 | BRACKET CABLE TIE SLIT VALVE | 2 | A1B101007 | |
| 0020-20972 | BLOCK FIXTURE GAS SPRING | 4 | A1B101008 | |
| 0020-20988 | HOOP SHIELD | 1 | A1B101009 | |
| 0020-20991 | PANEL BLANK TURBO CNTL | 1 | A1B101010 | |
| 0020-21007 | BLCK WALL CLMP | 229 | A1B101011 | |
| 0020-21034 | BLOCK | 2 | A1B101012 | |
| 0020-21035 | BRACKET SOURCE WATER LINE | 2 | A1B101013 | |
| 0020-21042 | WEIGHT CLAMP RING | 3 | A1B101014 | |
| 0020-21070 | SLIP HINGE FEMALE | 1 | A1B101015 | |
| 0020-21081 | RING | 1 | A1B101016 | |
| 0020-21084 | RING | 1 | A1B101017 | |
| 0020-21089 | COVER CHAMBER INTERCONNECT BD | 5 | A1B101018 | |
| 0020-21093 | SHIELD UPPER COLLIMATED TI-5500 | 1 | A1B101019 | |
| 0020-21098 | COVER | 9 | A1B101020 | |
| 0020-21099 | BRACKET CLAMP | 27 | A1B101021 | |
| 0020-21114 | BLADE 6-IN BUFFER | 2 | A1B101022 | |
| 0020-21115 | HOOP 5'' | 12 | A1B101023 | |
| 0020-21116 | FINGER 5'' PRECLEAN | 1 | A1B101024 | |
| 0020-21120 | SHIELD 5'' | 14 | A1B101025 | |
| 0020-21144 | INSERT PED | 51 | A1B101026 | |
| 0020-21145 | SLIT | 39 | A1B101027 | |
| 0020-21148 | HOOP COVER | 1 | A1B101028 | |
| 0020-21174 | FINGER FLAT | 1 | A1B101029 | |
| 0020-21188 | GASKET ORIFICE UHV | 1 | A1B101030 | |
| 0020-21200 | COVER SHIELD | 28 | A1B101031 | |
| 0020-21255-A | PLATE | 1 | A1B101032 | |
| 0020-21275 | CLAMP RING | 21 | A1B101033 | |
| 0020-21276 | PLATE | 1 | A1B101034 | |
| 0020-21278 | CLAMP RING 6'' AL | 2 | A1B101035 | |
| 0020-21428 | CLAMP RING | 1 | A1B101036 | |
| 0020-21430 | LID | 2 | A1B101037 | |
| 0020-21444 | BRACKET | 4 | A1B101038 | |
| 0020-21464 | SHIELD | 5 | A1B101039 | |
| 0020-21465 | SHIELD | 3 | A1B101040 | |
| 0020-21467 | SHIELD ADAPTOR | 1 | A1B101041 | |
| 0020-21468 | SHIELD 5'' ALUMINUM | 5 | A1B101042 | |
| 0020-21479 | CLAMPING RING 6'' TIW SEMI MAJOR FLAT | 30 | A1B101043 | |
| 0020-21643 | STANDOFF | 2 | A1B101044 | |
| 0020-21665 | W/SHIELD 8'' AL/TI | 2 | A1B101045 | |
| 0020-21673 | LOAD LOCK MECHANISM SHIELD | 1 | A1B101046 | |
| 0020-21708 | CHUCK | 5 | A1B101047 | |
| 0020-21713 | BLOCK | 2 | A1B101048 | |
| 0020-21744 | FINGER 8'' PRECLEAN | 28 | A1B101049 | |
| 0020-21746 | SHIELD | 1 | A1B101050 | |
| 0020-21755 | OUTER RING 6'' CERAMIC CLIP | 10 | A1B101051 | |
| 0020-21757 | FINGER GUARD 6'' LONG | 1 | A1B101052 | |
| 0020-21801 | FITTING | 2 | A1B101053 | |
| 0020-21804 | SLIM MAGNET ASSY 4MM | 2 | A1B101054 | |
| 0020-21863 | SHIMMAGNET1.5MM | 5 | A1B101055 | |
| 0020-21879 | PLATEW/VIEW PORT | 1 | A1B101056 | |
| 0020-21893 | SHIELD UPPER TIN 5 & 6 WAFER | 1 | A1B101057 | |
| 0020-21901 | BRACKET | 151 | A1B101058 | |
| 0020-21944 | POCKET PLATE QTZ 8'' PRECLEAN | 1 | A1B101059 | |
| 0020-21945 | POCKET PLATE AL203 8'' PRECLEAN | 1 | A1B101060 | |
| 0020-21963 | CAM RIM CASSETTE BEARING | 25 | A1B101061 | |
| 0020-21976 | GRILL DIFFUSER | 6 | A1B101062 | |
| 0020-21978 | SPACER RING | 5 | A1B101063 | |
| 0020-21979 | CLAMP RING | 8 | A1B101064 | |
| 0020-21981 | DIFFUSERHSG | 2 | A1B101065 | |
| 0020-22033 | HEX COLLIMATOR | 1 | A1B101066 | |
| 0020-22139 | PLATE TC AMP MOUNTING | 1 | A1B101067 | |
| 0020-22182 | CATHODE FLAME SPRAYED 5500 | 3 | A1B101068 | |
| 0020-22196 | PEDESTAL TIN | 34 | A1B101069 | |
| 0020-22214 | PLATE-POCKET ALUMINA | 1 | A1B101070 | |
| 0020-22215 | PLATE-POCKET QTZ II | 1 | A1B101071 | |
| 0020-22237 | COVER RING | 164 | A1B101072 | |
| 0020-22240 | REST PEDESTAL BTN (PACK OF 10) | 12 | A1B101073 | |
| 0020-22296 | ORIENTER BOARD COVER | 2 | A1B101074 | |
| 0020-22383 | PEDESTAL SST 8'' 101% W | 4 | A1B101075 | |
| 0020-22412 | COVER UPPER | 2 | A1B101076 | |
| 0020-22453 | TOOL ROBOT CLAMP ASSY | 39 | A1B101077 | |
| 0020-22459 | 6'' LIFTER | 1 | A1B101078 | |
| 0020-22461 | LIFTER 8'' | 2 | A1B101079 | |
| 0020-22478 | SUSCEPTOR 8'' | 4 | A1B101080 | |
| 0020-22491 | PLATE COVER | 21 | A1B101081 | |
| 0020-22492 | CLAMP LOWER | 42 | A1B101082 | |
| 0020-22493 | CLAMP SHIELD COLLIMATOR UPPER 8'' | 9 | A1B101083 | |
| 0020-22497 | BLOCK WATER | 27 | A1B101084 | |
| 0020-22498 | SHIELD UPPER | 22 | A1B101085 | |
| 0020-22510 | PRECISION RING AI CLAMP (HOLZ) | 14 | A1B101086 | |
| 0020-22511 | RETAIN BUTTON1001 PEDESTAL | 282 | A1B101087 | |
| 0020-22512 | REST BUTTON PEDESTAL | 27 | A1B101088 | |
| 0020-22543 | BLOCKNUT BROOKS MFC | 2 | A1B101089 | |
| 0020-22548 | PLATE BLANKOFF | 1 | A1B101090 | |
| 0020-22549 | PLATE BLANKOFF MBN COUPLING | 7 | A1B101091 | |
| 0020-22553 | CLAMP SHIELD | 22 | A1B101092 | |
| 0020-22555 | UPPER SHIELD | 16 | A1B101093 | |
| 0020-22559 | BLOCK | 4 | A1B101094 | |
| 0020-22577 | BRACKET SYSTEM MANIFOLD INLET | 2 | A1B101095 | |
| 0020-22578 | COVER SYSTEM LEFT MANIFOLD | 1 | A1B101096 | |
| 0020-22579 | COVER CENTER MANIFOLD LEFT | 3 | A1B101097 | |
| 0020-22619 | PIVOT ARM RIGHT | 1 | A1B101098 | |
| 0020-22660 | CLAMP RING 8'' | 3 | A1B101099 | |
| 0020-22664 | SPACER SOURCE GUIDE PIN WIDE BODY CHBR | 1 | A1B101100 | |
| 0020-22695 | COLLIMATOR | 20 | A1B101101 | |
| 0020-22734 | COLLIMATOR | 1 | A1B101102 | |
| 0020-22735 | HUB | 4 | A1B101103 | |
| 0020-22740 | SHIELD | 1 | A1B101104 | |
| 0020-22768 | PLATE SPACER | 1 | A1B101105 | |
| 0020-22794 | SHIELD | 6 | A1B101106 | |
| 0020-22795 | SHIELD | 3 | A1B101107 | |
| 0020-22800 | SHIELD | 9 | A1B101108 | |
| 0020-22801 | COLLIMATOR | 14 | A1B101109 | |
| 0020-22805 | PLATE ADAPTER CLAMP WIDE BODY | 18 | A1B101110 | |
| 0020-22813 | WAFER TEST TI PASTE 8'' | 22 | A1B101111 | |
| 0020-22844 | PEDESTAL SHIELD 8'' PRECLEAN | 49 | A1B101112 | |
| 0020-22846 | COVERGAS TRENCH | 11 | A1B101113 | |
| 0020-22852 | SHIELD PRECLEAN 8'' | 23 | A1B101114 | |
| 0020-22862 | HUB SHUTTER DC BIAS | 8 | A1B101115 | |
| 0020-22863 | SCREW DC BIAS PIN | 18 | A1B101116 | |
| 0020-22898 | COVER DISC | 1 | A1B101117 | |
| 0020-22906 | PIN QUARTZ PRECLEAN PEDESTAL | 2719 | A1B101118 | |
| 0020-22907 | INSULATOR | 4 | A1B101119 | |
| 0020-22918 | BRACKET | 3 | A1B101120 | |
| 0020-22920 | SHIELD 6'' PRECLEAN II | 3 | A1B101121 | |
| 0020-22950 | ADAPTER | 9 | A1B101122 | |
| 0020-22988 | TARGET TI G-12 PVD (0190-21244) | 3 | A1B101123 | |
| 0020-22993 | PLATE COVER COHERENT 8'' CHAMBER 16 INCH | 40 | A1B101124 | |
| 0020-23031 | BRACKET | 1 | A1B101125 | |
| 0020-23032 | CAM RIGHT OUTBOARD | 1 | A1B101126 | |
| 0020-23036 | CAM LEFT OUTBOARD | 1 | A1B101127 | |
| 0020-23039 | BRACKET LEFT | 4 | A1B101128 | |
| 0020-23041 | SHIELD OUTER CLAMP | 5 | A1B101129 | |
| 0020-23042 | ADAPTOR RING | 7 | A1B101130 | |
| 0020-23043 | SHIELD UPPER T/TIN | 87 | A1B101131 | |
| 0020-23044 | SHIELD TIN LOWER | 11 | A1B101132 | |
| 0020-23045 | SHIELD LOWER T/TIN | 33 | A1B101133 | |
| 0020-23069 | SHIELD TIN LOWER 6'' WAFER | 4 | A1B101134 | |
| 0020-23070 | SHIELD UPPER 101% TIN 5+6 | 3 | A1B101135 | |
| 0020-23095 | BRACKET A.L.L. CASSETTE SENSOR 200MM | 1 | A1B101136 | |
| 0020-23101 | SCREW STOP A.L.L. CASSETTE | 4 | A1B101137 | |
| 0020-23138 | BRACKET | 7 | A1B101138 | |
| 0020-23165 | BRACKETCONNECTOR A.L.L. CASSETTE SENSOR | 3 | A1B101139 | |
| 0020-23174 | PLATE COVER | 5 | A1B101140 | |
| 0020-23181 | CLAMP RING | 15 | A1B101141 | |
| 0020-23191 | TRUNION RIGHT LLA LONG | 3 | A1B101142 | |
| 0020-23209 | LIFT, HOOP, 8" WIDE B | 1 | A1C100104 | |
| 0020-23220 | SHIELD 6 TI MTRL TIW PROCESS | 6 | A1B101143 | |
| 0020-23235 | INSERT COUNTERWEIGHT | 2 | A1B101144 | |
| 0020-23278 | SHIELD UPPERENDURA HOT-E-CHUCK AL | 32 | A1B101145 | |
| 0020-23354 | INSULATOR-TUBE QUARTZ | 2 | A1B101146 | |
| 0020-23355 | PC2 PEDESTAL | 1 | A1B101147 | |
| 0020-23367 | CONNECTOR | 1 | A1B101148 | |
| 0020-23396 | ENDURA HOT-E-CHUCK AL LOWER SHIELD | 22 | A1B101149 | |
| 0020-23402 | SHIELD 8'' WSI-13'' SOURCE | 1 | A1B101150 | |
| 0020-23405 | CLAMP RING | 13 | A1B101151 | |
| 0020-23438 | HEATER CHAMBER COVERPVD | 4 | A1B101152 | |
| 0020-23487 | BRACKETMOUNTING 2-PHASE DRIVER | 2 | A1B101153 | |
| 0020-23563 | BRACKET CRYO COMPRESSOR | 1 | A1B101154 | |
| 0020-23584 | SHIELD | 3 | A1B101155 | |
| 0020-23585 | SHIELDLOWER | 4 | A1B101156 | |
| 0020-23586 | SHIELD ADAPTER | 47 | A1B101157 | |
| 0020-23587 | PIN | 234 | A1B101158 | |
| 0020-2358U | SHIELD | 3 | A1B101159 | |
| 0020-23630 | CLAMP RING | 3 | A1B101160 | |
| 0020-23635 | LIFT HOOP 6 INCH | 1 | A1B101161 | |
| 0020-23640 | BLOCK FITTING LIFT MOUNT | 2 | A1B101162 | |
| 0020-23669 | SHIELD | 4 | A1B101163 | |
| 0020-23811 | COHERENT 8'' W/1.25:1 0.5'' HEX | 13 | A1B101164 | |
| 0020-23825 | CLAMP RING | 18 | A1B101165 | |
| 0020-23835 | CLAMP RING | 1 | A1B101166 | |
| 0020-23836 | PLATE ADAPTER CLAMP G-12 (PACK OF 2) | 42 | A1B101167 | |
| 0020-23850 | BRACKET STAUFF CLAMPS GASLINE MANIFOLD | 3 | A1B101168 | |
| 0020-23879 | SPECIAL WEIGHT | 3 | A1B101169 | |
| 0020-23880 | BRACKET | 4 | A1B101170 | |
| 0020-23881 | SHIELD | 57 | A1B101171 | |
| 0020-23917 | BRACKET CABLE COVER LIFT | 1 | A1B101172 | |
| 0020-23987 | MAGNET ENDURA LID | 1 | A1B101173 | |
| 0020-24011 | HOLDER FINGER | 4 | A1B101174 | |
| 0020-24018 | PIN ANTENNA PC 2 POLY | 6 | A1B101175 | |
| 0020-24056 | LOWER SHIELD | 7 | A1B101176 | |
| 0020-24057 | BRACKET VALVE WATER | 1 | A1B101177 | |
| 0020-24082 | SHIELD 8'' LOWER 101 G-12 | 24 | A1B101178 | |
| 0020-24100 | INSULATOR QUARTZ PCII | 34 | A1B101179 | |
| 0020-24100C | INSULATOR QTZ PC2 CLEAN | 1 | A1B101180 | |
| 0020-24101 | INSERT PEDESTAL PCII 8'' | 15 | A1B101181 | |
| 0020-24143 | BLOCK MTG THERMAL SWITCH | 1 | A1B101182 | |
| 0020-24144 | COVER THERMAL SWITCH DEAGS | 1 | A1B101183 | |
| 0020-24145 | BRACKET CONN MTG DEGAS CHAMBER | 1 | A1B101184 | |
| 0020-24171 | CLAMP RING 8'' SHORT AI/TI ETCH | 10 | A1B101185 | |
| 0020-24236 | CLIP ANTENNA SPRING | 24 | A1B101186 | |
| 0020-24243 | UPPER SHIELD | 66 | A1B101187 | |
| 0020-24244 | LOWER SHIELD | 96 | A1B101188 | |
| 0020-24256 | COLLIMATOR DISPOSABLE | 2 | A1B101189 | |
| 0020-24262 | DOOR LOCK(AMU) | 1 | A1B101190 | |
| 0020-24382 | SHIELD 6'' WAFER | 1 | A1B101191 | |
| 0020-24387 | 6'' PEDESTAL | 1 | A1B101192 | |
| 0020-24406 | RINGCLAMPAL/REFL | 2 | A1B101193 | |
| 0020-24418 | WAFER TEST T1 PASTE 6'' | 18 | A1B101194 | |
| 0020-24432 | INSULATOR QUARTZ 8 INCH | 3 | A1B101195 | |
| 0020-24453 | SHIELD | 2 | A1B101196 | |
| 0020-24530 | SHIELD UPPER G12 SST | 23 | A1B101197 | |
| 0020-24531 | ADAPTOR SHIELD G12 SST | 93 | A1B101198 | |
| 0020-24532 | SHIELD LOWER | 3 | A1B101199 | |
| 0020-24719 | COVER RING AL | 7 | A1B101200 | |
| 0020-24722 | SHADOW G3 TIN SEED RING | 19 | A1B101201 | |
| 0020-24732 | MIDCLAMP TOP PNEUMATIC GAS BOX CVDT | 2 | A1B101202 | |
| 0020-24735 | PEDESTAL | 2 | A1B101203 | |
| 0020-24736 | SHIELD RF | 6 | A1B101204 | |
| 0020-24737 | PLATE | 4 | A1B101205 | |
| 0020-24742 | QUARTZ INSULATOR (SER# PA-WCQ/445) | 2 | A1B101206 | |
| 0020-24744 | SHIELD | 3 | A1B101207 | |
| 0020-24746 | SHIELD LOWER AL | 40 | A1B101208 | |
| 0020-24804 | COVER RINGENDURA HOT-E-CHUCK AL | 16 | A1B101209 | |
| 0020-24826 | END PLATE BEAM SHORT -HOIST | 4 | A1B101210 | |
| 0020-24831 | ADAPTOR SOURCE | 1 | A1B101211 | |
| 0020-24866 | SHIELD LOWER 8'' | 11 | A1B101212 | |
| 0020-24896 | COVER RING | 3 | A1B101213 | |
| 0020-24913 | PEDESTAL 8'' | 26 | A1B101214 | |
| 0020-24914 | COVER 8'' RING | 87 | A1B101215 | |
| 0020-24962 | SHIELD LOW KNEE AL/TI PRCS SST 8'' WFR .4 | 11 | A1B101216 | |
| 0020-25059 | RING | 4 | A1B101217 | |
| 0020-25077 | SHIELD LOWER 8 | 1 | A1B101218 | |
| 0020-25110 | PA BRACKET | 1 | A1B101219 | |
| 0020-25256 | 8'' 101 SHUTTER DISC. TIN 101 | 20 | A1B101220 | |
| 0020-25313 | FLANGE UPPER BELLOWS N2 COH TIN | 1 | A1B101221 | |
| 0020-25396 | LOWER SHIELD | 1 | A1B101222 | |
| 0020-25454 | PLATE 8IN COHERENT 1.50:1 5/8 | 8 | A1B101223 | |
| 0020-25640 | LOWER SHIELD | 3 | A1B101224 | |
| 0020-25670 | SHIELD | 7 | A1B101225 | |
| 0020-25672 | CLAMP RING & LOWER SHIELD | 1 | A1B101226 | |
| 0020-25713 | CLAMP RING 6 INCH | 1 | A1B101227 | |
| 0020-25744 | RING | 2 | A1B101228 | |
| 0020-25800 | SHIELD UPPER | 2 | A1B101229 | |
| 0020-25874 | CLAMP RING & LOWER SHIELD | 2 | A1B101230 | |
| 0020-25897 | TUBE INSULATOR 3.60'' | 2 | A1B101231 | |
| 0020-25898 | BLOCK MOUNTING NUPRO SHUT-OFF VALVE | 4 | A1B101232 | |
| 0020-25917 | H_ISOLATOR DC BIAS SHUTTER | 17 | A1B101233 | |
| 0020-25920 | SHIELD LOWER 8'' B12 SST | 3 | A1B101234 | |
| 0020-25941 | SHIELD | 1 | A1B101235 | |
| 0020-26034 | CLAMP RING | 1 | A1B101236 | |
| 0020-26106 | CLAMP RING (TI) | 3 | A1B101237 | |
| 0020-26117 | CLAMP RING 5 INCH | 1 | A1B101238 | |
| 0020-26158 | CLAMP RING | 1 | A1B101239 | |
| 0020-26217 | COVER RING 6'' TI | 1 | A1B101240 | |
| 0020-26228 | PEDESTAL | 1 | A1B101241 | |
| 0020-26254 | INSULATOR CERAMIC DURASOURCE | 5 | A1B101242 | |
| 0020-26262 | CLAMP RING 6'' SMP AL | 4 | A1B101243 | |
| 0020-26288 | SHIELD LOWER | 1 | A1B101244 | |
| 0020-26289 | SHIELD LOWER 101 TTN | 22 | A1B101245 | |
| 0020-26310 | SHIELD LWR 6-IN CLAMPED | 22 | A1B101246 | |
| 0020-26312 | SHIELD UPPER 8 IN DURASOURCE | 36 | A1B101247 | |
| 0020-26319 | INSULATOR LIGHT LID | 2 | A1B101248 | |
| 0020-26396 | COVER RING | 19 | A1B101249 | |
| 0020-26403 | RING COVER 6'' HTESC ALUM | 3 | A1B101250 | |
| 0020-26436 | SHIELD | 1 | A1B101251 | |
| 0020-26439 | RING | 3 | A1B101252 | |
| 0020-26577 | TUBE INSULATOR 1.60'' | 3 | A1B101253 | |
| 0020-26578 | CLAMP RING SS | 1 | A1B101254 | |
| 0020-26583 | SHUTTER DISK 6 IN 101 PROCESS | 5 | A1B101255 | |
| 0020-26588 | SHIELD LOWER T/TIN | 53 | A1B101256 | |
| 0020-26589 | SHIELD 6 PCII @C & D | 4 | A1B101257 | |
| 0020-26601 | DISKSHUTTERSS | 17 | A1B101258 | |
| 0020-26820 | CLAMP RING 8'' AL | 6 | A1B101259 | |
| 0020-26822 | SHIELD LOWER KNEE (HOT-AL) | 2 | A1B101260 | |
| 0020-26851 | WAFER BLOCK | 8 | A1B101261 | |
| 0020-26853 | ADAPTER | 3 | A1B101262 | |
| 0020-26854 | ADAPTER | 3 | A1B101263 | |
| 0020-26863 | SHIELD MIDDLE | 7 | A1B101264 | |
| 0020-26864 | INNER SHIELD | 7 | A1B101265 | |
| 0020-26865 | UPPER SHIELD (SIDE FLOW) | 5 | A1B101266 | |
| 0020-26866 | UPPER SHIELD (DOWNFLOW) | 5 | A1B101267 | |
| 0020-26899 | HALF PLATE | 1 | A1B101268 | |
| 0020-26906 | SHIELD 6'' LOW KNEE | 4 | A1B101269 | |
| 0020-26926 | N2 BLANKOFF | 8 | A1B101270 | |
| 0020-26967 | PC II GAS TRENCH COVER | 12 | A1B101271 | |
| 0020-26980 | CLAMP AI-SI-CU | 11 | A1B101272 | |
| 0020-26981 | CLAMP RING | 4 | A1B101273 | |
| 0020-27094 | SHIELD LOWER 6'' | 5 | A1B101274 | |
| 0020-27123 | PEDESTAL PLATE | 32 | A1B101275 | |
| 0020-27124 | PEDESTAL PCII 6'' JMF/SMF @ C& | 1 | A1B101276 | |
| 0020-27160 | SHIELD BOWL | 1 | A1B101277 | |
| 0020-27163 | CLAMP PADDED 6''MOSI | 2 | A1B101278 | |
| 0020-27191 | CLAMP RING | 36 | A1B101279 | |
| 0020-27205 | CLAMP RING (WSI) | 9 | A1B101280 | |
| 0020-27309 | COVER RING 8'' TI 101% | 1 | A1B101281 | |
| 0020-27365 | BARATRON SHIPPING FIXTURE | 1 | A1B101282 | |
| 0020-27455 | DISK 8'' ADVANCED 101 SHUTTER | 1 | A1B101283 | |
| 0020-27457 | BUCKET SHIELD (SST) ARC SPRAY | 5 | A1B101284 | |
| 0020-27644 | LOWER SHIELD | 8 | A1B101285 | |
| 0020-27737 | PLATE | 21 | A1B101286 | |
| 0020-27741 | RINGCLAMPPADDED | 14 | A1B101287 | |
| 0020-27812 | PIN SOURCE FRAME ALIGNMENT | 3 | A1B101288 | |
| 0020-27827 | METAL RING | 6 | A1B101289 | |
| 0020-27842 | PEDESTAL 8'' PINLESS | 61 | A1B101290 | |
| 0020-27863 | SHIELD LOWER | 18 | A1B101291 | |
| 0020-27865 | PEDESTAL | 4 | A1B101292 | |
| 0020-27871 | SCREW SHOLDER | 2 | A1B101293 | |
| 0020-27885 | SHIMMAGNET ASSY.50MMSST | 2 | A1B101294 | |
| 0020-27889 | SHIMMAGNET ASSY | 2 | A1B101295 | |
| 0020-27913 | LOWER SHIELD | 3 | A1B101296 | |
| 0020-27914 | SHIELDLOWER | 3 | A1B101297 | |
| 0020-27942 | BRACKET CABLE VHP COVER LIFT | 7 | A1B101298 | |
| 0020-27944 | CLAMP RING PADDED 6 INCH | 1 | A1B101299 | |
| 0020-28029 | SHIELD UPPER | 1 | A1B101300 | |
| 0020-28043 | SHIELD LOW KNEE AL CLAMPED (TI) | 4 | A1B101301 | |
| 0020-28106 | PEDESTAL | 3 | A1B101302 | |
| 0020-28110 | CLAMP RING SMF 1.8MM NON-MILLED | 45 | A1B101303 | |
| 0020-28189 | CLAMP RING 6 INCH | 1 | A1B101304 | |
| 0020-28365 | SHIELD UPPER 8 TIN AL ARC SPRAY | 1 | A1B101305 | |
| 0020-28367 | SHIELD 6-IN HTHU AL/TI | 3 | A1B101306 | |
| 0020-28368 | SHIELD LOWER 8'' | 3 | A1B101307 | |
| 0020-28435 | SUPPORT CASSETTE | 7 | A1B101308 | |
| 0020-28445 | METAL RING | 15 | A1B101309 | |
| 0020-28446 | METAL RING | 12 | A1B101310 | |
| 0020-28449 | SHIELDLOWER 8'' G-12 CLAMP FLAME SP | 2 | A1B101311 | |
| 0020-28622 | ROBOT BLADE 8 HTHU TRANSFER | 3 | A1B101312 | |
| 0020-28626 | PEDESTAL 6-IN SMRMF PC88@A TI | 6 | A1B101313 | |
| 0020-28714 | RING RESTRAINT HTESC 8'' 9MM | 1 | A1B101314 | |
| 0020-28715 | PIN RESTRAINT HTESC | 1 | A1B101315 | |
| 0020-28743 | BLOCKWATER IMP | 4 | A1B101316 | |
| 0020-28744 | PLATE COVER | 4 | A1B101317 | |
| 0020-28754 | COVER 8'' PEDESTAL | 1 | A1B101318 | |
| 0020-28772 | SHIELDDARKSPACEIMP | 1 | A1B101319 | |
| 0020-28773 | RINGCLAMPSHIELDINTERNAL | 10 | A1B101320 | |
| 0020-28800 | DISKSHUTTERIMP2C | 3 | A1B101321 | |
| 0020-28889 | BLANK-OFF ADAPTER GASLINE | 5 | A1B101322 | |
| 0020-28907 | ISOLATORCERAMIC | 4 | A1B101323 | |
| 0020-28989 | 101 G3 LOWER SHUTTER SHIELD | 12 | A1B101324 | |
| 0020-29034 | BRACKET SENSOR FLAG MOTOR LIFT EXT | 1 | A1B101325 | |
| 0020-29035 | FLAG LOWER MOTOR LIFT EXT | 2 | A1B101326 | |
| 0020-29036 | FLAG UPPER MOTOR LIFT EXT | 1 | A1B101327 | |
| 0020-29072 | CERAMIC PLATE COVER | 1 | A1B101328 | |
| 0020-29143 | CAPIMPCOILSUPPORT | 190 | A1B101329 | |
| 0020-29206 | BUSHING RIGID COIL SUPPORT | 158 | A1B101330 | |
| 0020-29214 | TI COIL | 13 | A1B101331 | |
| 0020-29240 | CLAMP RING 8 SNNF SST E/E 3.404 6 PAD | 1 | A1B101332 | |
| 0020-29306 | CAPIMPRFFDTHRU | 3 | A1B101333 | |
| 0020-29310 | TI PIN | 116 | A1B101334 | |
| 0020-29319 | NUT RF FEEDTHRU VECTRA IMP | 4 | A1B101335 | |
| 0020-29320 | SHIELD DARK SPACE VECTRA IMP | 1 | A1B101336 | |
| 0020-29335 | BUTTONRESTADV101IMP | 3 | A1B101337 | |
| 0020-29342 | NUT RF FEEDTHRU IMP | 9 | A1B101338 | |
| 0020-29343 | SHIELDIMPDRKSPC | 55 | A1B101339 | |
| 0020-29346 | SHIELD 8'' AL CLMPD | 3 | A1B101340 | |
| 0020-29409 | STRAP CONNECTOR FLEX (PACK OF 10) | 9 | A1B101341 | |
| 0020-29456 | SHIELD | 1 | A1B101342 | |
| 0020-29457 | TRANSFER SIDE CLAMP RING | 2 | A1B101343 | |
| 0020-29496 | REST BUTTON ADV. 101 CHROME | 15 | A1B101344 | |
| 0020-29640 | BUTTONRESTADV.1013.4 MMFULL-COV | 5 | A1B101345 | |
| 0020-29719 | PEDESTALZDPCH34 | 11 | A1B101346 | |
| 0020-29743 | SHIELD LOWER 5'' | 1 | A1B101347 | |
| 0020-29862 | TARGETAL5N5300MM | 6 | A1B101348 | |
| 0020-29957 | DEFLECTOR WATER GENRACK | 1 | A1B101349 | |
| 0020-29975 | CONNECTORRFBARIMP | 23 | A1B101350 | |
| 0020-30000 | CLAMP PORC ADJ WB | 11 | A1B101351 | |
| 0020-30008 | CLAMPSHIELD 8''ALM | 1 | A1B101352 | |
| 0020-30028 | SCREW GAS RING C&D | 55 | A1B101353 | |
| 0020-30033 | PIN ADV CLAMP BWCVD | 12 | A1B101354 | |
| 0020-30072 | RING VESPEL 200MM | 19 | A1B101355 | |
| 0020-30082 | BODY THROTTLE VALV | 5 | A1B101356 | |
| 0020-30083 | VALVE THROTTLE OX NIT | 2 | A1B101357 | |
| 0020-30084 | COVER FRONT THROTTLE VALVE | 1 | A1B101358 | |
| 0020-30110 | CVD LAMP COLLAR | 2 | A1B101359 | |
| 0020-30170 | PEDESTAL | 8 | A1B101360 | |
| 0020-30177 | PLATE GAS DIS | 2 | A1B101361 | |
| 0020-30179 | CLAMP RING EXT POLY 4.4 | 45 | A1B101362 | |
| 0020-30196 | STRIP CONTACT | 4 | A1B101363 | |
| 0020-30200 | STRAPS EXT. CATHODE GND | 123 | A1B101364 | |
| 0020-30203 | PEDESTAL 200MM NOTCH PHASE 1 | 10 | A1B101365 | |
| 0020-30223 | PLATE GAS DISTRUBUTION | 9 | A1B101366 | |
| 0020-30226 | BRACKET SWITCH | 14 | A1B101367 | |
| 0020-30228 | SCREEN PLASMA | 4 | A1B101368 | |
| 0020-30284 | SLEEVE CONICAL | 4 | A1B101369 | |
| 0020-30286 | SHOWER HEAD 200MMNI | 8 | A1B101370 | |
| 0020-30287 | PUMPING PLATEPEOX | 19 | A1B101371 | |
| 0020-30290 | MANIFOLD GAS | 1 | A1B101372 | |
| 0020-30317 | RING | 11 | A1B101373 | |
| 0020-30329 | SCREW ALUMINUM MACHINE HEX | 9 | A1B101374 | |
| 0020-30338 | SEALTHROTTLE VLV SACVD | 2 | A1B101375 | |
| 0020-30357 | PLUG DIST. PLT METAL ETCH | 4 | A1B101376 | |
| 0020-30369 | PLATE BLOCKER | 3 | A1B101377 | |
| 0020-30370 | Cover ALUM #4 SCR HD Protector PRSP | 6 | A1B101378 | |
| 0020-30382 | CAP NUT TOP MOUNT SUSCEPT | 9 | A1B101379 | |
| 0020-30396 | NUTMOUNTING BOSS TOP MOUNT SUSC | 14 | A1B101380 | |
| 0020-30401 | SUSCEPTOR SUPPORT ARM(SAME:S3M | 1 | A1B101381 | |
| 0020-30405 | PERF PLATE 125MM | 7 | A1B101382 | |
| 0020-30406 | FACEPLATE BWCVD | 2 | A1B101383 | |
| 0020-30407 | PLATE PERFERATED REPLACES 0020-10595 | 17 | A1B101384 | |
| 0020-30418 | RING TOP 8'' EXT CATH DC POLY | 59 | A1B101385 | |
| 0020-30420 | COVER PEDESTAL 8'' | 51 | A1B101386 | |
| 0020-30422 | INSERT INNER PEDESTAL | 126 | A1B101387 | |
| 0020-30425 | INSERT AL OUTER PEDEATAL | 165 | A1B101388 | |
| 0020-30426 | INSERT AL INNER PEDESTAL | 73 | A1B101389 | |
| 0020-30427 | RING CLAMP 8'' EXT CATH | 6 | A1B101390 | |
| 0020-30477 | 200 MM LEVELING BAR | 2 | A1B101391 | |
| 0020-30480 | FILM THERMAL CATHODE OX | 31 | A1B101392 | |
| 0020-30481 | SPIDER ASSY | 1 | A1B101393 | |
| 0020-30482 | COUPLING FLEX | 67 | A1B101394 | |
| 0020-30482 | COUPLING FLEX 8" OXIDE | 3 | B1C100105 | |
| 0020-30486 | SENSOR CAP MODIFIED | 2 | A1B101395 | |
| 0020-30510 | PLATE CONNRS CVD (USED ON TUNGSTEN 5200) | 1 | A1B101396 | |
| 0020-30533 | SCREWSUSCEPTOR AND WAFER LIF (PACK OF 10) | 71 | A1B101397 | |
| 0020-30552 | FINGER | 34 | A1B101398 | |
| 0020-30556 | ELBOW GAS SUPPLY SS METAL ETCH | 4 | A1B101399 | |
| 0020-30562 | 200MM WAFER TOOL CENTERING | 2 | A1B101400 | |
| 0020-30570 | PLATE GAS DISTRIBUTION PLATE 150MM | 2 | A1B101401 | |
| 0020-30585 | INSERT NI POLY/WSI 200MM | 38 | A1B101402 | |
| 0020-30587 | RING EMI SHLD | 1 | A1B101403 | |
| 0020-30595 | PEDESTAL 200MM | 77 | A1B101404 | |
| 0020-30607 | SPIDER ASSY | 2 | A1B101405 | |
| 0020-30608 | PEDESTAL ETCH | 1 | A1B101406 | |
| 0020-30625 | DIST HSG GAS | 1 | A1B101407 | |
| 0020-30628 | RING CLAMP VESPEL POLY | 25 | A1B101408 | |
| 0020-30629 | PEDESTAL | 35 | A1B101409 | |
| 0020-30652 | RING | 4 | A1B101410 | |
| 0020-30700 A | INSERT POLYSULFONE, 125MM OX/MLR/NIT | 5 | B1C100122 | |
| 0020-30700A | INSERT POLY SULFONE 125 MM OX/MIR/NIT | 7 | B1C100147 | |
| 0020-30701A | INSERT POLY SULFONE 150 MM BX/MIR/NIT | 6 | B1C100148 | |
| 0020-30710 | RING CLAMP VESPEL | 11 | A1B101411 | |
| 0020-30725 | BRACKET | 2 | A1B101412 | |
| 0020-30733 | PLATE DISTRIBUTION 20MM | 3 | A1B101413 | |
| 0020-30812 | COVER OX/MLR/NIT PEDESTA | 12 | A1B101414 | |
| 0020-30813 | INSERT OX/MLR/NIT PEDESTAL | 86 | A1B101415 | |
| 0020-30816 | PLATE GAS DIS AL ANODIZE | 1 | A1B101416 | |
| 0020-30822 | FINGER | 1 | A1B101417 | |
| 0020-30855 | PLUG GDP VESPEL C&D | 231 | A1B101418 | |
| 0020-30865 | BRACKET | 1 | A1B101419 | |
| 0020-30886 | WASHER RETAINER #10 INCONEL X-750 NI PLA | 4 | A1B101420 | |
| 0020-30887 | WASHER 3/16'' (#10) SPRING INCONEL X-750 | 4 | A1B101421 | |
| 0020-30890 | CLAMP ADUSTATBLE | 18 | A1B101422 | |
| 0020-30914 | SCREW FLATHEAD 4- (PACK OF 10) | 7 | A1B101423 | |
| 0020-30959 | PLATE BLOCKER .135 METALICA UNIVERSAL C | 2 | A1B101424 | |
| 0020-30990 | HOUSING FEEDTHRUPRSFP | 1 | A1B101425 | |
| 0020-30991 | COVER TOP FEEDTHRU PRSP | 1 | A1B101426 | |
| 0020-31001 | RING | 1 | A1B101427 | |
| 0020-31003 | CLAMP RING | 2 | A1B101428 | |
| 0020-31015 | WASHER | 1 | A1B101429 | |
| 0020-31016 | HOUSING TUBE QTZ | 1 | A1B101430 | |
| 0020-31019 | PERF PLATE | 25 | A1B101431 | |
| 0020-31020 | PLATE BLOCKER 200MM WCVD | 7 | A1B101432 | |
| 0020-31035 | MANIFOLD INPUT BWCVD | 1 | A1B101433 | |
| 0020-31132 | SCREW | 2 | A1B101434 | |
| 0020-31138 | GAS PASSAGE PLATE | 2 | A1B101435 | |
| 0020-31139 | PLUGDC BIAS | 30 | A1B101436 | |
| 0020-31147 | BASE INSERT ALUMINIUM | 19 | A1B101437 | |
| 0020-31147 | BASE INSERT, ALUM, 150/200MM FLAT | 4 | B1C100170 | |
| 0020-31162 | SCREW MACH. ALUMINUM PAN FL | 1 | A1B101438 | |
| 0020-31163 | RINGFOCUSAL200MMPRSP3 | 18 | A1B101439 | |
| 0020-31177 | SCREW 8/32 X 1/4 (PACK OF 10) | 2 | A1B101440 | |
| 0020-31229 | MFC INSULATION H20 VDSII | 1 | A1B101441 | |
| 0020-31282 | HINGE CVD CHAMBER | 3 | A1B101442 | |
| 0020-31283 | HINGE | 2 | A1B101443 | |
| 0020-31296 | SCREW MACHINE ALUMINUM HEX | 1 | A1B101444 | |
| 0020-31333 | BRACKET I/0 INTERCONNECT | 1 | A1B101445 | |
| 0020-31389 | CYLINDER FLOW THRU 8'' | 10 | A1B101446 | |
| 0020-31395 | PLUG DC | 74 | A1B101447 | |
| 0020-31397 | SCREW VESPEL | 4 | A1B101448 | |
| 0020-31415 | SCREW PLENUM (PACK OF 10) | 4 | A1B101449 | |
| 0020-31416 | PLENUM SCREWALUMINUMFH (PACK OF 10) | 3 | A1B101450 | |
| 0020-31423 | CLAMP SWITCH ETCH UNIB | 2 | A1B101451 | |
| 0020-31437 | WASHERER #6 SLOTTED CONICAL INC X LIFT H | 19 | A1B101452 | |
| 0020-31463 | CARRIER COMPLAINT EXT CATHODE | 27 | A1B101453 | |
| 0020-31467 | SCREW | 10 | A1B101454 | |
| 0020-31470 | INSERT NI MEDIUM 150MM POLY EXT CATH | 1 | A1B101455 | |
| 0020-31472 | AL INNER SHUNT | 3 | A1B101456 | |
| 0020-31488 | GAS DISTRIBUTON PLATE | 1 | A1B101457 | |
| 0020-31488 | GDP, 13 HOLES | 4 | B1C100160 | |
| 0020-31488D | GAS DISTRIBUTION PLATE, 13 HOLES | 6 | B1C100131 | |
| 0020-31492 | GAS DIST. PLATE 101 HOLES | 72 | A1B101458 | |
| 0020-31492-001 | GDP PLATE 101 Hole | 3 | B1C100132 | |
| 0020-31493 | GAS DISTRIBUTION PLATE | 2 | A1B101459 | |
| 0020-31501 | FINGERCHUCK 200MASP | 16 | A1B101460 | |
| 0020-31509 | PEDESTALRIMLESSOX/MLR/ | 11 | A1B101461 | |
| 0020-31513 | SUPPT REV1 CERAMIC HOOP | 7 | A1B101462 | |
| 0020-31514 | THREAD INSERT CERAMIC WAFER HOOP RING | 36 | A1B101463 | |
| 0020-31516 | SCREW HOOP SUPPORT/HOOP | 6 | A1B101464 | |
| 0020-31517 | KLC | 5 | A1B101465 | |
| 0020-31521 | PERF PLATE | 1 | A1B101466 | |
| 0020-31548 | G.D.P | 2 | A1B101467 | |
| 0020-31548M | G.D.P(133H:HICONEL) | 3 | A1B101468 | |
| 0020-31552 | TOOL CALIBRATION DISK FLAT | 3 | A1B101469 | |
| 0020-31556 | BEZEL FILLER DC | 2 | A1B101470 | |
| 0020-31558 | CLAMP VESP OX MODIF DESIGN | 2 | A1B101471 | |
| 0020-31564 | RODCATHODEESC | 8 | A1B101472 | |
| 0020-31570 | PIN LIFT | 50 | A1B101473 | |
| 0020-31570 REV. A | LIFT PIN, ANODIZED | 11 | B1C100106 | |
| 0020-31596 | BRACKET | 2 | A1B101474 | |
| 0020-31597 | HANDLE | 3 | A1B101475 | |
| 0020-31621 | RING CLAMPING VESPEL 8'' | 25 | A1B101476 | |
| 0020-31628 | WASHER INSULATING TUNGSTEN | 32 | A1B101477 | |
| 0020-31629 | TOP INSULATING | 59 | A1B101478 | |
| 0020-31630 | BOTTOM INSULATING | 6 | A1B101479 | |
| 0020-31632 | CARRIERESC | 14 | A1B101480 | |
| 0020-31633 | LIFT PIN CONDUCTIVE | 63 | A1B101481 | |
| 0020-31634 | ADAPTOR DELRIN | 19 | A1B101482 | |
| 0020-31637 | COVER INSERT 200MM ESC | 6 | A1B101483 | |
| 0020-31638 | COVER 200MM ESC | 71 | A1B101484 | |
| 0020-31639 | INSERT INNER NI 200MM ESC | 10 | A1B101485 | |
| 0020-31640 | INSERT OUTER NI 200MM | 25 | A1B101486 | |
| 0020-31642 | AMP-406 | 66 | A1B101487 | |
| 0020-31643 | GAS DISTRIBUTION PLATE | 57 | A1B101488 | |
| 0020-31651 | CENTERING PIN | 6 | A1B101489 | |
| 0020-31655 | OXIDE PEDESTAL | 3 | A1B101490 | |
| 0020-31658 | RING | 30 | A1B101491 | |
| 0020-31659 | COVER VESPEL (PACK OF 10) | 19 | A1B101492 | |
| 0020-31664 | MANIFOLD BOTTOM PURGE | 8 | A1B101493 | |
| 0020-31666 | WASHERSINSERT LIFT | 194 | A1B101494 | |
| 0020-31667 | SCREWS (PACK OF 10) | 1 | A1B101495 | |
| 0020-31668 | SCREW SHOULDER 4/48 UNF (PACK OF 10) | 14 | A1B101496 | |
| 0020-31678 | BRACKET | 2 | A1B101497 | |
| 0020-31692 | FT ELBOW GAS SUPPLY UNIBODY | 20 | A1B101498 | |
| 0020-31700 | SHAFT | 18 | A1B101499 | |
| 0020-31723 | PEDESTAL 200MM POLY | 4 | A1B101500 | |
| 0020-31737 | INSULATING FLANGE | 29 | A1B101501 | |
| 0020-31739 | CARRIERLIFT | 4 | A1B101502 | |
| 0020-31747 | PLATE HANDLE BASE | 8 | A1B101503 | |
| 0020-31764 | PLATE FRONT HRTV | 1 | A1B101504 | |
| 0020-31765 | STANDOFF VESPEL | 16 | A1B101505 | |
| 0020-31767 | CYLINDER CLAMPING 200MM POLY/W SI | 42 | A1B101506 | |
| 0020-31804 | GAS PLATE DIST PLATE | 1 | A1B101507 | |
| 0020-31810 | WASHERS (PACK OF 10) | 1 | A1B101508 | |
| 0020-31812 | SCREWSHOULDER INCONEL WL (PACK OF 10) | 1 | A1B101509 | |
| 0020-31822 | FILTER RECESSED ENDPOINT | 94 | A1B101510 | |
| 0020-31823 | BRACKET ENDPOINT | 2 | A1B101511 | |
| 0020-31831 | TOP COVER ETCH CHAMBER | 1 | A1B101512 | |
| 0020-31833 | HINGE BRACKETTOP METAL ETCH | 2 | A1B101513 | |
| 0020-31838 | ADAPTORDELRIN | 2 | A1B101514 | |
| 0020-31903 | PLATE RF MATCH | 1 | A1B101515 | |
| 0020-31906 | MICRO SWITCH HOLDER | 2 | A1B101516 | |
| 0020-31909 | CLAMP SHIELD GATE VALVE BOTTOM | 2 | A1B101517 | |
| 0020-31919 | PLUG DC ESC RECESSED NI | 5 | A1B101518 | |
| 0020-32013 | LID CHAMBER UNIVERSAL | 3 | A1B101519 | |
| 0020-32036 | PLATE BLOCKER | 1 | A1B101520 | |
| 0020-32047 | POST LOWER 2PC EXT PEDESTAL | 71 | A1B101521 | |
| 0020-32049 | VESPEL CAP | 273 | A1B101522 | |
| 0020-32063 | SPACER MFC | 2 | A1B101523 | |
| 0020-32117 | HOUSINGINNER THROTTLE VALVE | 1 | A1B101524 | |
| 0020-32122 | CAP POLYTETRAFLURO ETHYENE (TEFLON) | 5 | A1B101525 | |
| 0020-32126 | PLATE SX100 BLOCKER | 20 | A1B101526 | |
| 0020-32130 | SPACER NI5 SHUNT 200MM ESC | 5 | A1B101527 | |
| 0020-32132 | INSERT OUTER NI5 200MM ESC | 1 | A1B101528 | |
| 0020-32141 | FEEDTHRU HELIUM 2 PASS | 1 | A1B101529 | |
| 0020-32148 | SHOWERHEADFACEPLATE | 25 | A1B101530 | |
| 0020-32165 | COVERPROTECTION1 | 15 | A1B101531 | |
| 0020-32166 | COVER PROTECTION200MMESC | 23 | A1B101532 | |
| 0020-32167 | SPIDER | 6 | A1B101533 | |
| 0020-32222 | TERMINAL BLOCK | 20 | A1B101534 | |
| 0020-32237 | COVER VESPEL 200MM HIGH PROFILE NOCH E | 23 | A1B101535 | |
| 0020-32259 | GAS DIS PLATE | 3 | A1B101536 | |
| 0020-32263 | GAS DIST. PLATE145 HOLES156 THICK | 5 | A1B101537 | |
| 0020-32319 | GAS DIST. PLATE | 10 | A1B101538 | |
| 0020-32320 | GAS DISTRIBUTION PLATE ANODIZED | 8 | A1B101539 | |
| 0020-32422 | INSERT INNER NICKEL | 10 | A1B101540 | |
| 0020-32431 | SCREW CONNECTOR RF | 2 | A1B101541 | |
| 0020-32835 | SPACER LOADLOCK COVER | 6 | A1B101542 | |
| 0020-32836 | HINGEREMOVABLERTSLIT VLVE | 5 | A1B101543 | |
| 0020-32837 | HINGELEFT | 3 | A1B101544 | |
| 0020-32930 | PLATE ARM ROTATION | 4 | A1B101545 | |
| 0020-32962 | INSERT OUTER NICKEL H | 10 | A1B101546 | |
| 0020-32963 | COVER BACK HV CENTER | 6 | A1B101547 | |
| 0020-32982 | PEDESTAL, FULL ROUND NI, OX/M | 1 | A1C100105 | |
| 0020-32988 | CLAMP | 5 | A1B101548 | |
| 0020-33100 | PLVG MANOMETER | 21 | A1B101549 | |
| 0020-33165 | RING | 2 | A1B101550 | |
| 0020-33166 | SHIM BASE CATHODE | 36 | A1B101551 | |
| 0020-33328 | CLAMPFLANGE | 3 | A1B101552 | |
| 0020-33329 | DXZ BLOCK CLAMP | 3 | A1B101553 | |
| 0020-33330 | CLAMPISOLATOR | 4 | A1B101554 | |
| 0020-33343 | CLAMP SCREW CUP | 10 | A1B101555 | |
| 0020-33357 | STUDLEVELING(REV-A) | 18 | A1B101556 | |
| 0020-33406 | UV FILTER(PUMPING PLATE) | 3 | A1B101557 | |
| 0020-33538 | SHOWERHEAD PERFORATED PLATE | 2 | A1B101558 | |
| 0020-33665 | SCREW CAP SUSCEPTOR | 1 | A1B101559 | |
| 0020-33669 | GAS DISTRIBUTION PLATE | 17 | A1B101560 | |
| 0020-33671 | CLAMP VESPEL SEE THRU UNI-LID | 42 | A1B101561 | |
| 0020-33761 | PIN | 1 | A1B101562 | |
| 0020-33803 | PADFOOTUPPER CHAMBER | 5 | A1B101563 | |
| 0020-33804 | ADAPTER GAS FEED DPS MEC | 6 | A1B101564 | |
| 0020-33805 | COVER FEEDDPS MEC | 30 | A1B101565 | |
| 0020-33808 | ADAPTORGAS FEED ASSYA3 DPS | 11 | A1B101566 | |
| 0020-33810 | COVERGAS FEED ASSY(CAT) | 5 | A1B101567 | |
| 0020-33815 | PLATE | 1 | A1B101568 | |
| 0020-33936 | HOUSING TC AMP & INTERLOCK | 2 | A1B101569 | |
| 002-03398-F | QUARTZ PIPE, LOW, CATHODE | 2 | B1C100133 | |
| 002-03398-F | INSULATING PIPE, QUARTZ | 3 | B1C100149 | |
| 0020-33993 | RDT 1098 | 5 | A1B101570 | |
| 0020-34017 | PLATE | 3 | A1B101571 | |
| 0020-34021 | BRACKET | 1 | A1B101572 | |
| 0020-34031 | SUPPORT PEDESTAL SHORTENED SIMPLE CATHODE | 2 | A1B101573 | |
| 0020-34034 | CYLINDER LIFT ETCH CHAMBER | 4 | A1B101574 | |
| 0020-34038 | PIN-CONTACT RETAINING SPRING | 2 | A1B101575 | |
| 0020-34042 | SPACER | 2 | A1B101576 | |
| 0020-34047 | COVER TURBO SIDE | 3 | A1B101577 | |
| 0020-34093 | PLATE | 1 | A1B101578 | |
| 0020-34110 | CLAMPINDICATOR (PACK OF 5) | 12 | A1B101579 | |
| 0020-34112 | PLATE REFERENCE INTICATOR | 5 | A1B101580 | |
| 0020-34130 | PINTUBE LIFT | 8 | A1B101581 | |
| 0020-34263 | BRACKET | 1 | A1B101582 | |
| 0020-34265 | BRACKET | 2 | A1B101583 | |
| 0020-34290 | CLIP | 1 | A1B101584 | |
| 0020-34311 | HEAT SINK LINER | 1 | A1B101585 | |
| 0020-34315 | LINER CATHODE RPS | 1 | A1B101586 | |
| 0020-34316 | SHEETINTERFACESOFT AL 11 | 85 | A1B101587 | |
| 0020-34444 | FACEPLATE DxZ | 1 | A1B101588 | |
| 0020-34446 | BASE | 1 | A1B101589 | |
| 0020-34464 | SCREW SHOULDER P-CHUCK | 12 | A1B101590 | |
| 0020-34466 | WASHER P-CHUCK | 12 | A1B101591 | |
| 0020-34508 | COVER TERMINAL | 1 | A1B101592 | |
| 0020-34616 | STOPACME NUT DXZ | 1 | A1B101593 | |
| 0020-34694 | LINER GDP R2 OXIDE GECO | 3 | A1B101594 | |
| 0020-34710 | PLATE FACE SIN | 3 | A1B101595 | |
| 0020-34722 | PLATE ADAPTER | 1 | A1B101596 | |
| 0020-34828 | FLAG SENSOR | 18 | A1B101597 | |
| 0020-34873 | GAS DIST. PLATE | 1 | A1B101598 | |
| 0020-34896 | FILLER SLIT VALVE RPS | 4 | A1B101599 | |
| 0020-34897 | CHAMBER-RPS | 3 | A1B101600 | |
| 0020-34985 | PULLEY TIMING BELT | 6 | A1B101601 | |
| 0020-34986 | COVER BELT MOTOR DRIVE THROTTLE | 2 | A1B101602 | |
| 0020-35475 | CAPTON PADS(FOR BLADE ATTACHMENT) | 8 | A1B101603 | |
| 0020-35626 | GASKET, DOME NECK | 7 | B1C100177 | |
| 0020-35712 | O-RING | 1 | A1B101604 | |
| 0020-35857 | O-RING | 1 | A1B101605 | |
| 0020-36093 | BUSS BAR LOWER RIGHT CONTRACTOR | 1 | A1B101606 | |
| 0020-36094 | BUSS BAR LOWER CENTER CONTACTOR | 1 | A1B101607 | |
| 0020-36105 | INSERT CHB 2'' RING | 1 | A1B101608 | |
| 0020-36392 | SUSCEPTOR SGL 200 MM | 9 | A1B101609 | |
| 0020-36396 | COVER RING | 2 | A1B101610 | |
| 0020-36760 | FLAGROTATION | 3 | A1B101611 | |
| 0020-37160 | CLAMP EXHAUST 2 IN | 3 | A1B101612 | |
| 0020-37430 | BAFFLEINJECTTEFLON HORIZONTAL SPLIT | 2 | A1B101613 | |
| 0020-37581 | BLOCK (PT-P1-4700) | 1 | A1B101614 | |
| 0020-37773 | BRACKETGAS FEED R2 CHAMBER UNIVERSAL | 1 | A1B101615 | |
| 0020-37953 | GAS PANEL | 1 | A1B101616 | |
| 0020-38058 | CYLINDERLIFTER | 15 | A1B101617 | |
| 0020-38061 | INSULATOR | 4 | A1B101618 | |
| 0020-38066 | BRACKET | 3 | A1B101619 | |
| 0020-38086 | CONTACT BASE | 6 | A1B101620 | |
| 0020-38087 | ESC AL FOIL(GASKET) | 203 | A1B101621 | |
| 0020-38104 | CLAMP LAMP HOUSING ATM CHAMBER | 1 | A1B101622 | |
| 0020-38753 | LIFT PINS(CONDUCTIVE) | 19 | A1B101623 | |
| 0020-38786 | CARRIER 5200 MXP ESC OXIDE | 96 | A1B101624 | |
| 0020-38851 | FILTER UV DPS POLY | 2 | A1B101625 | |
| 0020-38889 | COVER FIXTURE R2 SIMP CATHODE | 6 | A1B101626 | |
| 0020-38890 | COVER CATHODE DPS CHAMBER | 4 | A1B101627 | |
| 0020-38923 | PLUGENDPOINTDPS | 6 | A1B101628 | |
| 0020-38967 | CARRIER MXP POLY ESC | 2 | A1B101629 | |
| 0020-39045 | BRACKET | 6 | A1B101630 | |
| 0020-39046 | VIEWPORT FILTER INFRA-RED ADAPTER | 1 | A1B101631 | |
| 0020-39278 | OUTRIGGER FRONT PANEL RTP | 4 | A1B101632 | |
| 0020-39319 | BRACKET | 2 | A1B101633 | |
| 0020-39488 | HINGELEFT LID PUMPING PLATE DXZ | 1 | A1B101634 | |
| 0020-39695 | RING | 1 | A1B101635 | |
| 0020-39742 | BRACKETFIBEROPTICCABLE LOCK | 2 | A1B101636 | |
| 0020-39746 | PLATEBASEH.O.T.PACK5200 | 4 | A1B101637 | |
| 0020-39761 | GAS PANEL VALVE | 1 | A1B101638 | |
| 0020-40137 | LOCK SHIPPING DOOR 11C | 13 | A1B101639 | |
| 0020-40156 | ULTIMA+ LIFT PIIN CERAMIC | 8 | A1B101640 | |
| 0020-40164 | PLUGHOLE | 2 | A1B101641 | |
| 0020-40190 | FILTERUVTURBO PORT LINER | 8 | A1B101642 | |
| 0020-40376 | SHAFT BUTTERFLY 200MM THROTTLE VALVE | 2 | A1B101643 | |
| 0020-40544 | SPIDER | 1 | A1B101644 | |
| 0020-40550 | BRACKET CLAMP | 4 | A1B101645 | |
| 0020-40564 | BLANK OFF POS. E&F | 3 | A1B101646 | |
| 0020-40621 | INSULATOR RF HDP ETCH | 2 | A1B101647 | |
| 0020-40627 | GRAFOIL ROOF TOP | 2 | A1B101648 | |
| 0020-40683 | COUPLING FLEX | 2 | A1B101649 | |
| 0020-40938 | LIFT PIN TEE SEAL | 4 | A1B101650 | |
| 0020-41118 | POST CLAMPUPPER ESC | 4 | A1B101651 | |
| 0020-41145 | HE FITTING | 1 | A1B101652 | |
| 0020-41152 | SPIDER LIFT E-CHUCK | 2 | A1B101653 | |
| 0020-41153 | HOLDER PIN E-CHUCK | 5 | A1B101654 | |
| 0020-41157 | BUSHING | 18 | A1B101655 | |
| 0020-41326 | GASKET GRAFOIL ROOF TOP CHIL | 1 | A1B101656 | |
| 0020-41331 | RING ROOF AND DOME COOLING 5300 | 1 | A1B101657 | |
| 0020-42015 | TUBE EXTENTION | 4 | A1B101658 | |
| 0020-42067 | SCREW PAN HEAD 6-32X44 HST (PACK OF 10) | 16 | A1B101659 | |
| 0020-42082 | PLATEPUMPING8 INFCWXZ CVD | 1 | A1B101660 | |
| 0020-42160 | LIFT RING ALUM | 1 | A1B101661 | |
| 0020-42191 | ADAPTER LASER ASSY | 1 | A1B101662 | |
| 0020-42262 | MANIFOLD GAS OUT B | 2 | A1B101663 | |
| 0020-42266 | FACE PLATE ALUMINUM SCREW | 8 | A1B101664 | |
| 0020-42290 | BLADE 8'' CENTURA | 2 | A1B101665 | |
| 0020-42296 | PLATE BACK MICROWAVE REMOTE PLASMA | 2 | A1B101666 | |
| 0020-42297 | PLATE BACK FILTER MICROWAVE REMOTE PLAMS | 2 | A1B101667 | |
| 0020-42316 | SCREW.FACE PLATE (PACK OF 10) | 2 | A1B101668 | |
| 0020-42348 | PLATE PUMPING 8'' SRCMP WXZ | 2 | A1B101669 | |
| 0020-50060 | 5 BLADE | 1 | A1B101670 | |
| 0020-51080 | GUARD METAL | 5 | A1B101671 | |
| 0020-51116 | GEAR | 1 | A1B101672 | |
| 0020-51176 | GASKET | 4 | A1B101673 | |
| 0020-51243 | CLAMP RING POLY 5INCH | 1 | A1B101674 | |
| 0020-51283 | GASKET (HEAT EXCHANGE) | 1 | A1B101675 | |
| 0020-51284 | GASKET(HEAT EXCHANGE) | 1 | A1B101676 | |
| 0020-51314 | INSERT BASE | 4 | A1B101677 | |
| 0020-51397 | FINGER ROBOT BLADECERAMIC | 5 | A1B101678 | |
| 0020-51401 | COVER PASSAGE | 2 | A1B101679 | |
| 0020-55631 | O-RING | 10 | A1B101680 | |
| 0020-55635 | O-RING | 13 | A1B101681 | |
| 0020-60028 | SUSCEPTOR OVERLAY | 1 | A1B101682 | |
| 0020-60037 | SUSCEPTOR | 1 | A1B101683 | |
| 0020-60272 | RING SHIELD | 2 | A1B101684 | |
| 0020-60404 | CLAMP RING | 1 | A1B101685 | |
| 0020-60503-A | BALANCER DURA 6''OFFSET 5mm | 2 | A1B101686 | |
| 0020-60745-P1 | SHUTTER DISK 4-33¡ã | 3 | A1B101687 | |
| 0020-60747-P1 | CLAMP RING 4-33¡ã | 6 | A1B101688 | |
| 0020-60771 | SHIELD UPPER | 2 | A1B101689 | |
| 0020-60815-A | CLAMP SHIELD MAGNET DURA OFFSE | 2 | A1B101690 | |
| 0020-60824 | SHIELD LOWER | 2 | A1B101691 | |
| 0020-61009 | ADAPTER 11.3''SCI T/S 75mm | 2 | A1B101692 | |
| 0020-61020-P1 | BRACKET CLAMP SCI T/S 75mm | 3 | A1B101693 | |
| 0020-61162-A | SPACER PILOW BLOCK | 4 | A1B101694 | |
| 0020-61288-A | BRACKETGUIDESOURCE SCI | 2 | A1B101695 | |
| 0020-62423 | SHIELD LOWER 190MM SPACING 200MM ALPS | 2 | A1B101696 | |
| 0020-70028 | BRACKET ROBOT I/C PCBA LEFT | 1 | A1B101697 | |
| 0020-70051 | WINDOW UPPER CLEAR | 4 | A1B101698 | |
| 0020-70052 | WINDOW CLEARLOWER | 3 | A1B101699 | |
| 0020-70055 | BRACKET WINDOW STOP | 3 | A1B101700 | |
| 0020-70056 | CAP FITTING PIPE 2'' HEAT EXCHA | 1 | A1B101701 | |
| 0020-70060 | BRACKET HEAT EXCHANGER | 2 | A1B101702 | |
| 0020-70123 | PANEL GENERIC ELECTRICAL I/O EXP GP | 1 | A1B101703 | |
| 0020-70127 | BRAKET RPBOT I/C PCBA RIGHT | 1 | A1B101704 | |
| 0020-70141 | PIVOT BLOCK WINDOW BELLCRANK | 1 | A1B101705 | |
| 0020-70173 | PLATE MOUNTING TURBO PCB | 1 | A1B101706 | |
| 0020-70184 | RING ADAPT MTL | 2 | A1B101707 | |
| 0020-70203 | BLANK OFF | 1 | A1B101708 | |
| 0020-70220 | SHIELD | 3 | A1B101709 | |
| 0020-70255 | Board BRKT | 3 | A1B101710 | |
| 0020-70289 | SPACER EXTENDED | 2 | A1B101711 | |
| 0020-70290 | BRACKET WINDOW STOP SUPPORT | 1 | A1B101712 | |
| 0020-70320 | BRACKET | 2 | A1B101713 | |
| 0020-70336 | FROG LEG WING | 2 | A1B101714 | |
| 0020-70379 | SHIELD | 1 | A1B101715 | |
| 0020-70424 | CENTER RING LOADLOCK | 1 | A1B101716 | |
| 0020-70428 | O-RING | 2 | A1B101717 | |
| 0020-70430 | SPR LEAFSLIT VALVE | 40 | A1B101718 | |
| 0020-70434 | DOOR SLIT VALVE | 1 | A1B101719 | |
| 0020-70436 | PLATECAM SLITVALVE | 155 | A1B101720 | |
| 0020-70536 | BRCKT PCB TURBO INTERCONNECT | 1 | A1B101721 | |
| 0020-70600 | PANEL-REAR WATER GEN RA | 1 | A1B101722 | |
| 0020-70622 | BRACKET MOUNTING SMOKE DETECTOR | 2 | A1B101723 | |
| 0020-70643 | VALVE SLIT 0021-09922 | 5 | A1B101724 | |
| 0020-70717 | LEVER GAS POST MACHINED | 6 | A1B101725 | |
| 0020-70739 | BRACKET | 1 | A1B101726 | |
| 0020-70781 | PLATE | 7 | A1B101727 | |
| 0020-70821 | CHAMBER COVER INTERCONNECT | 3 | A1B101728 | |
| 0020-75023 | CONNECTING ROD | 3 | A1B101729 | |
| 0020-75763 | DOOR INNER MAINFRAME AC BOX | 2 | A1B101730 | |
| 0020-75890 | CLAMP PIVOT EXTENDED REACH WRIST | 1 | A1B101731 | |
| 0020-75984 | LID | 1 | A1B101732 | |
| 0020-75998 | BRACKET SUPPORT WBLL FASTER WAFFER MAPPIN | 1 | A1B101733 | |
| 0020-76000 | FLAP | 11 | A1B101734 | |
| 0020-76006 | SCREWS (PACK OF 10) | 4 | A1B101735 | |
| 0020-76099 | FITTING SEAL ROBOT BLADE | 1 | A1B101736 | |
| 0020-76169 | VME COVER | 5 | A1B101737 | |
| 0020-76170 | COVER SYSTEM ELECTRONICS | 1 | A1B101738 | |
| 0020-76193 | SPACER TERMINAL BLOCK | 3 | A1B101739 | |
| 0020-76242 | ROT. STOP II COVER LIFTER | 10 | A1B101740 | |
| 0020-76292 | GUAGE BLOCK .522''TILT CASSETTE 8'' | 3 | A1B101741 | |
| 0020-76423 | CLAMP VACUUM LINE CENTURA CHAMBER FACILITIES | 2 | A1B101742 | |
| 0020-76429 | SIDE PLATE UPPER FRAME REAR CENTURA | 4 | A1B101743 | |
| 0020-76431 | CENTER PLATE UPPER FRAME REAR CENTURA | 1 | A1B101744 | |
| 0020-76447 | PANEL RETURN SUPPLY | 1 | A1B101745 | |
| 0020-76473 | BRKT GEN RACK | 42 | A1B101746 | |
| 0020-76474 | BRACKET GEN RACK CONNECTOR PLATE | 29 | A1B101747 | |
| 0020-76522 | ALIGNMENT PIN | 1 | A1B101748 | |
| 0020-76569 | CLAMP BASE FRNT WATER LINE FAC I/F | 2 | A1B101749 | |
| 0020-76570 | CLAMP HOLD FRNT WATER LINE FAC I/F | 2 | A1B101750 | |
| 0020-76571 | CLAMP BASE REAR WATER LINE FAC I/F | 2 | A1B101751 | |
| 0020-76572 | CLAMP PLT REAR WATER LINE FAC I/F | 2 | A1B101752 | |
| 0020-76618 | CLAMP HOLD REAR WATER LINE FAC I/F | 2 | A1B101753 | |
| 0020-76674 | BLANK OFF PLATE | 2 | A1B101754 | |
| 0020-76718 | PANEL | 2 | A1B101755 | |
| 0020-76953 | BRACKET CLAMP 1/2-1/12 WALL | 18 | A1B101756 | |
| 0020-76954 | BRACKET CLAMP | 88 | A1B101757 | |
| 0020-77210 | SENSOR FLAG | 7 | A1B101758 | |
| 0020-77280 | PULLEY MOUNT | 4 | A1B101759 | |
| 0020-77290 | FLAG X-AXIS SENSOR | 7 | A1B101760 | |
| 0020-77292 | CAP MAIN | 9 | A1B101761 | |
| 0020-77293 | SPINDLE CAP PULLEY | 3 | A1B101762 | |
| 0020-77299 | SPACER DRIVE PULLEY BEARING | 6 | A1B101763 | |
| 0020-77300 | SPACERROBOT | 5 | A1B101764 | |
| 0020-77330 | SPACER-DRIVE SHAFT BEARING | 1 | A1B101765 | |
| 0020-77334 | FLAG-Z-AXIS SENSOR | 1 | A1B101766 | |
| 0020-77336 | CLAMP WRIST DRIVE SHAFT | 1 | A1B101767 | |
| 0020-77368 | PAD-CONDITION PLATE | 4 | A1B101768 | |
| 0020-77370 | PULLEY | 5 | A1B101769 | |
| 0020-77372 | GEO P4 PC SWEGS | 1 | A1B101770 | |
| 0020-77373 | GEAR | 2 | A1B101771 | |
| 0020-77430 | SHOULDER BUSHING | 1 | A1B101772 | |
| 0020-77443 | SEAL (PACK OF 10) | 6 | A1B101773 | |
| 0020-77943 | GASKET LOWER PAD CONDITIONER | 5 | A1B101774 | |
| 0020-78126 | MANIFOLD | 1 | A1B101775 | |
| 0020-78262 | BRUSH PADCLEAN CUP | 11 | A1B101776 | |
| 0020-78263 | BRUSHDISCFOR POLITEX PAD | 200 | A1B101777 | |
| 0020-78316 | CHUCK-MANIFOLD | 1 | A1B101778 | |
| 0020-78432 | PULLEY | 5 | A1B101779 | |
| 0020-78434 | PULLEY COUPLING | 3 | A1B101780 | |
| 0020-78477 | SHIELD | 4 | A1B101781 | |
| 0020-78478 | WASHER | 1 | A1B101782 | |
| 0020-78548 | DIAPHRAM TUBING | 4 | A1B101783 | |
| 0020-78648 | RING | 1 | A1B101784 | |
| 0020-78667 | PULLEY | 9 | A1B101785 | |
| 0020-78710 | PLATE STOP | 2 | A1B101786 | |
| 0020-78712 | SEAL UPPER (PACK OF 5) | 4 | A1B101787 | |
| 0020-78783 | BLADDER DECHUCK | 2 | A1B101788 | |
| 0020-78832 | DETENT | 2 | A1B101789 | |
| 0020-78879 | BRACKET TRACK BEARING | 1 | A1B101790 | |
| 0020-78885 | CLAMP LOWER TITAN 6'' | 2 | A1B101791 | |
| 0020-78932 | JAWLOADCUP | 3 | A1B101792 | |
| 0020-78972 | WRISTDRIVESHAFTSPACER | 2 | A1B101793 | |
| 0020-79010 | PINJWSWFRHLDR440X5/16 | 2 | A1B101794 | |
| 0020-79072 | FLANGE | 2 | A1B101795 | |
| 0020-79080 | SHOULDERROTATIONGEAR | 3 | A1B101796 | |
| 0020-79085 | CLAMP-OUTER | 1 | A1B101797 | |
| 0020-79086 | FLANGE-MANIFOLD | 4 | A1B101798 | |
| 0020-79087 | CLAMP-INNER | 2 | A1B101799 | |
| 0020-79091 | RINGRETAININGSTANDARD | 22 | A1B101800 | |
| 0020-79092 | CLAMP-BLADDER | 4 | A1B101801 | |
| 0020-79095 | ROD BUSHING | 5 | A1B101802 | |
| 0020-79096 | CLAMP-MEMBRANE | 2 | A1B101803 | |
| 0020-79097 | CLAMP-FLEXURE | 1 | A1B101804 | |
| 0020-79099 | SENSOR PLUNGER | 11 | A1B101805 | |
| 0020-79162 | SEAL CLAMP (PACK OF 10) | 15 | A1B101806 | |
| 0020-79179 | DIAPHRAGM | 9 | A1B101807 | |
| 0020-79190 | FRAMEHARMONICDRIVE | 1 | A1B101808 | |
| 0020-79204 | PAD-SUPPORT TUNGSTEN MIRRA | 6 | A1B101809 | |
| 0020-79207 | ADAPTER | 3 | A1B101810 | |
| 0020-79227 | SENSORPLATE | 6 | A1B101811 | |
| 0020-79229 | MOTOR BRACKET | 3 | A1B101812 | |
| 0020-79230 | MOTOR BRACKET | 1 | A1B101813 | |
| 0020-79322 | MEMBRANE SUPPORT | 29 | A1B101814 | |
| 0020-79323 | MEMBRANE SUPPORT PAD | 105 | A1B101815 | |
| 0020-79376 | SEAL CLAMP SST | 2 | A1B101816 | |
| 0020-79422 | ARDEL RING | 8 | A1B101817 | |
| 0020-79524 | BEARING HOUSING | 2 | A1B101818 | |
| 0020-79712 | CLAMP MEMBRANE 6''REV P1 | 2 | A1B101819 | |
| 0020-79897 | DDF3 O-DPM CLP | 3 | A1B101820 | |
| 0020-79898 | DDF3BRGSPCR | 3 | A1B101821 | |
| 0020-79900 | DDF3O-BRGCLP | 3 | A1B101822 | |
| 0020-79901 | DDF3TBGMNFLD | 11 | A1B101823 | |
| 0020-79923 | SWP MOTOR SPCR | 3 | A1B101824 | |
| 0020-79974 | NOZZLE | 1 | A1B101825 | |
| 0020-79986 | MEMBRANE 300MM TITAN | 9 | A1B101826 | |
| 0020-80037 | APERTUREPRE-DEFINING SICREPLACES 0020 | 2 | A1B101827 | |
| 0020-80073 | ELECTRODE SUPPRESSION | 2 | A1B101828 | |
| 0020-80180 | LINER END FILAMENT | 1 | A1B101829 | |
| 0020-80236 | APERTURE LOW DOSE | 27 | A1B101830 | |
| 0020-80452 | LINER BEAMSTOP | 5 | A1B101831 | |
| 0020-80626 | TOP SHIELDARC CHAMBER | 1 | A1B101832 | |
| 0020-80627 | ARC CHAMBER PLASMA GUN | 1 | A1B101833 | |
| 0020-80632 | SHIELD GUIDE TUBE | 3 | A1B101834 | |
| 0020-80633 | SHIELD GUIDE TUBE SIDE | 6 | A1B101835 | |
| 0020-80634 | SHIELDGUIDE TUBETOP | 1 | A1B101836 | |
| 0020-80637 | FRONT APERTURE | 7 | A1B101837 | |
| 0020-80638 | APERTURE | 4 | A1B101838 | |
| 0020-80638 | P19500 EPG2 GRAPHITE | 2 | B1C100163 | |
| 0020-80662 | MOUNTING PLATE | 1 | A1B101839 | |
| 0020-80682 | ELECTRODE EH4 | 5 | A1B101840 | |
| 0020-80686 | APERTURE EPGI | 1 | A1B101841 | |
| 0020-80687 | SCREEN ENTRY TUBE, 9500XR- AMI | 3 | B1C100185 | |
| 0020-80688 |
SCREEN SLIDE ENTRY 9500XR - AMI | 3 | B1C100208 | |
| 0020-80689 | WASHERSHIELD RETAINING | 39 | A1B101842 | |
| 0020-81224 | ARC CHAMBER | 1 | A1B101843 | |
| 0020-81226 | SLEEVE OVEN NOZZLE | 18 | A1B101844 | |
| 0020-81268 | VANEPYRO C MRS | 4 | A1B101845 | |
| 0020-81268 | VANE,(MRS) P19500 AMI | 2 | B1C100189 | |
| 0020-81386 | SHIELD INSULATOR | 16 | A1B101846 | |
| 0020-81474 | HOLDER PRE-DEF APERATURE | 2 | A1B101847 | |
| 0020-81482 | ANTI-CATHODE TUNGSTEN BER. ( MODIFIED) | 10 | B1C100211 | |
| 0020-81538 | CHAMBER ARC FILAMENT 2.2 PURE (PACK OF 10) | 5 | A1B101848 | |
| 0020-81549 | SPACER EXTRACTION | 6 | A1B101849 | |
| 0020-81784 | NOZZLE RETAINING | 11 | A1B101850 | |
| 0020-82053 | REFLECTOR PFS REMOTE | 6 | B1C100209 | |
| 0020-82056 | GRAPHITE TOP SHIELD PFS-AMI | 8 | B1C100224 | |
| 0020-82057 | SCREW CHANNEL RETAINING (PFS) | 2 | A1B101851 | |
| 0020-82131 | CLAMP 2.4 DIA LH FILAMENT | 1 | A1B101852 | |
| 0020-82135 | TU FILAMENT | 1 | A1B101853 | |
| 0020-82135 | FILAMENT, ARC CHAMBER BERNAS | 18 | B1C100194 | |
| 0020-82399 | GRAPHITE GASKET (2) | 2 | A1B101854 | |
| 0020-82474 | HOUSING SHIELD CVR. GRAPHITE - AMI | 2 | B1C100186 | |
| 0020-82550 | HOLDERPRE-DEF.APERTURE | 1 | A1B101855 | |
| 0020-82741 | STRAP ION SOURCE | 26 | A1B101856 | |
| 0020-82810 | VANE | 7 | A1B101857 | |
| 0020-82823 | APERTURE EPG2, 9500 | 2 | B1C100187 | |
| 0020-82832 | BEAM STOP AMI | 2 | B1C100207 | |
| 0020-82833 | SHIELD | 9 | A1B101858 | |
| 0020-82834 | SHIELD END | 3 | A1B101859 | |
| 0020-82913 | ELECTRODE | 10 | A1B101860 | |
| 0020-83020 | SHIELD PERFORATED EH3 | 2 | A1B101861 | |
| 0020-83142 | SPRING DRIVE (150) | 17 | A1B101862 | |
| 0020-83227 | GRAPHITE SPACER | 25 | A1B101863 | |
| 0020-83283 | SCREW WHEEL RETAINING | 7 | A1B101864 | |
| 0020-83386 | BLADE CERAMIC 200MM | 2 | A1B101865 | |
| 0020-83521 | ARC CHAMBER REMOTE INSULATOR (PFS CARBO-GRAF 500) | 2 | B1C100188 | |
| 0020-83583 | SHIELD GUIDE TUBE 9500XR BOTTOM | 4 | B1C100222 | |
| 0020-83677 | PILLAR | 4 | A1B101866 | |
| 0020-83794 | FINGER SHORT | 8 | A1B101867 | |
| 0020-83795 | LONG FINGER | 3 | A1B101868 | |
| 0020-83923 | APERTURE | 1 | A1B101869 | |
| 0020-83924 | SLIT SHIELD 2'' | 2 | A1B101870 | |
| 0020-83928 | ELECTRODE EH3 | 6 | A1B101871 | |
| 0020-83931 | APERTURE (EPG 2) | 2 | A1B101872 | |
| 0020-83974 | ELECTRODE | 2 | A1B101873 | |
| 0020-83983 | INSULATOR HV BELLOWS | 8 | A1B101874 | |
| 0020-84055 | SUPPRESSION RING | 2 | A1B101875 | |
| 0020-84129 | PILLAR SUPPORT | 1 | A1B101876 | |
| 0020-84191 | MOUNTING KIT EHE | 3 | A1B101877 | |
| 0020-84219 | FRONT PLATE HALF | 1 | A1B101878 | |
| 0020-84222 | FINGER LONG HOLLOW GRIPPER -AMI (SLOTTED) |
2 | B1C100205 | |
| 0020-84364 | BRACKET GRD ELECT | 4 | A1B101879 | |
| 0020-84365 | BRACKET SUPPRESSION ELECTRODE | 2 | A1B101880 | |
| 0020-84523 | ELECTRODE SUPPRESSION P19500XR | 2 | B1C100190 | |
| 0020-84743 | FRONT PLATE RIGHT | 15 | B1C100164 | |
| 0020-84744 | RETAINER FRONT PLATE | 2 | B1C100165 | |
| 0020-84757 | TUBESHIELDCOOLED | 1 | A1B101881 | |
| 0020-84778 | LINER END FILAMENT | 3 | A1B101882 | |
| 0020-84800 | ELECTRODE GROUND | 2 | A1B101883 | |
| 0020-84807 | COLLET FILAMENT CLAMP | 10 | A1B101884 | |
| 0020-84819 | PRE-FOCUS APERTURE2 | 1 | A1B101885 | |
| 0020-84820 | PRE-FOCUS APERTURE 1 | 1 | A1B101886 | |
| 0020-84856 | PILLARMOUNTING | 1 | A1B101887 | |
| 0020-84897 | FILAMENT | 6 | A1B101888 | |
| 0020-84907 | FRONT PLATE LEFT | 16 | B1C100166 | |
| 0020-84940 | CONTACT SCREW | 9 | A1B101889 | |
| 0020-84964 | APERTURE PLATE | 6 | A1B101890 | |
| 0020-84988 | PRE MRS SLIT | 1 | A1B101891 | |
| 0020-85068 | PRE-DEFINING SHIELD | 2 | A1B101892 | |
| 0020-85070 | POST RETENTION | 3 | A1B101893 | |
| 0020-85074 | ARC CHAMBERS PLUG | 8 | A1B101894 | |
| 0020-85086 | PIENUM SHIELD | 2 | A1B101895 | |
| 0020-85114 | DI WATER CONNECTOR | 3 | A1B101896 | |
| 0020-85413 | GUIDE PLATE LEFT | 10 | A1B101897 | |
| 0020-85414 | GUIDE PLATE RIGHT | 9 | A1B101898 | |
| 0020-85415 | TOP GUIDE PLATE | 12 | A1B101899 | |
| 0020-85419 | ELECTRODE FOCUS | 5 | A1B101900 | |
| 0020-85420 | PRE-FOCUS APERTURE2 | 19 | A1B101901 | |
| 0020-85607 | ARC CHAMBER FRONT FILAMENT | 3 | A1B101902 | |
| 0020-85806 | SCREW CAPTIVE M4 | 28 | A1B101903 | |
| 0020-86641 | BRACKET SUPPRESSION ELEC | 6 | A1B101904 | |
| 0020-86731 | STRAP FILAMENT | 3 | B1C100191 | |
| 0020-86733 | CLAMP, FILAMENT R/H | 2 | B1C100195 | |
| 0020-86734 | CLAMP, FILAMENT L/H | 2 | B1C100196 | |
| 0020-86738 | LINER, SIDE | 2 | B1C100212 | |
| 0020-86740 | LINER, END, ATICATHODE | 20 | B1C100192 | |
| 0020-86835 | SPACER UPPER | 5 | A1B101905 | |
| 0020-86842 | PLATE COVER | 2 | B1C100167 | |
| 0020-86939 | SHIELD FEEDTHRO | 7 | A1B101906 | |
| 0020-86939 | SHIELD FEED THRU | 2 | B1C100168 | |
| 0020-87018 | FILAMENT | 45 | A1B101907 | |
| 0020-87508 | GUIDE FILAMENT | 8 | B1C100213 | |
| 0020-89586 | LINER, END, CATHO0E DIA 16 | 20 | B1C100217 | |
| 0020-89990 | CHAMBER ARC | 3 | A1B101908 | |
| 0020-89991 | SUPPORT | 5 | A1B101909 | |
| 0020-90203 | ORINGCARRIERBS | 1 | A1B101910 | |
| 0020-90985 | SCREW SKT CP HD VAC MN 6 X 20 (PACK OF 10) | 1 | A1B101911 | |
| 0020-91284 | SPACER BEARING LONG | 3 | A1B101912 | |
| 0020-91454 | SCREW VAC SKT CAP H | 5 | A1B101913 | |
| 0020-91466 | SCREW | 6 | A1B101914 | |
| 0020-91798 | CUP FARADAY | 25 | A1B101915 | |
| 0020-91800 | COVER CUP | 5 | A1B101916 | |
| 0020-91801 | INSULATOR CAP | 2 | A1B101917 | |
| 0020-91811 | BRACKET OPTP | 6 | A1B101918 | |
| 0020-92643 | INSERT E10 STANDARD | 9 | A1B101919 | |
| 0020-92776 | MOUNTING MAGNET | 2 | A1B101920 | |
| 0020-92811 | WASHER SPACER | 10 | A1B101921 | |
| 0020-92902 | BEARINGECCENTRIC | 2 | A1B101922 | |
| 0020-92945 | CLEVIS BRG | 8 | A1B101923 | |
| 0020-93042 | BOCKDRIVE | 1 | A1B101924 | |
| 0020-93465 | SCREW VAC HEX HD M10 | 5 | A1B101925 | |
| 0020-93833 | SHIELD GRAPHITE | 6 | A1B101926 | |
| 0020-94035 | BRACKET | 10 | A1B101927 | |
| 0020-94166 | DISC.CODINGSENSOR | 1 | A1B101928 | |
| 0020-94259 | ROD | 6 | A1B101929 | |
| 0020-94700 | PULLEYPOTDRIVE | 1 | A1B101930 | |
| 0020-94834 | FLANGE MOUNTING PILLAR | 32 | A1B101931 | |
| 0020-94862 | PILLAR MOUNTING TYP 1 | 6 | A1B101932 | |
| 0020-94928 | COLLER SHIM | 16 | A1B101933 | |
| 0020-95038 | SCREW VAC C5K HD M3X | 2 | A1B101934 | |
| 0020-95176 | SEAL BOTTOM | 21 | A1B101935 | |
| 0020-95369 | PILLAR SUPPORT DIFF.PP | 2 | A1B101936 | |
| 0020-95375 | INSULATOR FEED THRU | 3 | A1B101937 | |
| 0020-95818 | SHIMORIENTOR1MM | 2 | A1B101938 | |
| 0020-95819 | SHIMORIENTOR | 3 | A1B101939 | |
| 0020-96040 | PIN RETAINING | 14 | A1B101940 | |
| 0020-96204 | FLAG SENSOR | 5 | A1B101941 | |
| 0020-96262 | SHIELD MTG PLATE BS | 5 | A1B101942 | |
| 0020-96396 | GEAR ENCODER SHAFT | 1 | A1B101943 | |
| 0020-96467 | FINGER GRIPPER | 3 | A1B101944 | |
| 0020-96606 | SPRING FINGER | 41 | A1B101945 | |
| 0020-96736 | SENSOR COMB | 1 | A1B101946 | |
| 0020-96753 | GASKET, TEFLON, FACE, SEAL, 1/4" ID -1/2" 0D | 3 | B1C100197 | |
| 0020-96832 | SCREW (PACK OF 10) | 1 | A1B101947 | |
| 0020-97254 | SHIMGEAR SEGMENT | 5 | A1B101948 | |
| 0020-97557 | INSULATOR, SOURCE FILAMENT | 87 | B1C100225 | |
| 0020-97794 | SPACER | 2 | A1B101949 | |
| 0020-97900 | SCREW | 5 | A1B101950 | |
| 0020-98420 | APERTURE PLATE | 2 | A1B101951 | |
| 0020-98580 | FILAMENT CLAMP COLLET | 20 | A1B101952 | |
| 0020-98581 | CAPS | 6 | A1B101953 | |
| 0020-98631 | BLOCK RESTRAINING | 12 | A1B101954 | |
| 0020-98649 | PRE MRS. SLIT MASS RESOLVING SYSTEM | 2 | B1C100198 | |
| 0020-98696 | COVER PLATE | 2 | A1B101955 | |
| 0020-98696 | PLATE COVER (AMI) | 2 | B1C100202 | |
| 0020-98787 | ELECTRODE GROUND | 10 | A1B101956 | |
| 0020-98788 | ELECRODE GRAPHITE SUPPRESSION - AMI | 8 | B1C100218 | |
| 0020-98841 | SPACER | 5 | A1B101957 | |
| 0020-98879 | INSERT NEUTRAL | 3 | A1B101958 | |
| 0020-98887 | RING INSULATOR | 2 | A1B101959 | |
| 0020-98902 | STRAP ION SOURCE | 3 | A1B101960 | |
| 0020-98908 | RETAINER FRONT PLATE | 8 | A1B101961 | |
| 0020-98911 | THUMBSCREW CAPTIVE M4 | 15 | A1B101962 | |
| 0020-98913 | STARP LINK ANTI CATM | 1 | A1B101963 | |
| 0020-98914 | REFLECTOR, SOURCE FILAMENT | 8 | B1C100214 | |
| 0020-98916 | BASE LINER | 8 | A1B101964 | |
| 0020-98917 | SPARK EROSION ELECTRODE LINER SIDE | 13 | A1B101965 | |
| 0020-98917 | LINER, SIDE, P19500 AMI | 2 | B1C100215 | |
| 0020-98920 | BRACKET RETAINING CHANNEL | 2 | A1B101966 | |
| 0020-98937 | INSERT FRONT PLATEAN OPT FOR LOW ENERG | 1 | A1B101967 | |
| 0020-98948 | ELECTRODE EHO | 1 | A1B101968 | |
| 0020-98948 | APERTURE, SILICON CARBIDE, EHO AMI | 4 | B1C100226 | |
| 0020-98949 | GRAPHITE PLATE | 7 | A1B101969 | |
| 0020-98951 | APERATURE EH5 | 9 | A1B101970 | |
| 0020-98952 | APERATURE EH6 | 4 | A1B101971 | |
| 0020-98981 | GRIPPER FINGER CONDUCTIVE | 4 | A1B101972 | |
| 0020-98991 | SHIELD FEEDTHRU | 8 | A1B101973 | |
| 0020-99231 | ELECTRODE ES GRAPH.BF | 2 | A1B101974 | |
| 0020-99233 | APERTURE PRE-DEFINING BF | 1 | A1B101975 | |
| 0020-99235 | LINERMRSPLATE | 4 | A1B101976 | |
| 0020-99439 | BUSHINGSPECIAL REDUCING | 1 | A1B101977 | |
| 0020-99454 | NEUTRAL INSERT FLIGHT TUBE | 2 | A1B101978 | |
| 0020-99455 | E-OUTER INSERT FLIGHT TUBE | 1 | A1B101979 | |
| 0020-99470 | INSERT INNER MULTI-CHARGED TUBE | 19 | A1B101980 | |
| 0020-99470 | INSERT,
INNER, MULTI-CHARGER/BEAM TRAP MULTI- CHARGED CARBOGRAF 500 |
4 | B1C100216 | |
| 0020-99481 | SHIELDSPUTTERSTANDOFF | 8 | A1B101981 | |
| 0020-99490 | COVER GRAPHITE | 4 | A1B101982 | |
| 0020-99502 | BRACKET LIGHT CURTAIN | 3 | A1B101983 | |
| 0020-99515 | PLENUM CHAMBER SHIELD TURBO | 1 | A1B101984 | |
| 0020-99516 | PLANUM CHAMBER SHIELD PA PORT | 5 | A1B101985 | |
| 0020-99536 | STUD BACK MRS SHIELD MTG | 4 | A1B101986 | |
| 0020-99590 | BRACKETLED PANEL | 2 | A1B101987 | |
| 0020-99636 | BEAMSTOP SHIELDING END LEAP2 | 2 | A1B101988 | |
| 0020-99637 | SHIELDING SIDE | 2 | A1B101989 | |
| 0020-99710 | UPSLG., AB5-UPSLG, VANE, GRAPHITE, VIRTEOUS | 4 | B1C100193 | |
| 0020-JC022-A | SHIELD LOWER | 2 | A1B101990 | |
| 0020-JT253-2 | COLLAR | 1 | A1B101991 | |
| 0020-RW049E | GASKET | 1 | A1B101992 | |
| 0020-RW049E-1 | RING | 1 | A1B101993 | |
| 0020-TE711-1 | COVER RING | 1 | A1B101994 | |
| 0020-WM020-E1 | SHIELD LOWER | 3 | A1B101995 | |
| 0020-WM021 | COLLIMATOR SUPPORT | 7 | A1B101996 | |
| 0021-00006 | DRUM GAS MIXER UWAVE | 1 | A1B101997 | |
| 0021-00069 | BOXCONNECTORRECESS ENDPT DPS POLY | 1 | A1B101998 | |
| 0021-00571 | INSERT EXHAUST SST | 1 | A1B101999 | |
| 0021-00808 | RING SPACER. 150'''' THK R1 DTCU DPS | 1 | A1B102000 | |
| 0021-01285 | REFLECTOR RIGHT | 2 | A1B102001 | |
| 0021-01317 | OUTER SHIELD | 37 | A1B102002 | |
| 0021-01385 | COVER SHIELD HEATED GL | 1 | A1B102003 | |
| 0021-01495 | CLAMPHGL MIDSPAN TOP1.25DIA | 1 | A1B102004 | |
| 0021-01496 | CLAMPHGL MIDSPAN BASE1.25DIA | 1 | A1B102005 | |
| 0021-01570 | BLOCKER PLATE | 2 | A1B102006 | |
| 0021-01571 | SHOWER HEAD USG GIGA FILL | 5 | A1B102007 | |
| 0021-01602 | MANIFOLD INPUT WATER NI PL TI-XZ | 2 | A1B102008 | |
| 0021-01606 | SCRSHOULDERVENT6-32NI | 12 | A1B102009 | |
| 0021-02092 | PINPEDESTAL ALIGNMENT | 9 | A1B102010 | |
| 0021-02109 | BRACKET HGL MIDSPAN CH A B DMCVD | 1 | A1B102011 | |
| 0021-02112 | BRACKET OR GATE HT CVD TIN | 1 | A1B102012 | |
| 0021-02983 | SHIELDINNERTXZ | 25 | A1B102013 | |
| 0021-03065 | LINER LOWER THROTTLE VALVE | 3 | A1B102014 | |
| 0021-03066 | LINER MIDDLE THROTTLE VALVE | 1 | A1B102015 | |
| 0021-03095 | SCR CENTERING PURGE HEATER | 8 | A1B102016 | |
| 0021-03102 | PLATE LEVELING HEATER TI-XZ/HT TIN | 1 | A1B102017 | |
| 0021-03104 | PIN HEATER TX7 | 3 | A1B102018 | |
| 0021-03278 | BLOCK SPACER CYLINDER SUPPORT | 4 | A1B102019 | |
| 0021-03526 | RING OUTER BPSG SLOTTED | 1 | A1B102020 | |
| 0021-03568 | FACEPLATE SACVD PRODUCER 200MM | 1 | A1B102021 | |
| 0021-03692 | RING INNER 200MM FLAT 1.5MM | 1 | A1B102022 | |
| 0021-03733 | CAP RF | 11 | A1B102023 | |
| 0021-03791 | CATHODE INSULATOR RING | 1 | A1B102024 | |
| 0021-03845 | EDM ESC FOIL | 1 | A1B102025 | |
| 0021-03877 | FLAP ANODIZEDTOPTHROTTLE VA | 25 | A1B102026 | |
| 0021-03878 | THROTTLE VALVE FLAP ANODIZED | 19 | A1B102027 | |
| 0021-03927 | CLAMPVESPEL OX/MLR/NIT-200MM (5003963) | 26 | A1B102028 | |
| 0021-03973 | SHAFT PLUG TXZ BKM - 3 TOOL | 4 | A1B102029 | |
| 0021-04230 | SCREWSKHD8-32 X 1.1/NK(NON-CAT) | 40 | A1B102030 | |
| 0021-04232 | BAR NITRONIC RF | 25 | A1B102031 | |
| 0021-04249 | INNER CUP COIL SUPPORT ELECTRA COPPER | 6 | A1B102032 | |
| 0021-04252 | OUTER CUP COIL SUPPORT ELECTRA | 148 | A1B102033 | |
| 0021-04253 | FEEDTHRU COIL SUPPORT | 3 | A1B102034 | |
| 0021-04318 | CHAMBER LINER | 2 | A1B102035 | |
| 0021-04549 | BRACKET FLOW METER REGULATOR | 2 | A1B102036 | |
| 0021-04643 | SHIELD DARK SPACE GROUND ALPS | 1 | A1B102037 | |
| 0021-04822 | RING CLAMP | 5 | A1B102038 | |
| 0021-04838 | SHIELD-UPPER | 5 | A1B102039 | |
| 0021-04839 | SHIELD | 5 | A1B102040 | |
| 0021-04840 | RING COVER | 5 | A1B102041 | |
| 0021-04867 | SHIELD | 5 | A1B102042 | |
| 0021-04871 | BLANK CHAMBER LEAK U WAVE WXZ | 1 | A1B102043 | |
| 0021-04919 | CUCUPOUTERFEEDTHROUGHO/U | 2 | A1B102044 | |
| 0021-04921 | SHIELD COPPER | 3 | A1B102045 | |
| 0021-06079 | SHIELD INNER BKM3 TXZ | 1 | A1B102046 | |
| 0021-06148 | CLAMP RING 8'''' SEMI NOTCH 4 ALIGNMENT | 30 | A1B102047 | |
| 0021-06182 | MEMBRANECERAMICDUALCELL | 8 | A1B102048 | |
| 0021-06215 | COVER 125mm ESC | 2 | B1C100107 | |
| 0021-06336 | DISC 8'' SHUTTER | 23 | A1B102049 | |
| 0021-06465 | COVER APPLICATOR UWAVE WXZ | 1 | A1B102050 | |
| 0021-07230 | SHUTTER DISK 8'''' SNNF CLAMPED ELECTRA | 37 | A1B102051 | |
| 0021-07406 | SHIELDLOWER300MMB101SHORTPVD | 2 | A1B102052 | |
| 0021-07418 | SCREW CENTERING PURGE HEATER 200MM | 3 | A1B102053 | |
| 0021-07531 | CUSHIELDLOWERLTBESCSIP | 13 | A1B102054 | |
| 0021-07586 | EDGE RING MIDDLE | 3 | A1B102055 | |
| 0021-07905 | LOWER SHIELD | 12 | A1B102056 | |
| 0021-07984 | SHIELDOUTER | 3 | A1B102057 | |
| 0021-08111 | BRACKET | 1 | A1B102058 | |
| 0021-08190 | BRACKETSUPPORT | 1 | A1B102059 | |
| 0021-08217 | COVER EMITTER INTFC PCB LOCAL | 3 | A1B102060 | |
| 0021-08315 | SHIELDUPPER | 8 | A1B102061 | |
| 0021-08316 | SHIELDMIDDLE | 8 | A1B102062 | |
| 0021-08322 | SHIELDRINGCLAMPBOTTOM300 | 4 | A1B102063 | |
| 0021-08500 | FRAME FIX BRACKET FOR CASTERS | 4 | A1B102064 | |
| 0021-08501 | GRATING FIX BRACKET FOR CASTER | 4 | A1B102065 | |
| 0021-08773 | HOLDER LEAD SCREW COVER | 1 | A1B102066 | |
| 0021-08863 | SPIDER LEGS WEDGE POST ELECTRA ECP | 3 | A1B102067 | |
| 0021-09002 | PLATE DISTRIBUTION HALETH | 15 | A1B102068 | |
| 0021-09016 | LIDQUARTZTRANKIT0270-09283 | 13 | A1B102069 | |
| 0021-09069 | SLEEVE MOUNTING SCREW | 18 | A1B102070 | |
| 0021-09098 | RING SEPARATION MXP+ | 100 | A1B102071 | |
| 0021-09104 | LINERCATHODEKIT | 1 | A1B102072 | |
| 0021-09156 | RINGCLAMPING CLEAR | 1 | A1B102073 | |
| 0021-09244 | FOIL THERMAL BASE | 3 | A1B102074 | |
| 0021-09426 | BRACKETSOLID ALUMINUMRECESS | 3 | A1B102075 | |
| 0021-09427 | COVERSOLID ALUMINUM RECESS | 3 | A1B102076 | |
| 0021-09428 | COVERVIEW WINDOWSOLID ALUMN | 3 | A1B102077 | |
| 0021-09429 | FILTERUVSOLID ALUMINUM | 4 | A1B102078 | |
| 0021-09444 | PLATE INSULATOR | 1 | A1B102079 | |
| 0021-09453 | TOOLCLEANINGPLATETHROTTLE V | 2 | A1B102080 | |
| 0021-09503 | CLAMP RING DOME DPS | 3 | A1B102081 | |
| 0021-09510 | BLOCK COOLING DTCU DPC | 1 | A1B102082 | |
| 0021-09629 | KEY CLAMP RING DOME DPS | 3 | A1B102083 | |
| 0021-09701 | PLATE PERF 200MM NON R-F | 1 | A1B102084 | |
| 0021-09703 | PLATE BLOCKER 200MM NON R-F | 5 | A1B102085 | |
| 0021-09708 | INSULATOR GDP NG-1 HOLE | 40 | A1B102086 | |
| 0021-09755 | SPACERCOMPOSITEESC. 8IN | 1 | A1B102087 | |
| 0021-09756 | VESPEL RING | 24 | A1B102088 | |
| 0021-09757 | VESPEL SPACER | 1 | A1B102089 | |
| 0021-09759 | FACEPLATE | 10 | A1B102090 | |
| 0021-09771 | VESPEL SCREW | 2 | A1B102091 | |
| 0021-09780 | THERMAL SHIM | 11 | A1B102092 | |
| 0021-09791 | SCREWALIGNMENTSIMP (PACK OF 10) | 6 | A1B102093 | |
| 0021-09835 | CHAMBER-LINER | 17 | A1B102094 | |
| 0021-09836 | GASKET | 15 | A1B102095 | |
| 0021-09859 | STUD PLENUM RPS | 2 | A1B102096 | |
| 0021-09873 | GUIDE SCREW PLENUM RPS | 2 | A1B102097 | |
| 0021-09875 | COLLAR RING SHOWERHEAD 200MM | 1 | A1B102098 | |
| 0021-09938 | PLUGMANOMETERPORTR2 | 27 | A1B102099 | |
| 0021-09984 | SUPPORT | 2 | A1B102100 | |
| 0021-09985 | BRACKET | 1 | A1B102101 | |
| 0021-09986 | BRACKET | 2 | A1B102102 | |
| 0021-09987 | PLATE | 2 | A1B102103 | |
| 0021-09988 | COVER | 2 | A1B102104 | |
| 0021-10086 | PLATE CORD STRAIN RELIEF POWER SUPPLY | 1 | A1B102105 | |
| 0021-10087 | RF GEN RACK PLATE SINGLE PLUG | 1 | A1B102106 | |
| 0021-10090 | SPACER | 14 | A1B102107 | |
| 0021-10136 | GAS TRENCH COVER RING | 9 | A1B102108 | |
| 0021-10233 | CHAMBER LINER FOR SUPER E | 11 | A1B102109 | |
| 0021-10345 | CATHODE SUPPORT CAN MXP POLY | 2 | A1B102110 | |
| 0021-10431 | INSULATOR PWR FEED DPA | 3 | A1B102111 | |
| 0021-10432 | INSULATOR #2 POWER FEED DPA | 8 | A1B102112 | |
| 0021-10495 | PLATE GAS DISTRIBUTION 43-H | 25 | A1B102113 | |
| 0021-10534 | PIN BLOCKROUND | 3 | A1B102114 | |
| 0021-10535 | PIN BLOCKTAPERED | 4 | A1B102115 | |
| 0021-10591 | FILTER RECESSED ENDPOINT MXP POLY | 6 | A1B102116 | |
| 0021-10634 | PLUG THROTTLE VALVE NEW | 2 | A1B102117 | |
| 0021-10642 | FEEDTHRU HELIUM HOUSING | 7 | A1B102118 | |
| 0021-10693 | INSERTSLIT VALVE | 12 | A1B102119 | |
| 0021-10694 | LINER PUMP THROAT | 2 | A1B102120 | |
| 0021-10732 | PAD VESPEL MAGNET RING | 8 | A1B102121 | |
| 0021-10885 | SCREW | 34 | A1B102122 | |
| 0021-10900 | COVER VESPEL (PACK OF 10) | 21 | A1B102123 | |
| 0021-10901 | CLAMP RING VESPEL | 23 | A1B102124 | |
| 0021-11038 | BRACKET | 1 | A1B102125 | |
| 0021-11098 | SUPPORTCUSHION PROFILER | 8 | A1B102126 | |
| 0021-11110 | RINGASSYEDGETXZ300MM | 7 | A1B102127 | |
| 0021-11119 | SHIELDBOTTOM | 1 | A1B102128 | |
| 0021-11368 | RINGCOVER | 8 | A1B102129 | |
| 0021-11901 | POST SRD SPIDER WEDGE POST ECP SF3 | 4 | A1B102130 | |
| 0021-12063 | ONE PIECE SHIELD | 3 | A1B102131 | |
| 0021-12201 | PINLIFTHEATERSST300MMTXZ | 1 | A1B102132 | |
| 0021-12262 | PLATE SPACER | 2 | A1B102133 | |
| 0021-12555 | SHIELD | 1 | A1B102134 | |
| 0021-12582 | CU RING COVER TI SIP TA REV2 | 40 | A1B102135 | |
| 0021-12762 | SHIELD LOWER 8 INCH BESC SIP-TA | 1 | A1B102136 | |
| 0021-12851 | CLAMP DOME DPS 300MM | 4 | A1C100106 | |
| 0021-12878 | ROBOT TRANSFER BLADE K100S300MM | 1 | A1B102137 | |
| 0021-13257 | BARRIGHTRFCONNECTOR | 14 | A1B102138 | |
| 0021-13258 | BARLEFTRFCONNECTOR | 14 | A1B102139 | |
| 0021-13308 | SHIELDLOWERLO-C300MMNIV | 2 | A1B102140 | |
| 0021-13890 | RINGCOVER | 9 | A1B102141 | |
| 0021-14160 | LARGEHOLEMEMBRANESUPPORTPAD | 10 | A1B102142 | |
| 0021-14287 | SHIELD 6-IN LOWER ESC | 4 | A1B102143 | |
| 0021-14355 | LIFT PINS - SUPER E TEFLON | 11 | A1B102144 | |
| 0021-15607 | SHIELDUPPER | 10 | A1B102145 | |
| 0021-15609 | SHIELDBOTTOM | 5 | A1B102146 | |
| 0021-15759 | SHIELD 6-IN MODIFIED-G12 ESC | 1 | A1B102147 | |
| 0021-15763 | DEPOSITION RING 6-IN ESC SMF | 1 | A1B102148 | |
| 0021-16365 | ASSY ANTI-SPLAY PLATE | 4 | A1B102149 | |
| 0021-16378 | SHAFTSPINDLEIBCECP | 2 | A1B102150 | |
| 0021-16768 | WALL FRONT TOP | 1 | A1B102151 | |
| 0021-17718 | SHIELD INNER 200MM SIP TA(N) | 19 | A1B102152 | |
| 0021-17721 | SHIELD CLAMP RING | 19 | A1B102153 | |
| 0021-17722 | CUTAUPPERSHIELDNOGROOVE | 29 | A1B102154 | |
| 0021-17725 | SHUTTERDISKTA | 23 | A1B102155 | |
| 0021-17727 | SHIELD LOWER 200MM | 12 | A1B102156 | |
| 0021-18088 | SHIELDLOWERNIVPVD | 6 | A1B102157 | |
| 0021-18436 | COVER RING 200MM | 13 | A1B102158 | |
| 0021-18956 | PLUNGER SENSOR 200 | 7 | A1B102159 | |
| 0021-19754 | PINLIFTTXZ300MM HOURGLASS | 1 | A1B102160 | |
| 0021-20042 | DISK8''B101 SHUTTER DISK SST | 11 | A1B102161 | |
| 0021-20045 | SHIELD DARK SPACE NOTCH BOTTOM ARC TA ONLY | 85 | A1B102162 | |
| 0021-20047 | COVER RING 8'' B101 T1 10.5''DIA 12 GRIT | 7 | A1B102163 | |
| 0021-20125 | SHUTTER DISK 6in 4-33 CLAMP | 5 | A1B102164 | |
| 0021-20148 | LOWER SHIELD | 9 | A1B102165 | |
| 0021-20152 | CLAMP RING (TI+COH-TI) 0020-60414 | 3 | A1B102166 | |
| 0021-20198 | PLATE | 3 | A1B102167 | |
| 0021-20381 | TI CUP | 15 | A1B102168 | |
| 0021-20381 | CUP IMP TI NOT CONTROLLED MAT REV R1 | 6 | B1C100175 | |
| 0021-20387 | PLATE BASE THICK CASSETTE | 1 | A1B102169 | |
| 0021-20390 | BLADE 8'' | 2 | A1B102170 | |
| 0021-20436 | GASKET RF 8.02 X .135 THK 8 B1 | 8 | A1B102171 | |
| 0021-20448 | ET ISPU | 1 | A1B102172 | |
| 0021-20474 | REST/LIFT POINT TI/TIN FLOAT W/B | 60 | A1B102173 | |
| 0021-20577 | TITANIUMREFLOW BUCKET SHIELD | 5 | A1B102174 | |
| 0021-20718 | CUPEDESTALCOVERLWRSST | 28 | A1B102175 | |
| 0021-20788 | SHIELD8'' DEGAS W/12.9 LID | 4 | A1B102176 | |
| 0021-20797 | MANIFOLD | 2 | A1B102177 | |
| 0021-21065 | SHIELDALSCREWLESSPRECLEANED | 4 | A1B102178 | |
| 0021-21307 | BUSHING COIL SUPPORT ELECTRA IMP-CU | 114 | A1B102179 | |
| 0021-21311 | CUP OUTER RIGID COIL SPRT ELECTRA IMP-CU | 93 | A1B102180 | |
| 0021-21320 | CURINGCLAMPBLT2TAB | 29 | A1B102181 | |
| 0021-21442 | SHIELD LOWER SIP-CU 8'''' BLT 90DEG STE | 1 | A1B102182 | |
| 0021-21443 | CU SHIM CLAMPING GAMMA TITANIUM | 16 | A1B102183 | |
| 0021-21444 | SHIELD UPPER CU | 12 | A1B102184 | |
| 0021-21567 | SCREWSHOULDER ALIGNMENTASML | 22 | A1B102185 | |
| 0021-21615 | PEDESTAL | 11 | A1B102186 | |
| 0021-21807 | ZLS RING CLAMP | 2 | A1B102187 | |
| 0021-21885 | DEPOSITION RING 6'' | 4 | A1B102188 | |
| 0021-21980 | COVER WAFER MAP LED | 1 | A1B102189 | |
| 0021-22011 | TUBE FLANGED HEATER LIFT BEARING BESC | 1 | A1B102190 | |
| 0021-22028 | PEDESTAL | 1 | A1B102191 | |
| 0021-22123 | BLANK-OFF BACKSIDE PURGE TIN TURBO ADAPTER | 2 | A1B102192 | |
| 0021-22224 | PEDESTAL 300MM IMP B101 HEATER W/CENTER BUTTON | 12 | A1B102193 | |
| 0021-22311 | SHIELD 6'' WFR/13'' SOURCE | 2 | A1B102194 | |
| 0021-22496 | PLATE T18-F | 3 | A1B102195 | |
| 0021-22576 | CLAMP FEEDTHRU COIL SUPPORT ELECTRA | 6 | A1B102196 | |
| 0021-22577 | PINFEEDTHRU COIL SUPPORT1/4 THK COPPE | 5 | A1B102197 | |
| 0021-22586 | SHUTTER DISK 8'' B101 | 1 | A1B102198 | |
| 0021-22587 | NUT RF CONNECTOR 10-32 | 10 | A1B102199 | |
| 0021-22602 | COVER RING 8'''' B101 TI 10.5'''' DIA 12 | 29 | A1B102200 | |
| 0021-22621 | SCREW LIFT HOOP AL - PROD | 3 | A1B102201 | |
| 0021-23329 | SHIELD CHAMBER SIP ll 200MM | 1 | A1B102202 | |
| 0021-23330 | SHIELDINNER SIP II 200MM | 1 | A1B102203 | |
| 0021-23331 | SHIELDOUTER SIMP 200MM | 1 | A1B102204 | |
| 0021-26311 | SHIELD LOWER | 1 | A1B102205 | |
| 0021-35095 | OXIDE CLAMP CARRIER5200 SYSTEM | 28 | A1B102206 | |
| 0021-35096 | CARRIER P1 POLY | 44 | A1B102207 | |
| 0021-35128 | COVERFIXTURE | 4 | A1B102208 | |
| 0021-35726 | BRACKET3-POSCAJONETCH | 2 | A1B102209 | |
| 0021-35749 | RINGISOLATORTXZ | 16 | A1B102210 | |
| 0021-35757 | SHAFTHINGE LID PUMPING PLATE DXZ | 1 | A1B102211 | |
| 0021-35813 | CABLE FLANGE | 2 | A1B102212 | |
| 0021-35817 | LINERR2 CHAMBER | 11 | A1B102213 | |
| 0021-35869 | PLATEPERFTXZ200MM | 7 | A1B102214 | |
| 0021-35875 | NUTROD LOCKRF ADAPTERTxZ MCVD | 1 | A1B102215 | |
| 0021-35987 | STRAP RF TXZ MCVD | 6 | A1B102216 | |
| 0021-35988 | FILTER SLIT WINDOW | 5 | A1B102217 | |
| 0021-36019 | STRAPLIDRF | 9 | A1B102218 | |
| 0021-36021 | HEATERPINTXZ | 13 | A1B102219 | |
| 0021-36022 | MANIFOLD OUTPUT | 3 | A1B102220 | |
| 0021-36066 | PLATE | 1 | A1B102221 | |
| 0021-36081 | CLAMPPERFPLATE | 10 | A1B102222 | |
| 0021-36133 | PLATE BLANK OFF GP ENSLOSURE | 2 | A1B102223 | |
| 0021-36204 | GAS DISTRIBUTION PLATE | 5 | A1B102224 | |
| 0021-36247 | CARRIER WXP CLAMP CENTURA | 1 | A1B102225 | |
| 0021-36560 | SAX BLOCKER GIGA FILL SACVD | 1 | A1B102226 | |
| 0021-36604 | UPPER MAGNET BRACKETSLIT VLV | 14 | A1B102227 | |
| 0021-36605 | LOWER MAGNET BRACKETSLIT VLV | 13 | A1B102228 | |
| 0021-36606 | MAGNET BRACKETENHANCED UNIBO | 107 | A1B102229 | |
| 0021-36675 | BLOCK RF ROD AUTOBIAS | 1 | A1B102230 | |
| 0021-36689 | PLATECERAMIC | 4 | A1B102231 | |
| 0021-36714 | RF ROD | 2 | A1B102232 | |
| 0021-37052 | BLOCKSWITCH CLAMP LID | 2 | A1B102233 | |
| 0021-37053 | BRACKET RECESSEDENDPOINT WINDOW | 3 | A1B102234 | |
| 0021-37144 | BRACKET RF CABLE | 1 | A1B102235 | |
| 0021-37145 | BRACKET U-SHAPE | 1 | A1B102236 | |
| 0021-37153 | BRACKET MOUNTING TERMINAL BL | 3 | A1B102237 | |
| 0021-37154 | SHIELD TERMINAL BLOCK 8 POS | 3 | A1B102238 | |
| 0021-37155 | SPACER TERMINAL BLOCK | 3 | A1B102239 | |
| 0021-37156 | BRACKET MAGNET POWER CORD | 2 | A1B102240 | |
| 0021-37187 | ADAPTORPOLYLINEHEAT RESIST | 11 | A1B102241 | |
| 0021-37188 | ADAPTOR POLYLINE HEAT RESISTA | 1 | A1B102242 | |
| 0021-37435 | PLATE | 16 | A1B102243 | |
| 0021-37436 | PLATE BLANK-OFF BOTTOM MODULE CXZ | 7 | A1B102244 | |
| 0021-37827 | HOUSING BOTTOM MODULE | 3 | A1B102245 | |
| 0021-37828 | COVER BOTTOM MODULE | 7 | A1B102246 | |
| 0021-37887 | CASSETTE PLATFORM Z DRIVE COR-RES | 1 | A1B102247 | |
| 0021-38055 | SCREEN COVER NARROW COR-RES | 14 | A1B102248 | |
| 0021-38101 | CHAMBER LID NGDT ANODIZED | 2 | A1B102249 | |
| 0021-38136 | COVER PROTECTION 150MM ESC | 1 | A1B102250 | |
| 0021-38137 | COVERPROTECTION200MMESC | 2 | A1B102251 | |
| 0021-38336 | MANIFOLD | 2 | A1B102252 | |
| 0021-38799 | SPACERTEFLON | 2 | A1B102253 | |
| 0021-38826 | SLEEVE INCONEL CASSETTE | 1 | A1B102254 | |
| 0021-38828 | BEARING PLASTIC INDEXER HOUSINGLL NB 5200 | 24 | A1B102255 | |
| 0021-38830 | BEARING PLASTICCASSETTE HANDLER CENTUR | 3 | A1B102256 | |
| 0021-38833 | PLATFORM ELECTRO POLISH | 2 | A1B102257 | |
| 0021-39748 | BLOCKER PERF | 7 | A1B102258 | |
| 0021-39885 | LIDCLAMPISOLATORTXZ | 1 | A1B102259 | |
| 0021-39905 | ADAPTOR TOP | 1 | A1B102260 | |
| 0021-39935 | LINER UPPER | 1 | A1B102261 | |
| 0021-39942 | LINER INNER PUMP PORT | 10 | A1B102262 | |
| 0021-39971 | LINERTHROTTLE PORTLOWERIPS | 8 | A1B102263 | |
| 0021-39995 | LINER UPPER | 2 | A1B102264 | |
| 0021-40317 | LIFT PIN HOLDERS 5300 | 3 | A1B102265 | |
| 0021-70220 | ENDURA HOT-E-CHUCK AL DEPO RING | 33 | A1B102266 | |
| 0021-70281 | COVER FRONT CHAMBER DPS POLY | 5 | A1B102267 | |
| 0021-70282 | COVER BACK CHMBR COOLING DPS POLY | 5 | A1B102268 | |
| 0021-70378 | MANIFOLD | 9 | A1B102269 | |
| 0021-76158 | CASE WINDOW ORIENTER OCR | 1 | A1B102270 | |
| 0021-76453 | BRACKET OCR CAMERA INTERFACE ORIENTER | 1 | A1B102271 | |
| 0021-76454 | BRACKET OCR CAMERA MOUNT ORIENTER | 1 | A1B102272 | |
| 0021-76559 | BLOCK NEST 150MM | 1 | A1B102273 | |
| 0021-76564 | COVER LAMP SIDE WIDEBODY CHAMBER | 1 | A1B102274 | |
| 0021-76690 | DESPOSITION RING | 4 | A1B102275 | |
| 0021-76742 | OUTRIGGER SUPPORT BARSMIF INTERFACECENTURA MF | 1 | A1B102276 | |
| 0021-77006 | COUNTERWEIGHTEXT | 1 | A1B102277 | |
| 0021-77031 | SHIELDPADCOND. BACK | 2 | A1B102278 | |
| 0021-77073 | SPACER HARMONIC DRIVE | 5 | A1B102279 | |
| 0021-77124 | STAND ROLLER ASSY | 2 | A1B102280 | |
| 0021-77125 | BRUSHROLLERASSEMBLY | 14 | A1B102281 | |
| 0021-77145 | 8 PEDESTAL POLITEX PAD REV.2 | 13 | A1B102282 | |
| 0021-77415 | PAD HEAD INSTALLATION | 2 | A1B102283 | |
| 0021-77501 | TEE-DI WATER | 2 | A1B102284 | |
| 0021-77502 | LOOM-FIBER OPT | 2 | A1B102285 | |
| 0021-77623 | NOZZLE-RIGHT | 2 | A1B102286 | |
| 0021-77624 | MEMBRANE WAFER 8'' | 129 | A1B102287 | |
| 0021-77625 | NOZZLE-LEFT | 6 | A1B102288 | |
| 0021-77647 | DDF3IC4NUT | 12 | A1B102289 | |
| 0021-77922 | HOUSING GIMBAL BASE | 2 | A1B102290 | |
| 0021-78077 | SHOULDERCOVER | 3 | A1B102291 | |
| 0021-78788 | CMP RACK BRACKET | 1 | A1B102292 | |
| 0021-78797 | STRAINRELIEFFLEXCABLEROBOT | 3 | A1B102293 | |
| 0021-79305 | BRACKET | 2 | A1B102294 | |
| 0021-79340 | GUARDOUTER300MMLOADCUP | 2 | A1B102295 | |
| 0021-79552 | UNDER COVER | 4 | A1B102296 | |
| 0021-90082 | COVER | 3 | A1B102297 | |
| 0021-90405 | LINERENDCATHODETUNGSTEN | 6 | A1B102298 | |
| 0021-90441 | APERTURE PLATE | 2 | A1B102299 | |
| 0021-90649 | INSULATOR CAP | 4 | A1B102300 | |
| 0021-90653 | COVER PLASMA HEAD | 1 | A1B102301 | |
| 0021-90851 | SHIELD INSULATOR | 4 | A1B102302 | |
| 0022-77155 | PLATE MEMBRANE SUPPORT | 3 | A1B102303 | |
| 0022-77166 | SHAFT DRIVE 200W MOTOR INPUT STATION | 1 | A1B102304 | |
| 0022-77251 | COLLAR 4 SLURRY DISPENSE ARM | 1 | A1B102305 | |
| 0022-77273 | SLEEVE 200 MM MESA | 3 | A1B102306 | |
| 0022-77548 | RING EDGE CONTROL W+ CARRIERS | 3 | A1B102307 | |
| 0023-04098 | CUP CALIBRATION | 3 | A1B102308 | |
| 0030-00027 | BLOCK MOUNTING SHUT OFF VALVE | 4 | A1B102309 | |
| 0030-00137 | COVER CAP 1/4-20 SCREW (PACK OF 10) | 6 | A1B102310 | |
| 0030-00169 | CLIP PED | 274 | A1B102311 | |
| 0030-00170 | CLIP (PACK OF 10) | 4 | A1B102312 | |
| 0030-00171 | STOP SPRING (PACK OF 10) | 11 | A1B102313 | |
| 0030-00173 | STOP SPRING VALVE | 129 | A1B102314 | |
| 0030-00184 | WAFER BUTTON MOLDED | 100 | A1B102315 | |
| 0030-00190 | HOUSING | 47 | A1B102316 | |
| 0030-00195 | LG FACE SEAL | 3 | A1B102317 | |
| 0030-00196 | LARGE FACE SEAL 200MM | 18 | A1B102318 | |
| 0030-00216 | COVER SCREW (PACK OF 10) | 1 | A1B102319 | |
| 0030-00218 | RING PEDESTAL BOTTOM | 1 | A1B102320 | |
| 0030-00219 | RING PEDESTAL TOP/MID | 40 | A1B102321 | |
| 0030-00237 | RING PEDESTAL BOTTOM | 16 | A1B102322 | |
| 0030-00242 | COVER CAP 1/4-20 SCREW (PACK OF 10) | 10 | A1B102323 | |
| 0030-00243 | SCREW SHCS COVER #8 (PACK OF 10) | 56 | A1B102324 | |
| 0030-00246 | LIP SEAL 365ID X .130 THK | 5 | A1B102325 | |
| 0030-01005 | SPACER TRAYS ARDELL (PACK OF 10) | 12 | A1B102326 | |
| 0030-01038 | CLIP WAFER | 459 | A1B102327 | |
| 0030-09026 | 8 SLOT ELEVATOR COM | 2 | A1B102328 | |
| 0030-09027 | TC AMPLIFIER | 1 | A1B102329 | |
| 0030-09036 | SEAL FINGER HOLE | 61 | A1B102330 | |
| 0030-09048 | ENCODER ROTARY | 1 | A1B102331 | |
| 0030-09049B | 125MM (5IN.) PEDESTAL FACE C2SC513 | 27 | B1C100134 | |
| 0030-09052 | SEAL LARGE FACE NOTCH | 86 | A1B102332 | |
| 0030-09055 | SEAL LARGE FACE 125MM | 25 | A1B102333 | |
| 0030-09057 | MARK II PANEL | 1 | A1B102334 | |
| 0030-40030 | O-RINGGINGERBREADLIFT BASEESC | 1 | A1B102335 | |
| 0030-60013 | RING | 1 | A1B102336 | |
| 0030-60020 | COVER | 1 | A1B102337 | |
| 0030-60032 | BRACKET | 8 | A1B102338 | |
| 0030-60034 | SHIELDCAP COMOSITE EXTD 6'' | 6 | A1B102339 | |
| 0030-60037 | OVERLAYTRAY SUPPORT EXTD 6'' | 12 | A1B102340 | |
| 0030-70001 | BUTTON SWITCHEMO | 8 | A1B102341 | |
| 0030-70046 | MACHINING BRKT CLAMP SOURCE | 4 | A1B102342 | |
| 0030-70055 | FACE PLATE | 1 | A1B102343 | |
| 0030-70084 | TEFLON RING | 8 | A1B102344 | |
| 0030-76001 | MACHINE CASTING HSG STORAGE E | 1 | A1B102345 | |
| 0035-00014 | CRANKDOOR INDE | 4 | A1B102346 | |
| 0035-00016 | SUPPORT STAND TUBING | 7 | A1B102347 | |
| 0035-00017 | CAP SUPPORT | 4 | A1B102348 | |
| 0035-00021 | RING PEDESTAL TOP/MID | 19 | A1B102349 | |
| 0035-00025 | BELL JAR INDEXER MACHINE | 1 | A1B102350 | |
| 0035-00027 | BRACKET | 1 | A1B102351 | |
| 0035-00028 | BRACKET CLEVIS MTG MACH LEFT | 2 | A1B102352 | |
| 0035-00030 | CRANK-COUPLING RIGHT | 3 | A1B102353 | |
| 0035-00034 | CRANK BRACKET | 6 | A1B102354 | |
| 0035-00072 | SHIELDTOP | 13 | A1B102355 | |
| 0035-00074 | TOP SHIELD | 1 | A1B102356 | |
| 0035-00077 | PEDESTAL RING | 38 | A1B102357 | |
| 0040-000103 | BELLOWS ACTUATOR GATE | 1 | A1B102358 | |
| 0040-00059 | STAND OFF CATHODE | 7 | A1B102359 | |
| 0040-00076 | LOWER MANIFOLD ASSY | 1 | A1B102360 | |
| 0040-00089 | PROCESS ROUGH LNE LOWER | 1 | A1B102361 | |
| 0040-00097 | BASEPLATE WLDMT ROUGHLINE | 1 | A1B102362 | |
| 0040-00101 | WELDMENT TURBO FO | 2 | A1B102363 | |
| 0040-00103 | BELLOWS ACTUATOR VALVE | 2 | A1B102364 | |
| 0040-00130 | TUBING WELDMENT | 1 | A1B102365 | |
| 0040-00159 | HOSE CRYO VACUUM LINE | 2 | A1B102366 | |
| 0040-00162 | RF CONTACT ASSY | 3 | A1B102367 | |
| 0040-00181 | LOAD ROUGH LINE | 2 | A1B102368 | |
| 0040-00186 | MANIFOLD T WELDMENT | 9 | A1B102369 | |
| 0040-00188 | AUX TUBE GAS DIST UPPER | 4 | A1B102370 | |
| 0040-00249 | PORT SCREEN AL COARSE METAL | 6 | A1B102371 | |
| 0040-00250 | OPERATOR CONTROL PANEL ASSEMBLY | 5 | A1B102372 | |
| 0040-00263 | SCREEN 1'' PORT | 5 | A1B102373 | |
| 0040-00267 | TUBE FLEX CAP MAN | 6 | A1B102374 | |
| 0040-00305 | HOUSING RF MICRO MATCH | 1 | A1B102375 | |
| 0040-00310 | COIL RF MATCH | 8 | A1B102376 | |
| 0040-00311 | BAFFLE TURBO PORT | 7 | A1B102377 | |
| 0040-00312 | GAS LINE #I VCR | 3 | A1B102378 | |
| 0040-00313 | GAS LINE #II VCR | 2 | A1B102379 | |
| 0040-00314 | GAS LINE #III VCR | 2 | A1B102380 | |
| 0040-00316 | MANIFOLD GAS DIST.WLDMNT VCR | 1 | A1B102381 | |
| 0040-00317 | GAS TUBE WELDMENT | 6 | A1B102382 | |
| 0040-00318 | MANIFOLD WELDMENT | 2 | A1B102383 | |
| 0040-00322 | FITTING MFC 1/4 VCR INLET FEMALE | 1 | A1B102384 | |
| 0040-00324 | GAS FEED THRU WELDMENT | 2 | A1B102385 | |
| 0040-00347 | PEDESTAL | 1 | A1B102386 | |
| 0040-00401 | FASTENER BRACKETRECEIVER | 8 | A1B102387 | |
| 0040-00442 | TUBE GAS WELDMENT | 3 | A1B102388 | |
| 0040-00443 | GAS TUBE | 27 | A1B102389 | |
| 0040-00454 | LAZER REVIEW PART | 1 | A1B102390 | |
| 0040-00456 | CABLE ASSY FOBER OPTIC ZO | 1 | A1B102391 | |
| 0040-00457 | CABLE FIBER OPT 6 FT | 1 | A1B102392 | |
| 0040-00518 | GAS LINE | 1 | A1B102393 | |
| 0040-00519 | GASLINE | 2 | A1B102394 | |
| 0040-00523 | HEXACORD | 5 | A1B102395 | |
| 0040-00524 | GAS LINE | 1 | A1B102396 | |
| 0040-00537 | HELIUM CONTROL MANIFOLD IHC | 3 | A1B102397 | |
| 0040-00539 | ELBOW JOINT | 3 | A1B102398 | |
| 0040-00540 | ELBOW JOINT | 3 | A1B102399 | |
| 0040-00551 | ADAPTOR WELDMENT BARATRON | 1 | A1B102400 | |
| 0040-00555 | CHAMBER SHIELD FRONT | 2 | A1B102401 | |
| 0040-00556 | CHAMBER SHIELD | 2 | A1B102402 | |
| 0040-00557 | CHAMBER SHIELD (2) | 2 | A1B102403 | |
| 0040-00558 | CHAMBER SHIELD (3) | 2 | A1B102404 | |
| 0040-00559 | CHAMBER SIDE SHIELD 4 | 2 | A1B102405 | |
| 0040-00560 | CHAMBER SHIELD REAR | 2 | A1B102406 | |
| 0040-00564 | GAS LINE | 1 | A1B102407 | |
| 0040-00567 | HE DELIVERY LINE CHD INITIAL IHC | 1 | A1B102408 | |
| 0040-00592 | ROLLER FLATFINDER | 8 | A1B102409 | |
| 0040-00594 | TUBE KEYED GAS | 55 | A1B102410 | |
| 0040-00694 | LABYRINTHRIGIDCOIL SUPPORT | 1 | A1B102411 | |
| 0040-01009 | GAS MODULE TUBE | 2 | A1B102412 | |
| 0040-01029 | NUT HOIST LEADSCREW FOLL | 6 | A1B102413 | |
| 0040-01079 | BRACKET | 6 | A1B102414 | |
| 0040-01080 | CONNECTOR FLEXIBLE | 3 | A1B102415 | |
| 0040-01215 | COVERRF OUTPUTENI 28B | 3 | A1B102416 | |
| 0040-01227 | TUBE CONDUCTANCE | 2 | A1B102417 | |
| 0040-01242 | BRKT LCF EMITTER XFER CH LID MOUNT | 3 | A1B102418 | |
| 0040-01680 | BRACKET SYSTEM MANIFOLD INLET | 1 | A1B102419 | |
| 0040-02261 | BLADE SHUTTER 8'' CU LT BESC 2 PIN | 1 | A1B102420 | |
| 0040-02297 | BASE STAND | 2 | A1B102421 | |
| 0040-02496 | TOP CAN SOURCE | 1 | A1B102422 | |
| 0040-02526 | FACEPLATE RF GENERATOR DPS | 1 | A1B102423 | |
| 0040-02954 | MOUNTING RINGDOME.40'''' COIL HTHR DTC | 5 | A1B102424 | |
| 0040-03024 | SHIELD HEATERTOP SPOOL | 1 | A1B102425 | |
| 0040-03025 | SHIELD HEATER BOTTOM SPOOL | 1 | A1B102426 | |
| 0040-03263 | SLIT VALVE INSERT | 1 | A1B102427 | |
| 0040-03713 | RINGMOUNTINGDOMEES DTCUPOL | 2 | A1B102428 | |
| 0040-03770 | PUMPING PLATE DXZLID | 1 | A1B102429 | |
| 0040-04134 | STRAP GROUNDING SHIELD SUPPORT | 2 | A1B102430 | |
| 0040-04221 | LIDLEXANSLIT LINER DOOR | 3 | A1B102431 | |
| 0040-04355 | BRACKET 13.56 MHZ VAC RELAY FILTER | 1 | A1B102432 | |
| 0040-04586 | INNER SHIELD | 3 | A1B102433 | |
| 0040-04626 | ASSY FORK BLADE WAFER LOADERECP | 1 | A1B102434 | |
| 0040-05988 | SUPPORTARC CHAMBERLOWER | 1 | A1B102435 | |
| 0040-05997 | SHROUDLEXANSLIT LINER DOOR | 3 | A1B102436 | |
| 0040-06460 | WATLOW BLANKOFF PANEL | 1 | A1B102437 | |
| 0040-06596 | TXZ LID FRAME | 1 | A1B102438 | |
| 0040-07090 | WAFER GRIP WEDGE POST SRD SPIDER ECP | 8 | A1B102439 | |
| 0040-07289 | MANIFOLDHEAT EXC LINETWO CH TXZ | 3 | A1B102440 | |
| 0040-07291 | PEDESTAL RING DEP | 3 | A1B102441 | |
| 0040-07598 | BRKTENDURA STAND SUPPORT W/ HE MANIFOLD | 3 | A1B102442 | |
| 0040-08783 | BRACKET BOTTOM MOUNT MICROWAVE | 4 | A1B102443 | |
| 0040-08784 | BRACKET AJUSTMENT MOUNT MICROWAVE | 4 | A1B102444 | |
| 0040-08792 | BLADE SHUTTER TA/BESC | 1 | A1B102445 | |
| 0040-08953 | BLANKOFF SZBESC WTRBOX FLOW SWITCH | 1 | A1B102446 | |
| 0040-09019 | ENCLOSURE 12 LINE GAS PANEL | 1 | A1B102447 | |
| 0040-09021R | CHAMBER BODY ETCH RE-ANODIZED | 2 | A1B102448 | |
| 0040-09026 | MANIFOLD BLOCK 2:1 | 11 | A1B102449 | |
| 0040-09112 | LATCH PLATE | 1 | A1B102450 | |
| 0040-09125 | COVER PANEL | 2 | A1B102451 | |
| 0040-09134 | LIFTER FRAME | 2 | A1B102452 | |
| 0040-09152 | ENCLOSURE ELECTRONICS RIGHT | 2 | A1B102453 | |
| 0040-09157 | SHIELD | 2 | A1B102454 | |
| 0040-09159 | DOOR FRONT RIGHT | 3 | A1B102455 | |
| 0040-09163 | PANEL RIGHT | 1 | A1B102456 | |
| 0040-09165 | PLATE | 2 | A1B102457 | |
| 0040-09199 | BRACKET SUSC. LIFT | 2 | A1B102458 | |
| 0040-09217 | PIPECLUSTER EXHAUST THROTTLE VALVE N | 2 | A1B102459 | |
| 0040-09260 | BOXGASAMS | 1 | A1B102460 | |
| 0040-09261 | WSI PLATE PERF 125MM | 2 | A1B102461 | |
| 0040-09264 | PLATE COVER EXPANDED RS-232 | 8 | A1B102462 | |
| 0040-09308-A | 5''KITPLATEASSYTOP MOUNT | 3 | A1B102463 | |
| 0040-09340 | SCREEN TURBO ANODIZED | 1 | A1B102464 | |
| 0040-09345 | PANEL | 1 | A1B102465 | |
| 0040-09462 | CLAMPPREFIRE LAMPPRSP3 | 7 | A1B102466 | |
| 0040-09547 | CHAMBER SHIELD REAR UNIVERSAL | 2 | A1B102467 | |
| 0040-09548 | COVER WINDOW SIDE SHIELD UPER UNIVERSAL | 5 | A1B102468 | |
| 0040-09549 | CHAMBER SHIELD REAR UNIVERSAL | 1 | A1B102469 | |
| 0040-09560 | COVER WINDOW SIDE SHIELD LOWER UNIVERSAL | 3 | A1B102470 | |
| 0040-09581 | FINGER BASKET (L027B4B) | 2 | A1B102471 | |
| 0040-09604 | BRACKET | 2 | A1B102472 | |
| 0040-09629 | COVER KID LEFT POSN D ASP | 1 | A1B102473 | |
| 0040-09668 | ASSY BELLOWS SUSCEPTOR | 4 | A1B102474 | |
| 0040-09675 | BASE ESC | 3 | A1B102475 | |
| 0040-09701 | BELLOWS WELDMENT GASLINE | 1 | A1B102476 | |
| 0040-09706 | SHIELD GATE VALVE BOTTOM | 1 | A1B102477 | |
| 0040-09716 | PIPE | 1 | A1B102478 | |
| 0040-09719 | TOOLESC | 5 | A1B102479 | |
| 0040-09761 | REDUCTION BOXES | 3 | A1B102480 | |
| 0040-09762 | SHIELD FRONT SERVICABLE | 1 | A1B102481 | |
| 0040-09875 | JACK CONNECTOR | 2 | A1B102482 | |
| 0040-09902 | BYPASS-KF25 ROUGHLINE | 3 | A1B102483 | |
| 0040-09944 | BELLOWS GASLINE W/FLAT | 2 | A1B102484 | |
| 0040-09956 | ESC MXP OXIDE STANDARD CATHODE | 2 | A1B102485 | |
| 0040-09958 | SHELL ASSY 200MM NOTCH IS MONO5MIC | 2 | A1B102486 | |
| 0040-13131 | HOSE ASSYBRAID | 3 | A1B102487 | |
| 0040-13132 | HOSE ASSYBRAID | 3 | A1B102488 | |
| 0040-13142 | STANDSTEC LIQUID INJECTOR | 1 | A1B102489 | |
| 0040-13264 | ELBOWLLC EXHAUST TTFCENTURA COMMON | 12 | A1B102490 | |
| 0040-13278 | COVER OCR STAGES ORIENTER | 1 | A1B102491 | |
| 0040-13569 | COVER RF WATER BOX HT ESC | 1 | A1B102492 | |
| 0040-13599 | BRKT COVER LWRSUB-PNLSHORT | 1 | A1B102493 | |
| 0040-13600 | BRACKET COVER LOWER SUB-PANEL CENTURA | 1 | A1B102494 | |
| 0040-13658 | CLAMP HEATER 1.18 DIA SFT MTR HT ESC | 2 | A1B102495 | |
| 0040-13659 | HEATER BLOCK | 1 | A1B102496 | |
| 0040-13844 | BRACKET OCR CAMERA CHASSIS ORIENTER | 1 | A1B102497 | |
| 0040-13845 | COVER OCR CAMERA ACCESS ORIENTER | 1 | A1B102498 | |
| 0040-13846 | BRACKET EXTENSION COMPUTER RACK ORIENTER | 1 | A1B102499 | |
| 0040-13848 | COVER OCR CONTROLLER ORIENTER | 1 | A1B102500 | |
| 0040-18157 | COVER SERIPLEX GEN RACK HDP-CVD ULTIMA | 9 | A1B102501 | |
| 0040-20030 | ADAPTOR CONV.VENT & CRYO XFR LLC | 1 | A1B102502 | |
| 0040-20048 | LAMP FEEDTHRU | 57 | A1B102503 | |
| 0040-20142 | GAS FILTER | 2 | A1B102504 | |
| 0040-20165 | BRACKET VCR CROSS | 1 | A1B102505 | |
| 0040-20328 | SUPPORT | 3 | A1B102506 | |
| 0040-20330 | BRACKET | 1 | A1B102507 | |
| 0040-20561 | BELL JAR PRECLEAN II | 19 | A1B102508 | |
| 0040-21176 | PRECLEAN II BELL JAR | 1 | A1B102509 | |
| 0040-21178 | BELL JAR | 17 | A1B102510 | |
| 0040-21289 | ADAPTER 16'' CHAM DURASOURCE T | 1 | A1B102511 | |
| 0040-21367 | PEDESTALUNIVERSAL 200 MM 3 POINT | 3 | A1B102512 | |
| 0040-21516 | WATER BLOCK SOURCE MANIFOLD | 2 | A1B102513 | |
| 0040-21821 | COLLIMATOR | 1 | A1B102514 | |
| 0040-21826 | FLANGEEDWARDS PUMPCVD EXH SW | 7 | A1B102515 | |
| 0040-21838 | BRACKET VCR CROSS HEATR BYPAS | 1 | A1B102516 | |
| 0040-21934 | HANDLE | 1 | A1B102517 | |
| 0040-21985 | HPT-E-CHUCK AL WAFER HOLDER | 8 | A1B102518 | |
| 0040-22023 | ADAPTOR SOURCE 13'' W/B | 1 | A1B102519 | |
| 0040-22038 | SHUTTER G3 GAS LINE CLAMP | 4 | A1B102520 | |
| 0040-22165 | COVER LAMP END | 1 | A1B102521 | |
| 0040-22360 | BRACKET ISO AMP MODULE ENDURA 5500 | 1 | A1B102522 | |
| 0040-22366 | PCII INTLK ROTATION RING ASSM @C | 1 | A1B102523 | |
| 0040-22415 | PANEL MANIFOLD REAR | 1 | A1B102524 | |
| 0040-22422 | PEDESTAL COOLDOWN | 4 | A1B102525 | |
| 0040-22824 | BRACKET | 2 | A1B102526 | |
| 0040-22848 | PLATE CORD STRAIN REFLIEF PWR-SVPP GEN RAK | 2 | A1B102527 | |
| 0040-22976 | BRACKET 2 STAGE LL VENT MAINFRAME SUPPORT | 2 | A1B102528 | |
| 0040-23147 | PANEL CH2 TURBO | 1 | A1B102529 | |
| 0040-23472 | BLANK-OFF HTESC PWR SUPPLY CHASSIS | 6 | A1B102530 | |
| 0040-23539 | BRACKET CASS PRESENT | 4 | A1B102531 | |
| 0040-31815 | ELECTROSTATIC CHUCK (DEEP TRENCH) | 29 | A1B102532 | |
| 0040-31845 | COVER CYLINDER SUPPORT | 1 | A1B102533 | |
| 0040-31846 | COVER ACCESS HELIUM AND WATER LINES | 2 | A1B102534 | |
| 0040-31943 | TOP LIDR2 CHAMBER OXIDE | 1 | A1B102535 | |
| 0040-31993 | CHAMBER SKIN CHAMBER | 3 | A1B102536 | |
| 0040-32148 | HEATER ASSY | 2 | A1B102537 | |
| 0040-32250 | LID-RPS 5000 1 3 N 4 | 2 | A1B102538 | |
| 0040-32263 | 8'' NN BIPOLAR ELECTROSTATIC CHUCK | 1 | A1B102539 | |
| 0040-32286 | PLATE ADAPTER 3.4 X 1.7 SAPPHIRE | 2 | A1B102540 | |
| 0040-32419 | BRACKET MOUNTING | 4 | A1B102541 | |
| 0040-32543 | RING MAGNET LOWER | 1 | A1B102542 | |
| 0040-32552 | BLADE THROTTLE VALVE | 4 | A1B102543 | |
| 0040-33083 | PANEL/PLATEN PAD DRIVERS | 5 | A1B102544 | |
| 0040-33242 | HOUSING TOP INPUT STATION 200MM MESA | 1 | A1B102545 | |
| 0040-34326 | HOUSING PRODUCER U | 1 | A1B102546 | |
| 0040-35553 | BELLOWS | 3 | A1B102547 | |
| 0040-36095 | BELLOWS HEATER LIFT | 2 | A1B102548 | |
| 0040-36290 | BELLOWSLOWER DCXZ | 1 | A1B102549 | |
| 0040-36299 | WELDMENT BELLOWS ASSY LOWER GIGA FILL | 1 | A1B102550 | |
| 0040-36300 | WELDMENT BELLOWS ASSY UPPER GIGA FILL | 1 | A1B102551 | |
| 0040-36425 | SHELL ASSY200MM MIN SHWR DBL NOT | 3 | A1B102552 | |
| 0040-36749 | BAFFLE UPPER ATM EXHAUST | 6 | A1B102553 | |
| 0040-36750 | BAFFLE LOWER ATM EXHAUST | 5 | A1B102554 | |
| 0040-39131 | POWER STRIP | 1 | A1B102555 | |
| 0040-39621 | CYLINDER SUPPORT COVER | 2 | A1B102556 | |
| 0040-39894 | WELDMENT TBG APPLICATOR VER B UWAVE | 1 | A1B102557 | |
| 0040-39947 | PRODUCER CERAMIC HEATER ALUMINUM BASE | 1 | A1B102558 | |
| 0040-40047 | PAD LEVELING 3/4-10 | 2 | A1B102559 | |
| 0040-41924 | ESC ASSY 200MM SNNF DPS HT CATHODE | 1 | A1B102560 | |
| 0040-43516 | END EFFECTOR BUFFER PRODUCER | 3 | A1B102561 | |
| 0040-47051 | CU BULKHEADCABLEMOTORIZEDTILTIECP | 1 | A1B102562 | |
| 0040-54484 | EXHAUST TEE TURBO 200MM TXZ | 1 | A1B102563 | |
| 0040-70184 | POST PVD CHAMBER CART | 1 | A1B102564 | |
| 0040-75705 | BRACKET OCR CONTROLLER ORIENTER | 1 | A1B102565 | |
| 0040-76022 | PLATE ADAPTER E-RACK COOLING | 1 | A1B102566 | |
| 0040-76083 | ADAPTER MALE QUICK DISCONNECT 3/4'' | 1 | A1B102567 | |
| 0040-76084 | ADAPTER FEMALE QUICK DISCONNECT 3/4'' | 1 | A1B102568 | |
| 0040-76368 | MANIFOLD SHORT | 1 | A1B102569 | |
| 0040-77013 | MIRRA ROBOT BLADE | 4 | A1B102570 | |
| 0040-77153 | TRAYCASSETTE | 2 | A1B102571 | |
| 0040-77176 | SPINDLE | 1 | A1B102572 | |
| 0040-77180 | BASEGIMBAL | 1 | A1B102573 | |
| 0040-77192 | PIN ANTI ROTATION | 1 | A1B102574 | |
| 0040-77207 | QUARTZ | 3 | A1B102575 | |
| 0040-77243 | RING | 13 | A1B102576 | |
| 0040-77317 | DIAMOND DISC. CARRIER | 2 | A1B102577 | |
| 0040-77461 | SPINDLE | 1 | A1B102578 | |
| 0040-77486 | REAR RACK CAS | 2 | A1B102579 | |
| 0040-77492 | SUPPORT 8'' CAS | 2 | A1B102580 | |
| 0040-77516 | SENSOR MOUNT | 8 | A1B102581 | |
| 0040-77517 | FLAG | 8 | A1B102582 | |
| 0040-77519 | SPACER | 8 | A1B102583 | |
| 0040-77799 | RETAINING RING COMPOSITE (NOGROOVES) | 31 | A1B102584 | |
| 0040-78072 | PANEL CENTER SHORT MIRRA | 1 | A1B102585 | |
| 0040-78261 | EM TUBE8 INCHTITANHEADPROFILER | 11 | A1B102586 | |
| 0040-90098 | FILTER AIR CTRL MODULE | 2 | A1B102587 | |
| 0040-91763 | ASSY BELLOWS 100-150MM | 1 | A1B102588 | |
| 0040-91878 | PILLAR EXTRACT | 1 | A1B102589 | |
| 0040-93051 | SHOE PICK UP | 1 | A1B102590 | |
| 0040-93337 | TUBE GASINE ASSY | 1 | A1B102591 | |
| 0040-93340 | OVEN NOZZLE | 30 | A1B102592 | |
| 0040-93481 | GASLINE ASSY INSULATED | 6 | A1B102593 | |
| 0040-93721 | MAGNET ASSY (PLASMA HEAD) | 3 | A1B102594 | |
| 0040-93953 | CGA 330 GAS PIG TAIL | 1 | A1B102595 | |
| 0040-94019 | FILAMENT R/H | 3 | A1B102596 | |
| 0040-94052 | INSERT HSINK COATED 150-0 DEG | 1 | A1B102597 | |
| 0040-94133 | SEALING NUT | 4 | A1B102598 | |
| 0040-94236 | BRACKET | 3 | A1B102599 | |
| 0040-94347 | NOZZLE OVEN MK2 | 6 | A1B102600 | |
| 0040-94526 | CLAMP 2.4 DIA RH FILAMENT | 2 | A1B102601 | |
| 0040-94526 | FILAMENT 2.4 R/H (9500) | 4 | B1C100206 | |
| 0040-95005 | ADAPTORKF251'' BSP MALEMOD | 3 | A1B102602 | |
| 0040-9529 | KIT, HEAT SINK INSRT 200MM/0 DEG-AMI | 8 | B1C100223 | |
| 0040-95790 | SHOE PICK-UP 150MM | 3 | A1B102603 | |
| 0040-96352 | E-SUPPORT BARCATHODEDIA16.5 | 3 | A1B102604 | |
| 0040-96352 | SUPPORT BAR, CATHODE DIAM. 16.5 | 2 | B1C100199 | |
| 0040-96373 | STRAPCONNECTING ASSY. | 1 | A1B102605 | |
| 0040-96829 | SHAFT ASSY BELLOW | 2 | A1B102606 | |
| 0040-96830 | TU. CATHODE BUTTON 3MM | 13 | B1C100200 | |
| 0040-96923 | PIGTAILCGA 330 | 2 | A1B102607 | |
| 0040-97400 | FORELINE | 1 | A1B102608 | |
| 0040-97401 | VAC MANIFOLD.550LG/KF40 | 1 | A1B102609 | |
| 0045-00002 | MOTOR MOUNTS ROBOT DRIVE | 1 | A1B102610 | |
| 0045-00013 | CLAMP GAS TUBE (REPLACES 0300-00003) | 13 | A1B102611 | |
| 0045-0002 | MOUNT ROBOT | 1 | A1B102612 | |
| 0045-00030 | RING PEDESTAL | 97 | A1B102613 | |
| 0045-00031 | RING PEDESTAL BOTTOM | 113 | A1B102614 | |
| 0045-01001 | 5''HUB AND NUT ASSY | 2 | A1B102615 | |
| 0045-96525 | FIXED CLIP - SILICON SPRAYED, 200-0 |
4 | B1C100219 | |
| 0050-00032 | TUBING GAS SUPPLY CHMA | 5 | A1B102616 | |
| 0050-00033 | TUBING GAS SUPPLY CHMB | 2 | A1B102617 | |
| 0050-00081 | WELDMENT 1/2 CPV X 3/4 COMP BE C | 2 | A1B102618 | |
| 0050-00516 | WELDMENT EXHAUST TUBE VER B UWAVE WXZ | 1 | A1B102619 | |
| 0050-00786 | GASLINE A5 BASIC ZM CH A SEGIII MCVD COMMON | 1 | A1B102620 | |
| 0050-00798 | GASLINE A3 BASIC ZM CH A SEG III MCVD COMMON | 1 | A1B102621 | |
| 0050-02390 | WLDBTM FEED EVENMANUAL VALVE UPPER CO | 1 | A1B102622 | |
| 0050-02534 | GAS LINE | 1 | A1B102623 | |
| 0050-03432 | LINE NUPRO | 1 | A1B102624 | |
| 0050-03433 | LINE NUPRO | 1 | A1B102625 | |
| 0050-03434 | LINE NUPRO | 1 | A1B102626 | |
| 0050-03435 | LINE NUPRO | 1 | A1B102627 | |
| 0050-03436 | LINE NUPRO | 1 | A1B102628 | |
| 0050-03437 | LINE NUPRO | 1 | A1B102629 | |
| 0050-03438 | LINE NUPRO | 1 | A1B102630 | |
| 0050-03439 | LINE NUPRO | 1 | A1B102631 | |
| 0050-03440 | LINE NUPRO | 1 | A1B102632 | |
| 0050-03441 | LINE NUPRO | 1 | A1B102633 | |
| 0050-03755 | GAS LINE | 3 | A1B102634 | |
| 0050-03766 | GAS LINE | 1 | A1B102635 | |
| 0050-03927 | GAS LINE | 1 | A1B102636 | |
| 0050-03937 | WELDMENT H2O SUPPLY CHA | 2 | A1B102637 | |
| 0050-04523 | GAS LIINE | 1 | A1B102638 | |
| 0050-04899 | GAS LINE O2 SENSOR EXHAUST CH.B | 1 | A1B102639 | |
| 0050-04938 | WELDMENT | 1 | A1B102640 | |
| 0050-04942 | WELDMENT AR MANIFOLD | 4 | A1B102641 | |
| 0050-05037 | GAS LINE | 1 | A1B102642 | |
| 0050-05061 | WELDMENT MANIFOLD | 1 | A1B102643 | |
| 0050-05172 | GL HGL CHA DUMP IM BASIC | 1 | A1B102644 | |
| 0050-05980 | WELDMENTSLIT PURGE CHAMBER ADAPTER | 1 | A1B102645 | |
| 0050-06116 | WLDMT FORELINE POSITION A ULTIMA | 1 | A1B102646 | |
| 0050-06184 | GAS LINE | 3 | A1B102647 | |
| 0050-06817 | WELDMENT WXZ | 1 | A1B102648 | |
| 0050-07002 | MANIFOLD CHAMBER FINAL CVD T | 1 | A1B102649 | |
| 0050-07584 | PUMPING LINE CH-B VACUUM | 1 | A1B102650 | |
| 0050-08003 | GAS LINE | 6 | A1B102651 | |
| 0050-08252 | WLDTEXTEGNSIONHE LINEDUAL Z | 3 | A1B102652 | |
| 0050-08258 | WLDTHE LINEIHC TO DUMP VALVE | 1 | A1B102653 | |
| 0050-08268 | WIDTHE LINEIHC TO FORELINE T | 1 | A1B102654 | |
| 0050-09003 | TUBE WELDMENT 3:1 OFFSET | 1 | A1B102655 | |
| 0050-09009 | TUBE WELDMENT FINAL LINE | 1 | A1B102656 | |
| 0050-09019 | TUBE WELDMENT ELBOW FILT | 5 | A1B102657 | |
| 0050-09032 | PIPING | 1 | A1B102658 | |
| 0050-09057 | TUBE WELDMENT CAP MAN | 1 | A1B102659 | |
| 0050-09080 | STAINLESS STEEL TUBE | 1 | A1B102660 | |
| 0050-09377 | ELBOW | 3 | A1B102661 | |
| 0050-09385 | WELDMONT MANIFOLD | 3 | A1B102662 | |
| 0050-09386 | WELDEMENTGASTUBE | 6 | A1B102663 | |
| 0050-09387 | SPOOL CHAMBER (AR PURGE) | 2 | A1B102664 | |
| 0050-09595 | TUBE GAS SUPPLY POSN A&D | 2 | A1B102665 | |
| 0050-09597 | TUBE GAS SUPPLY B&C | 1 | A1B102666 | |
| 0050-09644 | ADAPTOR VALVE TO MAN | 14 | A1B102667 | |
| 0050-09670 | TUBE WELDMENT TEOS IN LIQUIED SOURCE ENC | 2 | A1B102668 | |
| 0050-09678 | GAS LINE | 1 | A1B102669 | |
| 0050-09754 | PUMPING WLDMNT MANIFOLD SINGLE VALVE | 1 | A1B102670 | |
| 0050-09789 | VALVE WLDMNT FINAL VALVE | 89 | A1B102671 | |
| 0050-09877 | 5''GAS FEED WELDMENT | 1 | A1B102672 | |
| 0050-09880 | GAS VALVE | 4 | A1B102673 | |
| 0050-09953 | WELDMENT MANIFOLD WFG PAIR MIXER | 1 | A1B102674 | |
| 0050-10048 | ADAPTOR VALVE UNSHIELDED | 1 | A1B102675 | |
| 0050-10106 | WELDMENT LINE CH A 28 LI | 1 | A1B102676 | |
| 0050-10140 | WELDMENT GAS TUBE | 4 | A1B102677 | |
| 0050-10167 | MANIFOLD WELDMENT HE VENT | 3 | A1B102678 | |
| 0050-10186 | ADAPTER MANOMETER VALVE TO ADAPTER | 29 | A1B102679 | |
| 0050-10194 | WELDM'T EDGE PURGE WX2 | 1 | A1B102680 | |
| 0050-10239 | WELDMENT TIN/HE N2 INTERCONNECTCVD TIN | 2 | A1B102681 | |
| 0050-10256 | WELDMENTAR PURGE | 1 | A1B102682 | |
| 0050-10259 | GAS LINE FLEX | 2 | A1B102683 | |
| 0050-10308 | ELBOW SAE TO 1/2 MALE VCR | 9 | A1B102684 | |
| 0050-10309 | WELDMENT BYPASS ROUGH LINE VER PHASE III | 5 | A1B102685 | |
| 0050-10312 | TUBE GAS | 1 | A1B102686 | |
| 0050-10477 | TUBE WELDMENT CHAMBER BLOWER | 9 | A1B102687 | |
| 0050-10588 | WELDMNT INLET W/O DIVERTER WXZ | 1 | A1B102688 | |
| 0050-10602 | GASLINE | 1 | A1B102689 | |
| 0050-10634 | GASLINE | 1 | A1B102690 | |
| 0050-13146 | 4 PORT MANIFOLD | 1 | A1B102691 | |
| 0050-14534 | WELDMENT WATER RETURN CH.C | 1 | A1B102692 | |
| 0050-14719 | WELDMENT N2 | 1 | A1B102693 | |
| 0050-16439 | LINESIH4CHAMBER | 1 | A1B102694 | |
| 0050-18587 | WELDMENTSIH4TOP | 1 | A1B102695 | |
| 0050-18588 | GAS LINETOP FEEDHDP | 7 | A1B102696 | |
| 0050-18714 | GAS LINE | 1 | A1B102697 | |
| 0050-20067 | GAS LINE CHAMBER2 PROCRESSMFC 8&9VCR | 2 | A1B102698 | |
| 0050-20068 | CH#2 PROCESS MFC 8 A | 1 | A1B102699 | |
| 0050-20072 | GAS LINE CHAMBER 3 HEATER | 2 | A1B102700 | |
| 0050-20199 | 2 STAGE VENT L/L CHAMBER RIGHT SIDE | 1 | A1B102701 | |
| 0050-20345 | LINE-NENT PRECLEAN LOWER | 1 | A1B102702 | |
| 0050-20406 | GASLIINE #5 SYSTEM MANIFOLD | 2 | A1B102703 | |
| 0050-20459 | GASLINE #0 LEFT 2 STAGE L/L VENT VCR | 1 | A1B102704 | |
| 0050-20461 | GASLINERIGHT 2 STAGE L/L VENT VCR | 1 | A1B102705 | |
| 0050-20572 | TUBING DIFFERENTIAL ELBOW 3/8 '' | 1 | A1B102706 | |
| 0050-20609 | GAS TUBE | 1 | A1B102707 | |
| 0050-20950 | UPPER GAS LINE CH3 MFC 12VCR | 1 | A1B102708 | |
| 0050-20951 | GASLINE MANIFOLD CH 3 PROCESS | 1 | A1B102709 | |
| 0050-21165 | GASLINE HTR CH 3 LOWER 5RA VA | 1 | A1B102710 | |
| 0050-21186 | GASLINE HTR BYPASS H2O CHMBR | 1 | A1B102711 | |
| 0050-21270 | INSULATORHEATERARNTM | 1 | A1B102712 | |
| 0050-21342 | GASLINE #2 SYSTEM MANIFOLD | 5 | A1B102713 | |
| 0050-21577 | CASLINE #3 SYSTEM MANIFOLD | 2 | A1B102714 | |
| 0050-21578 | GASLINE #4 SYSTEM MANIFOLD | 2 | A1B102715 | |
| 0050-21879 | AR GAS LINE | 2 | A1B102716 | |
| 0050-21983 | GAS LINE ADAPTER FEEDTHRU-MIXED | 1 | A1B102717 | |
| 0050-22569 | INSULATOR-GAS LINE | 4 | A1B102718 | |
| 0050-25088 | G3 SPIDER | 1 | A1B102719 | |
| 0050-25217 | HE GAS LINE | 2 | A1B102720 | |
| 0050-25229 | GASLINEPROCESS-CARRIERTXZCH2 | 2 | A1B102721 | |
| 0050-25237 | PROCESS-CARRIERTTXZCH2/3 | 3 | A1B102722 | |
| 0050-26295 | GAS LINE EDGE PURGE | 1 | A1B102723 | |
| 0050-26298 | STAINLESS STEEL GAS LINE | 1 | A1B102724 | |
| 0050-26319 | GAS LINE #8 | 3 | A1B102725 | |
| 0050-26320 | GASLINE | 2 | A1B102726 | |
| 0050-26323 | GASLINE | 1 | A1B102727 | |
| 0050-26324 | GASLINE | 1 | A1B102728 | |
| 0050-26704 | VENT LINE CHAMBER 3 UPPER | 1 | A1B102729 | |
| 0050-30395 | GAS MANIFOLD TUNGSTEN BACKSIDE | 2 | A1B102730 | |
| 0050-30514 | WELDMENT WATER LINE | 2 | A1B102731 | |
| 0050-30618 | GASLINE | 1 | A1B102732 | |
| 0050-30619 | GASLINE | 1 | A1B102733 | |
| 0050-30620 | GASLINE | 1 | A1B102734 | |
| 0050-30621 | GASLINE | 1 | A1B102735 | |
| 0050-30622 | GASLINE | 1 | A1B102736 | |
| 0050-30623 | GASLINE | 1 | A1B102737 | |
| 0050-30624 | GASLINE | 1 | A1B102738 | |
| 0050-30625 | GAS LINE | 1 | A1B102739 | |
| 0050-30761 | GAS LINES | 1 | A1B102740 | |
| 0050-30858-A | GAS LINE | 1 | A1B102741 | |
| 0050-30919 | GAS WELDMENT | 1 | A1B102742 | |
| 0050-30925 | WELDMENT ASSY | 2 | A1B102743 | |
| 0050-30966 | GAS FEED IN ASSY SSGD | 2 | A1B102744 | |
| 0050-31063 | GAS WELDMENT | 2 | A1B102745 | |
| 0050-31222 | WELDMT DIVERTER UWAVE WXZ | 1 | A1B102746 | |
| 0050-31485 | CH. C. WELDMENT MXP/MXP+ | 1 | A1B102747 | |
| 0050-31486 | WELDMENT C MXP/MXP+MAIN PROCESSC2 | 1 | A1B102748 | |
| 0050-31494 | WELDMENT C MXP/MXP+ MAIN PROCESS C3 | 1 | A1B102749 | |
| 0050-31502 | GAS FEED LINE | 1 | A1B102750 | |
| 0050-31529 | WELDMENT MXP/MXP+CHAMBER ADAPTER | 1 | A1B102751 | |
| 0050-31601 | WELDMENT GAS FEED | 1 | A1B102752 | |
| 0050-31609 | CH-D MXP PURGE LINE #3 PHII CMN MNFRM C | 1 | A1B102753 | |
| 0050-31610 | WLDMNTCH-D MXP HE DUMP TO VALVE PHII CMN MNFR | 1 | A1B102754 | |
| 0050-31611 | WLDMNTCH-D MXP HE DUMP TO IHC PHII CMN MNFR | 1 | A1B102755 | |
| 0050-31615 | CH B GAS LINE TO FRAME | 1 | A1B102756 | |
| 0050-31643 | CH-D MXP VENT LINE #1 PH II CMN MNFRM CL | 1 | A1B102757 | |
| 0050-32020 | GAS LINE | 2 | A1B102758 | |
| 0050-32076 | GAS LINE | 2 | A1B102759 | |
| 0050-32286 | FORELINE | 1 | A1B102760 | |
| 0050-32354 | GAS FEED LINE | 1 | A1B102761 | |
| 0050-32928 | GAS LINE | 1 | A1B102762 | |
| 0050-32930 | GAS LINE | 2 | A1B102763 | |
| 0050-33030 | WELDEMENT | 1 | A1B102764 | |
| 0050-33610 | FITTING GAS TUBE ASSY | 1 | A1B102765 | |
| 0050-33692 | GAS LINE MANIFOLD | 1 | A1B102766 | |
| 0050-33825 | VALVE TXZ THROTTLE WELDMENT | 36 | A1B102767 | |
| 0050-33961 | FORELINE | 1 | A1B102768 | |
| 0050-34171-A | GAS LINE | 2 | A1B102769 | |
| 0050-35533 | LINK XFER/PROCESS | 3 | A1B102770 | |
| 0050-35721 | LINE NUPRO | 2 | A1B102771 | |
| 0050-35922 | GAS LINE | 8 | A1B102772 | |
| 0050-35923 | GAS LINE | 1 | A1B102773 | |
| 0050-35990 | GAS VALVE | 1 | A1B102774 | |
| 0050-35996 | LINE 4 NUPRO CHAMBER A | 1 | A1B102775 | |
| 0050-36141 | GAS LINE MANIFOLD | 1 | A1B102776 | |
| 0050-36184 | GAS LINE | 7 | A1B102777 | |
| 0050-36194 | GAS LINE | 2 | A1B102778 | |
| 0050-36198 | LINERP EXH.CHAMBER -B | 1 | A1B102779 | |
| 0050-36199 | GAS LINE EXH. CHAM. B VALVE/BELLOW | 1 | A1B102780 | |
| 0050-36214 | GAS LINE PROCESS CHAMBER EXH. A/B MF | 1 | A1B102781 | |
| 0050-36239 | GAS LINE | 4 | A1B102782 | |
| 0050-36267 | LINE MANIFOLD 3/8 SOURCE | 6 | A1B102783 | |
| 0050-36337 | GAS LINE RP OR ATM EXH. CHMBR C. MF | 2 | A1B102784 | |
| 0050-36362 | GAS LINE MANIFOLD | 2 | A1B102785 | |
| 0050-37548 | GAS LINE | 1 | A1B102786 | |
| 0050-37555 | FORE LINE | 1 | A1B102787 | |
| 0050-37560 | GAS LINE | 3 | A1B102788 | |
| 0050-37563 | GAS LINE | 1 | A1B102789 | |
| 0050-37564 | GAS LINE | 1 | A1B102790 | |
| 0050-37568 | GAS LINE | 1 | A1B102791 | |
| 0050-37815 | TUBING COOLANT LINE | 5 | A1B102792 | |
| 0050-37878 | WELDMENT CHAMBER C VENT LINE C1 | 1 | A1B102793 | |
| 0050-38077 | FORE LINEUPPER | 1 | A1B102794 | |
| 0050-38160 | GAS FEED LINE | 1 | A1B102795 | |
| 0050-38189 | WELDMENTCH A IHC | 1 | A1B102796 | |
| 0050-38199 | WELDMENT CHAMBER B IHC TO FORELINE B2 | 1 | A1B102797 | |
| 0050-38207 | WELDMENT CHAMBER B VENT LINE B2 (MXP+) | 1 | A1B102798 | |
| 0050-38481 | BRACKET MANOMETER DPS MEC | 1 | A1B102799 | |
| 0050-38481-A | WELDMENT | 1 | A1B102800 | |
| 0050-38964 | GAS LINE RP EXH. TEE CHAMB | 1 | A1B102801 | |
| 0050-39100 | WELDMENT CHAMBER B MAIN FRAME PROCESS B3 | 1 | A1B102802 | |
| 0050-39124 | GAS LINE | 1 | A1B102803 | |
| 0050-39565 | GAS LINE | 2 | A1B102804 | |
| 0050-39609 | GAS LINE | 1 | A1B102805 | |
| 0050-39959 | GAS LINE CHMBR-D MXP HESUPPLY T CH PH II MNFRM | 1 | A1B102806 | |
| 0050-40015 | TUBE | 1 | A1B102807 | |
| 0050-40160 | VALVE MANIFOLD UNION | 1 | A1B102808 | |
| 0050-40309 | GAS LINE MANIFOLD | 2 | A1B102809 | |
| 0050-40494 | GAS LINE | 1 | A1B102810 | |
| 0050-40513-P1 | GAS LINE | 1 | A1B102811 | |
| 0050-40598-PO | GAS LINE | 1 | A1B102812 | |
| 0050-40601 | GAS LINE | 3 | A1B102813 | |
| 0050-40761 | EXHAUST WELDMENT LLCKMOD PR SW | 10 | A1B102814 | |
| 0050-40762 | TBG ELBOW LLCK EX MAN PR SW | 3 | A1B102815 | |
| 0050-40792-P2 | GAS LINE | 6 | A1B102816 | |
| 0050-40822-002 | GAS LINE | 2 | A1B102817 | |
| 0050-41235 | GAS LINE | 1 | A1B102818 | |
| 0050-41241-003 | GAS LINE MANIFOLD | 3 | A1B102819 | |
| 0050-41347 | GAS LINE VAC CHUCK HORIZONTAL CH2 TXZ | 1 | A1B102820 | |
| 0050-41773-001-A | GAS LINE MANIFOLD | 1 | A1B102821 | |
| 0050-42235-002 | GAS LINE | 2 | A1B102822 | |
| 0050-42411-001-A | GAS LINE | 1 | A1B102823 | |
| 0050-43103 | WELDMENT PURGE MICROWAVE WXZ SHORT FRAME | 1 | A1B102824 | |
| 0050-43104 | WELDMT APPLICATOR POSITION A&B | 1 | A1B102825 | |
| 0050-52785 | ADAPTOR TURBO LON | 1 | A1B102826 | |
| 0050-54509 | WELDMENT SPOOL 6.97'' M/F TPCC | 1 | A1B102827 | |
| 0050-54510 | WELDMENT SPOOL 3.49'' M/F TPCC | 1 | A1B102828 | |
| 0050-54577 | WELDMENT FINAL LEFT TO CH POS 6 TPCC | 1 | A1B102829 | |
| 0050-66160-A | GAS LINE MANIFOLD | 1 | A1B102830 | |
| 0050-66236-A | GAS LINE | 4 | A1B102831 | |
| 0050-70003 | WELDMENT | 1 | A1B102832 | |
| 0050-70005 | VENT LINE WELDMENT N2 LLC | 1 | A1B102833 | |
| 0050-70013 | ELBOW GAS LINE | 1 | A1B102834 | |
| 0050-70025 | LOAD LOCK DIFF | 1 | A1B102835 | |
| 0050-70084 | LINE-TURBO VENT | 1 | A1B102836 | |
| 0050-70091 | GAS LINE | 1 | A1B102837 | |
| 0050-70106 | GAS LINE | 1 | A1B102838 | |
| 0050-75161 | PLMB WELDMENTVER 4TEOSCH-BGAS PANEL | 2 | A1B102839 | |
| 0050-75244 | GAS LINE | 3 | A1B102840 | |
| 0050-75806 | GASLINE PROCESS UPPER CH D W/B CAJON | 1 | A1B102841 | |
| 0050-76043 | ADAPTOR ROUGH LINE FLEX NARROW BODY | 2 | A1B102842 | |
| 0050-76610 | 2 STAGE VENT LLK CHAMBER LEFT SIDE CAJON | 1 | A1B102843 | |
| 0050-76887 | GASLINE NBLL - B VENT CENTURA COMMON M/F | 1 | A1B102844 | |
| 0050-77119 | SLURRY SENSOR | 2 | A1B102845 | |
| 0050-77120 | SLURRY SENSOR | 2 | A1B102846 | |
| 0050-77121 | SLURRY SENSOR | 2 | A1B102847 | |
| 0050-77172 | TUBE ASSY | 2 | A1B102848 | |
| 0050-77173 | TUBE ASSY | 2 | A1B102849 | |
| 0050-77174 | TUBE ASSY | 2 | A1B102850 | |
| 005-07742 | GAS LIN MANIFOLD | 1 | A1B102851 | |
| 0050-80601 | FLEX TUBING | 1 | A1B102852 | |
| 0050-80607 | FLEX TUBING | 1 | A1B102853 | |
| 0050-80622 | FLEX TUBING | 1 | A1B102854 | |
| 0050-80818 | FLEX TUBING | 1 | A1B102855 | |
| 0050-80819 | FLEX TUBING | 1 | A1B102856 | |
| 0050-80820 | FLEX TUBING | 1 | A1B102857 | |
| 0050-80870 | FLEX TUBING | 4 | A1B102858 | |
| 0050-81203 | CABLE ASSY | 4 | A1B102859 | |
| 0060-00001 | SEAL | 3 | A1B102860 | |
| 0060-00011 | LABEL CAUTION | 1 | A1B102861 | |
| 0060-00012 | LABEL CHILLED WATER | 1 | A1B102862 | |
| 0060-00014 | LABEL AIR IN | 1 | A1B102863 | |
| 0060-00215 | LABEL ENDPOINT KEYBOARD | 1 | A1B102864 | |
| 0060-01007 | SENSOR BAND HEX DR. | 2 | A1B102865 | |
| 0060-01152 | DAUGHTER BOARD | 1 | A1C100107 | |
| 0060-09021 | LABEL CRT | 1 | A1B102866 | |
| 0060-09023 | LABEL BEZEL IDENTIFIER | 1 | A1B102867 | |
| 0060-09048 | COLOR SWATCH | 1 | A1B102868 | |
| 0060-21022 | LABEL 3 WAY WATER VALVE | 4 | A1B102869 | |
| 0060-21215 | LABEL ENDURA VHP FRONT PANEL | 1 | A1B102870 | |
| 0060-21442 | LAB WRNING HOT SURFACE | 1 | A1B102871 | |
| 0060-35221 | LABEL TERMINAL BLOCK | 3 | A1B102872 | |
| 0060-35350 | RTP ROBOT ALIGNMENT KIT | 1 | A1B102873 | |
| 0060-76075 | LABEL WARNING 120VAC LOCKOUT | 1 | A1B102874 | |
| 0060-76125 | LAB WRNING FUSE HAZ/ANSI MUTLILENG | 3 | A1B102875 | |
| 0060-76128 | LAB WRNING HAZ/VOLT SM HOR/ANSI | 4 | A1B102876 | |
| 0060-76187 | LAB WRNING MOVING PARTS PRESENT | 1 | A1B102877 | |
| 0068-22700 | BEARING | 29 | A1B102878 | |
| 0090-00018 | JUMPER PLUG ASSY | 1 | A1B102879 | |
| 0090-00021 | MOTOR ASSY | 1 | A1B102880 | |
| 0090-00022 | MOTOR ASSY | 1 | A1B102881 | |
| 0090-00026 | PRESSURE SWITCH HAL ATM | 2 | A1B102882 | |
| 0090-00027 | SWITCH PRESSURE SGL. POLE THRW | 2 | A1B102883 | |
| 0090-00082 | CIRCUIT BOARD | 1 | A1B102884 | |
| 0090-00091 | ESC ASSEMBLY 125 MM, SEMI MAJOR FLAT |
3 | B1C100204 | |
| 0090-00105 | ISO XFMER KIT | 6 | A1B102885 | |
| 0090-00139 | ELEC ASSY WB ENDURA 124 & D LTESC | 1 | A1B102886 | |
| 0090-00154 | PENDANT AND CABLE | 1 | A1B102887 | |
| 0090-00246 | ASSEMBLY, GEN RACK RF ON ROTA | 1 | A1C100108 | |
| 0090-00341 | ESC ENA BLOCK | 5 | A1B102888 | |
| 0090-00514 | PRESSURE SENSORINLET N2 | 2 | A1B102889 | |
| 0090-00915 | MEGASONIC TANK HIGH LEVEL SWITCH | 1 | A1B102890 | |
| 0090-00916 | MEGASONIC TANK HIGH LEVEL SWITCH | 1 | A1B102891 | |
| 0090-00917 | MEGASONIC TANK LOW LEVEL SWITCH | 1 | A1B102892 | |
| 0090-00923 | MOTOR ENCODER ASSYROBOT | 1 | A1B102893 | |
| 0090-00936 | HARNESS SWITCH CHEM FLOW BRUSH LDM | 1 | A1B102894 | |
| 0090-01022 | HRNSSINPTMODBUFRWFRSNSR | 4 | A1B102895 | |
| 0090-09002 | MOTOR | 1 | A1B102896 | |
| 0090-09010 | MOTOR STEPPER W/BRAKE | 5 | A1B102897 | |
| 0090-09017 | MOTOR ASSY ROBOT EXT. | 1 | A1B102898 | |
| 0090-09026 | RF GENERATOR OEM-6A | 1 | A1B102899 | |
| 0090-09027 | MOTOR ASSY CVD LIFTS | 4 | A1B102900 | |
| 0090-09038 | ASSY BLOWER CVD | 7 | A1B102901 | |
| 0090-09062 | ASSY THEMAL ELEC DRIVER | 2 | A1B102902 | |
| 0090-09068 | CABLE ASSY GEN RACK | 1 | A1B102903 | |
| 0090-09071 | DAQ MK II CHAS MOD | 3 | A1B102904 | |
| 0090-09084 | RF SWITCH | 2 | A1B102905 | |
| 0090-09085 | PAD FOR LID HEATERS | 2 | A1B102906 | |
| 0090-09115 | ASSYTHERMAL ELECTRIC DRIVER | 1 | A1B102907 | |
| 0090-09121 | CABLE ASSYHEATER | 1 | A1B102908 | |
| 0090-09137 | CABLE ASSY | 4 | A1B102909 | |
| 0090-09139 | PHOTOHELIC GAUGE (DWYER) | 2 | A1B102910 | |
| 0090-09147 | CONTACTHIGH VOLTAGE | 1 | A1B102911 | |
| 0090-09157 | BASE HV CONN CATHODE DPS MEC | 1 | A1B102912 | |
| 0090-09237 | ASSY PAD HEATER LID TRENCH NARROW | 2 | A1B102913 | |
| 0090-09273 | ESCMETAL | 3 | A1B102914 | |
| 0090-20003 | ASSYVALVESENSOR | 11 | A1B102915 | |
| 0090-20007 | SENSOR | 1 | A1B102916 | |
| 0090-20015 | P5500 ORIENTER OVERTEMP SENSOR HARNESS | 1 | A1B102917 | |
| 0090-20029 | WAFER SENSOR | 1 | A1B102918 | |
| 0090-20033 | CABLE ASSY | 4 | A1B102919 | |
| 0090-20040 | 4-WAY DOUBLE VALVE | 1 | A1B102920 | |
| 0090-20042 | 3 WAY VALVE | 7 | A1B102921 | |
| 0090-20043 | SOLENOID VALVE | 1 | A1B102922 | |
| 0090-20044 | ASSY 4 WAY DOUBLE VALVE | 2 | A1B102923 | |
| 0090-20054 | SW ASSY HEDLAND WATER FLOW METER | 1 | A1B102924 | |
| 0090-20065 | ASSY CONNECTIONGAUGE BYPASS | 3 | A1B102925 | |
| 0090-20108 | SENSOR CABLE ASSY | 3 | A1B102926 | |
| 0090-20135 | PNEUMATIC EV NVJ3243Y | 1 | A1B102927 | |
| 0090-20137 | PNEUMATIC EV NVJ5243Y | 4 | A1B102928 | |
| 0090-20139 | SENSOR | 8 | A1B102929 | |
| 0090-20152 | ASSY OVERTEMP SW DEGAS CHAMBER | 2 | A1B102930 | |
| 0090-20188 | FLOWMETER ALPS | 1 | A1B102931 | |
| 0090-20210 | ASSY STATUS LAMP LED WM RED | 1 | A1C100109 | |
| 0090-20312 | SWITCH ASSY WATER FLOW W/RLY OUTPUT SST PROTEUS | 24 | A1B102932 | |
| 0090-20409 | SENSOR CASS PRESENT | 3 | A1B102933 | |
| 0090-35099 | ASSY ROTATION MOTOR | 1 | A1B102934 | |
| 0090-35115 | ESC ASSY195MM NOTCH | 2 | A1B102935 | |
| 0090-35132 | MICRO SWITCHRF CONNECTOR | 7 | A1B102936 | |
| 0090-35134 | D-SHELLASSYESC 195MMFLAT | 3 | A1B102937 | |
| 0090-35157 | ASSY ELECTRICAL RF TAP DTCU DPS METCH RO | 2 | A1B102938 | |
| 0090-35170 | ASSY SENSOR DETECTOR | 2 | A1B102939 | |
| 0090-35766 | 5" DPS ESC | 2 | B1C100111 | |
| 0090-35875 | MODULE ASSY | 7 | A1B102940 | |
| 0090-36127 | PCB EMMISSIVITY AND SENSOR | 1 | A1B102941 | |
| 0090-36221 | TC AMP & OVERTEMP ASSY INTERLO | 1 | A1B102942 | |
| 0090-36226 | ASSY OVERTEMP SWITCH INJECTION VALVE | 1 | A1B102943 | |
| 0090-36228 | JUMPER ASSY | 8 | A1B102944 | |
| 0090-36334 | ASSYUNDERTEMP SWITCH TEOS LINE | 2 | A1B102945 | |
| 0090-36342 | ASSY HALL EFFECT SENSOR | 4 | B1C100114 | |
| 0090-36419 | ELECT.ASSY.LID INTERLOCK SWE-DTCU | 3 | A1B102946 | |
| 0090-40006 | ASSY RECEIVER LOADLOCK | 2 | A1B102947 | |
| 0090-40014 | SWITCH OVER TEMP ROOF TOP | 2 | A1B102948 | |
| 0090-70005 | SWITCH PRESSURE | 1 | A1B102949 | |
| 0090-70019 | PIG TAIL SENSOR | 1 | A1B102950 | |
| 0090-70026 | ASSY RECEIPT 2P 3 PHASE | 1 | A1B102951 | |
| 0090-75009 | MOTOR ENCODER ASSY ROBOT | 2 | A1B102952 | |
| 0090-76115 | ASSY 300MM WAFER SENSOR | 5 | A1B102953 | |
| 0090-77008 | ASSY LVDT ZT-810/800 PM2 | 1 | A1C100110 | |
| 0090-77024 | CROSS CW/CCW SENSOR ASSY | 1 | A1B102954 | |
| 0090-77028 | SENSOR-SHOULDER ASSY | 2 | A1B102955 | |
| 0090-77031 | SWITCH-ROBOT | 2 | A1B102956 | |
| 0090-77049 | VALVE-SOLENOID (W/ PCB CONNECT) | 2 | A1B102957 | |
| 0090-77053 | TRANSDUCERPRESSURE | 9 | A1B102958 | |
| 0090-77054 | TRANSDUCER-PRESSURE -15 TO 30 PSI | 2 | A1B102959 | |
| 0090-77057 | MOTORSLURRY PUMP | 5 | A1B102960 | |
| 0090-77059 | SENSOR | 2 | A1B102961 | |
| 0090-77064 | DOOR SWITCH ROBOT | 1 | A1B102962 | |
| 0090-77067 | INNER TUBE PRESSURE TRANSDUCTOR | 4 | A1B102963 | |
| 0090-77074 | CBLASSYMOD.SWITCH A | 1 | A1B102964 | |
| 0090-77084 | PRESSURE TRANSDUCER RR | 1 | A1B102965 | |
| 0090-77085 | P.P. PRESSURE TRANSDUCTOR | 2 | A1B102966 | |
| 0090-77099 | SWITCHMAGNETICROBOTDOOR | 5 | A1B102967 | |
| 0090-77110 | PLATEN FEEDTHRU ENDPOINT LASER SLIP RING ASSEMBLY | 2 | A1B102968 | |
| 0090-77135 | PUMP MASTERFLEX | 3 | A1B102969 | |
| 0090-77141 | ASSY POLISHER LIGHT TOWER R/G/Y LED FLAS | 1 | A1B102970 | |
| 0090-77159 | SWWAFERLOCK | 5 | A1B102971 | |
| 0090-77161 | MOTOR HOME SENSOR | 1 | A1B102972 | |
| 0090-77180 | GRIPPER SENSOR HARNESS ARM 2 | 3 | A1B102973 | |
| 0090-77182 | GRIPPER SENSOR HARNESS ARM 4 | 4 | A1B102974 | |
| 0090-77229 | HARNESS MEGASONIC LDM LEAK DETECTOR | 1 | A1B102975 | |
| 0090-77256 | ASSY LDM LEAK DETECTOR 2 | 1 | A1B102976 | |
| 0090-77274 | HRNSDIWFLOWSWITCHBRUSH | 1 | A1B102977 | |
| 0090-77286 | VACUUM TRANSDUCER | 1 | A1B102978 | |
| 0090-77331 | SWITCH ASSY LWR EXH MEGASONIC | 1 | A1B102979 | |
| 0090-90240 | CHASSIS MODULE DAQ TYPE D | 2 | A1B102980 | |
| 0090-90445 | H-TYP DAQ | 1 | A1B102981 | |
| 0090-90600 | POWER SUPPLY FLOOD GUN CONTROL | 2 | A1B102982 | |
| 0090-91131 | CONVERTORPREANALYSIS | 1 | A1B102983 | |
| 0090-91288 | CRYOPUMP INTERFACE 100-240VAC 50/60HZ | 1 | A1B102984 | |
| 0090-91818 | PRE ACCEL/AMAG CTRL CHASSIS | 2 | A1B102985 | |
| 0090-99003 | MOTOR | 1 | A1B102986 | |
| 0100-00001 | MONITOR DC POWER SUPPLY ASSY | 11 | A1B102987 | |
| 0100-00002 | STEPPER BOARD | 14 | A1B102988 | |
| 0100-00003 | PCB STEPPER DRIVE | 43 | A1B102989 | |
| 0100-00005 | PCB ANALOG | 9 | A1B102990 | |
| 0100-00010 | PCB ION GAUGE ASSY. | 4 | A1B102991 | |
| 0100-00011 | PCB CHOPPER DRIVER (ALSO SEE 0100-00060) | 1 | A1B102992 | |
| 0100-00012 | PCB VME COUNTER | 2 | A1B102993 | |
| 0100-00013 | PCB ION TC/AC CONTROL | 8 | A1B102994 | |
| 0100-00014 | PCBOPTO DETECT | 14 | A1B102995 | |
| 0100-00015 | PCB POSITION ENCODER BUFFER | 1 | A1B102996 | |
| 0100-00016 | PCB GAS PANEL DEPOSITION | 7 | A1B102997 | |
| 0100-00017 | PCB INTERFACE AC ASSY | 1 | A1B102998 | |
| 0100-00021 | BOARD SENSOR OPTO | 30 | A1B102999 | |
| 0100-00024 | OPTO BOARDKEYBOARD INTERFACE | 3 | A1B103000 | |
| 0100-00025 | PCB ASSY 60V | 6 | A1B103001 | |
| 0100-00027 | GRIPPER PCB ASSY | 10 | A1B103002 | |
| 0100-00028 | POWER SUPPLYDCMONITOR | 2 | A1B103003 | |
| 0100-00032 | BOARD APPLIED INTERFACE | 1 | A1B103004 | |
| 0100-00033 | PCB BIDIRECTIONAL DC MOTOR DRIVE | 6 | A1B103005 | |
| 0100-00034 | PCB POWER SUPPLY STATUS | 12 | A1B103006 | |
| 0100-00035 | PCB MANOMETER | 7 | A1B103007 | |
| 0100-00037 | INDEXER INTERCONNECT BOARD | 1 | A1B103008 | |
| 0100-00038 | INTERCONNECT BOARD | 1 | A1B103009 | |
| 0100-00039 | PCB ROBOT INTERCONNECT | 3 | A1B103010 | |
| 0100-00041 | PCB SENSOR ASSY CATHODE | 2 | A1B103011 | |
| 0100-00042 | BOARD CIRCUIT ROTATION | 10 | A1B103012 | |
| 0100-00044 | PCB ISOLATION AMPLIFIER | 14 | A1B103013 | |
| 0100-00045 | PCB INTERCONNECT EXTERNAL | 2 | A1B103014 | |
| 0100-00046 | PCB AC CURRENT SENSOR | 9 | A1B103015 | |
| 0100-00047 | RIBBON CONNECT (7 PIN) | 1 | A1B103016 | |
| 0100-00048 | I/O STATUS MONITOR ASSY | 8 | A1B103017 | |
| 0100-00049 | PCB ANALOG SIGNAL CONDITONER | 9 | A1B103018 | |
| 0100-00052 | PCB STEPPER DRIVE | 1 | A1B103019 | |
| 0100-00053 | PCB OPERATOR BEZEL ASSEMBLY | 1 | A1B103020 | |
| 0100-00055 | PCB GATE HEATER CONTROL | 8 | A1B103021 | |
| 0100-00055U | GATE HEATER CONTROL | 1 | A1B103022 | |
| 0100-00056 | PNEUMATIC PANEL | 2 | A1B103023 | |
| 0100-00057 | HEATER BOARD | 2 | A1B103024 | |
| 0100-00058 | GATE VALVE INTERCONNECT BOARD | 2 | A1B103025 | |
| 0100-00060 | CHOPPER DRIVER HIGH CURRENT | 8 | A1B103026 | |
| 0100-00061 | BOARD CIRCUIT LIMIT | 12 | A1B103027 | |
| 0100-00062 | PCB STEPPER DRIVER | 24 | A1B103028 | |
| 0100-00063 | PCB TWB OPTP LIMIT DETECTOR | 27 | A1B103029 | |
| 0100-00066 | PCB EMISSION DETECTOR | 3 | A1B103030 | |
| 0100-00070 | PCB SENSOR | 4 | A1B103031 | |
| 0100-00072 | BOARD CIRCUIT SENSOR | 16 | A1B103032 | |
| 0100-00080 | PCB ASSY. SBC I/O BREAK | 5 | A1B103033 | |
| 0100-00084 | PCB AP SENSOR AMP | 3 | A1B103034 | |
| 0100-00086 | PCB CENTER FINDER | 3 | A1B103035 | |
| 0100-00100 | PCB DRIVER FLAT FINDER | 1 | A1B103036 | |
| 0100-00101 | PCB RF MATCH CONTROL | 4 | A1B103037 | |
| 0100-00110 | PCB FLAT FINDER MOTOR DRIVER | 3 | A1B103038 | |
| 0100-00114 | wPCB ASSY. GRIPPER OPTO SENSOR | 2 | A1B103039 | |
| 0100-00124 | BOARD SENSOR 1 CHAN OPTO | 1 | A1B103040 | |
| 0100-00125 | BOARD SENSOR 2 CHAN OPTO | 2 | A1B103041 | |
| 0100-00127 | PCB MVME 202 MODULE | 7 | A1B103042 | |
| 0100-00132 | PCB SYNC DETECT EASE | 3 | A1B103043 | |
| 0100-00132-W | PCB SYNC DETECT | 5 | A1B103044 | |
| 0100-00136 | PCB ASSY WAFER COUNTER FOR ALUMINUMS | 3 | A1B103045 | |
| 0100-00138 | PCB ENDPOINT PROCESSOR | 1 | A1B103046 | |
| 0100-00148 | CRYO PUMP TEMP SENSOR | 1 | A1B103047 | |
| 0100-00149 | PCB BLADE SENSOR ASSY. | 3 | A1B103048 | |
| 0100-00156 | PCB ISO AMPLIFIER | 4 | A1B103049 | |
| 0100-00160 | STRIPPER CHAMBER INTERCONNECT | 1 | A1B103050 | |
| 0100-00161 | INTERCONNECT BOARD | 1 | A1B103051 | |
| 0100-00164 | PC MONOCHROME W/ASSY INTERFACE BD | 2 | A1B103052 | |
| 0100-00169 | PCB VME MODULE | 4 | A1B103053 | |
| 0100-00177 | EP MODULE 1/0 INTERCONNECT BD | 3 | A1B103054 | |
| 0100-00181 | ISOAMP 2 ASSYNONLINEAR APPLICATION | 1 | A1B103055 | |
| 0100-00193 | PCB SYNC DETECTOR | 1 | A1B103056 | |
| 0100-00195 | PCB END POINT INTERFACE/SMOOTHER | 2 | A1B103057 | |
| 0100-00196 | PCB ASSY DRAM 512K | 1 | A1B103058 | |
| 0100-00208 | PCB GAS PANEL 3 | 2 | A1B103059 | |
| 0100-00261 | PCB ASSY (DC PWR. /SERIPLEX) | 2 | A1B103060 | |
| 0100-00269 | CONTROLLER POWER DIST PCB | 2 | A1B103061 | |
| 0100-00275 | LT/ESC/AI/INTLK BREAK-OUT PCB | 1 | A1B103062 | |
| 0100-00301 | PCB ASSY LCF EMITTER/RECEIVER INT | 3 | A1B103063 | |
| 0100-00559 | PWBA SOURCE MAG SERVO XP | 1 | A1B103064 | |
| 0100-00979 | ASSY PCB STEPPER CONTROLLER W/ DAUGHTER | 1 | A1B103065 | |
| 0100-00991 | PWB GAP SERVO | 1 | A1B103066 | |
| 0100-01000 | PCB RF MATCH | 1 | A1B103067 | |
| 0100-01004 | PCB UNIVERSAL ADDRESS | 1 | A1B103068 | |
| 0100-01321 | PCB DIGITAL I/O DIO | 4 | A1B103069 | |
| 0100-02042 | PCB ASSYCIRCUIT ROTATION | 1 | A1B103070 | |
| 0100-09000 | W/PCB ASSY RF MATCH CONT USE UP | 1 | A1B103071 | |
| 0100-09003 | PCB VIDEO CONTROLLER | 8 | A1B103072 | |
| 0100-09006 | PCB INTELLIGENT INTERFACE | 5 | A1B103073 | |
| 0100-09010 | PCB SYSTEM ELECTRONIC BACKPLANE | 11 | A1B103074 | |
| 0100-09012 | PCB | 5 | A1B103075 | |
| 0100-09017 | CHAMBER INTERCONNECT BOARD | 10 | A1B103076 | |
| 0100-09018 | VIDEO INTERCONNECT BD | 1 | A1B103077 | |
| 0100-09020 | FUSE BOARD | 10 | A1B103078 | |
| 0100-09022 | PCB MINI AI/AO | 20 | A1B103079 | |
| 0100-09023 | PCB ASSY MINI DI/DO CHAMBER INTER CONN | 14 | A1B103080 | |
| 0100-09026 | PCB. SYSTEM WIRING | 1 | A1B103081 | |
| 0100-09027 | BOARD AC INTERCONNECT | 2 | A1B103082 | |
| 0100-09028 | PCB | 3 | A1B103083 | |
| 0100-09029 | PCB INTERFACE TURBO | 4 | A1B103084 | |
| 0100-09031 | REMOTE GAS PANEL PCB | 4 | A1B103085 | |
| 0100-09033 | PCB ASSY TC AMPLIFIER | 2 | A1B103086 | |
| 0100-09034 | PCB L.S. INTERFACE | 4 | A1B103087 | |
| 0100-09038 | PCB DC BIAS DIVIDER | 1 | A1B103088 | |
| 0100-09039 | PCB L.S. BACKPLANE | 2 | A1B103089 | |
| 0100-09040 | PCB | 2 | A1B103090 | |
| 0100-09043 | OPTO SENSOR W/BRACKET | 1 | A1B103091 | |
| 0100-09054 | PCB ANALOG INPUT | 1 | A1B103092 | |
| 0100-09058 | OPERATOR CONTROL PANEL | 3 | A1B103093 | |
| 0100-09063 | GAS PANEL BOARD ASSY | 6 | A1B103094 | |
| 0100-09078 | ASSY ROBOT INTC BD | 4 | A1B103095 | |
| 0100-09079 | SENSOR ROBOT MTR PCB | 1 | A1B103096 | |
| 0100-09081 | PCB ASSY N2-DRYVAC DIST | 1 | A1B103097 | |
| 0100-09084 | PCB ASSY MONITOR LIGHT PEN INTERCONNECT BOARD | 15 | A1B103098 | |
| 0100-09102 | PCB CONTROLLER DISTRIBUTION | 6 | A1B103099 | |
| 0100-09104 | PCBCONTACTORINTERLOCK | 3 | A1B103100 | |
| 0100-09107 | TEOS GAS INTERCONNECT BD | 1 | A1B103101 | |
| 0100-09108 | PCB SENSOR LEVEL | 19 | A1B103102 | |
| 0100-09109 | PCB ASSY TEMP CONTROL | 10 | A1B103103 | |
| 0100-09114 | PCB GAS PANEL | 2 | A1B103104 | |
| 0100-09115 | PCB GAS PANEL ANALOG | 4 | A1B103105 | |
| 0100-09117 | PCB DIGITAL I/O FUSE | 24 | A1B103106 | |
| 0100-09118 | PCB | 1 | A1B103107 | |
| 0100-09123 | WAFER SENSOR PCB | 2 | A1B103108 | |
| 0100-09134 | FUSE BOARD DIO | 1 | A1B103109 | |
| 0100-09136 | PCB MINI DI/DO | 6 | A1B103110 | |
| 0100-09138 | PCB ASSY | 1 | A1B103111 | |
| 0100-09145 | RS 232 VIDEO INTERCONNECT BD. | 1 | A1B103112 | |
| 0100-09162 | WPCBA MANOMETER SELECT | 5 | A1B103113 | |
| 0100-09177 | ASSY PCB EXTVME | 4 | A1B103114 | |
| 0100-09180 | ASSY LIQUID SOURCE | 1 | A1B103115 | |
| 0100-09210 | PCB LIQUID INJECTOR INTERFACE | 1 | A1B103116 | |
| 0100-09214 | PCB CHAMBER INTERFACE | 1 | A1B103117 | |
| 0100-09231 | ASSY A.C. WINDOW CONTROLLER | 1 | A1B103118 | |
| 0100-09236 | PCB | 1 | A1B103119 | |
| 0100-09240 | PCB | 14 | A1B103120 | |
| 0100-09241 | PCB | 7 | A1B103121 | |
| 0100-09254 | PCB ASSY ENDPOINT | 4 | A1B103122 | |
| 0100-09287 | PCB ASSY (CENTUIRA APC MATRIX BD) | 2 | A1B103123 | |
| 0100-09293 | PCB LI/APC MATRIX | 4 | A1B103124 | |
| 0100-09307 | PCB DTLR INTERLOCK ASSYM KACI | 2 | A1B103125 | |
| 0100-09322 | OZONATOR DISTRIBUTION BOARD REVB | 1 | A1B103126 | |
| 0100-09386 | PCB DPA INTERLOCK | 1 | A1B103127 | |
| 0100-11000 | ANALOG INPUT | 1 | A1B103128 | |
| 0100-11002 | DIGITAL I/O PCB | 7 | A1B103129 | |
| 0100-11018 | PCB MVME 110-1 MODULE | 5 | A1B103130 | |
| 0100-11022 | PCB SERIAL I/O | 4 | A1B103131 | |
| 0100-11025 | PROM BOARD | 5 | A1B103132 | |
| 0100-11026 | PCB PROM | 3 | A1B103133 | |
| 0100-11030 | PCB PROM NO PROMS | 4 | A1B103134 | |
| 0100-11063 | PCB | 2 | A1B103135 | |
| 0100-14003 | PCB LEAK DET INTERFACEASSY | 1 | A1B103136 | |
| 0100-14021 | ASSY SLAVE CPU BOARD | 1 | A1B103137 | |
| 0100-18029 | CUASSY PCB REMOTE SERIPLEX I/O HDPCVD U | 1 | A1B103138 | |
| 0100-18044 | PCBA HEATER CONT INTLK INTERFACE | 2 | A1B103139 | |
| 0100-19009 | PCB BUFFER | 1 | A1B103140 | |
| 0100-20003 | PCB MAR DIGITAL I/O | 1 | A1B103141 | |
| 0100-20004 | PCB CHAMBER | 3 | A1B103142 | |
| 0100-20009 | PCB ASSY SYSTEM STEPPER DISTRIBUTION | 1 | A1B103143 | |
| 0100-20010 | PCBSTEC MFC INTERCONNECT BD | 1 | A1B103144 | |
| 0100-20011 | PCB CHAMBER A/B INT. | 1 | A1B103145 | |
| 0100-20021 | PC BOARD CHAMBER MUX | 3 | A1B103146 | |
| 0100-20025 | PNEUMATIC 4 WAY PCB | 1 | A1B103147 | |
| 0100-20030 | PCB ASSY CONTROLLER | 1 | A1B103148 | |
| 0100-20037 | PCB INTERLOCK SELECT | 2 | A1B103149 | |
| 0100-20040 | PCB ASSY REMOTE SUPPLY DIST | 13 | A1B103150 | |
| 0100-20053 | PCB ASSYSBC I/O BREAKO | 1 | A1B103151 | |
| 0100-20054 | MAIN FRAME INTERCONNECT ASSY | 2 | A1B103152 | |
| 0100-20064 | PCB I/O BREAKOUT | 1 | A1B103153 | |
| 0100-20073 | PCB ASSY WAFER DETECTOR | 2 | A1B103154 | |
| 0100-20078 | PCBA LASER DRIVER SEE | 1 | A1B103155 | |
| 0100-20086 | PCB ASSY WAFER MAP LED | 1 | A1B103156 | |
| 0100-20131 | PCB | 1 | A1B103157 | |
| 0100-20164 | PCB ASSYCONT POWER DIST | 2 | A1B103158 | |
| 0100-20183 | PCB ASSY SERIAL/VIDEO INTERCONNECT BOARD | 1 | A1B103159 | |
| 0100-20241 | PCB ASSY STEPPER DRIVER INTERFACE | 2 | A1B103160 | |
| 0100-20245 | EXCHANGER HEAT PCB ASSY 2ND NE | 1 | A1B103161 | |
| 0100-20332 | CASSETTE ALIGNMENT FIXTURE | 1 | A1B103162 | |
| 0100-35036W | PCB ASSY DUAL GAS LEAK | 1 | A1B103163 | |
| 0100-35049 | CUPCBSYSRESET | 1 | A1B103164 | |
| 0100-35148 | PCBA TWO CHBR GAS BACKPLANE | 2 | A1B103165 | |
| 0100-35148 REV PL | PCB, 2 CHAMBER, B PLANE | 2 | B1C100161 | |
| 0100-35170 | DIVIDER PCB | 4 | A1B103166 | |
| 0100-35187 | PCB ASSY LOAD LOCK BEEPER | 2 | A1B103167 | |
| 0100-35191 | PCB ASSEMBLY CHAMBER T/C INTERFACE | 1 | A1B103168 | |
| 0100-35249 | PCB | 1 | A1B103169 | |
| 0100-35260 | ASSY PCB TC | 3 | A1B103170 | |
| 0100-35337 | PCB ASSY (SPILL SENSOR BD) | 1 | A1B103171 | |
| 0100-38007 | PCB | 2 | A1B103172 | |
| 0100-38029 | PCB ASSEMBLY FAST LIFT | 1 | A1B103173 | |
| 0100-38083 | PCB ASSY CHAMBER INTERCONNECT | 2 | A1B103174 | |
| 0100-38084 | PCB ASSY CHAMBER INTERCONNECT | 1 | A1B103175 | |
| 0100-40009 | PCBFUSE STATUS. | 1 | A1B103176 | |
| 0100-40011 | PCB | 14 | A1B103177 | |
| 0100-40024 | PCB LOADLOCK INTERCONNECT D4 | 3 | A1B103178 | |
| 0100-40025 | PCBA MAINFRAME INTERCONN | 1 | A1B103179 | |
| 0100-40028 | PCBTWO CH GAS BACKPLANE | 1 | A1B103180 | |
| 0100-40029 | PCB SOURCE METROLOGY ASSY | 1 | A1B103181 | |
| 0100-40030 | PCB BIAS METROLOGY ASSY | 2 | A1B103182 | |
| 0100-40037 | PCBASOURCE SIGNAL CONDI | 4 | A1B103183 | |
| 0100-40037 | PCB, SIGNAL CONDITION, ASSEMBLY. PCB EWOB AND OTF/CENTER F. | 4 | B1C100173 | |
| 0100-40039 | PCB ASSY HIGH DEN PLAS CH | 1 | A1B103184 | |
| 0100-50007 | ROT BCN DRIVER PCB(AMJ P/N) | 1 | A1B103185 | |
| 0100-70019 | PCB CONTROLLER DIST WPS BD | 2 | A1B103186 | |
| 0100-70028 | PCB ROBOT INNERCONNECT REPLACED BY P/N 0100-76053 | 5 | A1B103187 | |
| 0100-70128 | ROBOT INTERCON ASSY | 1 | A1B103188 | |
| 0100-76046 | PCB GAS PANEL | 3 | A1B103189 | |
| 0100-76048 | PCB SAC CONTACTOR | 1 | A1B103190 | |
| 0100-76053 | PCBROBOTIC | 1 | A1B103191 | |
| 0100-76083 | PCBVIDEO DIST. | 2 | A1B103192 | |
| 0100-76124 | PCBDIGITALI/O | 4 | A1B103193 | |
| 0100-76250 | SWITCH RF BIAS CHAMBER INTERLOCK S-IPS | 1 | A1B103194 | |
| 0100-76495 | PCB | 1 | A1B103195 | |
| 0100-77003 | PCB-ASSY CMP DET BD | 1 | A1B103196 | |
| 0100-77014 | ASSY ENDPOINT CNTRLR BD | 1 | A1B103197 | |
| 0100-77018 | PCB-ROBOT ASSY | 1 | A1B103198 | |
| 0100-77026 | SENSOR ASSY PCB | 6 | A1B103199 | |
| 0100-77033 | PCBASSY (WAFER LOSS BOARD) | 2 | A1B103200 | |
| 0100-77034 | ASSYPCDHEAD | 2 | A1B103201 | |
| 0100-77035 | ROBOT PCB | 4 | A1B103202 | |
| 0100-77036 | ASSYPCB ROBOT WRIST | 2 | A1B103203 | |
| 0100-77038 | PCB#2INBTERLOCK ASSY | 2 | A1B103204 | |
| 0100-77042 | PCB ASSY PENTIUM INTERFACE 200MM CMP COM BOARD FOR RPM3 NOVA | 4 | A1B103205 | |
| 0100-77045 | ASSY PCB ROBOT WRIST | 5 | A1B103206 | |
| 0100-77054 | ASSY PCB VENT INTERLOCK | 1 | A1B103207 | |
| 0100-77058 | ROBOT PCB ASSY | 3 | A1B103208 | |
| 0100-90027 | DATA ACQUISITION MODULE | 2 | A1B103209 | |
| 0100-90032 | PCB ASSY | 1 | A1B103210 | |
| 0100-90042 | PCB ASSY | 1 | A1B103211 | |
| 0100-90126 | PCB CONFIGURATION | 1 | A1B103212 | |
| 0100-90127 | PWB TEMP. CONTR. SERV. | 1 | A1B103213 | |
| 0100-90140 | PWBA WAFER INTERLOCK | 1 | A1B103214 | |
| 0100-90172 | PCB 5 PHASE STEPPER CONTROLLER CVD AMAT 5200 | 2 | A1B103215 | |
| 0100-90178 | PWBA VAC CONTROL FEEDBACK | 1 | A1B103216 | |
| 0100-90188 | PCB ASSY VAC CONTROL | 1 | A1B103217 | |
| 0100-90216 | PCB ASSY | 1 | A1B103218 | |
| 0100-90221 | PCB ASSY | 1 | A1B103219 | |
| 0100-90232 | PWB ASSY SEVEN CHANNEL | 2 | A1B103220 | |
| 0100-90274 | PCB ASSY SPIN SCAN ERROR | 1 | A1B103221 | |
| 0100-90276 | PCB ASSY | 1 | A1B103222 | |
| 0100-90277 | PCB ASSY | 1 | A1B103223 | |
| 0100-90278 | PCB SCAN CONTROL | 1 | A1B103224 | |
| 0100-90312 | PWB ASSY SPIN \ SCAN INTERLOCK | 1 | A1B103225 | |
| 0100-90314 | PWB ASSY SCAN CLOCK | 1 | A1B103226 | |
| 0100-90388 | PWBA ORIENTER SENSOR | 1 | A1B103227 | |
| 0100-90451 | EXTRACTION CONTROL PCB | 2 | A1B103228 | |
| 0100-90468 | PWBA CHARGE VOLTAGE ACC | 1 | A1B103229 | |
| 0100-90491 | ARM WAFER POSITION PWBA | 3 | A1B103230 | |
| 0100-90492 | PWBA TPDU MONITOR | 1 | A1B103231 | |
| 0100-90629 | PWBA EXTENDER | 1 | A1B103232 | |
| 0100-90640 | PCB ASSY CONVERTOR | 2 | A1B103233 | |
| 0100-90650 | WHEEL CURRENT PCB | 1 | A1B103234 | |
| 0100-90689 | ARC VOLTAGE CONTROL PCB | 1 | A1B103235 | |
| 0100-90782 | PCB SPIN CONTROL | 2 | A1B103236 | |
| 0100-90793 | PWBA STANDBY | 1 | A1B103237 | |
| 0100-90809 | PWBA INDEX SERVO | 2 | A1B103238 | |
| 0100-90811 | PWBA SPIN CONTROL | 1 | A1B103239 | |
| 0100-90824 | PWBA GAP SERVO | 1 | A1B103240 | |
| 0100-90831 | SCAN CLOCK PCB | 1 | A1B103241 | |
| 0100-90848 | PWBA 162 M/BOARD HI-RES | 1 | A1B103242 | |
| 0100-90852 | A. MAGNET CONTROL M/B | 1 | A1B103243 | |
| 0100-90853 | PWBA INDEX SERVO | 8 | A1B103244 | |
| 0100-90854 | SPIN SCAN INTERLOCK PWBA | 1 | A1B103245 | |
| 0100-90859 | PWBA TO CONVERTER | 1 | A1B103246 | |
| 0100-90861 | PWBASPINSCANCONTROLS | 1 | A1B103247 | |
| 0100-90870 | 4-PHASE STEPPER CONTROLLER | 1 | A1B103248 | |
| 0100-90876 | PCB INDEX CONTROL | 1 | A1B103249 | |
| 0100-90949 | PCB SOURCE SUP N CLAMP BOX | 1 | A1B103250 | |
| 0100-90970 | PWBA BEAM PROFILER MICRO CONTROL | 1 | A1B103251 | |
| 0100-90988 | PWB ASSY A MAGNET V.I. | 1 | A1B103252 | |
| 0100-90999 | ARC CURRENT PCB | 1 | A1B103253 | |
| 0100-91024 | PWBA PRE ACCEL VENDOR I/F | 1 | A1B103254 | |
| 0100-94044 | PROTECTION SOURCE | 5 | A1B103255 | |
| 0100-94078 | PWBA ARGON CONTROL | 1 | A1B103256 | |
| 0101-00039 | BOARD ROBOT INTERCONNECT | 1 | A1B103257 | |
| 0110-00015 | BOARD POSITION ENCODER BUFFER | 1 | A1B103258 | |
| 0110-00048 | WPWB I/O STATUS MONITOR | 1 | A1B103259 | |
| 0120-03374 | BRACKET | 1 | A1B103260 | |
| 0120-09925 | CVD;NUT SUSCEPTOR | 7 | A1B103261 | |
| 0140-00015 | HARNESS ASSY | 3 | A1B103262 | |
| 0140-00017 | HARNESS ASSYINDEX DOOR | 1 | A1B103263 | |
| 0140-00019 | SHUTTLE SHAFT HARNESS | 1 | A1B103264 | |
| 0140-00021 | HARNESS MAIN SYS | 1 | A1B103265 | |
| 0140-00024 | BREAK FAIL SAFE | 3 | A1B103266 | |
| 0140-00025 | SWITCH HARNESS CASSETTE | 10 | A1B103267 | |
| 0140-00026 | MOTOR ASSY DC | 43 | A1B103268 | |
| 0140-00030 | GATE THERMISTRON HARNESS ASSY | 8 | A1B103269 | |
| 0140-00033 | SENSOR DISTANCE HARNESS ASSE | 5 | A1B103270 | |
| 0140-00034 | HARNESS ASS'Y.BLADE | 5 | A1B103271 | |
| 0140-00036 | ASSY EMITTER WIRING | 37 | A1B103272 | |
| 0140-00039 | HARNESS | 2 | A1B103273 | |
| 0140-00046 | RECEIVER WIRING ASSY. | 33 | A1B103274 | |
| 0140-00048 | FLAG SENSOR HARNESS ASSY | 18 | A1B103275 | |
| 0140-00053 | ASSY WIRING MAGNETIC SW | 16 | A1B103276 | |
| 0140-00054 | AIR FLOW SW HARNESS ASSY | 1 | A1B103277 | |
| 0140-00056 | HARNESS ASSY DOOR | 4 | A1B103278 | |
| 0140-00058 | CABLE ASSY | 1 | A1B103279 | |
| 0140-00060 | HRNS PWR CORD HEATER CONTROLLER | 1 | A1B103280 | |
| 0140-00064 | CABLE ASSY | 1 | A1B103281 | |
| 0140-00081 | HARNESS ASSY TRAVEL PLATE | 1 | A1B103282 | |
| 0140-00083 | CONNECTOR INDEXER DOOR 18 PIN | 3 | A1B103283 | |
| 0140-00088 | CONNECTOR | 1 | A1B103284 | |
| 0140-00117 | HARNESS ASSY.REMOTE AIR FLOW | 1 | A1B103285 | |
| 0140-00144 | HARNESS ASSY PWR/FUSE | 1 | A1B103286 | |
| 0140-00145 | HARNESS ASSYTURBO INTC RPLCS 0140-09016 | 5 | A1B103287 | |
| 0140-00181 | CABLE | 1 | A1B103288 | |
| 0140-00313 | HARN ASSY DC PWR SPLIT | 1 | A1B103289 | |
| 0140-00317 | CABLE ASSY | 1 | A1B103290 | |
| 0140-00407 | HARNESS ASSY SLIT LINER/FLOW 3Y ADAPT | 4 | A1B103291 | |
| 0140-00422 | CABLE CONTROLLER B/S HELIUM | 1 | A1B103292 | |
| 0140-00435 | ASSY DOME CABLE DPS CHAMBER MCE | 1 | A1B103293 | |
| 0140-00457 | HARNESS ASSY ETCH COVER INTER | 2 | A1B103294 | |
| 0140-00502 | HRNS ASSY POTP/MUX CONTR. DIST LTESC | 2 | A1B103295 | |
| 0140-00770 | HARNESS ASSY REACTIVE PC W/ RGA | 1 | A1B103296 | |
| 0140-00788 | HARNESS ASSY FRONT ROBOT | 1 | A1B103297 | |
| 0140-00928 | HARNESS ASSY 30A 3-PHASE OUTL | 3 | A1B103298 | |
| 0140-00957 | H/A 120VAC SYS AC TB2 TO LTESC CONTACTOR | 1 | A1B103299 | |
| 0140-01284 | CABLE ASSY | 1 | A1B103300 | |
| 0140-01340 | HARNESS ASSY AUTO BIAS INTERCONNECT | 13 | A1B103301 | |
| 0140-01640 | HARNESS ASSYEMO FRONT BEZEL INTRCONN.25FT. | 1 | A1B103302 | |
| 0140-01652 | H/A TEST JUMPER ROBOT CALIBRATION | 1 | A1B103303 | |
| 0140-01813 | CABLE TC 12 FT #8 | 1 | A1B103304 | |
| 0140-01915 | CABLE ASSY | 1 | A1B103305 | |
| 0140-02972 | HARNESS ASSY, 300? DC POWER | 1 | A1C100111 | |
| 0140-03528 | CABLEHEATER POWER H/A | 3 | A1B103306 | |
| 0140-04819 | CABLE ENDPOINT BULKHEAD TO PLATENS | 1 | A1B103307 | |
| 0140-07001 | HARN CAROUSEL TR POS | 2 | A1B103308 | |
| 0140-07002 | HARN-LDR CASSHLDR OP | 1 | A1B103309 | |
| 0140-09000 | HARNESSELECTRICAL SYSTEM | 1 | A1B103310 | |
| 0140-09004 | HARNESSCHAMBER INTR. | 1 | A1B103311 | |
| 0140-09005 | HARNESS | 1 | A1B103312 | |
| 0140-09006 | CABLE HARNESS | 1 | A1B103313 | |
| 0140-09015 | HARNESSASSY | 2 | A1B103314 | |
| 0140-09016 | HARNESS ASSY TURBO INTC PLS USE 0140-00145 | 1 | A1B103315 | |
| 0140-09025 | SWITCH ASP WAVEGUARD | 1 | A1B103316 | |
| 0140-09026 | HARNESS LOADER | 1 | A1B103317 | |
| 0140-09027 | HARNESS CHMB A B SLIT | 1 | A1B103318 | |
| 0140-09028 | ASSY HARNESS ELEV & COMB | 7 | A1B103319 | |
| 0140-09038 | HARNESS CHAMBER C AND D SLIT VALVE | 1 | A1B103320 | |
| 0140-09045 | VAC PUMP HARNESS C/D | 1 | A1B103321 | |
| 0140-09048 | HARNESS ASSY PUMP A/B | 2 | A1B103322 | |
| 0140-09059 | HARNESS TURBO INTC | 1 | A1B103323 | |
| 0140-09060 | HARNESS ASSYN2 SENSEELEC. | 1 | A1B103324 | |
| 0140-09063 | HARNESS ASSYFRONT PANEL | 1 | A1B103325 | |
| 0140-09082 | CABLE ASSY MAGNET (A) | 2 | A1B103326 | |
| 0140-09120 | CABLE ASSY HARNESS END PT TRENCH/ BLANKET FILM | 13 | A1B103327 | |
| 0140-09121 | SWITCH | 2 | A1B103328 | |
| 0140-09125 | CABLE ASSY LASER SAFETY EXT | 10 | A1B103329 | |
| 0140-09130 | ZERO ORDER SENSOR ASSY | 3 | A1B103330 | |
| 0140-09143 | CABLE HARNESS | 2 | A1B103331 | |
| 0140-09149 | CABLE ASSY | 1 | A1B103332 | |
| 0140-09151 | CABLE ASSY | 1 | A1B103333 | |
| 0140-09152 | HARNESS CASSETTE H | 4 | A1B103334 | |
| 0140-09158 | HARNESS ASSY FINAL VALVE | 3 | A1B103335 | |
| 0140-09160 | HARNESS ASSY DRY VAC | 1 | A1B103336 | |
| 0140-09165 | CABLE HARNESS | 1 | A1B103337 | |
| 0140-09166 | HARNESS ASSY DRY VAC PUMP | 3 | A1B103338 | |
| 0140-09170 | HARNESS ASSY (CVD) STND VAC PUMP | 1 | A1B103339 | |
| 0140-09199 | HARNESS AC BOX INTERIM | 1 | A1B103340 | |
| 0140-09218 | HARNESS ASSY XFMR CHBR | 1 | A1B103341 | |
| 0140-09223 | HARNESS ASSY.CV/TUNG. CHAMBER | 1 | A1B103342 | |
| 0140-09226 | HARNESS ASSY | 1 | A1B103343 | |
| 0140-09235 | HARNESS 15 VOLT PS TO DIST | 4 | A1B103344 | |
| 0140-09236 | HARNESS EXPANDED GAS PANEL | 6 | A1B103345 | |
| 0140-09238 | HARNESS ADDRESS SELECT | 4 | A1B103346 | |
| 0140-09364 | HARNESS ASSY PREFIRE PWR SUP | 1 | A1B103347 | |
| 0140-09422 | HARNESSAMPULE OVERTEMP INTERLOCK(3 PK) | 1 | A1B103348 | |
| 0140-09444 | HARNESS ASSY A&B | 3 | A1B103349 | |
| 0140-09490 | HARNESS ASSY CONTROLLER | 1 | A1B103350 | |
| 0140-09493 | CABLE ASSY | 1 | A1B103351 | |
| 0140-09494 | HARNESS ASSY | 20 | A1B103352 | |
| 0140-09551 | HARNESS ASSY MOLDED POWER CORD | 1 | A1B103353 | |
| 0140-09604 | HARNESS ASSY THERMOCOUPLE R2 LID | 4 | A1B103354 | |
| 0140-09621 | HARNESS ASSY | 52 | A1B103355 | |
| 0140-09675 | HARNESS/MULTI SWITCH | 9 | A1B103356 | |
| 0140-09732 | ASSY LID HARNESS | 1 | A1B103357 | |
| 0140-09737 | HARNESS ASSY | 20 | A1B103358 | |
| 0140-09747 | HARNESS TEOS CABINET INTERLOC | 2 | A1B103359 | |
| 0140-09966 | CABLE ASSY | 11 | A1B103360 | |
| 0140-09983 | HARNESS ASSY | 1 | A1B103361 | |
| 0140-09984 | HARNESS ASSY | 1 | A1B103362 | |
| 0140-09987 | HARNESS ASSY | 1 | A1B103363 | |
| 0140-10000 | HARNESS ASSY INTERCONNECT DXZ | 3 | A1B103364 | |
| 0140-10010 | HARNESS DI EXTENSION LINE | 1 | A1B103365 | |
| 0140-10023 | HARNESS ASSY | 30 | A1B103366 | |
| 0140-10035 | CABLE ASSY | 2 | A1B103367 | |
| 0140-10072 | HARNESS AMPLUE LEVEL SENS | 1 | A1B103368 | |
| 0140-10082 | HARNESS ASSY TC WASHER EGEC PID CONTROL | 3 | A1B103369 | |
| 0140-10104 | 3-WAY WIRE SNESOR | 1 | A1B103370 | |
| 0140-10181 | HARNESS ASSY | 25 | A1B103371 | |
| 0140-10182 | HARNESS ASSY | 24 | A1B103372 | |
| 0140-10946 | HARNASSYMATCOLPLINTL | 2 | A1B103373 | |
| 0140-12255 | HARNESS ASSY VME BUS DC POW | 1 | A1B103374 | |
| 0140-16152 | H/A ECI PCB TO PLIS OPTIMA | 33 | A1B103375 | |
| 0140-18061 | ASSY HARNESS COVER & LID | 3 | A1B103376 | |
| 0140-20021 | HARNESS ASSY ANALOG STE DIS | 2 | A1B103377 | |
| 0140-20101 | CABLE ASSY | 1 | A1B103378 | |
| 0140-20118 | HARNESS ASSY CCD BD/LASER DRIVER INT | 1 | A1B103379 | |
| 0140-20136 | HARNESS ASSY GENERATOR RACK 1 | 1 | A1B103380 | |
| 0140-20167 | WIRING HARNESS | 1 | A1B103381 | |
| 0140-20286 | HARNESS ASSY CHAMBER 1 & 4 AC | 2 | A1B103382 | |
| 0140-20364 | HARNESS ASSY MFRAME H20 LK DET | 1 | A1B103383 | |
| 0140-20365 | HARNESS ASSYWATER SW INTCNT | 1 | A1B103384 | |
| 0140-20434 | HARNESS-ASSY SUSCEPTOR DI PRECLEAN | 7 | A1B103385 | |
| 0140-20475 | CASSETTE INDEXER | 1 | A1B103386 | |
| 0140-20502 | HARN ASSY AC 2-PHASE DRIVER | 6 | A1B103387 | |
| 0140-20504 | CABLE ASSY | 3 | A1B103388 | |
| 0140-20505 | HRNS ASSY LIFT UP/DWN | 3 | A1B103389 | |
| 0140-20518 | HARNESS ASSY BUF EXTENSION | 19 | A1B103390 | |
| 0140-20531 | HARNESS-WIRE | 1 | A1B103391 | |
| 0140-20537 | HARNESS RF MATCH C&D | 2 | A1B103392 | |
| 0140-20563 | HARNESS ASSY OVERTEMP | 1 | A1B103393 | |
| 0140-20694 | HARNESS ASSY PVD SHUTTER SENSORS | 9 | A1B103394 | |
| 0140-20700 | SWITCH CH-C COVER | 3 | A1B103395 | |
| 0140-21047 | HARNESS ASSY MAIN AC REMOTE DIST | 1 | A1B103396 | |
| 0140-21154 | HARNESS ASSY A/B PUMP OVERTEMP | 1 | A1B103397 | |
| 0140-21155 | HAR. ASSY SYSTEM PUMP OVERTEMP | 1 | A1B103398 | |
| 0140-21156 | HARNESS ASSY CH A/B PUMP ON/OFF | 1 | A1B103399 | |
| 0140-21157 | HARNESS ASSY SYTEM PUMP ON/OFF | 1 | A1B103400 | |
| 0140-21406 | CABLEASSY13.56MHZ/FM/INTERCONNECT | 2 | A1B103401 | |
| 0140-21408 | HRNS ASSY PVD W/B CH INTERCONN | 2 | A1B103402 | |
| 0140-21416 | HARNESS ASSYVOR MATCH/H20 FLOW INTLK INTERCONN | 2 | A1B103403 | |
| 0140-21614 | HARNESS ASSY SINGLE PHASE UPS | 2 | A1B103404 | |
| 0140-21726 | HARNESS ASSY CH INTCN JUMPER HTESC | 1 | A1B103405 | |
| 0140-21750 | HARNESS ASSY SIP-CU/WTR FLOW INTLK INTE | 2 | A1B103406 | |
| 0140-21804 | HARNESS ASSY WATER FLOW INTLK CVD | 4 | A1B103407 | |
| 0140-35100 | HARNESS NARROW BODY LOADLOCK | 1 | A1B103408 | |
| 0140-35478 | SWITCH GAS PANEL EXHAUST | 1 | A1B103409 | |
| 0140-35534 | ASSEMBLY HARNESS VALVE SENSORS DPS CHAMBER | 1 | A1B103410 | |
| 0140-35643 | TUBING | 1 | A1B103411 | |
| 0140-35687 | HARNESS ASSY | 1 | A1B103412 | |
| 0140-35688 | HARNESS ASSY | 1 | A1B103413 | |
| 0140-35689 | HARNESS ASSY | 1 | A1B103414 | |
| 0140-35734 | HARNESS ASSY | 13 | A1B103415 | |
| 0140-35735 | HARNESS ASSY | 13 | A1B103416 | |
| 0140-35736 | HARNESS ASSY | 25 | A1B103417 | |
| 0140-35737 | HARNESS ASSY | 25 | A1B103418 | |
| 0140-35916 | HARNESS ASSY | 2 | A1B103419 | |
| 0140-35961 | HARNESS MAIN DPS | 1 | A1B103420 | |
| 0140-35994 | TUBING | 1 | A1B103421 | |
| 0140-36039 | HARNESS DC POWER SUPPLY TO INTERCONNECT | 3 | A1B103422 | |
| 0140-36124 | HARNESS 4 DRIVERS TO 4 CONTRA | 1 | A1B103423 | |
| 0140-36157 | C/A MAGNET DRIVER ADAPTER | 2 | A1B103424 | |
| 0140-36248 | HARNESS MAGNET POWER CORD PO | 1 | A1B103425 | |
| 0140-36256 | HARNESS ASSY | 1 | A1B103426 | |
| 0140-36257 | HARNESS ASSY | 1 | A1B103427 | |
| 0140-36259 | HARNESS ASSY | 1 | A1B103428 | |
| 0140-36261 | HARNESS ASSY | 1 | A1B103429 | |
| 0140-36263 | HARNESS ASSY | 1 | A1B103430 | |
| 0140-36585 | HARNESSGROUNDCENTURA CONTROLLER CMF | 2 | A1B103431 | |
| 0140-38207 | HARNESS ASSY | 1 | A1B103432 | |
| 0140-38208 | HARN SLIT LINER DOOR OPTO SW | 2 | A1B103433 | |
| 0140-38497 | HARNESS ASSYIHC TO CHMB INTER | 3 | A1B103434 | |
| 0140-70036 | HARNESS ASSY PUMP CONTROL A-D LLC | 15 | A1B103435 | |
| 0140-70065 | CABLE ASSY | 40 | A1B103436 | |
| 0140-70090 | POWER CONTROL CABLE ASSY | 1 | A1B103437 | |
| 0140-70092 | HARNESS ASSY LLC/CENTURA INTERFACE PUMP | 1 | A1B103438 | |
| 0140-70093 | CABLE PUMP INTERCONNECT | 24 | A1B103439 | |
| 0140-70094 | HARNESS ASSY | 1 | A1B103440 | |
| 0140-70243 | ASSY MICRO SWITCH | 4 | A1B103441 | |
| 0140-70244 | ASSY SWITCH MICRO CLOSED | 1 | A1B103442 | |
| 0140-70353 | CABLE ASSY | 1 | A1B103443 | |
| 0140-75033 | HARNESSASSEMBLYLOADLOCKINTERCONNECT | 2 | A1B103444 | |
| 0140-75040 | CABLE ASSEMBLY | 2 | A1B103445 | |
| 0140-75048 | HARNESS CONTROLLER | 1 | A1B103446 | |
| 0140-75070 | HARN. ASSY DRIVER ENCODER HOME SENSORS | 1 | A1B103447 | |
| 0140-75106 | HARNESS 20SLOT SYS COTR ASSY | 1 | A1B103448 | |
| 0140-75111 | HRNS ASSY SHIELD TREATMENT TURBO | 2 | A1B103449 | |
| 0140-75229 | SHIELDED HARNS ASSY | 1 | A1B103450 | |
| 0140-75342 | H/A. CB'S TO CONT.'S CENTURA PHASE II CN | 1 | A1B103451 | |
| 0140-76000 | CASSETTE HARNESS | 1 | A1B103452 | |
| 0140-76004 | HARN ASSY AUX. CONTACTOR | 7 | A1B103453 | |
| 0140-76005 | HARNESS ASSY | 1 | A1B103454 | |
| 0140-76006 | CABLE ASSY | 7 | A1B103455 | |
| 0140-76014 | CABLE ASSY | 3 | A1B103456 | |
| 0140-76015 | HARNESS WIRING VIDEO XFER | 7 | A1B103457 | |
| 0140-76016 | HARNESS ASSY RS232 WAFER ORIENTER | 2 | A1B103458 | |
| 0140-76128 | CABLE HARNESS | 1 | A1B103459 | |
| 0140-76129 | ASSY CABLE | 1 | A1B103460 | |
| 0140-76169 | CABLE | 1 | A1B103461 | |
| 0140-76185 | HARNESS ASSYLAMP SOCKET A3/A4 | 1 | A1B103462 | |
| 0140-76222 | CABLE ASSY | 2 | A1B103463 | |
| 0140-76326 | HARNESS ASSY | 1 | A1B103464 | |
| 0140-76363 | HARNESS NSO SYSTEM AC CH1-4 E-CHUCK | 1 | A1B103465 | |
| 0140-76416 | SENSOR I/O SLIT P555 | 2 | A1B103466 | |
| 0140-76426 | HARN ASSY 24V POWER INTCNT | 2 | A1B103467 | |
| 0140-76744 | TUBING | 1 | A1B103468 | |
| 0140-76821 | HARNESS ASSY PNEUMATIC | 3 | A1B103469 | |
| 0140-76990 | HARNESS ASSY OCR USER INTERFACE | 1 | A1B103470 | |
| 0140-77016 | CABLE - RESOLVER HEAD | 3 | A1B103471 | |
| 0140-77034 | CABLE-HEAD SWEEP | 1 | A1B103472 | |
| 0140-77059 | CABLE SLIPRINGS/DETECTOR | 4 | A1B103473 | |
| 0140-77065 | CABLE-ROBOT SENSOR COIL | 1 | A1B103474 | |
| 0140-77066 | ROBOT ENCODER CABLE | 2 | A1B103475 | |
| 0140-77077 | CABLE | 1 | A1B103476 | |
| 0140-77082 | C/A ISRM 12 FT CMP/MF INTERCONNECT | 1 | A1B103477 | |
| 0140-77151 | CABLE-ROTATIONHTROT 2 PWR | 1 | A1B103478 | |
| 0140-77152 | 300F0082;CABLEHT ROT 3 PWR | 1 | A1B103479 | |
| 0140-77153 | HT ROT 3 PWR MNFRM BKHD | 1 | A1B103480 | |
| 0140-77300 | CABLEHEAD SWEEP WAFER | 8 | A1B103481 | |
| 0140-77419 | CABLE | 1 | A1B103482 | |
| 0140-77442 | CABLE-HEAD AND USER CONFIG DIGI | 2 | A1B103483 | |
| 0140-77477 | CABLE | 1 | A1B103484 | |
| 0140-77496 | PHOTOHELIC SENSOR LOWER EXHAUST | 1 | A1B103485 | |
| 0140-77566 | CABLE | 1 | A1B103486 | |
| 0140-77615 | CABLE PORT SERVER-BLHD | 1 | A1B103487 | |
| 0140-77617 | CONFIGHEAD&USERANALOG | 1 | A1B103488 | |
| 0140-77631 | C/A HD ROT1-4 MTR DRIVER RESOLVER | 1 | A1B103489 | |
| 0140-77632 | C/A HD SWP1-4 MTR DRIVER | 1 | A1B103490 | |
| 0140-77635 | CABLEMOTORROTATIONHD3 | 1 | A1B103491 | |
| 0140-77636 | CABLE ASSEMBLY MOTOR DRIVER | 1 | A1B103492 | |
| 0140-77697 | CABLE | 3 | A1B103493 | |
| 0140-77708 | CABLE | 4 | A1B103494 | |
| 0140-77882 | CABLE CASSETTE | 2 | A1B103495 | |
| 0140-78000 | CA ASSY SENSOR | 1 | A1B103496 | |
| 0140-78067 | 300D0062;CABLE125 FTISRMPORTSERVER | 1 | A1B103497 | |
| 0140-78527 | CABLE ASSY HARNESS | 1 | A1B103498 | |
| 0140-90100 | STEPPING MOTO0R | 2 | A1B103499 | |
| 0140-90138 | FRM ASSY RETROFIT CHASS | 2 | A1B103500 | |
| 0140-90477 | C/FORM RXF/OIMBILICAL | 2 | A1B103501 | |
| 0150-00006 | CABLE | 3 | A1B103502 | |
| 0150-00018 | ANALOG INPUT | 2 | A1B103503 | |
| 0150-00049 | CABLE ASSY | 1 | A1B103504 | |
| 0150-00053 | CYLINDER AIR | 2 | A1B103505 | |
| 0150-00077 | CABLE ASSY | 2 | A1B103506 | |
| 0150-00078 | CABLE ASSY | 1 | A1B103507 | |
| 0150-00079 | CABLE ASSY | 1 | A1B103508 | |
| 0150-00080 | CABLE ASSY | 1 | A1B103509 | |
| 0150-00081 | CABLE ASSY | 1 | A1B103510 | |
| 0150-00082 | CABLE ASSY | 1 | A1B103511 | |
| 0150-00083 | CABLE ASSY | 1 | A1B103512 | |
| 0150-00084 | CABLE ASSY | 1 | A1B103513 | |
| 0150-00085 | CABLE ASSY | 1 | A1B103514 | |
| 0150-00087 | CABLE ASSY | 2 | A1B103515 | |
| 0150-00091 | CONTROL CABLE RF GEN | 1 | A1B103516 | |
| 0150-00101 | CABLE OPERATOR KEYBOARD | 1 | A1B103517 | |
| 0150-00104 | REMOTE KEYBOARD CABLE | 1 | A1B103518 | |
| 0150-00121 | SWITCH BELL DOWN ASSY | 11 | A1B103519 | |
| 0150-00123 | BRIGHT/COTRAST CABLE | 1 | A1B103520 | |
| 0150-00124 | CABLE ASSY BELL OPEN SWITCH | 12 | A1B103521 | |
| 0150-00128 | CABLE ASSYPHASE & MAGNITUDE I | 2 | A1B103522 | |
| 0150-00137 | AC CABLE ASSY | 1 | A1B103523 | |
| 0150-00144 | CABLE ASSY | 2 | A1B103524 | |
| 0150-00172 | CABLE | 2 | A1B103525 | |
| 0150-00187 | CABLE ASSEMBLY II TL SCOTT | 1 | A1B103526 | |
| 0150-00205 | CABLE ASSY | 2 | A1B103527 | |
| 0150-00209 | CABLE ASSY CHAMBER HEAT | 1 | A1B103528 | |
| 0150-00210 | POWER CORD | 1 | A1B103529 | |
| 0150-00219 | CABLE ASSY | 1 | A1B103530 | |
| 0150-00227 | CABLE ASSY | 1 | A1B103531 | |
| 0150-00236 | CABLE | 3 | A1B103532 | |
| 0150-00241 | CABLEINTERFACE | 1 | A1B103533 | |
| 0150-00248 | CABLE FLOOD METER | 13 | A1B103534 | |
| 0150-00256 | CABLEHEAT EXCHANGER | 1 | A1B103535 | |
| 0150-00264 | PC INTERFACE B/D | 1 | A1B103536 | |
| 0150-00273 | CABLE ASSY REMOTE RECIPE | 2 | A1B103537 | |
| 0150-00275 | CABLE PCB BASE ASSY | 1 | A1B103538 | |
| 0150-00276 | CABLE ASSY REM RECIPE | 4 | A1B103539 | |
| 0150-00278 | CABLE ASSY | 2 | A1B103540 | |
| 0150-00291 | CABLE INTERCONNECT PCB FLAT ASSY SCSI SOP | 1 | A1B103541 | |
| 0150-00300 | CONNECTOR | 1 | A1B103542 | |
| 0150-00331 | CABLE RF POWER | 3 | A1B103543 | |
| 0150-00339 | INTCON CABLE AE RF MATCH | 1 | A1B103544 | |
| 0150-00404 | CABLE FLOW SENSOR | 2 | A1B103545 | |
| 0150-00457 | CABLE ASSYVACUUM RELAY FILTER TO MATCH | 1 | A1B103546 | |
| 0150-00458 | CABLE ASSY RELAY FILTER | 1 | A1B103547 | |
| 0150-00495 | CABLE ASSY | 1 | A1B103548 | |
| 0150-00516 | CABLE | 6 | A1B103549 | |
| 0150-00523 | CABLE ASSY 25FT M/F EMO UMBILICAL | 4 | A1B103550 | |
| 0150-00525 | CABLE ASSY90DEG SHELL25FT. UMBILICAL EMC COMP | 2 | A1B103551 | |
| 0150-00599 | ASSYSERIPLEX ADAPTOR CABLE | 1 | A1B103552 | |
| 0150-00696 | CABLE ASSY CONTACTOR INTLK CABLE 2 | 1 | A1B103553 | |
| 0150-00779 | CABLE ASSY | 1 | A1B103554 | |
| 0150-00987 | CABLE ASSY CHAMBER TEMP SENSOR | 1 | A1B103555 | |
| 0150-01593 | RIBBON CABLE ASSY RF MATCH CONTROL CON | 4 | A1B103556 | |
| 0150-01770 | CABLE ASSY DC BIAS VOLTAGE DIVIDER | 2 | A1B103557 | |
| 0150-01969 | CABLE ASSYDRIVER CONTROL25' I/O BLKHD | 3 | A1B103558 | |
| 0150-02207 | CABLE POWER LLCK PRS SW | 2 | A1B103559 | |
| 0150-02649 | CABLE ASSY O2 SENSOR RS-232 | 1 | A1B103560 | |
| 0150-02801 | CABLE ASSY FLOPPY DRIVE INTERCONNECT MIRRA 300MM | 5 | A1B103561 | |
| 0150-02959 | CABLE ASSY O2 ANALYZER POWER TPCC | 1 | A1B103562 | |
| 0150-03241 | CABLE ASSY PNEUMATICS UMBILICAL | 1 | A1B103563 | |
| 0150-03337 | CABLE ASSYDPS THROTTLE VALVE 75' MOTOR METAL | 2 | A1B103564 | |
| 0150-03361 | CABLE ASSY | 1 | A1B103565 | |
| 0150-03957 | CABLE ASSY CONTRACTOR INTERLOCK LTESC | 3 | A1B103566 | |
| 0150-04435 | CABLE ASSY VME POWER SUPPLY | 1 | A1B103567 | |
| 0150-05016 | CONNECTOR | 1 | A1B103568 | |
| 0150-05104 | CABLE ASSY. IGNITON NETWORK | 3 | A1B103569 | |
| 0150-06024 | CABLE ASSY WATER FLOW METER INTCNT | 1 | A1B103570 | |
| 0150-06185 | CABLE ASSY | 1 | A1B103571 | |
| 0150-06944 | CABLE | 1 | A1B103572 | |
| 0150-09000 | ASSY FLAT CABLE HD DISK | 1 | A1B103573 | |
| 0150-09001 | ASSY FLAT CABLE HD DISK | 1 | A1B103574 | |
| 0150-09002 | ASSY FLAT CABLE FLOPPY DISK 3 & P | 1 | A1B103575 | |
| 0150-09004 | FLAT CABLE ASSY RS 232 .25P | 10 | A1B103576 | |
| 0150-09005 | CABLE ASSY | 3 | A1B103577 | |
| 0150-09016 | ASSY FLT CABLE A40 POS | 2 | A1B103578 | |
| 0150-09017 | CABLE ASSYCHAMBER INT. | 1 | A1B103579 | |
| 0150-09018 | REV K KTC ELECTRONICS | 2 | A1B103580 | |
| 0150-09019 | CABLE ASSY | 1 | A1B103581 | |
| 0150-09023 | CABLE ASSYVIDEO MONITOR | 2 | A1B103582 | |
| 0150-09025 | CABLE ASSY | 6 | A1B103583 | |
| 0150-09027 | CABLE ASSY HEAT EXCHANGER | 4 | A1B103584 | |
| 0150-09032 | CABLE ASSY | 4 | A1B103585 | |
| 0150-09033 | CABLE ASSY SYS VIDEO | 7 | A1B103586 | |
| 0150-09034 | CABLE ASSY | 2 | A1B103587 | |
| 0150-09056 | CABLE ASSY | 1 | A1B103588 | |
| 0150-09057 | CABLE ASSY | 2 | A1B103589 | |
| 0150-09059 | CABLE ASSY | 1 | A1B103590 | |
| 0150-09064 | CABLE ASSY PNEU SENSE | 1 | A1B103591 | |
| 0150-09066 | VACUUM SWITCH | 1 | A1B103592 | |
| 0150-09068 | CABLE ASSY TURBO INTERFACE | 1 | A1B103593 | |
| 0150-09072 | CABLE LEVELING HEAD EXTENSION | 12 | A1B103594 | |
| 0150-09079 | ASSY CABLE LIQUID SOURCE | 1 | A1B103595 | |
| 0150-09080 | ASSY LIQUID S CVD | 1 | A1B103596 | |
| 0150-09086 | ASSY CABLE OIL PRESSURE SWITCH | 2 | A1B103597 | |
| 0150-09087 | CABLE ASSY POW SUSCEPTOR CAL DISPLAY | 19 | A1B103598 | |
| 0150-09094 | CABLE RF GROUND STRAP | 1 | A1B103599 | |
| 0150-09104 | LIQUID SOURCE CABLE RS232 50 | 1 | A1B103600 | |
| 0150-09106 | CABLES REMOTE REV E 100 | 2 | A1B103601 | |
| 0150-09108 | CABLES REMOTE DIG REV F 100 | 1 | A1B103602 | |
| 0150-09110 | 1/2 ATM SWITCH ASSY CABLE ROOTS VAC | 2 | A1B103603 | |
| 0150-09112 | CABLE KEYBOARD/PRINTER | 1 | A1B103604 | |
| 0150-09120 | CABLE ASSY HEAT EXCHANGER 2 NESLAB | 1 | A1B103605 | |
| 0150-09127 | CABLE AFC 1LIQ. SOURCE | 2 | A1B103606 | |
| 0150-09145 | CABLE ASSY | 2 | A1B103607 | |
| 0150-09146 | CABLE N2 FLOW SWITCH | 6 | A1B103608 | |
| 0150-09172 | CABLE ASSY GAS PANEL | 1 | A1B103609 | |
| 0150-09176 | CABLE ASSY GAS PANEL | 1 | A1B103610 | |
| 0150-09196 | ASSY CABLE | 3 | A1B103611 | |
| 0150-09208 | MULTIFAN CABLE ASSY FAN AMPULE | 5 | A1B103612 | |
| 0150-09218 | PRESSURE SWITCH | 3 | A1B103613 | |
| 0150-09220 | CABLE ASSY-MFC-DOPANT | 2 | A1B103614 | |
| 0150-09236 | CABLE / CABLE ASY FLOPPY DISK DR | 3 | A1B103615 | |
| 0150-09240 | RF GENERATOR INTERFACE CABLE | 7 | A1B103616 | |
| 0150-09241 | CHAMBER PURGE CABLE ASSY | 2 | A1B103617 | |
| 0150-09243 | CABLE ASSY (MFCs CH. A &B) | 10 | A1B103618 | |
| 0150-09245 | CABLE VME TO EXPANDED DIST. | 3 | A1B103619 | |
| 0150-09246 | CABLE EXPANDED DIST TO GP | 5 | A1B103620 | |
| 0150-09246 | CABLE ASSY EXPANDED DISTRIBUT | 1 | A1C100112 | |
| 0150-09247 | CABLE EXPANDED GAS PANEL PNEUMATIC | 6 | A1B103621 | |
| 0150-09248 | CABLE ASSY EXP GP AFC LOWER | 6 | A1B103622 | |
| 0150-09254 | CONVERSION CABLE | 3 | A1B103623 | |
| 0150-09258 | CABLE ASSY MFC 42'' | 19 | A1B103624 | |
| 0150-09259 | CABLE ASSY MFC 49'' | 5 | A1B103625 | |
| 0150-09260 | CABLE ASSY | 4 | A1B103626 | |
| 0150-09261 | CABLE ASSY | 14 | A1B103627 | |
| 0150-09272 | T/C CABLE | 1 | A1B103628 | |
| 0150-09273 | LEVEL SENSOR CABLE | 13 | A1B103629 | |
| 0150-09276 | CABLE OVER PRESSURE | 50 | A1B103630 | |
| 0150-09285 | CABLE GAS PANEL HARNESS ASSY | 7 | A1B103631 | |
| 0150-09291 | CABLE ASSY | 2 | A1B103632 | |
| 0150-09350 | HOT BOX | 1 | A1B103633 | |
| 0150-09359 | CABLE ASSY FEEDER K1 TO CB4-1 | 3 | A1B103634 | |
| 0150-09360 | CABLE ASSY FEEDER K1 TO CB4-2 | 1 | A1B103635 | |
| 0150-09361 | CABLE ASSY FEEDER K1 TO CB4-3 | 2 | A1B103636 | |
| 0150-09362 | ASSY CABLE FEEDER WIRE | 1 | A1B103637 | |
| 0150-09363 | ASSY CABLE FEEDER WIRE | 1 | A1B103638 | |
| 0150-09364 | ASSY CBL FDR WIRE K4-6 TO CB10 | 2 | A1B103639 | |
| 0150-09365 | CABLE FEEDER | 1 | A1B103640 | |
| 0150-09366 | CABLE FEEDER | 1 | A1B103641 | |
| 0150-09370 | CABLE FEEDER K2-6 TO CB5-3 | 2 | A1B103642 | |
| 0150-09389 | CABLE ASSYHEATER AC | 1 | A1B103643 | |
| 0150-09420 | CABLE ASSY POWER FLOW DETECTOR | 6 | A1B103644 | |
| 0150-09488 | CABLE ASSY EXP RS-232 INTERCON | 5 | A1B103645 | |
| 0150-09491 | CABLE ASSY | 8 | A1B103646 | |
| 0150-09514 | CABLE ASSY | 5 | A1B103647 | |
| 0150-09515 | CABLEASSYTRF MATCH MANUAL | 5 | A1B103648 | |
| 0150-09517 | CBL ASSY CAP MONO/PROC GIV | 16 | A1B103649 | |
| 0150-09532 | CABLE.ASSY | 3 | A1B103650 | |
| 0150-09534 | CABLE ASSYE/PAUX F | 3 | A1B103651 | |
| 0150-09557 | CABLE ASSY | 1 | A1B103652 | |
| 0150-09590 | EMO#2 REMOTE CABLE | 14 | A1B103653 | |
| 0150-09616 | CABLE PRESSURE SWITCH | 42 | A1B103654 | |
| 0150-09617 | CABLE CIRCUIT BREAKER | 1 | A1B103655 | |
| 0150-09635 | CABLE ASSYTHERMOCOUPLE ANTI CLOUDING | 1 | A1B103656 | |
| 0150-09662 | CABLE ASSY | 1 | A1B103657 | |
| 0150-09667 | CABLE ASSY | 1 | A1B103658 | |
| 0150-09681 | POWER LEAD DRUX | 8 | A1B103659 | |
| 0150-09695 | CABLE ASSY | 4 | A1B103660 | |
| 0150-09701 | CABLE ASSY | 1 | A1B103661 | |
| 0150-09707 | CABLE ASSY REMOTE VIDEO | 1 | A1B103662 | |
| 0150-09708 | CABLE ASSY | 2 | A1B103663 | |
| 0150-09709 | CABLE ASSY SET GAS TO REMOTE 25 FT | 1 | A1B103664 | |
| 0150-09710 | CABLE ASSY SET CONTROL TO PANEL | 1 | A1B103665 | |
| 0150-09757 | CABLE ASSY | 1 | A1B103666 | |
| 0150-09770W | CABLE ASSY L11 FB TO EV PCV | 1 | A1B103667 | |
| 0150-09783 | CABLE HARNESS ASSY INTERCONN P5000 | 2 | A1B103668 | |
| 0150-09784 | HALF ATM SWITCH | 1 | A1B103669 | |
| 0150-09785 | CABLE ASSY | 1 | A1B103670 | |
| 0150-09791 | CABLE ASP GENERATOR | 3 | A1B103671 | |
| 0150-09822 | CABLE ASSY | 1 | A1B103672 | |
| 0150-09823 | CABLE POWER 120 VAC | 7 | A1B103673 | |
| 0150-09835 | PROTEUS FLOW SWITCH 0.4 GPM | 4 | A1B103674 | |
| 0150-09836 | CABLE GATE | 5 | A1B103675 | |
| 0150-09879 | CABLEESCCONTROLLER CHAMBER C | 1 | A1B103676 | |
| 0150-09880 | CABLE ESC CONTROLLER CH. D | 1 | A1B103677 | |
| 0150-09881 | CABLEESCCONTROLLER(RS232) | 4 | A1B103678 | |
| 0150-09884 | CABLE ASSY LID INTERLOC | 2 | A1B103679 | |
| 0150-09889 | CABLE ASSY SCSI 50P EXT 20-SLOT VME3-1/2 | 1 | A1B103680 | |
| 0150-09900 | CABLE ASSEMBLY OZONATOR POSITION A | 4 | A1B103681 | |
| 0150-09901 | CABLE | 2 | A1B103682 | |
| 0150-09908 | CABLE | 5 | A1B103683 | |
| 0150-10030 | CABLE VME GND TO ENDPOINT SELECT BD H | 4 | A1B103684 | |
| 0150-10044 | THERMAL CABLE ASSY | 8 | A1B103685 | |
| 0150-10045 | CABLE ASSEMBLY | 15 | A1B103686 | |
| 0150-10063 | CABLE ASSY SAFETY SWITCH JUMPER | 4 | A1B103687 | |
| 0150-10069 | CABLE ASSY ENDPOINT GAIN WXZ | 6 | A1B103688 | |
| 0150-10133 | CABLE ASSY EXPANDED | 1 | A1B103689 | |
| 0150-10141 | ASSYEXZ 2-PHASE STEPPING MOTOR | 4 | A1B103690 | |
| 0150-10184 | CABLE JUMPER INTERLOCK HF MATCH | 1 | A1B103691 | |
| 0150-10188 | CABLE EXPANDED DI/DO | 1 | A1B103692 | |
| 0150-10203 | PWR CABLE | 2 | A1B103693 | |
| 0150-10204 | CABLE ASSY | 6 | A1B103694 | |
| 0150-10240 | CABLE ASSY | 2 | A1B103695 | |
| 0150-10241 | POWER CORD | 3 | A1B103696 | |
| 0150-10242 | POWER CORD | 1 | A1B103697 | |
| 0150-10248 | CABLE ASSY LFC TO L11FB CH A LIQUID IN | 1 | A1B103698 | |
| 0150-10251 | ASSY CABLE | 1 | A1B103699 | |
| 0150-10257 | CABLE ASSY | 1 | A1B103700 | |
| 0150-10260 | CABLE ASSY | 1 | A1B103701 | |
| 0150-10261 | CABLE ASSY | 6 | A1B103702 | |
| 0150-10327 | CABLE ASSY | 1 | A1B103703 | |
| 0150-10328 | CBL I/O PWR. DIST. | 1 | A1B103704 | |
| 0150-10394 | CABLE ASSY | 2 | A1B103705 | |
| 0150-10395 | CABLE ASSY | 2 | A1B103706 | |
| 0150-10396 | CABLE | 1 | A1B103707 | |
| 0150-10397 | CABLE ASSY | 2 | A1B103708 | |
| 0150-10398 | CABLE ASSY | 2 | A1B103709 | |
| 0150-10404 | CABLE ASSY PCB 36'' LONG OZONATOR | 4 | A1B103710 | |
| 0150-10407 | CABLE ASSY | 1 | A1B103711 | |
| 0150-10409 | CABLE ASSY | 12 | A1B103712 | |
| 0150-10412 | CABLE ASSY | 1 | A1B103713 | |
| 0150-10423 | CABLE ASSY | 3 | A1B103714 | |
| 0150-10424 | CABLE ASSY | 3 | A1B103715 | |
| 0150-10461 | CABLE | 2 | A1B103716 | |
| 0150-10474 | CABLE ASSY TB3 | 3 | A1B103717 | |
| 0150-10500 | C/A ORIENTER CH UMBILICAL 55 FT. | 1 | A1B103718 | |
| 0150-10520 | POWER CABLE | 1 | A1B103719 | |
| 0150-10534 | CABLE HARNESS | 2 | A1B103720 | |
| 0150-10549 | TC SENSOR | 6 | A1B103721 | |
| 0150-13068 | CABLE ASSY 50 FT VHP TRANS MOTOR | 3 | A1B103722 | |
| 0150-13083 | CABLE ASSY PUMP EDWARDS HARSH SVCE 75 FT | 1 | A1B103723 | |
| 0150-13088 | CABLE ASSY 50 FT VHP TRANS MOTOR | 2 | A1B103724 | |
| 0150-13092 | CABLE ASSY 75 FT FINAL VLVE INTLK | 1 | A1B103725 | |
| 0150-13116 | CABLE ASSYGAS PANEL POWER (25FT.) | 14 | A1B103726 | |
| 0150-13152 | POWER CABLELAMP DRIVER TO CHAMBER TRAY60 FT | 1 | A1B103727 | |
| 0150-13155 | POWER CABLE 5KVA SFMR TO CHAMBER TRAY | 3 | A1B103728 | |
| 0150-13223 | JUMPER XFER CHAMBER LID INTERLOCK | 1 | A1B103729 | |
| 0150-13248 | CABLE ASSY WTR FL INLK ON BD CRYO 2&3 | 1 | A1B103730 | |
| 0150-16154 | CABLE ASSY | 95 | A1B103731 | |
| 0150-16201 | INTERCONNECT CABLE HEAT EXCH. | 1 | A1B103732 | |
| 0150-18035 | CBL ASSY EMC COMP PUMP UMBILICAL 75 FT | 4 | A1B103733 | |
| 0150-18059 | ASSY CABLE GNDSHLD HDP | 2 | A1B103734 | |
| 0150-18097 | CABLE ASSY DC POWER DISTRIB SECOND SERIPLEX | 1 | A1B103735 | |
| 0150-20003 | CABLE ASSY REMOTE DC POWER | 1 | A1B103736 | |
| 0150-20010 | CABLE ASSY PNUEMATIC INTERCONNECT | 1 | A1B103737 | |
| 0150-20028 | CABLE | 1 | A1B103738 | |
| 0150-20038 | CABLE ASSY REMOTE I/O | 21 | A1B103739 | |
| 0150-20055 | CABLE ASSY SYS FAIL DETECT CONTROLLER | 1 | A1B103740 | |
| 0150-20076 | CABLE ASSY | 5 | A1B103741 | |
| 0150-20090 | GENERATOR CABLE | 5 | A1B103742 | |
| 0150-20095 | CABLE ASSY HV INPUT LTD | 1 | A1B103743 | |
| 0150-20112 | CABLE ASSY | 39 | A1B103744 | |
| 0150-20119 | Cable Assy | 2 | A1B103745 | |
| 0150-20126 | CABLE ASSY | 4 | A1B103746 | |
| 0150-20140 | CABLE ASSY | 3 | A1B103747 | |
| 0150-20143 | JUMPER 4-PIN CONNECTOR | 17 | A1B103748 | |
| 0150-20149 | CABLE ASSY | 4 | A1B103749 | |
| 0150-20159 | CABLE ASSY CRYO COMP | 1 | A1B103750 | |
| 0150-20160 | CABLE ASSEMBLY EMO INTERCONNECT | 11 | A1B103751 | |
| 0150-20168 | CABLE ASSY SEC. GENERATOR RACK | 9 | A1B103752 | |
| 0150-20181 | CABLE ASSY | 4 | A1B103753 | |
| 0150-20182 | CABLE CHASSIS GND. MDX 1FT | 3 | A1B103754 | |
| 0150-20183 | CABLE ASSY | 4 | A1B103755 | |
| 0150-20186 | CABLE ASSY | 1 | A1B103756 | |
| 0150-20187 | CABLE ASSYREMOTE SYSTEM VIDEO | 32 | A1B103757 | |
| 0150-20239 | CABLE ASSY LLB LED PXR | 3 | A1B103758 | |
| 0150-20252 | CABLE ASSY ORIENTER RS232 | 1 | A1B103759 | |
| 0150-20262 | AC CHANNEL ORIENTER | 1 | A1B103760 | |
| 0150-20267 | CABLE ASSY CHB TC AMP INT | 3 | A1B103761 | |
| 0150-20337 | CABLE REMOTE SYS VIDEO 35FT | 1 | A1B103762 | |
| 0150-20345 | CABLE | 12 | A1B103763 | |
| 0150-20353 | CABLE ASSY | 4 | A1B103764 | |
| 0150-20369 | CA ASSY WATER DETECT MAINFRAME | 1 | A1B103765 | |
| 0150-20388 | RF CABLE | 1 | A1B103766 | |
| 0150-20390 | RF CABLE | 1 | A1B103767 | |
| 0150-20391 | RF CABLE | 1 | A1B103768 | |
| 0150-20406 | CABLE ASSY CRYO 12 WATER FLOW INTLK | 2 | A1B103769 | |
| 0150-20408 | CABLE ASSY CRYO WATER DI | 2 | A1B103770 | |
| 0150-20409 | CABLE ASSY CRYO INTCNCTWATER INTLK | 1 | A1B103771 | |
| 0150-20435 | CABLE ASSY | 2 | A1B103772 | |
| 0150-20464 | CABLE ASSY WATER FLOW METER INTCNT | 5 | A1B103773 | |
| 0150-20509 | CABLE ASSY | 1 | A1B103774 | |
| 0150-20522 | CABLEASSYMATCH/LIFT | 3 | A1B103775 | |
| 0150-20536 | CABLE | 9 | A1B103776 | |
| 0150-20537 | CABLE ASSY PUMP CONTROL CH 3/D | 8 | A1B103777 | |
| 0150-20556 | CABLE ASSY EMO MAIN AC TO GEN RACK | 1 | A1B103778 | |
| 0150-20574 | CABLE ASSY A/B PUMP STD INTF | 8 | A1B103779 | |
| 0150-20578 | PLUG | 16 | A1B103780 | |
| 0150-20580 | CABLE ASSY 2-PHS DRVR OUT MTR | 1 | A1B103781 | |
| 0150-20602 | CABLE ASSYBUF XFER LTD IN PLACEINTLK | 1 | A1B103782 | |
| 0150-20631 | RORZE TO ENDURA COMS CABLE | 1 | A1B103783 | |
| 0150-20638 | PLUG TERMINATOR RF | 22 | A1B103784 | |
| 0150-20639 | CABLE ASSY 2-PHASE DRVR INPUT | 1 | A1B103785 | |
| 0150-20640 | CABLE ASSY 2-PHASE DRVR OUTPUT | 1 | A1B103786 | |
| 0150-20641 | CABLE ASSY TC CHAMBER TRAY INTERFACE | 6 | A1B103787 | |
| 0150-20660 | CABLE ASSY | 1 | A1B103788 | |
| 0150-20664 | CABLE ASSY WTR LEAK TRAY\TRAY | 1 | A1B103789 | |
| 0150-20705 | CABLE ASSY WTR FL INLK ON BD CRYO | 1 | A1B103790 | |
| 0150-20708 | CABLE ASSY 75 FT DC | 12 | A1B103791 | |
| 0150-20710 | CABLE ASSY 2ND GEN WTR LK INTERCONN | 1 | A1B103792 | |
| 0150-20809 | GROUNDING STRAP | 2 | A1B103793 | |
| 0150-20827 | VIDEO MONITOR SWITCHBOX CABLE | 1 | A1B103794 | |
| 0150-20885 | CABLE ASSY 25FT WTR LKG DET RF GEN INTCO | 1 | A1B103795 | |
| 0150-20901 | CABLE ASSY ENCODER INTRCONNECT | 1 | A1B103796 | |
| 0150-21082 | CABLE ASSY 75' EXT INTERCONNECT | 4 | A1B103797 | |
| 0150-21084 | CABLE ASSY 75'' EMO | 2 | A1B103798 | |
| 0150-21112 | CABLE ASSY EMO MAIN AC TO GEN RACK 100F | 1 | A1B103799 | |
| 0150-21220 | CABLE ASSY TRANSFER ROBOT | 1 | A1B103800 | |
| 0150-21224 | CABLE ASSY CASSETTE INDEXER INTCNT | 1 | A1B103801 | |
| 0150-21225 | CABLE ASSY OPERATOR PANEL | 1 | A1B103802 | |
| 0150-21232 | CABLE ASSY CHAMBER 3 INTCNT 50 FT | 2 | A1B103803 | |
| 0150-21234 | CABLE ASSY CHAMBER 1 INTCNT 50 FT | 1 | A1B103804 | |
| 0150-21235 | CABLE ASSY CHAMBER A/B INTCNT 50 FT | 1 | A1B103805 | |
| 0150-21236 | CABLE ASSY GAS INTCNT 50 FT | 1 | A1B103806 | |
| 0150-21238 | CABLE ASSY ENCODER INTCON 600 | 1 | A1B103807 | |
| 0150-21309 | CABLESYSTEM CONTROLLER | 2 | A1B103808 | |
| 0150-21340 | CHAMBER 2 INTERCONNECT | 1 | A1B103809 | |
| 0150-21341 | CABLE | 1 | A1B103810 | |
| 0150-21342 | CABLE ASSYCHAMBER 4 INTERCONNECT | 1 | A1B103811 | |
| 0150-21348 | CABLE GENERATOR RACK INTERCONN | 6 | A1B103812 | |
| 0150-21352 | CABLE | 1 | A1B103813 | |
| 0150-21357 | CHAMBER C INTERCONNECT | 2 | A1B103814 | |
| 0150-21358 | CABLE | 1 | A1B103815 | |
| 0150-21420 | CABLE ASSY REM 1 INTCON 75 FT | 1 | A1B103816 | |
| 0150-21422 | CABLE ASSY PUMP FRAME INTERCONNECT | 1 | A1B103817 | |
| 0150-21423 | CABLE TO MAINFRAME | 2 | A1B103818 | |
| 0150-21424 | CABLE ASSY | 3 | A1B103819 | |
| 0150-21446 | CABLE ASSY WTR LEAD DETECT MNFRM | 1 | A1B103820 | |
| 0150-21463 | CABLE ASSY EXT ROBOT INTLK CEM96 | 1 | A1B103821 | |
| 0150-21556 | CABLE ASSYOPERATION PANEL INTCT(40FT.)EMC | 1 | A1B103822 | |
| 0150-21622 | CABLE ASSY EMO JUMPER SHP-FABS | 3 | A1B103823 | |
| 0150-21767 | CABLE ASSY HEAT EXCHANGER 75 FT | 1 | A1B103824 | |
| 0150-21768 | CABLE | 1 | A1B103825 | |
| 0150-21975 | CABLE ASSY 40 FT MDX MINI PANEL | 1 | A1B103826 | |
| 0150-21977 | CABLE ASSY 70 FT MDX MINI PNL | 3 | A1B103827 | |
| 0150-22021 | CABLE | 3 | A1B103828 | |
| 0150-22038 | CABLE FOR E-CLEAN CART INTERLOCK | 2 | A1B103829 | |
| 0150-22042 | CABLE ASSY | 3 | A1B103830 | |
| 0150-22055 | CABLE HRNS ASSY | 1 | A1B103831 | |
| 0150-22289 | CBL ASSY STEPPER Y AXIS | 1 | A1B103832 | |
| 0150-22343 | CABLE ASSY STEPPER X-AXIS INTCNT 50 FT | 1 | A1B103833 | |
| 0150-22344 | CABLE ASSY STEPPER Y-AXIS 50 FT | 1 | A1B103834 | |
| 0150-22421 | CABLE ASSY70FT. MDX-L MINI PNL | 2 | A1B103835 | |
| 0150-22422 | CABLE | 1 | A1B103836 | |
| 0150-22451 | HRNS 13.56MHZ MATCH INTEGRATION | 1 | A1B103837 | |
| 0150-22586 | CABLE ASSY JUMPER PLUG | 1 | A1B103838 | |
| 0150-22660 | CABLE ASSY REACTIVE PRECLEAN MATCH LIFT | 1 | A1B103839 | |
| 0150-22845 | CABLE ASSY MAIN AC/SYS AC EMO INTCO | 1 | A1B103840 | |
| 0150-35002 | CABLE ASSY MONITOR 30' | 1 | A1B103841 | |
| 0150-35112 | 5 PHASE DRIVER TO PCB C/A AC PWR | 2 | A1B103842 | |
| 0150-35215 | CABLE ASSY STEC MFC SHORT | 1 | A1B103843 | |
| 0150-35222 | CABLE ASSY | 1 | A1B103844 | |
| 0150-35350 | CABLE ASSY ROTATION HOME | 2 | B1C100115 | |
| 0150-35431 | CABLE ASSY | 2 | A1B103845 | |
| 0150-35432 | CABLEASSYTC GAUGECENTURA | 3 | A1B103846 | |
| 0150-35434 | CABLE ASSY RF MATCH/CHM | 1 | A1B103847 | |
| 0150-35445 | C/A MAG DRIVER ADAPTER | 7 | A1B103848 | |
| 0150-35511 | CABLE ASSY EXT. MAINFRAME | 1 | A1B103849 | |
| 0150-35516 | CABLE ASSY JUMPER PLUG WATER F | 1 | A1B103850 | |
| 0150-35539 | CABLE ASSY | 1 | A1B103851 | |
| 0150-35615 | MANIFOLD | 3 | A1B103852 | |
| 0150-35616 | EV MANIFOLD | 4 | A1B103853 | |
| 0150-35617 | CABLE ASSY24VAC FRONT LAMP DPS CENTURA | 1 | A1B103854 | |
| 0150-35632 | CABLE ASSY | 3 | A1B103855 | |
| 0150-35633 | CABLE ASSY | 4 | A1B103856 | |
| 0150-35634 | CABLE ASSY | 2 | A1B103857 | |
| 0150-35635 | CABLE ASSY | 3 | A1B103858 | |
| 0150-35641 | CABLE ASSY24VAC REAR LAMP DPS CENTURA | 1 | A1B103859 | |
| 0150-35712 | CABLE HEATER CH. A/C LINE 1 DCVD CENTU | 1 | A1B103860 | |
| 0150-35736 | CABLE ASSY | 1 | A1B103861 | |
| 0150-35738 | CABLE ASSY | 1 | A1B103862 | |
| 0150-35766 | TC K-TYPE | 3 | A1B103863 | |
| 0150-35795 | CABLE ASSY | 3 | A1B103864 | |
| 0150-35796 | CABLE ASSY | 3 | A1B103865 | |
| 0150-35797 | CABLE ASSY | 2 | A1B103866 | |
| 0150-35798 | CABLE ASSY | 1 | A1B103867 | |
| 0150-35799 | CABLE ASSY | 2 | A1B103868 | |
| 0150-35800 | CABLE ASSY | 2 | A1B103869 | |
| 0150-35801 | CABLE ASSY | 2 | A1B103870 | |
| 0150-35802 | CABLE ASSY | 2 | A1B103871 | |
| 0150-35803 | CABLE ASSY | 1 | A1B103872 | |
| 0150-35832 | CABLE ASSY | 1 | A1B103873 | |
| 0150-35833 | CABLE ASSY | 1 | A1B103874 | |
| 0150-35834 | CABLE ASSY | 1 | A1B103875 | |
| 0150-35835 | CABLE ASSY | 1 | A1B103876 | |
| 0150-35961 | CABLE ASSYRECIPE SELECT25 FT | 6 | A1B103877 | |
| 0150-36092 | C/A SPARCSTATION RS232 48' 5200 MCC | 1 | A1B103878 | |
| 0150-36709 | CABLE ASSY | 1 | A1B103879 | |
| 0150-36726 | CABLE ASSY | 7 | A1B103880 | |
| 0150-36727 | CABLE ASSY | 8 | A1B103881 | |
| 0150-36880 | CABLE WATER LEAK DETECTOR | 1 | A1B103882 | |
| 0150-36897 | CABLE HGL HB TO CHA/B CVD- TXZ | 1 | A1B103883 | |
| 0150-37196 | CABLE IPS BIAS VOLTAGE MATCH TO SIG | 1 | A1B103884 | |
| 0150-37287 | CABLE HEATER GPLIS CH A SEG 1 CENTURA CVD TI | 1 | A1B103885 | |
| 0150-37289 | CABLE HEATER GPLIS CH A SEG 2CENTURA CVD TI | 1 | A1B103886 | |
| 0150-38892 | CABLE HEATER GPLIS CH A SEG 3CENTURA CVD TI | 1 | A1B103887 | |
| 0150-39004 | CABLE AI/O 50P F/M 40FT | 1 | A1B103888 | |
| 0150-39381 | CABLE COAXIAL ENDPOINT | 1 | A1B103889 | |
| 0150-39415 | RIBBON CABLE ASSY RF MATCH CENTURA | 1 | A1B103890 | |
| 0150-70001 | GROUNDCABLEASSY | 1 | A1B103891 | |
| 0150-70002 | CABLE ASSY FLAT SCSI 50P EXT | 3 | A1B103892 | |
| 0150-70005 | JUMPER CABLES | 2 | A1B103893 | |
| 0150-70013 | CABLE | 1 | A1B103894 | |
| 0150-70014 | CABLE | 2 | A1B103895 | |
| 0150-70015 | CABLE | 1 | A1B103896 | |
| 0150-70019 | RIBBON CABLE (37 PIN) | 2 | A1B103897 | |
| 0150-70020 | CABLE | 1 | A1B103898 | |
| 0150-70034 | PROBE TEMP | 2 | A1B103899 | |
| 0150-70039 | CBL ASSY ENI IFT | 1 | A1B103900 | |
| 0150-70120 | CABLE SATELITE EMO | 1 | A1B103901 | |
| 0150-70130 | CABLE ASSY HEATER AC POS 3 WIDE BODY | 1 | A1B103902 | |
| 0150-70171 | CABLE ASSY EXHAUST FAN | 1 | A1B103903 | |
| 0150-75012 | CABLE ASSY | 2 | A1B103904 | |
| 0150-75013 | EMC COM CABLE PROC INTFC PUMP | 12 | A1B103905 | |
| 0150-75014 | CABLE POWER INTFC CONDUIT 60 FT | 12 | A1B103906 | |
| 0150-75025 | EMC COMP ASSY CABLE EMO | 1 | A1B103907 | |
| 0150-75026 | EMC COMP ASSY CABLE REMOTE | 1 | A1B103908 | |
| 0150-75027 | EMC COMP ASSY CABLE REMOTE DIGITAL | 1 | A1B103909 | |
| 0150-75028 | EMC COMP ASSY CABLE DC POWERFOOT | 1 | A1B103910 | |
| 0150-75029 | EMC COMP CBL FINAL VALVE N2 | 1 | A1B103911 | |
| 0150-75033 | CABLE 75 FT PANEL TO REMOTE | 2 | A1B103912 | |
| 0150-75034 | EMC COMP ASSY CABLE 75FT SYSTEM VID | 3 | A1B103913 | |
| 0150-75035 | EMC COMP ASSY CABLE | 7 | A1B103914 | |
| 0150-75040 | EMC COMP CA BLE LLC | 1 | A1B103915 | |
| 0150-75075 | CABLE PWR25FT.208VAC.FROM CNTRLR TO CHAMBER TRAY | 4 | A1B103916 | |
| 0150-75076 | CABLE POWER CONTROLLER TO CHAMBER 40FT | 1 | A1B103917 | |
| 0150-75077 | CABLE POWER25FT.5KVA. XFMR TO CHAMBER TRAY | 2 | A1B103918 | |
| 0150-75078 | CABLE POWER XFMR TO CHAMBER TRAY | 2 | A1B103919 | |
| 0150-75125 | MAINFRAME BULKHEAD | 1 | A1B103920 | |
| 0150-75152 | CABLE | 1 | A1B103921 | |
| 0150-75616 | SLEEVE GROUNDING HT ESC C/A | 2 | A1B103922 | |
| 0150-76002 | CABLE HARNESS | 5 | A1B103923 | |
| 0150-76008 | CABLE ASSY WATER LEAK MF INCNT | 1 | A1B103924 | |
| 0150-76016 | CABLE ASSY END POINT VIDEO VGA | 2 | A1B103925 | |
| 0150-76061 | ASSY CABLE INTRCNT SERIAL | 3 | A1B103926 | |
| 0150-76064 | CABLE GND 2ND TURBO | 1 | A1B103927 | |
| 0150-76066 | ASSY CABLE SYSTEM VIDEO 35 FT | 8 | A1B103928 | |
| 0150-76104 | NESLAB/CENTURA RACK INTERCONNECT CABLE | 1 | A1B103929 | |
| 0150-76116 | CABLE ASSY BUFFER ROBOT TEST | 26 | A1B103930 | |
| 0150-76163 | CABLE ASSY SOURCE HIN | 4 | A1B103931 | |
| 0150-76165 | CABLE ASSY | 9 | A1B103932 | |
| 0150-76166 | EMC COMP. ASSY CABLE (REPLACES 0150-09107) | 1 | A1B103933 | |
| 0150-76168 | EMC COMP. DC POWER FOOT (REPLACES 0150-09109) | 3 | A1B103934 | |
| 0150-76169 | CABLE P12 SYS/P6 N2 | 3 | A1B103935 | |
| 0150-76175 | KIT 25'' UMBILICALS BASIC | 1 | A1B103936 | |
| 0150-76176 | ASSYCBLEMC COMPCHMBRE | 1 | A1B103937 | |
| 0150-76181 | EMC COMPHARNESS ASSY MAIN FRAME | 4 | A1B103938 | |
| 0150-76184 | EMC COMP. 25' CABLE CHA ABC | 4 | A1B103939 | |
| 0150-76190 | EMC. COMP CABLE DIGITAL | 10 | A1B103940 | |
| 0150-76191 | CABLE ASSY | 10 | A1B103941 | |
| 0150-76192 | EMC COMP. ASSY CABLE (REPLACES 0150-09106) | 2 | A1B103942 | |
| 0150-76198 | CABLE ASSY MONITOR INTERF | 21 | A1B103943 | |
| 0150-76222 | CABLE ASSY | 2 | A1B103944 | |
| 0150-76225 | CABLE ASSY | 1 | A1B103945 | |
| 0150-76226 | CABLE ASSY | 1 | A1B103946 | |
| 0150-76227 | CABLE ASSY | 2 | A1B103947 | |
| 0150-76228 | CABLE ASSY | 1 | A1B103948 | |
| 0150-76229 | CABLE ASSY | 2 | A1B103949 | |
| 0150-76258 | CABLE ASSY TFR UTI RGA-POS 7 | 2 | A1B103950 | |
| 0150-76259 | CABLE ASSY BFR UTI RGA-POS 8 | 2 | A1B103951 | |
| 0150-76322 | CABLE | 1 | A1B103952 | |
| 0150-76464 | CABLE ASSYOTF/WOB/EWOB SERIAL INTERFACE | 1 | A1B103953 | |
| 0150-76513 | CABLE ASSY MAIN FRAME UMBILICAL | 4 | A1B103954 | |
| 0150-76515 | CABLE ASSY | 3 | A1B103955 | |
| 0150-76649 | CABLE ASSY AC POWER ORIENTER | 1 | A1B103956 | |
| 0150-76652 | CABLE ASSY | 1 | A1B103957 | |
| 0150-76656 | CABLE ASSY32IN CENTURA SMIF LLA ASYST INTERCON | 1 | A1B103958 | |
| 0150-76771 | POWER SUPPLY CABLE ENDURA 5500 | 1 | A1B103959 | |
| 0150-76821 | CABLE HEATER AC | 3 | A1B103960 | |
| 0150-76822 | CABLE ASSY AI MUX 3 | 1 | A1B103961 | |
| 0150-76823 | C/AHTESC RF CLEAN INTLKRF MATCH | 1 | A1B103962 | |
| 0150-76827 | CABLE BROOKS MFC TO STEC MFC | 2 | A1B103963 | |
| 0150-76875 | CABLE ASSY75ftCENTURA SMIF LLAINTERCONNECT | 1 | A1B103964 | |
| 0150-76876 | CABLE ASSY 75ft CENTRU SMIF LLB INTERCONNECT | 1 | A1B103965 | |
| 0150-76963 | CABLE ASSY | 1 | A1B103966 | |
| 0150-77097 | 50FT SECS/GEM EXTENSION | 1 | A1B103967 | |
| 0150-77364 | CABLERETROD5P2CARD E | 1 | A1B103968 | |
| 0150-77505 | CABLEANALOGI/OCNTRL | 1 | A1B103969 | |
| 0150-78394 | CBLASSYMIRRA300MMPCS1DRIVER-MOTOR | 2 | A1B103970 | |
| 0150-78398 | CBLASSYMIRRA300MMPCS3DRIVERMOTO | 1 | A1B103971 | |
| 0150-90005 | CABLE ASSY | 1 | A1B103972 | |
| 0150-90162 | CABLE ASSY | 2 | A1B103973 | |
| 0150-90364 | FIBRE OPTICS 1.42M | 1 | A1B103974 | |
| 0150-90394 | F/O T1 6000MM''C'' | 1 | A1B103975 | |
| 0150-90396 | F/O T2 1000MM EMER | 11 | A1B103976 | |
| 0150-90711 | CABLE | 1 | A1B103977 | |
| 0150-90773 | CABLE ASSY | 1 | A1B103978 | |
| 0150-90774 | CABLE ASSY. 2G. P6/VIBR. SENSOR | 1 | A1B103979 | |
| 0150-90826 | GATE VALVE HARNESS | 1 | A1B103980 | |
| 0150-90835 | TRANSZORB ASSY (ION SOURCE) | 1 | A1B103981 | |
| 0150-91185 | FO, T7, 7600 MM, 10A.G.TX/14E.G.TX | 2 | B1C100102 | |
| 0150-91368 | DIODE ASSY | 3 | A1B103982 | |
| 0150-91369 | DIODE ASSY | 2 | A1B103983 | |
| 0150-91424 | CABLE CONNECTOR D-TYPE 2G | 1 | A1B103984 | |
| 0150-91737 | SPARES TB 300MM | 1 | A1B103985 | |
| 0150-91746 | F/O SPARES TL 4500MM/SMA-SMA | 2 | A1B103986 | |
| 0150-91868 | C.F.A. 4A.P11/3D.P14 | 1 | A1B103987 | |
| 0150-91877 | C.F.A. 4D.P2/3D.P15 | 1 | A1B103988 | |
| 0150-91939 | CABLE 2GP3/SFP11 | 7 | A1B103989 | |
| 0150-92160 | CABLEROUGH VALVE F/B J1 | 2 | A1B103990 | |
| 0150-97258 | CABLEHCIGULE | 1 | A1B103991 | |
| 0150-97545 | CABLE ASSY RPS2 POWER PRODUCER S | 1 | A1B103992 | |
| 0150-97547 | CABLE ASSY PRODUCER HEATER POWER | 1 | A1B103993 | |
| 0150-99096 | CAWOHTHROH/SBEAM | 1 | A1B103994 | |
| 0150-99115 | CABLECHARGE HEAD SENSOR | 1 | A1B103995 | |
| 0150-99132 | CABLE ASSY | 2 | A1B103996 | |
| 0150-99133 | CABLE ASSY | 1 | A1B103997 | |
| 0150-99136 | CABLE | 2 | A1B103998 | |
| 0160-20000 | CONNECTOR COAXIAL N RECEPTACL | 3 | A1B103999 | |
| 0170-20510 | WIRING DIAGRAM PRESS CONTROL INTERGRATION AXZ | 3 | A1B104000 | |
| 01-81033-00 | GAS DISTR LN ASSY | 2 | A1B104001 | |
| 01-81334-00 | GAS TUBE | 11 | A1B104002 | |
| 01-81911-00 | CONTROLLER ION/TC MODEL 8100N | 3 | A1B104003 | |
| 01-81912-00 | ANALOG INTERFACE UNIT | 2 | A1B104004 | |
| 01-81917-00/A | TRANSDUCER BARATRON TURBO CONTROLLER | 2 | A1B104005 | |
| 01-82042-01 | DEPRESSOR ASSY-OXIDE SYS | 12 | A1B104006 | |
| 01-82622-00 | PLATENS, 5" OD 4.5 POLISHED | 4 | B1C100123 | |
| 01-82628-00 | STRAP GROUND BELL JAR | 6 | A1B104007 | |
| 01-82868-00 | DRIVE AIR VARIABLE ASSY | 2 | A1B104008 | |
| 01-83800-00 | HEX DRIVE ASSY GEAR | 1 | A1B104009 | |
| 01-83802-00 | HEX POSITION DECODER | 2 | A1B104010 | |
| 01-88018-00 | CARTRIDGE DEIONIZER | 1 | A1B104011 | |
| 0190-00014 | SPECS SWITCH FOOT OPERATED | 1 | A1B104012 | |
| 0190-00036 | R.F. SENSE COIL | 1 | A1B104013 | |
| 0190-00040 | SENSOR CURRENT | 1 | A1B104014 | |
| 0190-00047 | RIBBON CONNECT 7 PIN | 1 | A1B104015 | |
| 0190-00048 | RF MATCH 15PF CAP | 1 | A1B104016 | |
| 0190-00065 | O RING 19.5CSD .21VITON | 30 | A1B104017 | |
| 0190-00085 | CYLINDER AIR LEFT SIDE | 4 | A1B104018 | |
| 0190-00118 | O-RING 27.940 ID .275 CSD VITON UNDER BELL JAR | 10 | A1B104019 | |
| 0190-00139 | SPRING TORISON (PACK OF 10) | 91 | A1B104020 | |
| 0190-00139 | SPRING, TORSION 90 DEGREE | 13 | B1C100103 | |
| 0190-00233 | MERCURY CAPILLARY LAMP SPECIFICATION | 4 | A1B104021 | |
| 0190-00709 | HOSE ASSY CH B RETURN FROM CHAMBER | 1 | A1B104022 | |
| 0190-00710 | HOSECH-C SUPPLY | 2 | A1B104023 | |
| 0190-00711 | HOSECH-C RETURN | 2 | A1B104024 | |
| 0190-00712 | HOSECH-C SUPPLY | 2 | A1B104025 | |
| 0190-00794 | CARTRIDGE-PFA UPPER/LOWER | 4 | A1B104026 | |
| 0190-01002 | 5''PWB.UNMIVERSAL | 1 | A1B104027 | |
| 0190-01004 | O-RING 210 CROSS X .85ID VITON | 13 | A1B104028 | |
| 0190-01329 | ELBOW1/2X1/2FNPT | 1 | A1B104029 | |
| 0190-01333 | PLUG3/8MNPTPIPE | 2 | A1B104030 | |
| 0190-01336 | CONNECTORMALE5/8TBXX1/2MNPT | 2 | A1B104031 | |
| 0190-01338 | CONNECTORMALE1/2TUBEX3/8MNPT | 2 | A1B104032 | |
| 0190-01344 | HDPCDOPLUG1/4MALEPIPE | 2 | A1B104033 | |
| 0190-01403 | THERMOCOUPLE (WXZ TIPE) | 7 | A1B104034 | |
| 0190-01546 | WATER FLOW SWITCH (TWO PORTS) | 1 | A1B104035 | |
| 0190-02060 | KIT RETROFIT SLIT VALVE | 16 | A1B104036 | |
| 0190-02061 | MANIFOLD ASSY 4ZA SLIT VALVE W/REGULATOR | 4 | A1B104037 | |
| 0190-02385 | PLATTERANODE GEN 6 PACKAGE 200MM | 3 | A1B104038 | |
| 0190-02770 | CDOHYDROGENLOCKOUTVALVE | 2 | A1B104039 | |
| 0190-02850 | CABLEMK-IIZASV | 5 | A1B104040 | |
| 0190-02893 | KITBRUSHINGSEMI ANNUAL | 12 | A1B104041 | |
| 0190-02894 | KIT LOWER BRUSH SEMI-ANNUAL | 8 | A1B104042 | |
| 0190-02895 | KITBRROLLERSEMI-ANNUAL | 2 | A1B104043 | |
| 0190-03058 | DIVER MOTOR UPPER | 2 | A1B104044 | |
| 0190-04665 | HIGH EMISSIVITY WAFER 200MM | 5 | A1B104045 | |
| 0190-05274 | WATERVORTEXSTEPTAPER | 1 | A1B104046 | |
| 0190-06909 | KENSINGTON PRODUCER ROBOT #1 CONTROLLER | 1 | A1B104047 | |
| 0190-08535 | SHIELD | 12 | A1B104048 | |
| 0190-08541 | SUSCEPTOR 5''(PLA STO) | 1 | A1B104049 | |
| 0190-09006 | CLIPPARD VALVE W/CONNECT | 2 | A1B104050 | |
| 0190-09026 | CABLE LEVELING HEAD | 17 | A1B104051 | |
| 0190-09035 | FAN 12V | 3 | A1B104052 | |
| 0190-09061 | GASKET WINDOW | 2 | A1B104053 | |
| 0190-09065 | CABLE ASSY 20 COND FLEX FLAT W/RECPT | 8 | A1B104054 | |
| 0190-09066 | RIBBON CABLE ETCH | 15 | A1B104055 | |
| 0190-09075 | CHAMBER HEATER | 2 | A1B104056 | |
| 0190-09085 | 60 EV PNUEMATIC PCB/W MANIFOLD | 6 | A1B104057 | |
| 0190-09118 | HYBRID SEALQTZ WINDOW | 3 | A1B104058 | |
| 0190-09132 | SWITCH 1/2 ATM | 6 | A1B104059 | |
| 0190-09153 | OUTLET SPECIAL EAGLE 3 WAY | 5 | A1B104060 | |
| 0190-09163 | HEATING ELEMENT ENHANCED GND | 3 | A1B104061 | |
| 0190-09207 | VALVE W/CABLE | 26 | A1B104062 | |
| 0190-09265 | ASTEX OZONATOR WAVE GUIDE | 1 | A1B104063 | |
| 0190-09268 | PLATE PUMPING PLENUM TEOS | 1 | A1B104064 | |
| 0190-09285 | CABLE | 1 | A1B104065 | |
| 0190-09291 | RINGWAFER LIFT | 5 | A1B104066 | |
| 0190-09293 | SEAL 15 .276 X .139 W BROWN BWCVD CHAMBER LID | 17 | A1B104067 | |
| 0190-09372 | TEMP PROBE | 5 | A1B104068 | |
| 0190-09398 | SUSCEPTOR 200MM | 47 | A1B104069 | |
| 0190-09445 | DETECTOR END POINT | 4 | A1B104070 | |
| 0190-09467 | PCB APC CHAMBER B | 1 | A1B104071 | |
| 0190-09480 | SUSCEPTOR 8'' PASS MANUAL | 2 | A1B104072 | |
| 0190-09497 | THERMOCOUPLE | 1 | A1B104073 | |
| 0190-09533 | GATE, 5000, ZA SLIT VALVE (ANODIZED) | 3 | B1C100124 | |
| 0190-09539 | SEAL ZA SLIT VALVE | 2 | A1B104074 | |
| 0190-09545 | PEDESTAL 6'' EXT | 2 | A1B104075 | |
| 0190-09764 | TIME BASE SCR ZERO FIRING VARIABLE | 1 | A1B104076 | |
| 0190-09781 | MxPtSEPERATION RING | 2 | A1B104077 | |
| 0190-09918 | SEAL | 3 | A1B104078 | |
| 0190-13017 | TRANSFORMER | 1 | A1B104079 | |
| 0190-13065 | PCB VGA VIDEO CONTROLLER | 1 | A1B104080 | |
| 0190-14021 | FLOW METER | 1 | A1B104081 | |
| 0190-18114 | CABLE RF MTCH HV HDP | 2 | A1B104082 | |
| 0190-18120 | CABLERF | 14 | A1B104083 | |
| 0190-18121 | RF CABLE ETO SOURCE | 2 | A1B104084 | |
| 0190-18122 | RF CABLE ETO BIAS | 3 | A1B104085 | |
| 0190-18144 | FILTER ETO GEN 6X6 | 7 | A1B104086 | |
| 0190-18157 | FILTER ETO GEN 8X15 | 4 | A1B104087 | |
| 0190-18158 | CANISTER ETO RF GE | 2 | A1B104088 | |
| 0190-18273 | HOSE ASSY75FT.HIGH TEMP | 6 | A1B104089 | |
| 0190-18277 | KIT FLOW SWITCH ETO | 1 | A1B104090 | |
| 0190-18284 | CABLEM-WAVEWAVEGUIDEINTRLCK | 1 | A1B104091 | |
| 0190-18290 | HARNESSINTERLOCKHDPCDO | 1 | A1B104092 | |
| 0190-18304 | PLUG PURGE | 1 | A1B104093 | |
| 0190-18322 | ASSY CH A HOSE DUMMY LOAD TO | 1 | A1B104094 | |
| 0190-18328 | ASSY HOSE 75' SMC/AMAT1 | 6 | A1B104095 | |
| 0190-18333 | CABLE ASSY HI VOLTAGE 4 PIN 100FT | 1 | A1B104096 | |
| 0190-18404 | ASSY HOSE TURBO RT TO MAG HE | 1 | A1B104097 | |
| 0190-18405 | ASSY HOSE AMAT1/SMC COLD TO COND | 1 | A1B104098 | |
| 0190-18412 | ASSY CHB HOSE | 1 | A1B104099 | |
| 0190-18442 | SENSOR PT SMC | 3 | A1B104100 | |
| 0190-18448 | HDP CDO SOLENOID 24V N/C | 1 | A1B104101 | |
| 0190-20015 | VALVEMANIFOLD | 1 | A1B104102 | |
| 0190-20048 | PCB VME SBC SYNERGY | 4 | A1B104103 | |
| 0190-20105 | WAFER CONFIG | 2 | A1B104104 | |
| 0190-20130 | ADJ GAS LINE REST 3 INCH | 1 | A1B104105 | |
| 0190-21122 | TARGET 99.99% COBALT REFILL | 1 | A1B104106 | |
| 0190-21447 | TOP COVER DIFFUSER/FILTER FAST VENT | 2 | A1B104107 | |
| 0190-21557 | INDICATOR (508B-3) | 1 | A1B104108 | |
| 0190-35008 | MANIFOLD | 1 | A1B104109 | |
| 0190-35083 | FLOW GAUGE | 3 | A1B104110 | |
| 0190-35201 | GATE VALVE MXP 5200 | 1 | A1B104111 | |
| 0190-35208 | CHAMBER INTERFACE ASSY PCB | 1 | A1B104112 | |
| 0190-35216 | INTERFACE PROCESS CHAMBER BD | 2 | A1B104113 | |
| 0190-35236 | THERMOMETER CNTL FBR-OPT | 1 | A1B104114 | |
| 0190-35386 | WAFER 6-IN HIGH EMISSIVITY | 1 | A1B104115 | |
| 0190-35430 | CONTROL THERMOMEETER FBR-OPT 12OVSPEC | 1 | A1B104116 | |
| 0190-35511 | ASSY THERMOCOUPLE TXZ MCVD | 4 | A1B104117 | |
| 0190-35525 | THERMOCOUPLE (CXZ) | 1 | A1B104118 | |
| 0190-35606 | SWITCH-FLOW PROTEUS | 1 | A1B104119 | |
| 0190-35693 | HOSEHX SUPPLY CHMB-D SP3 CENTURA CMF | 1 | A1B104120 | |
| 0190-35694 | HOSEHX RETURN CHMB-D SP3 CENTURA CMF | 1 | A1B104121 | |
| 0190-35783 | GENERATOR RACK | 3 | A1B104122 | |
| 0190-35845 | BLOCK XTR VALVE MICROWAVE REM | 1 | A1B104123 | |
| 0190-35865 | VALVE DUAL EC WXZ UWAVE | 1 | A1B104124 | |
| 0190-36045 | MAGNET BRACKET GROUND STRAP | 70 | A1B104125 | |
| 0190-36070 | MOTOR 5PHS STEPPER 33.3 TORQUE | 1 | A1B104126 | |
| 0190-36071 | DRIVER 5 PHS .75AMPS | 1 | A1B104127 | |
| 0190-36174 | SEAL METAL RING IS 4.618 CSD . | 1 | A1B104128 | |
| 0190-36236 | VALVE TEB 120C STEC 2410V-02M INJ. 208V | 1 | A1B104129 | |
| 0190-36316 | LAMP FOR RTP XE CHAMBER | 21 | A1B104130 | |
| 0190-36330 | WAFER 6-IN LOW EMISSIVITY | 1 | A1B104131 | |
| 0190-40000 | MANIFOLD | 3 | A1B104132 | |
| 0190-40017 | TURBO ISOLATION VALVE | 2 | A1B104133 | |
| 0190-40019 | FLOW SWITCH ASSY1.0 GPM SETPOINT | 2 | A1B104134 | |
| 0190-40037 | CHILLERBAY VOLTEX | 1 | A1B104135 | |
| 0190-40051 | THERMOCOUPLE INFRA RED DOME | 2 | A1B104136 | |
| 0190-40052 | HEATER CAST ROOFTOP | 1 | A1B104137 | |
| 0190-40053 | THERMOCOUPLE SST - ROOF TOP | 2 | A1B104138 | |
| 0190-40061 | CABLE ASSY | 1 | A1B104139 | |
| 0190-40068 | CABLE ASSY ESC TO CHAMBER | 1 | A1B104140 | |
| 0190-40086 | SBC W/MEZ.33MHZ 16MB V36 | 2 | A1B104141 | |
| 0190-40091 | BRACKET-PUMP MOUNTING | 1 | A1B104142 | |
| 0190-40097 | THERMOCOUPLE ROOF TOP SST | 3 | A1B104143 | |
| 0190-40133 | CABLE ASSY MTCH-CH 10FT HIGH TEMP HDP | 1 | A1B104144 | |
| 0190-70003 | CABLE ASSY BLADE VAC | 1 | A1B104145 | |
| 0190-70030 | L/LVACUUMSENSOR | 3 | A1B104146 | |
| 0190-70044 | SWITCH 24VDC 2WATT100PSI | 17 | A1B104147 | |
| 0190-70045 | HOSEPVDCHAMBER | 10 | A1B104148 | |
| 0190-70052 | STEPPER MOTOR DRIVE | 1 | A1B104149 | |
| 0190-70070 | BRG BALL .312 ID .688 PD | 4 | B1C100112 | |
| 0190-70079 | RF GENERATOR (COMDEL) 3 PHASE | 1 | A1B104150 | |
| 0190-70108 | ASSY PCB MXP CHAMBER INTERFACE | 1 | A1B104151 | |
| 0190-70119 | EXTENDED INNER RACEDBL | 13 | A1B104152 | |
| 0190-75080 | BRG BALL 8.62 OD X 8 ID X .3125 W 4-PT W/C | 6 | A1B104153 | |
| 0190-76003 | BEARING BALL LINEAR | 3 | A1B104154 | |
| 0190-76129 | MEMC COMP HTR PUMP 1200W | 1 | A1B104155 | |
| 0190-76190 | POWERSUPPLYDC6KWW/CEMARK | 1 | A1B104156 | |
| 0190-76820 | CABLE ASSY | 1 | A1B104157 | |
| 0190-77021 | MOTOR-CROSS | 1 | A1B104158 | |
| 0190-77090 | CHAIN-E | 2 | A1B104159 | |
| 0190-77111 | BEARING DOUBLE SEAL | 2 | A1B104160 | |
| 0190-77112 | BEARINGBALL (1 PAIR) | 6 | A1B104161 | |
| 0190-77124 | BEARING 25 ID | 3 | A1B104162 | |
| 0190-77170 | SERVO MOTOR | 1 | A1B104163 | |
| 0190-77184 | BEARING BALL 25 ID X 3.0 OD .25W | 1 | A1B104164 | |
| 0190-77187 | BEARINGBALL | 3 | A1B104165 | |
| 0190-77188 | BEARINGBALL | 4 | A1B104166 | |
| 0190-77189 | BEARINGBALL | 3 | A1B104167 | |
| 0190-77363 | CU MODULE BRUSH LIQ.DEL. LOW FLOW | 2 | A1B104168 | |
| 0190-77472 | HEATEREXCHANGE | 1 | A1B104169 | |
| 0190-77505 | FLOW SWITCH W/ CONNECTOR MALEMA | 2 | A1B104170 | |
| 0190-89031 | O-RING | 2 | A1B104171 | |
| 0190-89032 | O-RING | 1 | A1B104172 | |
| 0195-00666 | 160C ZONE 8 TOP LEVEL ASSY, B | 1 | A1C100113 | |
| 0195-00666 | 160C ZONE 8 TOP LEVEL ASSY, B | 1 | A1C100114 | |
| 0200-00005 | INSLTR TBG WXZ 300MM | 16 | A1B104173 | |
| 0200-00012-F | RING QUARTZ | 4 | B1C100150 | |
| 0200-00016 | QTZ COVER 15 | 6 | A1B104174 | |
| 0200-00017 | PIPE INSULATE QTZ | 3 | A1B104175 | |
| 0200-00025 | GAS RING 100-200MM MLR 5 | 42 | A1B104176 | |
| 0200-00028 | GAS RING 100-200MM | 1 | A1B104177 | |
| 0200-00043 | COVER QUARTZ 6'' POLY .40 | 79 | A1B104178 | |
| 0200-00043 | QUARTZ COVER 6" POLY .40 | 5 | B1C100125 | |
| 0200-00043B | QUARTZ COVER 6", POLY .40 | 2 | B1C100126 | |
| 0200-00043-B | COVER, QUARTZ 6" POLY, .40 | 6 | B1C100127 | |
| 0200-00043R | COVER QUARTZ 6'' POLY (REPAIRED) | 17 | A1B104179 | |
| 0200-00048 | CLAMP RING 125MM 1/4 THICK | 5 | A1B104180 | |
| 0200-00050 | RING PEDESTAL | 1 | A1B104181 | |
| 0200-00057 | WINDOW SMALL STD. | 4 | A1B104182 | |
| 0200-00058 | GAS RING SMALL HOLES/CHANNELS | 10 | A1B104183 | |
| 0200-00058 / 24875 | GAS RING, SMALL HOLES & CHANNELS | 2 | B1C100182 | |
| 0200-00060 | QUARTZ TZ GAS RING(UPPER) | 3 | A1B104184 | |
| 0200-00071 | INSULATING PIPE 200MM QTZ | 140 | A1B104185 | |
| 0200-00071V | INSULATING PIPE QUARTZ 200MM EXT | 1 | A1B104186 | |
| 0200-00151-P1 | INSULATOR QUARTZ 6'' SMF | 1 | A1B104187 | |
| 0200-00156-P1 | SHADOW RING | 2 | B1C100135 | |
| 0200-00157-P1 | Ring, top, 125 mm flat 0220-00157 REV P1 |
2 | B1C100128 | |
| 0200-00167 | WINDOW QUARTZ LCF BUFFER/TRANSF | 3 | A1B104188 | |
| 0200-00230 | RING DEPOSITION W/ | 1 | A1B104189 | |
| 0200-00255 | COVER-LOW PROFILE | 1 | A1B104190 | |
| 0200-00275 | HEATER GUIDE PIN | 22 | A1B104191 | |
| 0200-00277 | PLATE GUIDE CENTERING SRCMP WXZ | 141 | A1B104192 | |
| 0200-00282 | CERAMIC CATHODE INSULATOR | 65 | A1B104193 | |
| 0200-00299 | INSULATOR COIL SUPPORT RIGID VECTRA IMP | 2 | A1B104194 | |
| 0200-00340 | BUSHING UPPER SHIELD | 7 | A1B104195 | |
| 0200-00426 | QUARTZWINDOWCLEARLCF-LL300MM | 8 | A1B104196 | |
| 0200-00438 | COVERPEDESTALCERAMICALARC | 19 | A1B104197 | |
| 0200-00457 | HOUSING DOUBLE RF | 3 | A1B104198 | |
| 0200-00458 | BLADE CERAMIC 8'' TRANSFER HP+CVD COMPATIB | 1 | A1B104199 | |
| 0200-00518 | PUMPING RING CERAMIC 300MM | 1 | A1B104200 | |
| 0200-00618 | INSULATOR HTR WXZ 300MM | 23 | A1B104201 | |
| 0200-00639 | INSERT RING SILICON 200MM | 3 | A1B104202 | |
| 0200-00665-001 | UNI-INSERT GDP HIGH RA | 4 | A1B104203 | |
| 0200-00671 | FOCUS RING (0200-35606) | 5 | A1B104204 | |
| 0200-00673 | COVER RING 8'' FMP/BESC CERANIC W/AL ARC | 4 | A1B104205 | |
| 0200-00690 | INSERT RINGSILICON200MM | 2 | A1B104206 | |
| 0200-00710 | ISOLATOR EC LID (W TYPE) | 1 | A1B104207 | |
| 0200-00715 | BASEPLATE W/BAFFLE QTZ SERIALIZED | 2 | A1B104208 | |
| 0200-00716-001 | POLYSILICON SOURCE RING | 2 | A1B104209 | |
| 0200-00716-002 | SOURCE RING | 2 | A1B104210 | |
| 0200-00937 | 8'' COVER PEDESTAL | 5 | A1B104211 | |
| 0200-00954 | RINGDEPCERAMIC | 4 | A1B104212 | |
| 0200-01051 | QUARTZ LINER SIDE | 1 | A1B104213 | |
| 0200-01155 | CUDEPOSITIONRINGW/ANTIROTATIONBESC | 8 | A1B104214 | |
| 0200-01802 | RIB CERAMIC MSCD 4 | 6 | A1B104215 | |
| 0200-01978 | COVER RINGECHUCK300MM PCIIE | 1 | A1B104216 | |
| 0200-02812 | DEPOSITION RING | 30 | A1B104217 | |
| 0200-02866 | RING SINGLE LOW PROFILE 200MM SNNF QUARTZ DPN | 2 | A1B104218 | |
| 0200-03260 | PLUG HE ESC ALUMINA DPSII HTC | 1 | A1C100115 | |
| 0200-03672 | RING | 3 | A1B104219 | |
| 0200-04277 | INSULATING FLANGE | 1 | A1B104220 | |
| 0200-06083 | BASE PLATE SHIELD | 1 | A1B104221 | |
| 0200-09000 | HEATER WINDOW | 2 | A1B104222 | |
| 0200-09002 | SLIT WINDOW CVD CHAMBER | 2 | A1B104223 | |
| 0200-09024 | WINDOW SMALL | 106 | A1B104224 | |
| 0200-09062 | RING COVER SPUTTER | 9 | A1B104225 | |
| 0200-09069 | SUPPORT 150MM SUSCEPTOR | 2 | A1B104226 | |
| 0200-09071 | LIFTING PIN 200MM | 50 | A1B104227 | |
| 0200-09072 | SHIELD 200MM | 4 | A1B104228 | |
| 0200-09084 | SHIELD 125MM SPUTTER ETCH | 1 | A1B104229 | |
| 0200-09084 | QUARTZ SHIELD 125mm SPUTTER ETCH | 2 | B1C100183 | |
| 0200-09084A1 | QUARTZ SHILED 125mm SPUTTER ETCH | 2 | B1C100184 | |
| 0200-09086V | QUARTZ RING 200MM SPUTTER ETCH | 7 | A1B104230 | |
| 0200-09087 | RING 150MM QTZ SPUTTER | 30 | A1B104231 | |
| 0200-09088 | RING QUARTZ 125MM SPUTTER ETCH | 3 | A1B104232 | |
| 0200-09088-C | QUARTZ RING 125MM SPUTTER ETCH | 3 | B1C100151 | |
| 0200-09088-C | QUARTZ RING 125MM SPUTTER ETCH | 7 | B1C100152 | |
| 0200-09090 | RING GRAPHITE 200MM SPUTTER | 138 | A1B104233 | |
| 0200-09091 | RING GRAPHITE 150 MM SPUTTER ETCH | 1 | A1B104234 | |
| 0200-09092 | RING GRAPHITE 125MM | 30 | A1B104235 | |
| 0200-09092 REV.C | RING, GRAPHITE, 125mm | 6 | B1C100136 | |
| 0200-09092C | RING, GRAPHITE, 125mm | 12 | B1C100137 | |
| 0200-09114 | ARMSUSCEPTOR200MM | 1 | A1B104236 | |
| 0200-09129 | ISOLATER 200 MM WB | 2 | A1B104237 | |
| 0200-09135 | ADAPTERPUMPINGPLATE | 4 | A1B104238 | |
| 0200-09146 | PIN WAFER LIFT (CERAMIC) | 28 | A1B104239 | |
| 0200-09147 | FINGER WAFER LIFT(BWCVD) | 7 | A1B104240 | |
| 0200-09155 | RING 100 MM | 2 | A1B104241 | |
| 0200-09177 | COVER 200MM | 10 | A1B104242 | |
| 0200-09179 | INSULATING PIPE QUARTZ | 28 | A1B104243 | |
| 0200-09182 | RINGCERAMICPUMPPLATE | 3 | A1B104244 | |
| 0200-09187 | COVER QTZ 8'' EXT POLV | 14 | A1B104245 | |
| 0200-09197 | PLATE LOWER GAS 4 - 6'' ASP | 2 | A1B104246 | |
| 0200-09199 | TUBE PLASMA QUARTZ | 2 | A1B104247 | |
| 0200-09201 | PLATE GAS DIST LOWER 8'' PRSP | 5 | A1B104248 | |
| 0200-09201A | PLATE GAS DIST LOWER 8'' PRSP | 6 | A1B104249 | |
| 0200-09211 | RECEPTACLE BOTTOM, CERAMIC | 1 | A1C100116 | |
| 0200-09212 | WINDOW BOTTOM QTZ | 5 | A1B104250 | |
| 0200-09213 | QUARTZ TZ WINDOW 10'' | 3 | A1B104251 | |
| 0200-09217 | RING QUARTZ 8'' EXT METAL NOTCH | 11 | A1B104252 | |
| 0200-09220 | COVER RING QTZ 6'' | 14 | A1B104253 | |
| 0200-09222 | RING EXT QUARTZ 8'' | 26 | A1B104254 | |
| 0200-09242 | PLUG DC GRAPHITE (PACK OF 10) | 13 | A1B104255 | |
| 0200-09250 | COVER REV A 8'' EXT CATHODE | 4 | A1B104256 | |
| 0200-09252 | RING OUTER 125MM (CERAMIC) | 4 | A1B104257 | |
| 0200-09264 | SPUTTER RING 150MM | 4 | A1B104258 | |
| 0200-09291 | RINGINNER150MMCERAMIC | 16 | A1B104259 | |
| 0200-09312 | WINDOW QTZ SMALL | 1 | A1B104260 | |
| 0200-09313 | MASK RING EDGE(SHADOW RING) | 1 | A1B104261 | |
| 0200-09319 | RING OUTER SHADOW | 13 | A1B104262 | |
| 0200-09335 | PLATE | 3 | A1B104263 | |
| 0200-09336 | PLATE GAS DIST | 4 | A1B104264 | |
| 0200-09338 | CAP TOP GAS DIST | 2 | A1B104265 | |
| 0200-09346 | RING COVER CLAMP C&D PH2 | 3 | A1B104266 | |
| 0200-09346B | COVER, WRAP AROUND | 6 | B1C100129 | |
| 0200-09347 | COLLAR 150MM | 5 | A1B104267 | |
| 0200-09349 | CLAMP QTZ | 4 | A1B104268 | |
| 0200-09384 | PIN WAFER LIFT 150MM UNIVERSAL CHAMBER | 11 | A1B104269 | |
| 0200-09410 | RING FOCUS QUARTS | 3 | A1B104270 | |
| 0200-09416 | RING CLAMPING | 9 | A1B104271 | |
| 0200-09422 | RING FOCUSING QUARTZ | 7 | A1B104272 | |
| 0200-09441 | WINDOW SLITPRSP | 6 | A1B104273 | |
| 0200-09444 | GAS DIST QUARTZ | 8 | A1B104274 | |
| 0200-09445 | QUARTZUPPER | 52 | A1B104275 | |
| 0200-09446 | LINER - QUARTZ LOWER | 30 | A1B104276 | |
| 0200-09467 | DC PICK UP | 35 | A1B104277 | |
| 0200-09468 | RING COVER SXTAL 200MM | 9 | A1B104278 | |
| 0200-09478 | PLATE GAS DIST UPPER 20MM | 14 | A1B104279 | |
| 0200-09478P | Q'TZ G.D.P UPPER | 2 | A1B104280 | |
| 0200-09478R1 | QUARTZ UPPER PLATE | 8 | A1B104281 | |
| 0200-09482 | COLLAR QUARTZ ALUM 150MM EXT CATH | 5 | A1B104282 | |
| 0200-09484 | RING QUARTZ EXTERNAL ALUM | 6 | A1B104283 | |
| 0200-09495 | INNER RING | 4 | A1B104284 | |
| 0200-09517 | FINGER CERAMIC | 15 | A1B104285 | |
| 0200-09528 | COVER | 2 | A1B104286 | |
| 0200-09532 | CLAMP RING | 5 | A1B104287 | |
| 0200-09534 | CERAMIC CLAMP RING | 68 | A1B104288 | |
| 0200-09546 | ADAPTOR RING | 4 | A1B104289 | |
| 0200-09554 | COVER QTZ GRINDFINISH | 7 | A1B104290 | |
| 0200-09559 | CERAMIC CLAMP RING COVER 200MM | 81 | A1B104291 | |
| 0200-09572 | COLLAR | 46 | A1B104292 | |
| 0200-09574 | 200MM CERAMIC HOOP | 18 | A1B104293 | |
| 0200-09575 | LIFT PIN REV 1 CERAMIC HOOP 200MM | 68 | A1B104294 | |
| 0200-09579 | COLLAR 200MM | 3 | A1B104295 | |
| 0200-09596 | COLLAR QUARTZ | 2 | A1B104296 | |
| 0200-09602 | PIPE QUARTZ | 1 | A1B104297 | |